RF power supplies 60 and 70, {HEAD ~ gas supply system} 80, vacuum pump system 90 and workpiece handling and robotic system 94 are all electronically connected to and controlled by {TAIL ~ a main control system} 100 
are electronically connected to
RF power supplies 60 and 70 , { HEAD ~ gas supply system } 80 , vacuum pump system 90 and workpiece handling and robotic system 94 are all electronically connected to and controlled by { TAIL ~ a main control system } 100
OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH REL OTH REL REL REL OTH OTH OTH TAIL TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH