{HEAD ~ The method} 10, wherein, in step , the average thickness of the Ta layer is set to {TAIL ~ about 0.1 Å} or more and about 0.3 Å or less 
{ HEAD ~ The method } 10 , wherein , in step , the average thickness of the Ta layer is set to { TAIL ~ about 0.1 Å } or more and about 0.3 Å or less
HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH