The safety aspects of using HBr as additive to CVD of SiC are very much the same as when using HCl; the HBr gas bottle should be installed in a ventilated gas cabinet equipped with HBr sensitive gas detector, gas mask able to filtrate HBr should be used when loading and unloading the samples, HBr sensitive gas detector should be installed in the lab close to the loading port of the CVD reactor and a scrubber capable of removing residual HBr and Br2 should be installed to clean the exhaust gases.