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Ein verbessertes SO2 Sensorsystem auf der Basis von SAW und IDK Elementen

: Leidl, A.; Hartinger, R.; Roth, M.; Endres, H.-E.

2. Dresdener Sensor-Symposium 1995. Tagungshandbuch
Dresden, 1995
Dresdener Sensor-Symposium <2, 1995, Dresden>
Conference Paper
Fraunhofer IFT; 2000 dem IZM eingegliedert
gas sensor; heteropolysiloxane; humidity; IDC; interdigital capacitor; micro system technology; SAW; signal processing system; SO2; surface acoustic wave

Applying new transducer principles on well known indicator materials improves the performance of the whole system, especially the humidity interference. A well known SO2-sensitive material (heteropolysiloxane, NND)/PTMS) was tested with a SAW ( Surface Acoustic Wave, STW Surface Transverse Wave Mode) transducer and an IDC (Interdigital Capacitor) device. Due to a different relative sensitivity of the coated IDC and SAW devices to SO2 and humidity, we were able to reduce the overall cross-sensitivity of the system to humidity significantly. The combination of these two different types of transducers, in case of need extended with other transducers, increases the performance of the sensor system.