A uniform dielectric layer can thus be provided because the sidewalls of {HEAD ~ the contact hole} 120 are not on {TAIL ~ the surface} of the lower capacitor electrode 116 
A uniform dielectric layer can thus be provided because the sidewalls of { HEAD ~ the contact hole } 120 are not on { TAIL ~ the surface } of the lower capacitor electrode 116
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH OTH OTH TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH