The invention is a process for making {HEAD ~ optical devices} comprising compound semiconductors on substrates containing phosphorus in which a protective layer is put down on the active region prior to {TAIL ~ exposure} of the device to temperatures over about 300 degrees C 
The invention is a process for making { HEAD ~ optical devices } comprising compound semiconductors on substrates containing phosphorus in which a protective layer is put down on the active region prior to { TAIL ~ exposure } of the device to temperatures over about 300 degrees C
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