That is, the high k dielectric layer 12 can be transformed from an amorphous film having {HEAD ~ a loose structure} into {TAIL ~ the tenser high k dielectric layer} 12 having a crystalline region 16, as shown in FIG 5 
That is , the high k dielectric layer 12 can be transformed from an amorphous film having { HEAD ~ a loose structure } into { TAIL ~ the tenser high k dielectric layer } 12 having a crystalline region 16 , as shown in FIG 5
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD OTH TAIL TAIL TAIL TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH