In accordance with the present invention, a protective fixture has been constructed to allow {HEAD ~ efficient wafer processing} of {TAIL ~ micromechanical devices} 
In accordance with the present invention , a protective fixture has been constructed to allow { HEAD ~ efficient wafer processing } of { TAIL ~ micromechanical devices }
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD REL TAIL TAIL TAIL TAIL TAIL TAIL