Furthermore, in the example shown, {HEAD ~ a tool configuration} including {TAIL ~ six process chambers}, i.e., two process chambers may be used for three different process steps S1, S2 and S3, wherein it should be appreciated that any other configuration may be used, for instance as described above with reference to FIG 2 
Furthermore , in the example shown , { HEAD ~ a tool configuration } including { TAIL ~ six process chambers } , i.e. , two process chambers may be used for three different process steps S1 , S2 and S3 , wherein it should be appreciated that any other configuration may be used , for instance as described above with reference to FIG 2
OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD REL TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH