Consequently, if supplying the substrates according to these percentages, the chambers 211A and 212A may be synchronized with {HEAD ~ respect} to {TAIL ~ their down times} in view of the next planned maintenance activity 
Consequently , if supplying the substrates according to these percentages , the chambers 211A and 212A may be synchronized with { HEAD ~ respect } to { TAIL ~ their down times } in view of the next planned maintenance activity
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD REL TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH