A substrate is loaded into a chamber, the temperature is adjusted to {HEAD ~ between about 400° C.} and about 500° C., and the chamber is filed with {TAIL ~ hydrogen} to create a pressure between about 0.5 and about 3 Torr 
A substrate is loaded into a chamber , the temperature is adjusted to { HEAD ~ between about 400 ° C. } and about 500 ° C. , and the chamber is filed with { TAIL ~ hydrogen } to create a pressure between about 0.5 and about 3 Torr
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH