Consequently, {TAIL ~ the yield} of accepted products of reflection masks as {HEAD ~ optical elements} of the present invention is raised 
Consequently , { TAIL ~ the yield } of accepted products of reflection masks as { HEAD ~ optical elements } of the present invention is raised
OTH OTH TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH OTH OTH OTH OTH