The nitride semiconductor wafer 1, wherein Δθ varies non continuously within {HEAD ~ an angular range} of {TAIL ~ greater than 0.05°} and less than 1° 
The nitride semiconductor wafer 1 , wherein Δθ varies non continuously within { HEAD ~ an angular range } of { TAIL ~ greater than 0.05 ° } and less than 1 °
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD REL TAIL TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH