In the embodiment, {HEAD ~ a pressure sensor} 56 is provided as an evaporation detector which detects the pressure inside the furnace 11, which is to input to {TAIL ~ the controller} 20 not shown in FIG 7 as a detected signal of the oxygen in proceeding of evaporation 
In the embodiment , { HEAD ~ a pressure sensor } 56 is provided as an evaporation detector which detects the pressure inside the furnace 11 , which is to input to { TAIL ~ the controller } 20 not shown in FIG 7 as a detected signal of the oxygen in proceeding of evaporation
OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH REL REL REL REL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH