FIG. 5.Generation of a couple of triple stacking faults from the surface depletion induced by an APB during the 3C-SiC epitaxial growth along the [001] z direction. Under- coordinated atoms taken at different KMC times: (a) triple SFs generation from an APB (under-coordinated atoms related to the APB surface perturbation are visible); (b)-(,d) three subsequent snapshots showingthe independent kinetics of the APB moving toward the [110] direction, and the two generated triple SFs growing along (111) planes. The zoom in the (c) snapshot shows the three-bilayers structure of the two generated SFh3is.