For instance, the corresponding metrics, i.e., the remaining wafer processing capability, may be provided in {HEAD ~ the form} of {TAIL ~ a number} of substrates that can be processed until the next maintenance activity is required 
of
For instance , the corresponding metrics , i.e. , the remaining wafer processing capability , may be provided in { HEAD ~ the form } of { TAIL ~ a number } of substrates that can be processed until the next maintenance activity is required
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD REL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH