This invention also relates to a pattern inspection apparatus which uses the image correction technique to inspect {HEAD ~ a pattern image} for {TAIL ~ defects} 
This invention also relates to a pattern inspection apparatus which uses the image correction technique to inspect { HEAD ~ a pattern image } for { TAIL ~ defects }
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD REL TAIL TAIL TAIL TAIL TAIL