Epigraphic evidence reveals that Rajaraja started building this temple in his 19th regnal year and it was completed on 275th day of his 25th regnal year (1010), taking only 6 years. "Rajaraja named this temple as Rajarajesvaram" and the deity Shiva in Linga form as "Peruvudaiyar", the temple is also known in the deity's name as "Peruvudaiyarkovil". In later period Maratha and Nayaks rulers constructed various shrines and gopurams of the temple. In later period when the Sanskrit language was more popular during the Maratha rule the temple was named in Sanskrit as Brihadisvaram and the deity as Brihadisvara.