Cin is satisfied, where Cin is the conductance from the gas inlet to the position of the substrate nearest to the gas inlet, Cx is the conductance from {HEAD ~ the position} of the substrate nearest to {TAIL ~ the gas inlet} to the position of the substrate nearest to the gas outlet, Sout is the effective exhaust rate, Sact is the consumption rate of the gas, and Cz is the conductance from the substrate to the gas outlet 
Cin is satisfied , where Cin is the conductance from the gas inlet to the position of the substrate nearest to the gas inlet , Cx is the conductance from { HEAD ~ the position } of the substrate nearest to { TAIL ~ the gas inlet } to the position of the substrate nearest to the gas outlet , Sout is the effective exhaust rate , Sact is the consumption rate of the gas , and Cz is the conductance from the substrate to the gas outlet
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH OTH REL REL TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH