The processing station 6 wherein the heater plate is {HEAD ~ a composite heater plate} having {TAIL ~ at least two separately powered heating regions}, allowing temperature profile across the plate to be managed by managing power to the separately powered regions 
The processing station 6 wherein the heater plate is { HEAD ~ a composite heater plate } having { TAIL ~ at least two separately powered heating regions } , allowing temperature profile across the plate to be managed by managing power to the separately powered regions
OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD HEAD REL TAIL TAIL TAIL TAIL TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH