A semiconductor sensor,11, the relief holes being provided at {HEAD ~ respective corners} of {TAIL ~ the membrane} 
A semiconductor sensor,11 , the relief holes being provided at { HEAD ~ respective corners } of { TAIL ~ the membrane }
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD REL TAIL TAIL TAIL TAIL TAIL TAIL