While {TAIL ~ the plasma} is generated in the space between the electrodes, the vapor passes through the second electrode and the hydrogen containing gas is introduced into the space between the electrodes, a thin film of {HEAD ~ hydrogenated material} is formed on the substrate 
While { TAIL ~ the plasma } is generated in the space between the electrodes , the vapor passes through the second electrode and the hydrogen containing gas is introduced into the space between the electrodes , a thin film of { HEAD ~ hydrogenated material } is formed on the substrate
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