Consequently, in the example illustrated above, the next maintenance of one of the “bottleneck” chambers, i.e., the process chamber 212A, may be required after {HEAD ~ the processing} of {TAIL ~ 3000 substrates} in the chamber 212A 
Consequently , in the example illustrated above , the next maintenance of one of the “ bottleneck ” chambers , i.e. , the process chamber 212A , may be required after { HEAD ~ the processing } of { TAIL ~ 3000 substrates } in the chamber 212A
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD REL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH