{HEAD ~ The method} 1 wherein the polishing pad has {TAIL ~ a density} of about 0.3 g/cm 3 to about 1.5 g/cm 3 
{ HEAD ~ The method } 1 wherein the polishing pad has { TAIL ~ a density } of about 0.3 g / cm 3 to about 1.5 g / cm 3
HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH OTH OTH OTH OTH TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH