Thus, the highest frequency maintenance component, {HEAD ~ the nozzle}, is removed without moving or removing {TAIL ~ any other component} in the chamber, such as the mirror 
Thus , the highest frequency maintenance component , { HEAD ~ the nozzle } , is removed without moving or removing { TAIL ~ any other component } in the chamber , such as the mirror
OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD OTH REL REL REL REL OTH OTH TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH