{HEAD ~ The substrate processing apparatus} 1, further comprising {TAIL ~ an under plate} which is arranged below the substrate so as to oppose the substrate and which is movable up and down 
{ HEAD ~ The substrate processing apparatus } 1 , further comprising { TAIL ~ an under plate } which is arranged below the substrate so as to oppose the substrate and which is movable up and down
HEAD HEAD HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH OTH REL TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH