When using heavy ion beams, care must be taken for beam-induced damage in sample such as sputtering or amorphization. If only nuclear interaction is taken into account, it has been shown that the ratio of recoiling to displaced atoms is independent of "Z1" and only weakly dependent on the projectile mass of the incident ion. With heavy ion bombardment, it has been shown that the sputter yield by the ion beam on the sample increases for nonmetallic samples and enhanced radiation damage in superconductors. In any case, the acceptance angle of the detector system should be as large as possible to minimize the radiation damage. However, it may reduce the depth profiling and elemental analysis due to the ion beam not being able to penetrate the sample.