Alternatively, each nozzle may have its own dedicated supply line connected to {HEAD ~ a different respective source gas supply}, for supplying {TAIL ~ one or more types} of source gas to the chamber if required or desired 
Alternatively , each nozzle may have its own dedicated supply line connected to { HEAD ~ a different respective source gas supply } , for supplying { TAIL ~ one or more types } of source gas to the chamber if required or desired
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD HEAD HEAD HEAD OTH REL REL TAIL TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH