Note that even this wafer W can be {HEAD ~ a wafer} of having improved flatness when {TAIL ~ the wafer} W is planarized by applying a PACE method 
Note that even this wafer W can be { HEAD ~ a wafer } of having improved flatness when { TAIL ~ the wafer } W is planarized by applying a PACE method
OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH OTH OTH OTH TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH