{HEAD ~ The method} includes forming a film on the optical substrate by using a coating liquid containing a metal alkoxide containing at least aluminum, immersing {TAIL ~ the film} in a water containing liquid, baking the film having been immersed in the water containing liquid, and subjecting the film having been baked to treatment with warm water to form an aluminum containing film having a fine irregularity structure 
{ HEAD ~ The method } includes forming a film on the optical substrate by using a coating liquid containing a metal alkoxide containing at least aluminum , immersing { TAIL ~ the film } in a water containing liquid , baking the film having been immersed in the water containing liquid , and subjecting the film having been baked to treatment with warm water to form an aluminum containing film having a fine irregularity structure
HEAD HEAD HEAD HEAD HEAD HEAD REL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH REL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH