For the foundry "5nm" node, the minimum metal pitch for horizontal lines is taken to be around 32 nm, for which dipole-like illumination is preferred, but the minimum metal pitch for vertical lines (parallel to the gates) is taken to be around 40 nm, for which quasar-like illumination is preferred. Moreover, for the foundry "7nm" node, the minimum metal pitch for horizontal lines is taken to be around 40 nm, for which quasar-like illumination is expected, while the minimum metal pitch for vertical lines can be taken to be around 50 nm, for which conventional or annular illumination is preferred. For the quasar illumination, the best focus position varies strongly as a function of pitch, particularly 36-40 nm vs. 48-60 nm, as well as over the 48-72 nm range. For these nodes, it is impossible to have a single EUV exposure illumination setting that fits both metal line directions at different respective pitches. Unidirectional metal layers are expected for these nodes anyway. The line tip-to-tip gap in this case is expected to be kept small enough by using cut exposures in a multiple patterning scenario.