{HEAD ~ The present invention} processes {TAIL ~ an object} by repeated irradiation of divided laser beams which have low energy, taking advantage of energy reduction due to laser beam division at the corners of the polygon mirror, which prevents damages of the object 
{ HEAD ~ The present invention } processes { TAIL ~ an object } by repeated irradiation of divided laser beams which have low energy , taking advantage of energy reduction due to laser beam division at the corners of the polygon mirror , which prevents damages of the object
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