The next step is forming from the hydrogen gas a plasma having an ion density in the range between 1010 and 1013 cm−3 and an ion energy lower than 30 eV {HEAD ~ The last step} is exposing the workpiece to the plasma for {TAIL ~ a predetermined time} 
The next step is forming from the hydrogen gas a plasma having an ion density in the range between 1010 and 1013 cm−3 and an ion energy lower than 30 eV { HEAD ~ The last step } is exposing the workpiece to the plasma for { TAIL ~ a predetermined time }
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH OTH OTH OTH OTH OTH OTH TAIL TAIL TAIL TAIL TAIL TAIL TAIL