The fluid suppliers 61, 62, 63 are arranged in a direction extending from {HEAD ~ the circumference} of {TAIL ~ the wafer W} to its inside 
The fluid suppliers 61 , 62 , 63 are arranged in a direction extending from { HEAD ~ the circumference } of { TAIL ~ the wafer W } to its inside
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD REL TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH