The dummy region comprises {TAIL ~ a semiconductor substrate}, {HEAD ~ first and second laminates}, at least one first region, and at least one second region 
The dummy region comprises { TAIL ~ a semiconductor substrate } , { HEAD ~ first and second laminates } , at least one first region , and at least one second region
OTH OTH OTH OTH TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH