In this manner, a crystalline silicon film having a necessary degree of {TAIL ~ crystallinity} in {HEAD ~ a selective manner} can be obtained 
In this manner , a crystalline silicon film having a necessary degree of { TAIL ~ crystallinity } in { HEAD ~ a selective manner } can be obtained
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH TAIL TAIL TAIL TAIL TAIL OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH OTH