A common technique for creating a nanowire is vapor-liquid-solid method (VLS), which was first reported by Wagner and Ellis in 1964 for silicon whiskers with diameters ranging from hundreds of nm to hundreds of µm. This process can produce high-quality crystalline nanowires of many semiconductor materials, for example, VLS–grown single crystalline silicon nanowires (SiNWs) with smooth surfaces could have excellent properties, such as ultra-large elasticity. This method uses a source material from either laser ablated particles or a feed gas such as silane.