The coated substrate 1, wherein {HEAD ~ said intermediate layer} is mainly composed of {TAIL ~ Ru} 
The coated substrate 1 , wherein { HEAD ~ said intermediate layer } is mainly composed of { TAIL ~ Ru }
OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD REL REL REL REL TAIL TAIL TAIL TAIL TAIL