IBM , Infineon , Intel , aber auch Foundries wie UMC stecken zurzeit Milliarden in 300-mm-Fabs .
1	IBM	IBM	PROPN	NE	Case=Nom|Number=Sing|Person=3	12	nsubj	_	_
2	,	,	PUNCT	$,	PunctType=Comm	3	punct	_	_
3	Infineon	Infineon	PROPN	NE	Case=Nom|Number=Sing|Person=3	1	conj	_	_
4	,	,	PUNCT	$,	PunctType=Comm	5	punct	_	_
5	Intel	Intel	PROPN	NE	Case=Nom|Number=Sing|Person=3	1	conj	_	_
6	,	,	PUNCT	$,	PunctType=Comm	9	punct	_	_
7	aber	aber	CCONJ	KON	_	9	cc	_	_
8	auch	auch	ADV	ADV	_	9	advmod	_	_
9	Foundries	unknown	NOUN	NN	Person=3	1	conj	_	_
10	wie	wie	CCONJ	KOKOM	ConjType=Comp	11	case	_	_
11	UMC	UMC	PROPN	NE	Person=3	9	obl	_	_
12	stecken	stecken	VERB	VVFIN	Mood=Ind|Number=Plur|Person=3|Tense=Pres|VerbForm=Fin	0	root	_	_
13	zurzeit	zurzeit	ADV	ADV	_	12	advmod	_	_
14	Milliarden	Milliarde	NOUN	NN	Gender=Fem|Number=Plur|Person=3	12	obj	_	_
15	in	in	ADP	APPR	AdpType=Prep|Case=Dat	16	case	_	_
16	300-mm-Fabs	300-mm-Fabs	PROPN	NE	Person=3	12	obl	_	_
17	.	.	PUNCT	$.	PunctType=Peri	12	punct	_	_
