The go no go gauge 1, wherein {HEAD ~ the identification feature} comprises {TAIL ~ a unique marking} that specifies at least one of said chamber kit part, a feature of the chamber kit part and a process to which the chamber kit part will be exposed 
The go no go gauge 1 , wherein { HEAD ~ the identification feature } comprises { TAIL ~ a unique marking } that specifies at least one of said chamber kit part , a feature of the chamber kit part and a process to which the chamber kit part will be exposed
OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD REL TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH