Which of the following is the detection limit of Auger Electron Spectroscopy?
A. 0.1% monolayer
B. 0.5% monolayer
C. 1% monolayer
D. 2% monolayer
Answer:B
Which of the following is the detection limit of Auger Electron Spectroscopy?
A. 0.1% monolayer B. 0.5% monolayer C. 1% monolayer D. 2% monolayer
Explanation: The detection limit of AES is 0.5% monolayer. It has 0.5µ x-y resolution.