Thus a deposit is prevent from separating/flying from the target, backing plate, or another surface where {HEAD ~ an unwanted film} might be formed in {TAIL ~ the sputtering apparatus} 
Thus a deposit is prevent from separating / flying from the target , backing plate , or another surface where { HEAD ~ an unwanted film } might be formed in { TAIL ~ the sputtering apparatus }
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH REL REL TAIL TAIL TAIL TAIL TAIL TAIL TAIL