Further, it is possible to improve a throughput of {HEAD ~ the apparatus} in {TAIL ~ resist processing} 
in
Further , it is possible to improve a throughput of { HEAD ~ the apparatus } in { TAIL ~ resist processing }
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD REL TAIL TAIL TAIL TAIL TAIL TAIL