{HEAD ~ An apparatus} is fabricated with {TAIL ~ a plurality} of semiconductor device substrates and MEMS substrates with micromachined sensors, circuits, transducers, and MEMS devices fabricated on the plurality of substrates 
{ HEAD ~ An apparatus } is fabricated with { TAIL ~ a plurality } of semiconductor device substrates and MEMS substrates with micromachined sensors , circuits , transducers , and MEMS devices fabricated on the plurality of substrates
HEAD HEAD HEAD HEAD HEAD HEAD REL REL REL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH