Thus, the overlap of {HEAD ~ the deposition vapor} from {TAIL ~ each electrode assembly} 52 contributes to the uniformity of the coating 
Thus , the overlap of { HEAD ~ the deposition vapor } from { TAIL ~ each electrode assembly } 52 contributes to the uniformity of the coating
OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD REL TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH