{HEAD ~ Sputtering target} producing {TAIL ~ few particles}, backing plate or sputtering apparatus and sputtering method producing few particles 
{ HEAD ~ Sputtering target } producing { TAIL ~ few particles } , backing plate or sputtering apparatus and sputtering method producing few particles
HEAD HEAD HEAD HEAD HEAD HEAD REL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH