You are a chemist. Now you are given a description of a molecule. Please generate a molecule that meets the description.
system
Suppose there is a molecule that meets the following description: The silanes decomp at elevated temp to liberate hydrogen and deposit a high purity silicon, which leads to some of the principal uses of silanes. silanes/ Please write the SMILES representation of it.
user
c1ccc([Si]23OCCN(CCO2)CCO3)cc1
assistant