The method 10, wherein, in step , {HEAD ~ the average thickness} of the Ta layer is set to {TAIL ~ about 0.1 Å} or more and about 0.3 Å or less 
The method 10 , wherein , in step , { HEAD ~ the average thickness } of the Ta layer is set to { TAIL ~ about 0.1 Å } or more and about 0.3 Å or less
OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH OTH OTH REL REL REL TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH