In some illustrative embodiments, the sequencing of substrates to the chambers 212A, 212B, i.e., the bottleneck step, may be in an alternating manner in {HEAD ~ order} to maintain 100% of {TAIL ~ the total capacity} of the cluster tool 200 
In some illustrative embodiments , the sequencing of substrates to the chambers 212A , 212B , i.e. , the bottleneck step , may be in an alternating manner in { HEAD ~ order } to maintain 100 % of { TAIL ~ the total capacity } of the cluster tool 200
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD OTH OTH OTH OTH OTH TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH