{HEAD ~ A hydrogenated thin film} is formed in a controlled vacuum on a substrate by evaporating one or more solid materials and passing {TAIL ~ the resulting vapor} and a hydrogen containing gas into a space between two electrodes 
{ HEAD ~ A hydrogenated thin film } is formed in a controlled vacuum on a substrate by evaporating one or more solid materials and passing { TAIL ~ the resulting vapor } and a hydrogen containing gas into a space between two electrodes
HEAD HEAD HEAD HEAD HEAD HEAD HEAD HEAD REL REL OTH OTH OTH OTH OTH OTH OTH REL OTH OTH OTH OTH OTH OTH OTH REL TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH