{TAIL ~ Aluminum nitride layer deposition} in {HEAD ~ these manners} can have reduced carbon and oxygen incorporation 
{ TAIL ~ Aluminum nitride layer deposition } in { HEAD ~ these manners } can have reduced carbon and oxygen incorporation
TAIL TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH OTH OTH OTH OTH OTH