Referring to FIG 3, the support substrate 10 is formed on {HEAD ~ one surface} of {TAIL ~ the nitride semiconductor substrate} 20 for structurally supporting the nitride semiconductor substrate 20 
Referring to FIG 3 , the support substrate 10 is formed on { HEAD ~ one surface } of { TAIL ~ the nitride semiconductor substrate } 20 for structurally supporting the nitride semiconductor substrate 20
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD REL TAIL TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH