{TAIL ~ The intermediate layer} is mainly composed of Ru, {HEAD ~ Si}, Ge or carbon, or is a mixed layer including Ru, Si, or Ge mixed with at least one of carbon, nitrogen or oxygen, with a composition gradient across its thickness 
{ TAIL ~ The intermediate layer } is mainly composed of Ru , { HEAD ~ Si } , Ge or carbon , or is a mixed layer including Ru , Si , or Ge mixed with at least one of carbon , nitrogen or oxygen , with a composition gradient across its thickness
TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH