{HEAD ~ The combination} of the silicon oxide layer and {TAIL ~ the silicon layer} comprise, in turn, a composite SRO layer 
{ HEAD ~ The combination } of the silicon oxide layer and { TAIL ~ the silicon layer } comprise , in turn , a composite SRO layer
HEAD HEAD HEAD HEAD HEAD HEAD REL OTH OTH OTH OTH OTH TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH