A pattern inspection apparatus 1, wherein said irradiator includes {HEAD ~ a pair} of swing mirrors which reflect {TAIL ~ said deep ultraviolet laser} by mutually swinging at different directions 
A pattern inspection apparatus 1 , wherein said irradiator includes { HEAD ~ a pair } of swing mirrors which reflect { TAIL ~ said deep ultraviolet laser } by mutually swinging at different directions
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH OTH OTH OTH TAIL TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH