Where {HEAD ~ only the coating material} is coated on {TAIL ~ an area} of a substrate, the thickness profile is taken as the thickness of the coating material alone 
Where { HEAD ~ only the coating material } is coated on { TAIL ~ an area } of a substrate , the thickness profile is taken as the thickness of the coating material alone
OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD HEAD REL REL REL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH