{HEAD ~ The present invention} relates to a lithographic apparatus and {TAIL ~ a method} for manufacturing a device 
{ HEAD ~ The present invention } relates to a lithographic apparatus and { TAIL ~ a method } for manufacturing a device
HEAD HEAD HEAD HEAD HEAD HEAD HEAD REL REL OTH OTH OTH OTH TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH