{HEAD ~ RF power supplies} 60 and 70, gas supply system 80, vacuum pump system 90 and workpiece handling and robotic system 94 are all electronically connected to and controlled by {TAIL ~ a main control system} 100 
{ HEAD ~ RF power supplies } 60 and 70 , gas supply system 80 , vacuum pump system 90 and workpiece handling and robotic system 94 are all electronically connected to and controlled by { TAIL ~ a main control system } 100
HEAD HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH REL OTH REL REL REL OTH OTH OTH TAIL TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH