A method 1, wherein the ion density is greater than 1012 cm−3 and {HEAD ~ the ion energy} is between {TAIL ~ 10 eV} and 15 eV in said forming 
A method 1 , wherein the ion density is greater than 1012 cm−3 and { HEAD ~ the ion energy } is between { TAIL ~ 10 eV } and 15 eV in said forming
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD REL REL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH