The substrate boat 13, wherein each of {TAIL ~ the plurality} of substrate supports has a plurality of openings along a perimeter configured to accommodate {HEAD ~ the substrate holder} 
The substrate boat 13 , wherein each of { TAIL ~ the plurality } of substrate supports has a plurality of openings along a perimeter configured to accommodate { HEAD ~ the substrate holder }
OTH OTH OTH OTH OTH OTH OTH OTH TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD