An object of the present invention is to provide a substrate heating apparatus and a manufacturing method for the same which can achieve a uniform temperature distribution for a substrate while maintaining {HEAD ~ the strength} of {TAIL ~ the ceramic base} 
An object of the present invention is to provide a substrate heating apparatus and a manufacturing method for the same which can achieve a uniform temperature distribution for a substrate while maintaining { HEAD ~ the strength } of { TAIL ~ the ceramic base }
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD REL TAIL TAIL TAIL TAIL TAIL TAIL TAIL