The cap layer 130 is {HEAD ~ a stacked structure}, which includes {TAIL ~ a first cap layer} 132 on the gate structure 120 and a second cap layer 134 on the first cap layer 132 
The cap layer 130 is { HEAD ~ a stacked structure } , which includes { TAIL ~ a first cap layer } 132 on the gate structure 120 and a second cap layer 134 on the first cap layer 132
OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH REL TAIL TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH