For example, the high k dielectric layer 12 is heated by the laser source and surrounded by {HEAD ~ the second process gas} such as {TAIL ~ nitrogen} in the second annealing process, and the diagram of the temperature versus time is a spike 
For example , the high k dielectric layer 12 is heated by the laser source and surrounded by { HEAD ~ the second process gas } such as { TAIL ~ nitrogen } in the second annealing process , and the diagram of the temperature versus time is a spike
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD HEAD REL REL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH