The method for growing a superlattice structure on a substrate 11 wherein Al, Ga, and As are to be deposited on a substrate to form {HEAD ~ stacked monolayers} of {TAIL ~ AlAs} and GaAs and said step of causing the control means to include and not include respective ones of the elements within the beam in a pre established pattern of time periods includes the steps of: 
The method for growing a superlattice structure on a substrate 11 wherein Al , Ga , and As are to be deposited on a substrate to form { HEAD ~ stacked monolayers } of { TAIL ~ AlAs } and GaAs and said step of causing the control means to include and not include respective ones of the elements within the beam in a pre established pattern of time periods includes the steps of :
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