Chow married Felicia Yuen Hei-wah (袁曦華) and they had a daughter Roberta Chow (鄒重珩) in 1963. Chow also had an affair with a media writer Ng Suk-fong (伍淑芳), with pen name of Lan Yan (藍茵). Ng gave birth to his illegitimate son Felix Chow (鄒重珏) in 1960, followed by a second son Terence Chow (鄒重瑾), in 1963. However Chow was unable to give Ng and their illegitimate children any legitimacy due to his marriage to Yuen, chose to separate with them but continued with financial support. Ng died of illness in 1967 and her two sons were raised by her sister.