Referring to FIG 2E, in one embodiment of the invention the oxygen containing plasma treatment is carried out for {HEAD ~ a sufficient period} of time to substantially remove {TAIL ~ any remaining polymeric residue} remaining in the dual damascene opening including polymeric residues surrounding an upper portion of the via opening 28A also referred to as ‘via fences’ 
Referring to FIG 2E , in one embodiment of the invention the oxygen containing plasma treatment is carried out for { HEAD ~ a sufficient period } of time to substantially remove { TAIL ~ any remaining polymeric residue } remaining in the dual damascene opening including polymeric residues surrounding an upper portion of the via opening 28A also referred to as ‘ via fences ’
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