The present invention achieves technical advantages by using a nanoindenter type device to determine localized mechanical properties of a substrate as a function of displacement depth or {HEAD ~ applied load} of {TAIL ~ the nanoindenter tip} into the substrate surface, and accurately predicting the electrical property stability of the substrate under test as a function of this data 
The present invention achieves technical advantages by using a nanoindenter type device to determine localized mechanical properties of a substrate as a function of displacement depth or { HEAD ~ applied load } of { TAIL ~ the nanoindenter tip } into the substrate surface , and accurately predicting the electrical property stability of the substrate under test as a function of this data
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