It should be appreciated that {HEAD ~ the second annealing process} has {TAIL ~ a process temperature} that is substantially larger than the crystalline temperature of the high k dielectric layer 12; accordingly, the second annealing process can assist the transformation of the high k dielectric layer 12 
It should be appreciated that { HEAD ~ the second annealing process } has { TAIL ~ a process temperature } that is substantially larger than the crystalline temperature of the high k dielectric layer 12 ; accordingly , the second annealing process can assist the transformation of the high k dielectric layer 12
OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD HEAD REL TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH