{TAIL ~ This feature} is suitable for manufacturing equipment which includes a transport chamber and a plurality of process chambers radially placed around and connected with the transport chamber, with the fixed base 200 of the transfer robot A1 being placed in {HEAD ~ the transport chamber} 
{ TAIL ~ This feature } is suitable for manufacturing equipment which includes a transport chamber and a plurality of process chambers radially placed around and connected with the transport chamber , with the fixed base 200 of the transfer robot A1 being placed in { HEAD ~ the transport chamber }
TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD