Pumping systems 433, 434, and 435 are provided for adjusting {TAIL ~ the pressure} of {HEAD ~ the cluster forming chamber} 410, the encapsulation chamber 429 and the deposition chamber 430 
Pumping systems 433 , 434 , and 435 are provided for adjusting { TAIL ~ the pressure } of { HEAD ~ the cluster forming chamber } 410 , the encapsulation chamber 429 and the deposition chamber 430
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH TAIL TAIL TAIL TAIL TAIL TAIL OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH