It should be pointed out that in the Si− C−Cl−H system, the mole fractions of these 39 species were well below 1 × 10 −8 , except for Si2Cl6, Si2Cl5H, Cl3SiCH3, HCl2SiCH3, and ClSiCH3 at temperatures below1200 °C,where molefractions upto1 × 10 −6  could be noted.