creating a mask on the dielectric layer, {HEAD ~ the mask} comprising an opening, {TAIL ~ the shape} of which determines a lateral shape of the recess; and 
creating a mask on the dielectric layer , { HEAD ~ the mask } comprising an opening , { TAIL ~ the shape } of which determines a lateral shape of the recess ; and
OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD REL OTH OTH OTH TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH