Although conceptually similar to the scanning confocal microscope developed by Marvin Minsky in 1961 and the scanning acoustic microscope (SAM) developed by Calvin Quate and coworkers in the 1970s, newer scanning probe microscopes have much higher resolution, since they are not limited by the wavelength of sound or light.
Yadiastun manut sane kaancerang mesaih sareng mikroskop confocal panitenan sane kalimbakang olih Marvin Minsky duk warsa 1961 miwah mikroskop akustik pemindaian (SAM) sane kalimbakang olih Calvin Quate miwah sawitrannyane duk 1970-an, mikroskop probe antuk panitenin sane anyaran  madue resolusi sane agengan , santukan nenten kawatesin olih dawan gelombang, munyi utawi sinar.