According to the above described first embodiment of the present invention using {HEAD ~ the damage layer}, since the photo mask is used only once in {TAIL ~ the step} of defining the damage layer , the procedure may be simplified 
According to the above described first embodiment of the present invention using { HEAD ~ the damage layer } , since the photo mask is used only once in { TAIL ~ the step } of defining the damage layer , the procedure may be simplified
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