For this reason, a surface layer or a mixing layer formed as a result of an interaction between the resist pattern thickening material and the resist pattern is efficiently formed on {HEAD ~ the surface} of {TAIL ~ the resist pattern} in a state where the resist pattern constitutes the innerlayer thereof 
For this reason , a surface layer or a mixing layer formed as a result of an interaction between the resist pattern thickening material and the resist pattern is efficiently formed on { HEAD ~ the surface } of { TAIL ~ the resist pattern } in a state where the resist pattern constitutes the innerlayer thereof
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD REL TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH