The concentrations of predetermined components of {HEAD ~ a chemical solution} 5 present in {TAIL ~ a cleaning bath} 1 are measured by a measurement unit 11 
The concentrations of predetermined components of { HEAD ~ a chemical solution } 5 present in { TAIL ~ a cleaning bath } 1 are measured by a measurement unit 11
OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD OTH REL REL TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH