{HEAD ~ A processing fixture} and method of fabricating micromechanical devices, such as {TAIL ~ digital micromirror devices}, that allows fragile structures on wafer 22 to be protected from debris during the saw operation and subsequent cleaning operations 
{ HEAD ~ A processing fixture } and method of fabricating micromechanical devices , such as { TAIL ~ digital micromirror devices } , that allows fragile structures on wafer 22 to be protected from debris during the saw operation and subsequent cleaning operations
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