{TAIL ~ A passivation layer} is formed overlying the first dielectric layer and has an opening, in which the opening corresponds to the bonding region and the sensing region and exposes the dielectric island and a part of {HEAD ~ the first conductive layer} 
{ TAIL ~ A passivation layer } is formed overlying the first dielectric layer and has an opening , in which the opening corresponds to the bonding region and the sensing region and exposes the dielectric island and a part of { HEAD ~ the first conductive layer }
TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD HEAD