A method 4, characterized in that the gas required for {HEAD ~ particle displacement} is identical to {TAIL ~ the gas} used as process gas in the two coating steps 
A method 4 , characterized in that the gas required for { HEAD ~ particle displacement } is identical to { TAIL ~ the gas } used as process gas in the two coating steps
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH OTH TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH