{HEAD ~ A gas} coming into contact with a base material or substrate is purified by dust removing apparatus and {TAIL ~ adsorption and absorption apparatus} so that the concentration of fine particles in the gas is below class 1,000 and a non methane hydrocarbon concentration is below 0.2 ppm 
{ HEAD ~ A gas } coming into contact with a base material or substrate is purified by dust removing apparatus and { TAIL ~ adsorption and absorption apparatus } so that the concentration of fine particles in the gas is below class 1,000 and a non methane hydrocarbon concentration is below 0.2 ppm
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