the effective part and outer peripheral part are formed integrally by semiconductor material, and {HEAD ~ the modified region} includes {TAIL ~ a molten processed region} 
the effective part and outer peripheral part are formed integrally by semiconductor material , and { HEAD ~ the modified region } includes { TAIL ~ a molten processed region }
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD REL TAIL TAIL TAIL TAIL TAIL TAIL TAIL TAIL