the combination of said annealing {HEAD ~ steps} creating {TAIL ~ a diffusion profile} having a sharp delineation in said structure and permitting a deeper penetration of the diffusion profile compared to the penetration depth obtainable employing exclusively the second of said annealing steps at a given temperature due to the presence of said surface diffusion profile 
the combination of said annealing { HEAD ~ steps } creating { TAIL ~ a diffusion profile } having a sharp delineation in said structure and permitting a deeper penetration of the diffusion profile compared to the penetration depth obtainable employing exclusively the second of said annealing steps at a given temperature due to the presence of said surface diffusion profile
OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD REL TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH