A resist composition comprising {HEAD ~ a compound} having an active hydrogen and an alkali soluble siloxane polymer containing in the molecules thereof at least one unit selected from a unit represented by formula and a unit represented by formula ##STR1## wherein the Xs are the same or different and {TAIL ~ each} represents one member selected from the group consisting of hydrogen, ##STR2## ; and a carboxyl group 
A resist composition comprising { HEAD ~ a compound } having an active hydrogen and an alkali soluble siloxane polymer containing in the molecules thereof at least one unit selected from a unit represented by formula and a unit represented by formula # # STR1 # # wherein the Xs are the same or different and { TAIL ~ each } represents one member selected from the group consisting of hydrogen , # # STR2 # # ; and a carboxyl group
OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH