{HEAD ~ Containers} 51, 52, and 53 of nitrogen, phosphine , and silane , respectively, are coupled to {TAIL ~ tube} 37 via pipe 39 under the control of flow controllers 54, 55, and 56, respectively 
are coupled to
{ HEAD ~ Containers } 51 , 52 , and 53 of nitrogen , phosphine , and silane , respectively , are coupled to { TAIL ~ tube } 37 via pipe 39 under the control of flow controllers 54 , 55 , and 56 , respectively
HEAD HEAD HEAD HEAD HEAD OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH REL REL REL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH