Moreover, although CF based reaction products may be generated by the plasma of CF4 gas, {HEAD ~ the amount} of CF based reaction products generated by the plasma of CF4 gas is considerably smaller than {TAIL ~ the amount} of CF based reaction products generated by a plasma of C4F8 gas or C4F6 gas 
Moreover , although CF based reaction products may be generated by the plasma of CF4 gas , { HEAD ~ the amount } of CF based reaction products generated by the plasma of CF4 gas is considerably smaller than { TAIL ~ the amount } of CF based reaction products generated by a plasma of C4F8 gas or C4F6 gas
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