{HEAD ~ A photolithographic method} 6 wherein {TAIL ~ said imagewise exposing} of said first layer is done by computer controlling a thin beam of actinic radiation 
{ HEAD ~ A photolithographic method } 6 wherein { TAIL ~ said imagewise exposing } of said first layer is done by computer controlling a thin beam of actinic radiation
HEAD HEAD HEAD HEAD HEAD HEAD HEAD OTH REL TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH