the member being formed such that the reflectivity with respect to the incident radiation introduced to the member is relatively higher than the reflectivity of reflected radiation from {HEAD ~ a portion} of the substrate at which the member is not provided with respect to {TAIL ~ the incident radiation} introduced into the portion of the substrate on which the member is not provided, 
the member being formed such that the reflectivity with respect to the incident radiation introduced to the member is relatively higher than the reflectivity of reflected radiation from { HEAD ~ a portion } of the substrate at which the member is not provided with respect to { TAIL ~ the incident radiation } introduced into the portion of the substrate on which the member is not provided ,
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH