Thus, {TAIL ~ deflection} resulting in {HEAD ~ the central portion} of a large sized substrate can be controlled 
Thus , { TAIL ~ deflection } resulting in { HEAD ~ the central portion } of a large sized substrate can be controlled
OTH OTH TAIL TAIL TAIL TAIL TAIL OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH OTH OTH OTH OTH OTH OTH