The present invention processes an object by repeated irradiation of divided laser beams which have low energy, taking advantage of energy reduction due to {HEAD ~ laser beam division} at the corners of {TAIL ~ the polygon mirror}, which prevents damages of the object 
The present invention processes an object by repeated irradiation of divided laser beams which have low energy , taking advantage of energy reduction due to { HEAD ~ laser beam division } at the corners of { TAIL ~ the polygon mirror } , which prevents damages of the object
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH OTH OTH TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH