In {TAIL ~ one aspect}, {HEAD ~ the invention} pertains to a method of forming a layer of material on a substrate 
In { TAIL ~ one aspect } , { HEAD ~ the invention } pertains to a method of forming a layer of material on a substrate
REL TAIL TAIL TAIL TAIL TAIL TAIL OTH HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH