Further, there has also been known that {HEAD ~ a transparent electroconductive layer} having {TAIL ~ an uneven surface} is formed between the reflection layer and the semiconductor layer to obtain a light confining effect that an optical distance of reflected light is prolonged to obtain an effect of suppressing an excessive current flowing at the time of an occurrence of a shunt phenomenon 
Further , there has also been known that { HEAD ~ a transparent electroconductive layer } having { TAIL ~ an uneven surface } is formed between the reflection layer and the semiconductor layer to obtain a light confining effect that an optical distance of reflected light is prolonged to obtain an effect of suppressing an excessive current flowing at the time of an occurrence of a shunt phenomenon
OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD HEAD REL TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH