In one aspect, the invention pertains to {HEAD ~ a method} of forming a layer of material on {TAIL ~ a substrate} 
In one aspect , the invention pertains to { HEAD ~ a method } of forming a layer of material on { TAIL ~ a substrate }
OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH OTH OTH OTH OTH OTH TAIL TAIL TAIL TAIL TAIL TAIL