A material layer may be filled into the holes and a part of the oxide layer is removed to form {TAIL ~ an imprinting template} having {HEAD ~ a plurality} of pillar shaped protrusions 
A material layer may be filled into the holes and a part of the oxide layer is removed to form { TAIL ~ an imprinting template } having { HEAD ~ a plurality } of pillar shaped protrusions
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH OTH OTH