The present invention achieves technical advantages by using a nanoindenter type device to determine localized mechanical properties of a substrate as a function of displacement depth or applied load of the nanoindenter tip into the substrate surface, and accurately predicting {HEAD ~ the electrical property stability} of the substrate under test as {TAIL ~ a function} of this data 
The present invention achieves technical advantages by using a nanoindenter type device to determine localized mechanical properties of a substrate as a function of displacement depth or applied load of the nanoindenter tip into the substrate surface , and accurately predicting { HEAD ~ the electrical property stability } of the substrate under test as { TAIL ~ a function } of this data
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