The special cleaning step effect robust removal of the precipitates accumulated in the operating source due to the decomposition of carbon containing gases such as hydrocarbons and halocarbons Precipitate removal is achieved by employing ions and {HEAD ~ radicals} formed in an inert gas plasma or a mixture of inert gas and {TAIL ~ oxygen} to reactively etch or bombard the precipitates 
The special cleaning step effect robust removal of the precipitates accumulated in the operating source due to the decomposition of carbon containing gases such as hydrocarbons and halocarbons Precipitate removal is achieved by employing ions and { HEAD ~ radicals } formed in an inert gas plasma or a mixture of inert gas and { TAIL ~ oxygen } to reactively etch or bombard the precipitates
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