The method includes controlling acceleration voltage of {TAIL ~ electron beam and electric field} on a sample, beam current, beam diameter, image detection rate, image dimensions, precharge, discharge, or a combination of them, exposing an object to the electron beam, detecting in a sensor a physical change generated from the object, and inspecting or measuring the object on {HEAD ~ the basis} of a signal representing the detected physical change 
The method includes controlling acceleration voltage of { TAIL ~ electron beam and electric field } on a sample , beam current , beam diameter , image detection rate , image dimensions , precharge , discharge , or a combination of them , exposing an object to the electron beam , detecting in a sensor a physical change generated from the object , and inspecting or measuring the object on { HEAD ~ the basis } of a signal representing the detected physical change
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