The apparatus 6 including a deflecting surface projecting from the outer edge of {TAIL ~ said bowl} inwardly to {HEAD ~ a level} above the top surface of a substrate positioned on said top surface of said chuck member, said deflecting surface having a rounded deflector lip at the inner edge thereof and projecting downward toward said bowl 
The apparatus 6 including a deflecting surface projecting from the outer edge of { TAIL ~ said bowl } inwardly to { HEAD ~ a level } above the top surface of a substrate positioned on said top surface of said chuck member , said deflecting surface having a rounded deflector lip at the inner edge thereof and projecting downward toward said bowl
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH