The method 13, further comprising alternating cycles of surface processing and {HEAD ~ examination} of {TAIL ~ the exposed sample surface} using a scanning electron microscope, a focused ion beam microscope, or an atomic force microscope in situ and without opening the vacuum chamber 
The method 13 , further comprising alternating cycles of surface processing and { HEAD ~ examination } of { TAIL ~ the exposed sample surface } using a scanning electron microscope , a focused ion beam microscope , or an atomic force microscope in situ and without opening the vacuum chamber
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD REL TAIL TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH