ERDA, in general, has many applications in the areas of polymer science, material science – semiconductor materials, electronics, and thin film characterization. ERDA is widely used in polymer science. This is because polymers are hydrogen-rich materials which can be easily studied by LI-ERDA. One can examine surface properties of polymers, polymer blends and evolution of polymer composition induced by irradiation. HI-ERDA can also be used in the field of new materials processed for microelectronics and opto-electronic applications. Moreover, elemental analysis and depth profiling in thin film can also be performed using ERDA.