preparing a SiC single crystal wafer whose main surface is a c plane or {HEAD ~ whose main surface} is a surface which inclines a c plane with an angle of inclination of {TAIL ~ more than 0 degrees} but less than 10 degrees 
preparing a SiC single crystal wafer whose main surface is a c plane or { HEAD ~ whose main surface } is a surface which inclines a c plane with an angle of inclination of { TAIL ~ more than 0 degrees } but less than 10 degrees
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH TAIL TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH