If {HEAD ~ exposure} of all of {TAIL ~ the pattern portions} of the die are successfully completed, then processing is terminated 
If { HEAD ~ exposure } of all of { TAIL ~ the pattern portions } of the die are successfully completed , then processing is terminated
OTH HEAD HEAD HEAD HEAD HEAD OTH OTH OTH TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH