Consequently, {HEAD ~ the reproducibility} of treatment of semiconductor substrate with {TAIL ~ chemical solution} can be enhanced, and improvements in yield and reliability of semiconductor device can be expected 
with
Consequently , { HEAD ~ the reproducibility } of treatment of semiconductor substrate with { TAIL ~ chemical solution } can be enhanced , and improvements in yield and reliability of semiconductor device can be expected
OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH OTH OTH OTH REL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH