Thereafter, BSG film side walls 414, 415 are caused to be left by {HEAD ~ the RIE process} to carry out {TAIL ~ the salicide process} to thereby form metal silicide films 416, 417 on the source and drain diffused layers 410, 411  
Thereafter , BSG film side walls 414 , 415 are caused to be left by { HEAD ~ the RIE process } to carry out { TAIL ~ the salicide process } to thereby form metal silicide films 416 , 417 on the source and drain diffused layers 410 , 411
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD REL REL REL TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH