{HEAD ~ A shallow trench isolation multistage chemical mechanical polishing method} for forming {TAIL ~ a shallow trench isolation structure} is provided 
{ HEAD ~ A shallow trench isolation multistage chemical mechanical polishing method } for forming { TAIL ~ a shallow trench isolation structure } is provided
HEAD HEAD HEAD HEAD HEAD HEAD HEAD HEAD HEAD HEAD HEAD HEAD HEAD REL REL TAIL TAIL TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH