System and {HEAD ~ method} to predict {TAIL ~ the state} of a process controller in a semiconductor manufacturing facility 
to predict
System and { HEAD ~ method } to predict { TAIL ~ the state } of a process controller in a semiconductor manufacturing facility
OTH OTH HEAD HEAD HEAD HEAD HEAD REL REL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH