In {HEAD ~ some embodiments} the top of {TAIL ~ the processing chamber} is removable allowing users to remove either pedestals or heater assemblies 
In { HEAD ~ some embodiments } the top of { TAIL ~ the processing chamber } is removable allowing users to remove either pedestals or heater assemblies
OTH HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH OTH TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH