The method as claimed in clam 1, wherein {HEAD ~ said doped region} of the first conductivity type has {TAIL ~ a doping concentration} in a range of 1×1017 to 1×1019 cm 3 and a junction depth in a range of about 0.5 to 0.8μm 
The method as claimed in clam 1 , wherein { HEAD ~ said doped region } of the first conductivity type has { TAIL ~ a doping concentration } in a range of 1×1017 to 1×1019 cm 3 and a junction depth in a range of about 0.5 to 0.8μm
OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH OTH OTH OTH REL TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH