{TAIL ~ High purity polysilicon granules} are prepared by depositing {HEAD ~ reaction gas} on silicon granules in a fluidized bed reactor having: 
{ TAIL ~ High purity polysilicon granules } are prepared by depositing { HEAD ~ reaction gas } on silicon granules in a fluidized bed reactor having :
TAIL TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH