Since the resist pattern thickening material of the present invention contains a compound represented by the General Formula , the resist pattern thickening material can exhibit an effect of thickening the resist pattern efficiently and uniformly, irrespective of the type and the size of a material used for the resist pattern and has {HEAD ~ less dependency} on {TAIL ~ the type} and the size of the material used for the resist pattern 
Since the resist pattern thickening material of the present invention contains a compound represented by the General Formula , the resist pattern thickening material can exhibit an effect of thickening the resist pattern efficiently and uniformly , irrespective of the type and the size of a material used for the resist pattern and has { HEAD ~ less dependency } on { TAIL ~ the type } and the size of the material used for the resist pattern
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