Thereafter, heat treatment of high temperature and {HEAD ~ short time} by the RTA process is applied to thereby form {TAIL ~ diffused layers} 410, 411 of the source and drain regions 
Thereafter , heat treatment of high temperature and { HEAD ~ short time } by the RTA process is applied to thereby form { TAIL ~ diffused layers } 410 , 411 of the source and drain regions
OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH OTH OTH OTH OTH OTH OTH OTH TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH