HI-ERDA is more widely used compared to LI-ERDA because it can be used to study a lot more variety of elements compared to LI-ERDA. It can be used to identify heavy elements. It is used to detect recoiled target atoms and scattered beam ions using several detectors namely silicon diode detector, time-of-flight detector, gas ionization detector, etc. Such detectors are described below. Main advantage of HI-ERDA is its ability to obtain quantitative depth profiling information of all the sample elements in one measurement. Recent studies have shown that depth resolution obtained by using this technique is excellent. Depth resolution less than 1 nm can be obtained with good quantitative accuracy thus giving these techniques significant advantages over other surface analysis methods. Also, the accessible depth of 300 nm can be achieved using this technique. A wide range of ion beams including 35Cl, 63Cu, 127I, and 197Au, with different energies can be used in this technique in order for recoil to occur.