Thus, the overlap of the deposition vapor from each electrode assembly 52 contributes to {HEAD ~ the uniformity} of {TAIL ~ the coating} 
Thus , the overlap of the deposition vapor from each electrode assembly 52 contributes to { HEAD ~ the uniformity } of { TAIL ~ the coating }
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD REL TAIL TAIL TAIL TAIL TAIL TAIL