The method for producing a resist pattern of {TAIL ~ the present invention} includes {HEAD ~ steps} of: 
The method for producing a resist pattern of { TAIL ~ the present invention } includes { HEAD ~ steps } of :
OTH OTH OTH OTH OTH OTH OTH OTH TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH HEAD HEAD HEAD HEAD HEAD OTH OTH