The interlayer dielectric layer 40 is an insulation layer for electrically isolating a conductive layer 30 formed over the semiconductor layer 10 from the non volatile memory transistor, and includes {HEAD ~ a layer} 42 containing {TAIL ~ nitride} 
The interlayer dielectric layer 40 is an insulation layer for electrically isolating a conductive layer 30 formed over the semiconductor layer 10 from the non volatile memory transistor , and includes { HEAD ~ a layer } 42 containing { TAIL ~ nitride }
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD OTH REL TAIL TAIL TAIL TAIL TAIL