The invention is a process for making optical devices comprising compound semiconductors on substrates containing phosphorus in which {HEAD ~ a protective layer} is put down on {TAIL ~ the active region} prior to exposure of the device to temperatures over about 300 degrees C 
The invention is a process for making optical devices comprising compound semiconductors on substrates containing phosphorus in which { HEAD ~ a protective layer } is put down on { TAIL ~ the active region } prior to exposure of the device to temperatures over about 300 degrees C
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD REL REL REL REL TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH