{TAIL ~ A hard carbon film coated substrate} includes in {HEAD ~ stacked sequence} a substrate, an intermediate layer, and a hard carbon film 
{ TAIL ~ A hard carbon film coated substrate } includes in { HEAD ~ stacked sequence } a substrate , an intermediate layer , and a hard carbon film
TAIL TAIL TAIL TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH