FIG. 11. Polarity change of a triple SF following its interaction with a moving APB during the 3C-SiC epitaxial growth along the [001] z direction. Under-coordinated atoms taken at different KMC times: (a) interaction between the SFh3i and an APB; (b) independent kinetics of the APB moving toward the½ 110 direction, and the triple SF turning away from the APB along ð1 11Þ planes; (c) and (d) show atoms that are not epitaxially ordered and associated with the triple SF of (a) and (b), respectively. A zoom of the triple SF and the region where the polarity change takesplaceare alsoshownin the(b)and(d) snapshots,respectively.