third source/drain regions of the second conductivity type formed in {HEAD ~ the outward portions} from {TAIL ~ said second silicate glass layer} in the primary surface of said substrate; and 
third source / drain regions of the second conductivity type formed in { HEAD ~ the outward portions } from { TAIL ~ said second silicate glass layer } in the primary surface of said substrate ; and
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD REL TAIL TAIL TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH