{HEAD ~ A coil apparatus} includes {TAIL ~ a coil trace}, a semiconductor substrate and a dielectric layer arranged on the semiconductor substrate, at least parts of the coil trace being arranged above a recess in the dielectric layer 
{ HEAD ~ A coil apparatus } includes { TAIL ~ a coil trace } , a semiconductor substrate and a dielectric layer arranged on the semiconductor substrate , at least parts of the coil trace being arranged above a recess in the dielectric layer
HEAD HEAD HEAD HEAD HEAD HEAD HEAD REL TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH