The coaxial electrode assemblies 52 are arranged {HEAD ~ such that the deposition vapor} 78 78 from {TAIL ~ each} of the coaxial electrode assemblies 52 partially overlap 
The coaxial electrode assemblies 52 are arranged { HEAD ~ such that the deposition vapor } 78 78 from { TAIL ~ each } of the coaxial electrode assemblies 52 partially overlap
OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH REL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH