For this reason, a surface layer or a mixing layer formed as {HEAD ~ a result} of an interaction between the resist pattern thickening material and the resist pattern is efficiently formed on the surface of the resist pattern in a state where the resist pattern constitutes {TAIL ~ the innerlayer} thereof 
For this reason , a surface layer or a mixing layer formed as { HEAD ~ a result } of an interaction between the resist pattern thickening material and the resist pattern is efficiently formed on the surface of the resist pattern in a state where the resist pattern constitutes { TAIL ~ the innerlayer } thereof
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH TAIL TAIL TAIL TAIL TAIL TAIL OTH