{HEAD ~ A position} of an end part of the anti reflection layer inside the via hole may be lower than {TAIL ~ a position} of an end part of the first electrode extending from the first surface to the inside of the via hole 
{ HEAD ~ A position } of an end part of the anti reflection layer inside the via hole may be lower than { TAIL ~ a position } of an end part of the first electrode extending from the first surface to the inside of the via hole
HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH REL REL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH