Resist composition comprising a siloxane or silsesquioxane polymer having {TAIL ~ silanol groups} in a composition with {HEAD ~ a naphthoquinone compound} 
Resist composition comprising a siloxane or silsesquioxane polymer having { TAIL ~ silanol groups } in a composition with { HEAD ~ a naphthoquinone compound }
OTH OTH OTH OTH OTH OTH OTH OTH OTH TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD