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Plasma spray can be used to produce coatings. of virtually any metallic, cermet, or ceramic ma-. terial. The coatings are used for most of the types. of applications described in a subsequent section. The transferred plasma-arc process adds to. plasma spray the capability of substrate surface heat-. ing and melting. Figure 7 is a schematic repre-. sentation of the process.
The most commonly used surface micromachining process and material combination is a PSG sacrificial layer, a doped polysilicon structural layer, and the use of Hydrofluoric acid as the etchant to remove the PSG sacrificial layer and release the device.