Thus, {HEAD ~ the overlap} of {TAIL ~ the deposition vapor} from each electrode assembly 52 contributes to the uniformity of the coating 
of
Thus , { HEAD ~ the overlap } of { TAIL ~ the deposition vapor } from each electrode assembly 52 contributes to the uniformity of the coating
OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD REL TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH