In a semiconductor sensor having a membrane structure, the destruction of the membrane caused by the expansion or contraction of a fluid within {TAIL ~ a hollow part} formed under the membrane while the sensor is in {HEAD ~ use} is prevented 
In a semiconductor sensor having a membrane structure , the destruction of the membrane caused by the expansion or contraction of a fluid within { TAIL ~ a hollow part } formed under the membrane while the sensor is in { HEAD ~ use } is prevented
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD OTH OTH