The method 10, wherein, in step , {HEAD ~ the average thickness} of the Ta layer is set to about 0.1 Å or more and {TAIL ~ about 0.3 Å} or less 
The method 10 , wherein , in step , { HEAD ~ the average thickness } of the Ta layer is set to about 0.1 Å or more and { TAIL ~ about 0.3 Å } or less
OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH OTH OTH REL REL REL OTH OTH OTH OTH OTH OTH TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH