The insulating layer is commonly silicon nitride, but can also be a SiNx:H film , {TAIL ~ a titanium oxide film}, a silicon oxide film, a silicon nitride film containing carbon, a silicon oxide film containing carbon, {HEAD ~ a silicon oxynitride film containing carbon}, or a silicon oxide/titanium oxide film 
The insulating layer is commonly silicon nitride , but can also be a SiNx : H film , { TAIL ~ a titanium oxide film } , a silicon oxide film , a silicon nitride film containing carbon , a silicon oxide film containing carbon , { HEAD ~ a silicon oxynitride film containing carbon } , or a silicon oxide / titanium oxide film
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