Next, channels and bodies 150 are formed on the first substrate 100 in {HEAD ~ accordance} with {TAIL ~ the macro porous silicon process} described for the previous exemplary embodiment, so a micro needle array is formed 
Next , channels and bodies 150 are formed on the first substrate 100 in { HEAD ~ accordance } with { TAIL ~ the macro porous silicon process } described for the previous exemplary embodiment , so a micro needle array is formed
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD REL TAIL TAIL TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH