The plasma apparatus of the present invention may be applicable for which the electrode is located close to a portion where {HEAD ~ the electric field intensity} generated by {TAIL ~ the electromagnetic waves} becomes strong in the antenna when the electromagnetic waves are fed to the antenna 
The plasma apparatus of the present invention may be applicable for which the electrode is located close to a portion where { HEAD ~ the electric field intensity } generated by { TAIL ~ the electromagnetic waves } becomes strong in the antenna when the electromagnetic waves are fed to the antenna
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD HEAD REL REL TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH