The method 16 further comprising receiving {HEAD ~ a definition} of {TAIL ~ configuration parameters}, the configuration parameters selected from the group consisting of one or more of edit width, edit length, edit depth, edit time, beam current, gas type, and scan pattern, and wherein the at least one file generated further includes the defined configuration parameters 
The method 16 further comprising receiving { HEAD ~ a definition } of { TAIL ~ configuration parameters } , the configuration parameters selected from the group consisting of one or more of edit width , edit length , edit depth , edit time , beam current , gas type , and scan pattern , and wherein the at least one file generated further includes the defined configuration parameters
OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD REL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH