An apparatus is fabricated with a plurality of semiconductor device substrates and MEMS substrates with micromachined sensors, circuits, transducers, and MEMS devices fabricated on {HEAD ~ the plurality} of {TAIL ~ substrates} 
An apparatus is fabricated with a plurality of semiconductor device substrates and MEMS substrates with micromachined sensors , circuits , transducers , and MEMS devices fabricated on { HEAD ~ the plurality } of { TAIL ~ substrates }
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD REL TAIL TAIL TAIL TAIL TAIL