In {TAIL ~ some illustrative embodiments}, {HEAD ~ the sequencing} of substrates to the chambers 212A, 212B, i.e., the bottleneck step, may be in an alternating manner in order to maintain 100% of the total capacity of the cluster tool 200 
In { TAIL ~ some illustrative embodiments } , { HEAD ~ the sequencing } of substrates to the chambers 212A , 212B , i.e. , the bottleneck step , may be in an alternating manner in order to maintain 100 % of the total capacity of the cluster tool 200
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