A trench is formed in the source/drain region of {HEAD ~ the semiconductor substrate} thereby removing {TAIL ~ at least a portion} of the halo structure in the source/drain region 
A trench is formed in the source / drain region of { HEAD ~ the semiconductor substrate } thereby removing { TAIL ~ at least a portion } of the halo structure in the source / drain region
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD OTH REL TAIL TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH