At the transfer position 12, a side buffer is provided on a side of a travel rail at {HEAD ~ a load port} near {TAIL ~ the ground} or in the overhead space 
At the transfer position 12 , a side buffer is provided on a side of a travel rail at { HEAD ~ a load port } near { TAIL ~ the ground } or in the overhead space
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD REL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH