The invention is directed to {HEAD ~ an apparatus} for generating soft x radiation, {TAIL ~ particularly EUV radiation}, by laser induced plasma 
The invention is directed to { HEAD ~ an apparatus } for generating soft x radiation , { TAIL ~ particularly EUV radiation } , by laser induced plasma
OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD REL REL OTH OTH OTH OTH TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH