The flow rates of {HEAD ~ the respective gases} into {TAIL ~ the vacuum chamber} will depend upon the size of the chamber and the desired deposition rate, while the ratio of the gases to one another will be dependent upon the desired ratio in the composite layer being deposited 
The flow rates of { HEAD ~ the respective gases } into { TAIL ~ the vacuum chamber } will depend upon the size of the chamber and the desired deposition rate , while the ratio of the gases to one another will be dependent upon the desired ratio in the composite layer being deposited
OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD REL TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH