and compared to the aberration budget. Wavelength dependence of reflectance also affects the apodization, or illumination distribution across the pupil (for different angles); different wavelengths effectively 'see' different illuminations as they are reflected differently by the multilayer of the mask. This effective source illumination tilt can lead to large image shifts due to defocus. Conversely, the peak reflected wavelength varies across the pupil due to different incident angles. This is aggravated when the angles span a wide radius, e.g., annular illumination. The peak reflectance wavelength increases for smaller incident angles. Aperiodic multilayers have been proposed to reduce the sensitivity at the cost of lower reflectivity but are too sensitive to random fluctuations of layer thicknesses, such as from thickness control imprecision or interdiffusion. In particular, defocused dense lines at pitches up to twice the minimum resolvable pitch suffer wavelength-dependent edge shifts.