{HEAD ~ The diffraction pattern} is preferably formed on the quartz master using {TAIL ~ VLSI photolithography} 
{ HEAD ~ The diffraction pattern } is preferably formed on the quartz master using { TAIL ~ VLSI photolithography }
HEAD HEAD HEAD HEAD HEAD HEAD HEAD REL REL REL OTH OTH OTH OTH REL TAIL TAIL TAIL TAIL TAIL TAIL