The process 1, wherein {HEAD ~ the deposited polysilicon granules} have {TAIL ~ a markedly spherical shape} with sphericity values within the range of 0.85 to 1 
have
The process 1 , wherein { HEAD ~ the deposited polysilicon granules } have { TAIL ~ a markedly spherical shape } with sphericity values within the range of 0.85 to 1
OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD HEAD REL TAIL TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH