The storage node is formed over {HEAD ~ word lines} beginning with {TAIL ~ a deposition} and planarization of an insulator or composite insulator 
The storage node is formed over { HEAD ~ word lines } beginning with { TAIL ~ a deposition } and planarization of an insulator or composite insulator
OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD REL REL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH