The kinetic energy of the primary ion should be in which of the following range?
A. 0.1-4 keV
B. 0.2-1 keV
C. 0.4-2 keV
D. 0.3-5 keV
Answer:D
The kinetic energy of the primary ion should be in which of the following range?
A. 0.1-4 keV B. 0.2-1 keV C. 0.4-2 keV D. 0.3-5 keV
Explanation: The kinetic energy of the primary ion should be 0.3-5 keV. These primary ions are made incident on the surface.