In some embodiments the top of {TAIL ~ the processing chamber} is removable allowing users to remove either pedestals or {HEAD ~ heater assemblies} 
In some embodiments the top of { TAIL ~ the processing chamber } is removable allowing users to remove either pedestals or { HEAD ~ heater assemblies }
OTH OTH OTH OTH OTH OTH TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD