Bislang kleinster Transistor hergestellt
1	Bislang	Bislang	ADV	ADV	_	2	advmod	_	_
2	kleinster	klein	ADJ	ADJA	Case=Nom|Degree=Sup|Gender=Masc|Number=Sing	3	amod	_	_
3	Transistor	Transistor	NOUN	NN	Gender=Masc|Number=Sing|Person=3	4	nsubj	_	_
4	hergestellt	-	VERB	VVFIN	Mood=Ind|Number=Sing|Person=3|VerbForm=Fin	0	root	_	_
