The pressure of the deposition chamber 430 is maintained at a level lower than the pressure of the other two chambers to enable {HEAD ~ cluster transportation} from the cluster forming chamber 410 to {TAIL ~ the deposition chamber} 430 
The pressure of the deposition chamber 430 is maintained at a level lower than the pressure of the other two chambers to enable { HEAD ~ cluster transportation } from the cluster forming chamber 410 to { TAIL ~ the deposition chamber } 430
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH OTH OTH OTH OTH REL TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH