In {HEAD ~ the embodiment}, a pressure sensor 56 is provided as an evaporation detector which detects the pressure inside the furnace 11, which is to input to the controller 20 not shown in FIG 7 as {TAIL ~ a detected signal} of the oxygen in proceeding of evaporation 
In { HEAD ~ the embodiment } , a pressure sensor 56 is provided as an evaporation detector which detects the pressure inside the furnace 11 , which is to input to the controller 20 not shown in FIG 7 as { TAIL ~ a detected signal } of the oxygen in proceeding of evaporation
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