Self aligned contact openings are formed that extend through the pre metal dielectric film and through {HEAD ~ the barrier layer} in {TAIL ~ the core region} 
Self aligned contact openings are formed that extend through the pre metal dielectric film and through { HEAD ~ the barrier layer } in { TAIL ~ the core region }
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD REL TAIL TAIL TAIL TAIL TAIL TAIL TAIL