A process for depositing porous silicon oxide based films using a sol gel approach utilizing a precursor solution formulation which includes {TAIL ~ a purified nonionic surfactant} and an additive among other components, where the additive is {HEAD ~ either an ionic additive} or an amine additive which forms an ionic ammonium type salt in the acidic precursor solution 
A process for depositing porous silicon oxide based films using a sol gel approach utilizing a precursor solution formulation which includes { TAIL ~ a purified nonionic surfactant } and an additive among other components , where the additive is { HEAD ~ either an ionic additive } or an amine additive which forms an ionic ammonium type salt in the acidic precursor solution
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