{TAIL ~ Self aligned contact openings} are formed that extend through the pre metal dielectric film and through the barrier layer in {HEAD ~ the core region} 
{ TAIL ~ Self aligned contact openings } are formed that extend through the pre metal dielectric film and through the barrier layer in { HEAD ~ the core region }
TAIL TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD