In some illustrative embodiments, it may be verified whether {HEAD ~ a percentage} determined for {TAIL ~ each} of the process chambers in step 1 may be within the processing capacity of the process chambers 211A, 211B. That is, the processing capacity of the chambers have to be equal to or greater than the required percentage 
In some illustrative embodiments , it may be verified whether { HEAD ~ a percentage } determined for { TAIL ~ each } of the process chambers in step 1 may be within the processing capacity of the process chambers 211A , 211B. That is , the processing capacity of the chambers have to be equal to or greater than the required percentage
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD REL REL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH