Components referred to herein can encompass any and all components that, from a performance standpoint, are essential to replace, including {TAIL ~ any} of {HEAD ~ the constituent components} of a light source device for an exposure apparatus, an illumination optical system, and a projection optical system 
Components referred to herein can encompass any and all components that , from a performance standpoint , are essential to replace , including { TAIL ~ any } of { HEAD ~ the constituent components } of a light source device for an exposure apparatus , an illumination optical system , and a projection optical system
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH TAIL TAIL TAIL TAIL TAIL OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH