Methods are disclosed for improving {HEAD ~ the yield} of {TAIL ~ acceptable product} from microlithography using a charged particle beam 
Methods are disclosed for improving { HEAD ~ the yield } of { TAIL ~ acceptable product } from microlithography using a charged particle beam
OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD REL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH