{HEAD ~ a wiring layer} provided on and in {TAIL ~ direct contact} with the interlayer dielectric layer, 
{ HEAD ~ a wiring layer } provided on and in { TAIL ~ direct contact } with the interlayer dielectric layer ,
HEAD HEAD HEAD HEAD HEAD HEAD HEAD REL REL OTH OTH TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH