With the arrangement, the apparatus is capable of {HEAD ~ stable processing} of the wafer W in {TAIL ~ spite} of rotating the wafer W at a low speed 
With the arrangement , the apparatus is capable of { HEAD ~ stable processing } of the wafer W in { TAIL ~ spite } of rotating the wafer W at a low speed
OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH OTH OTH REL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH