We note that the frequency in Eq. (1) depends on the local atomic configurations RlocðX;tÞ around atom X before the transition, which we classify in the current KMCsL approximation by means of the number (one/two/three) of sp 3  X-Si and X-C bonds in the first- neighbor shell (see Sec.S1 of the supplementary material for the set- ting of the evaporation energetics and frequencies).