{HEAD ~ Intermetal dielectric} and interlevel dielectric that have {TAIL ~ dielectric constants} ranging from 2.0 to 2.6 are prepared from plasma or photon assisted CVD or transport polymerization  
have
{ HEAD ~ Intermetal dielectric } and interlevel dielectric that have { TAIL ~ dielectric constants } ranging from 2.0 to 2.6 are prepared from plasma or photon assisted CVD or transport polymerization
HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH OTH OTH REL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH