{HEAD ~ A method} 1, wherein {TAIL ~ the ion density} is greater than 1012 cm−3 and the ion energy is between 10 eV and 15 eV in said forming 
{ HEAD ~ A method } 1 , wherein { TAIL ~ the ion density } is greater than 1012 cm−3 and the ion energy is between 10 eV and 15 eV in said forming
HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH REL TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH