FIG 2 b schematically illustrates {HEAD ~ a cluster} of process chambers 210 according to an illustrative embodiment in which the cluster 210 may be provided in {TAIL ~ the form} of a cluster tool 200, that is, the process chambers 210 and the corresponding transport capabilities may be provided within a single mainframe, as is also previously explained with reference to the cluster tool 100 
FIG 2 b schematically illustrates { HEAD ~ a cluster } of process chambers 210 according to an illustrative embodiment in which the cluster 210 may be provided in { TAIL ~ the form } of a cluster tool 200 , that is , the process chambers 210 and the corresponding transport capabilities may be provided within a single mainframe , as is also previously explained with reference to the cluster tool 100
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