{HEAD ~ The thus thickened resist pattern} is uniformly thickened with {TAIL ~ the resist pattern thickening material} 
is uniformly thickened with
{ HEAD ~ The thus thickened resist pattern } is uniformly thickened with { TAIL ~ the resist pattern thickening material }
HEAD HEAD HEAD HEAD HEAD HEAD HEAD HEAD HEAD REL REL REL REL TAIL TAIL TAIL TAIL TAIL TAIL TAIL TAIL TAIL