The nitride semiconductor wafer 1, wherein Δθ varies non continuously within {TAIL ~ an angular range} of {HEAD ~ greater than 0.05°} and less than 1° 
The nitride semiconductor wafer 1 , wherein Δθ varies non continuously within { TAIL ~ an angular range } of { HEAD ~ greater than 0.05 ° } and less than 1 °
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH OTH OTH OTH