Thus, also in this case, the 6000 substrates to be processed may be distributed so as to process {TAIL ~ 2500 substrates} in {HEAD ~ the chamber} 213A, while 3500 substrates are to be processed in chamber 213B 
Thus , also in this case , the 6000 substrates to be processed may be distributed so as to process { TAIL ~ 2500 substrates } in { HEAD ~ the chamber } 213A , while 3500 substrates are to be processed in chamber 213B
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH TAIL TAIL TAIL TAIL TAIL TAIL OTH HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH