For example, the transfer position 12 is a load port of a semiconductor processing apparatus, {HEAD ~ a station} such as {TAIL ~ a stocker}, or a buffer for temporarily storing an article 
For example , the transfer position 12 is a load port of a semiconductor processing apparatus , { HEAD ~ a station } such as { TAIL ~ a stocker } , or a buffer for temporarily storing an article
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD REL REL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH