{TAIL ~ A supply} 94 of deposition and carrier gases is in fluid communication with {HEAD ~ the gas distribution assembly} 46 via a mixing manifold 96 
{ TAIL ~ A supply } 94 of deposition and carrier gases is in fluid communication with { HEAD ~ the gas distribution assembly } 46 via a mixing manifold 96
TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH OTH OTH OTH OTH