The adsorption and activation energies for surface reactions for SiH2 (standard CVD chemistry) and SiCl2 (chlorinated CVD-chemistry) onthe(000−1)4H-SiCsurfacehavepreviouslybeen studied, 17  and have here been calculated also for SiBr2 allowing us to extend the comparison between SiH2 and SiCl2 to include also SiBr2.