For instance, similar to the previously explained example, {HEAD ~ the cluster tool} 200 may represent {TAIL ~ a process flow} including the steps S1, S2, S3 in which a conductive barrier material, such as tantalum and the like, in combination with a copper seed material may be deposited 
For instance , similar to the previously explained example , { HEAD ~ the cluster tool } 200 may represent { TAIL ~ a process flow } including the steps S1 , S2 , S3 in which a conductive barrier material , such as tantalum and the like , in combination with a copper seed material may be deposited
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH REL TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH