A micro gyroscope determine {HEAD ~ three dimensional rotational movements} is mounted on {TAIL ~ a substrate} on which a plurality of masses tangentially oscillate about the z axis perpendicular to the substrate 
A micro gyroscope determine { HEAD ~ three dimensional rotational movements } is mounted on { TAIL ~ a substrate } on which a plurality of masses tangentially oscillate about the z axis perpendicular to the substrate
OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD HEAD REL REL REL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH