It is possible to provide an apparatus capable of reliably preventing mist of {TAIL ~ a processing solution} or the processing solution from reaching the upper surface of the substrate when rotating the substrate and supplying {HEAD ~ the processing solution} to the lower surface for processing the substrate 
It is possible to provide an apparatus capable of reliably preventing mist of { TAIL ~ a processing solution } or the processing solution from reaching the upper surface of the substrate when rotating the substrate and supplying { HEAD ~ the processing solution } to the lower surface for processing the substrate
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH OTH OTH OTH OTH OTH OTH