In one embodiment, an apparatus for delivering {HEAD ~ gases} to {TAIL ~ a semiconductor processing system} includes a plurality of gas input and output lines having inlet and outlet ports 
In one embodiment , an apparatus for delivering { HEAD ~ gases } to { TAIL ~ a semiconductor processing system } includes a plurality of gas input and output lines having inlet and outlet ports
OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD REL TAIL TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH