Referring to FIG 3, {HEAD ~ the support substrate} 10 is formed on one surface of the nitride semiconductor substrate 20 for structurally supporting {TAIL ~ the nitride semiconductor substrate} 20 
Referring to FIG 3 , { HEAD ~ the support substrate } 10 is formed on one surface of the nitride semiconductor substrate 20 for structurally supporting { TAIL ~ the nitride semiconductor substrate } 20
OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH TAIL TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH