The method 16 further comprising receiving a definition of configuration parameters, the configuration parameters selected from the group consisting of one or more of edit width, edit length, edit depth, edit time, beam current, gas type, and scan pattern, and wherein {HEAD ~ the at least one file} generated further includes {TAIL ~ the defined configuration parameters} 
The method 16 further comprising receiving a definition of configuration parameters , the configuration parameters selected from the group consisting of one or more of edit width , edit length , edit depth , edit time , beam current , gas type , and scan pattern , and wherein { HEAD ~ the at least one file } generated further includes { TAIL ~ the defined configuration parameters }
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH REL TAIL TAIL TAIL TAIL TAIL TAIL TAIL TAIL