The 2-D tetra-lateral PSD has the advantages of fast response, much lower dark current, easy bias application and lower fabrication cost. Its measurement accuracy and resolution is independent of the spot shape and size unlike the quadrant detector which could be easily changed by air turbulence. However, it suffers from the nonlinearity problem. While the position estimate is approximately linear with respect to the real position when the spot is in the center area of the PSD, the relationship becomes nonlinear when the light spot is away from the center. This seriously limits its applications and there are urgent demands for linearity improvement in many applications.