The apparatus 3, wherein each of the buffering members comprises a substrate contact portion contacting the substrate, and {HEAD ~ an impact absorbing portion} coupled to {TAIL ~ a lower portion} of the substrate contact portion to absorb impact applied to the substrate contact portion 
The apparatus 3 , wherein each of the buffering members comprises a substrate contact portion contacting the substrate , and { HEAD ~ an impact absorbing portion } coupled to { TAIL ~ a lower portion } of the substrate contact portion to absorb impact applied to the substrate contact portion
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD HEAD REL REL TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH