{HEAD ~ A supply} 94 of {TAIL ~ deposition and carrier gases} is in fluid communication with the gas distribution assembly 46 via a mixing manifold 96 
{ HEAD ~ A supply } 94 of { TAIL ~ deposition and carrier gases } is in fluid communication with the gas distribution assembly 46 via a mixing manifold 96
HEAD HEAD HEAD HEAD HEAD HEAD OTH REL TAIL TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH