To attain this object, the present invention provides a method that comprises cleaning a gas in contact with a substrate by dust control means and adsorption and adsorption means so that the concentration of fine particles in said gas is reduced to class 1000 or below whereas {HEAD ~ the concentrations} of non methane hydrocarbons are reduced to {TAIL ~ 0.2 ppm} or below and thereafter exposing the surface of the substrate to said gas 
To attain this object , the present invention provides a method that comprises cleaning a gas in contact with a substrate by dust control means and adsorption and adsorption means so that the concentration of fine particles in said gas is reduced to class 1000 or below whereas { HEAD ~ the concentrations } of non methane hydrocarbons are reduced to { TAIL ~ 0.2 ppm } or below and thereafter exposing the surface of the substrate to said gas
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