The wiring board 16, wherein {TAIL ~ the via plug} fills {HEAD ~ an entirety} of the through opening such that side surfaces of the via plug directly abut the insulating layer, and the via plug directly connects to the back surface of the first electrode 
The wiring board 16 , wherein { TAIL ~ the via plug } fills { HEAD ~ an entirety } of the through opening such that side surfaces of the via plug directly abut the insulating layer , and the via plug directly connects to the back surface of the first electrode
OTH OTH OTH OTH OTH OTH TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH