Thus, the overlap of the deposition vapor from {HEAD ~ each electrode assembly} 52 contributes to {TAIL ~ the uniformity} of the coating 
Thus , the overlap of the deposition vapor from { HEAD ~ each electrode assembly } 52 contributes to { TAIL ~ the uniformity } of the coating
OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH OTH TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH