A gas coming into contact with a base material or substrate is purified by dust removing {TAIL ~ apparatus} and adsorption and absorption apparatus so that the concentration of {HEAD ~ fine particles} in the gas is below class 1,000 and a non methane hydrocarbon concentration is below 0.2 ppm 
A gas coming into contact with a base material or substrate is purified by dust removing { TAIL ~ apparatus } and adsorption and absorption apparatus so that the concentration of { HEAD ~ fine particles } in the gas is below class 1,000 and a non methane hydrocarbon concentration is below 0.2 ppm
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