On the other hand, in the region away from the both surfaces of the gate by more than 0.09 μm, {TAIL ~ the peak concentration} equals 3×1020 cm 3 and {HEAD ~ the depth} becomes equal to 0.1 μm 
On the other hand , in the region away from the both surfaces of the gate by more than 0.09 μm , { TAIL ~ the peak concentration } equals 3×1020 cm 3 and { HEAD ~ the depth } becomes equal to 0.1 μm
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH OTH OTH OTH