A method for fabricating {TAIL ~ semiconductor substrates} with {HEAD ~ resistivity} below 0.02 ohm cm is provided 
A method for fabricating { TAIL ~ semiconductor substrates } with { HEAD ~ resistivity } below 0.02 ohm cm is provided
OTH OTH OTH OTH TAIL TAIL TAIL TAIL TAIL TAIL OTH HEAD HEAD HEAD HEAD HEAD OTH OTH OTH OTH OTH OTH