Alternatively, {HEAD ~ a silicon substrate} may be used instead of {TAIL ~ the substrate} and the oxide layer 
Alternatively , { HEAD ~ a silicon substrate } may be used instead of { TAIL ~ the substrate } and the oxide layer
OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH REL REL REL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH