In particular, also when these insulating film and metallic film form patterns, a polishing rate and polishing uniformity are excellent in convex portions in the patterns, and when a polishing layer is a resin layer with a non foam structure, the above described effects are significant, and particularly when an insulating film or a metallic film on which a pattern is formed is polished, {HEAD ~ a polishing rate} and polishing uniformity are excellent also in {TAIL ~ a concave portion} 
In particular , also when these insulating film and metallic film form patterns , a polishing rate and polishing uniformity are excellent in convex portions in the patterns , and when a polishing layer is a resin layer with a non foam structure , the above described effects are significant , and particularly when an insulating film or a metallic film on which a pattern is formed is polished , { HEAD ~ a polishing rate } and polishing uniformity are excellent also in { TAIL ~ a concave portion }
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH OTH OTH REL OTH REL TAIL TAIL TAIL TAIL TAIL TAIL TAIL