There is provided a method of forming a damascene pattern including {TAIL ~ a via} and a trench in {HEAD ~ a damascene process} of forming a copper metal interconnection 
There is provided a method of forming a damascene pattern including { TAIL ~ a via } and a trench in { HEAD ~ a damascene process } of forming a copper metal interconnection
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH OTH OTH OTH OTH