{HEAD ~ The invention} is {TAIL ~ a process} for making optical devices comprising compound semiconductors on substrates containing phosphorus in which a protective layer is put down on the active region prior to exposure of the device to temperatures over about 300 degrees C 
{ HEAD ~ The invention } is { TAIL ~ a process } for making optical devices comprising compound semiconductors on substrates containing phosphorus in which a protective layer is put down on the active region prior to exposure of the device to temperatures over about 300 degrees C
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