{HEAD ~ The assembly} includes a source 24 of one or more solid materials such as silicon, germanium and {TAIL ~ carbon} within the chamber 14 
{ HEAD ~ The assembly } includes a source 24 of one or more solid materials such as silicon , germanium and { TAIL ~ carbon } within the chamber 14
HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH