In {HEAD ~ the laser processing method} disclosed in {TAIL ~ Patent Document} 1, however, the modified layer does not stop within the plate like object but reaches the outer face thereof  
In { HEAD ~ the laser processing method } disclosed in { TAIL ~ Patent Document } 1 , however , the modified layer does not stop within the plate like object but reaches the outer face thereof
OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD HEAD REL REL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH