By way of example, this polishing step may be accomplished by {TAIL ~ means} of {HEAD ~ chemical mechanical polishing} 
By way of example , this polishing step may be accomplished by { TAIL ~ means } of { HEAD ~ chemical mechanical polishing }
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH TAIL TAIL TAIL TAIL TAIL OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD