The hydrocarbon based solvent may have a lower boiling point than that of cyclohexasilane and {HEAD ~ a higher coefficient} of viscosity than that of cyclohexasilane so that {TAIL ~ the quality} of a Si film may be improved 
The hydrocarbon based solvent may have a lower boiling point than that of cyclohexasilane and { HEAD ~ a higher coefficient } of viscosity than that of cyclohexasilane so that { TAIL ~ the quality } of a Si film may be improved
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