Unlike DUV lithography sources, based on excimer lasers, EUV plasma sources produce light across a broad range of wavelengths. Though the EUV spectrum is not completely monochromatic, nor even as spectrally pure as DUV laser sources, the working wavelength has generally been taken to be 13.5 nm. In actuality, the reflected power is distributed mostly in the 13.3-13.7 nm range. The bandwidth of EUV light reflected by a multilayer mirror used for EUV lithography is over +/-2% (>270 pm); the phase changes due to wavelength changes at a given illumination angle may be calculated