Resist {TAIL ~ composition} comprising {HEAD ~ a siloxane or silsesquioxane polymer} having silanol groups in a composition with a naphthoquinone compound 
Resist { TAIL ~ composition } comprising { HEAD ~ a siloxane or silsesquioxane polymer } having silanol groups in a composition with a naphthoquinone compound
OTH TAIL TAIL TAIL TAIL TAIL OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH