The deep lightly doped P− regions 64 were ion implanted with {TAIL ~ a dose} of {HEAD ~ boron difluoride}, BF2 dopant from about 1 E 12 ions/cm2 to about 1 E 13 ions/cm2 at an energy from about 35 keV to about 70 keV 
The deep lightly doped P− regions 64 were ion implanted with { TAIL ~ a dose } of { HEAD ~ boron difluoride } , BF2 dopant from about 1 E 12 ions / cm2 to about 1 E 13 ions / cm2 at an energy from about 35 keV to about 70 keV
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH TAIL TAIL TAIL TAIL TAIL TAIL OTH HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH