Nonlinear effects like the I-V characteristic of the boundary sheath are utilized for Langmuir probe measurements but they are usually neglected for modelling of RF discharges due to their very inconvenient mathematical treatment. The Self Excited Electron Plasma Resonance Spectroscopy (SEERS) utilizes exactly these nonlinear effects and known resonance effects in RF discharges. The nonlinear elements, in particular the sheaths, provide harmonics in the discharge current and excite the plasma and the sheath at their series resonance characterized by the so-called geometric resonance frequency.