A mask blank is provided by forming {HEAD ~ a plurality} of {TAIL ~ films}, including at least a thin film to be a transfer pattern, on a board 
A mask blank is provided by forming { HEAD ~ a plurality } of { TAIL ~ films } , including at least a thin film to be a transfer pattern , on a board
OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD REL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH