This article provides information about ERDA that has been around for a long time, since the mid-1970s. The article provides detailed information about the High ion Incident ERDA. However, Low ion Incident ERDA is still not neglected. The comparative analysis of overall ERDA with other techniques such as TEM, AFM, XRR, NR, VASE, XPS, and DSIMS is also mentioned. The article briefly touches upon the history of ERDA but the main focus is on the technique itself. Comprehensive information on the instrumentation as well as its applications in elemental characterization and depth profile are provided.