The processing chamber and {HEAD ~ loadlock chambers} are connected to {TAIL ~ a vacuum system} having two vacuum pumps for maintaining a vacuum in the chambers 
The processing chamber and { HEAD ~ loadlock chambers } are connected to { TAIL ~ a vacuum system } having two vacuum pumps for maintaining a vacuum in the chambers
OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD REL REL REL TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH