The process consists of a step of placing a plurality of wafers in a shrouded quartz boat or wafer carrier having a plurality of slots cut in the walls thereof to admit reactant gases to {HEAD ~ the vicinity} of {TAIL ~ the wafers} 
The process consists of a step of placing a plurality of wafers in a shrouded quartz boat or wafer carrier having a plurality of slots cut in the walls thereof to admit reactant gases to { HEAD ~ the vicinity } of { TAIL ~ the wafers }
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