Further, {HEAD ~ micro passageways} are formed that penetrate {TAIL ~ the first surface} of the substrate from the second surface by a porous silicon process, and integrates the micro passageways, thereby forming the bodies and channels of micro needles 
penetrate
Further , { HEAD ~ micro passageways } are formed that penetrate { TAIL ~ the first surface } of the substrate from the second surface by a porous silicon process , and integrates the micro passageways , thereby forming the bodies and channels of micro needles
OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH OTH REL TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH