A plurality of micro passageways that penetrate the first surface of {TAIL ~ the substrate} from {HEAD ~ the second surface} are formed by a porous silicon process 
A plurality of micro passageways that penetrate the first surface of { TAIL ~ the substrate } from { HEAD ~ the second surface } are formed by a porous silicon process
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH TAIL TAIL TAIL TAIL TAIL TAIL OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH OTH OTH OTH OTH OTH