The lid portion 88 includes a throughway 92 to place {HEAD ~ the gas distribution assembly} 46 in {TAIL ~ fluid communication} with the process chamber 32 
The lid portion 88 includes a throughway 92 to place { HEAD ~ the gas distribution assembly } 46 in { TAIL ~ fluid communication } with the process chamber 32
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD HEAD OTH REL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH