Subsequently, the substrate is heated to about 450 ° C. and {HEAD ~ the coating film} is irradiated with, e.g., {TAIL ~ ultraviolet radiation} having a wavelength of 172 nm 
Subsequently , the substrate is heated to about 450 ° C. and { HEAD ~ the coating film } is irradiated with , e.g. , { TAIL ~ ultraviolet radiation } having a wavelength of 172 nm
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD REL REL REL OTH OTH OTH TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH