It should be appreciated that {HEAD ~ the second annealing process} has a process temperature that is substantially larger than the crystalline temperature of the high k dielectric layer 12; accordingly, the second annealing process can assist the transformation of {TAIL ~ the high k dielectric layer} 12 
It should be appreciated that { HEAD ~ the second annealing process } has a process temperature that is substantially larger than the crystalline temperature of the high k dielectric layer 12 ; accordingly , the second annealing process can assist the transformation of { TAIL ~ the high k dielectric layer } 12
OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH TAIL TAIL TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH