In general, in another aspect, {TAIL ~ the invention} features a nano electromechanical energy conversion assembly including a piezoelectric flexible membrane supported on at least two sides by {HEAD ~ a chamber} 
In general , in another aspect , { TAIL ~ the invention } features a nano electromechanical energy conversion assembly including a piezoelectric flexible membrane supported on at least two sides by { HEAD ~ a chamber }
OTH OTH OTH OTH OTH OTH OTH TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD