Effects of Pulse Bias Voltages on Structure and Property of DLC Films Prepared by PECVD Technique
中文关键词: 脉冲偏压  DLC薄膜  力学性能  摩擦学性能
英文关键词: pulse bias voltages  DLC film  mechanical properties  tribological performance
陈国富 华南理工大学机械与汽车工程学院 cgfhnlg@163.com 
摘要点击次数: 1304
全文下载次数: 0
      在不锈钢基材表面利用等离子体增强化学气相沉积技术（PECVD）改变脉冲偏压制备不同结构类金刚石薄膜（DLC）。分别采用表面轮廓仪、扫描电镜、拉曼光谱及电子探针分析薄膜的表面粗糙度、断面形貌、薄膜结构及成分，采用纳米压痕仪及划痕仪测试薄膜的纳米硬度、弹性模量和膜基结合力，采用球盘摩擦试验机测试薄膜在大气环境中的摩擦学性能。结果表明：脉冲偏压显著影响PECVD制备的DLC薄膜的表面粗糙度、微观形貌、膜基结合力、纳米硬度及摩擦学性能；随偏压的增大，DLC薄膜的表面粗糙度，摩擦因数及磨损量都先减小后增大，而膜基结合力则先增大后减小。其中2.0 kV偏压制备的DLC薄膜具有最强的膜基结合力,而1.6 kV偏压制备的DLC薄膜具有最低的表面粗糙度、最高的硬度和最优的减摩耐磨性能。
      The diamond like carbon (DLC) films were prepared on the surface of 304 stainless steel by plasma enhanced chemical vapor deposition (PECVD) technique with varying pulse bias voltages.The surface roughness,the cross sectional morphology,the structure and composition of the films were characterized by surface profilometer,scanning electron microscopy,Raman spectrum and electron probe,respectively.The hardness and elastic modulus of the films were tested on a nanoindentor,and the corresponding adhesion forces between the film and substrate were investigated using a scratch tester.The tribological properties of the films were evaluated by a ball on disc tribometer.The results show that the DLC films are successfully prepared by PECVD technique and the applied pulsed bias voltages greatly affect the morphologies,microstructures and mechanical properties of the as prepared DLC films.With the increasing of the bias voltages,the surface roughness,friction coefficient and wear rate of the DLC film are decreased to a minimum value and then start to increase,while the adhesion force between the film and the substrate is increased to a maximum value and then slightly decreased.The film prepared with 20 kV pulse bias voltage exhibits optimal adhesion force to the substrate.However,the film prepared with 16 kV bias voltage shows the smoothest surface and the highest hardness,resulting in superior friction reduction and wear resistance.