The low K dielectric materials are prepared from PACVD or {HEAD ~ TP} of {TAIL ~ some selected siloxanes} and F containing aromatic compounds 
The low K dielectric materials are prepared from PACVD or { HEAD ~ TP } of { TAIL ~ some selected siloxanes } and F containing aromatic compounds
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD REL TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH