The apparatus 6 including a deflecting surface projecting from the outer edge of said bowl inwardly to a level above the top surface of {HEAD ~ a substrate} positioned on {TAIL ~ said top surface} of said chuck member, said deflecting surface having a rounded deflector lip at the inner edge thereof and projecting downward toward said bowl 
The apparatus 6 including a deflecting surface projecting from the outer edge of said bowl inwardly to a level above the top surface of { HEAD ~ a substrate } positioned on { TAIL ~ said top surface } of said chuck member , said deflecting surface having a rounded deflector lip at the inner edge thereof and projecting downward toward said bowl
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD REL REL TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH