{HEAD ~ A boat} loaded with {TAIL ~ wafers} is moved from the loadlock chamber to the processing chamber, with the boat being rotated while the source gas is supplied 
{ HEAD ~ A boat } loaded with { TAIL ~ wafers } is moved from the loadlock chamber to the processing chamber , with the boat being rotated while the source gas is supplied
HEAD HEAD HEAD HEAD HEAD HEAD REL REL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH