The FIG 1 embodiment includes a liquid jet type X ray generating device 1 located at the most upstream portion of {HEAD ~ the depicted optical system} of {TAIL ~ the exposure apparatus} 
The FIG 1 embodiment includes a liquid jet type X ray generating device 1 located at the most upstream portion of { HEAD ~ the depicted optical system } of { TAIL ~ the exposure apparatus }
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD HEAD REL TAIL TAIL TAIL TAIL TAIL TAIL TAIL