The invention features a system and method for reducing the contribution of {HEAD ~ cyclic errors} to an interferometric position measurement of {TAIL ~ a movable stage} 
The invention features a system and method for reducing the contribution of { HEAD ~ cyclic errors } to an interferometric position measurement of { TAIL ~ a movable stage }
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH OTH OTH OTH OTH TAIL TAIL TAIL TAIL TAIL TAIL TAIL