The second alignment system 400 may be formed in {HEAD ~ the interior} or {TAIL ~ exterior} of the vacuum processing chamber 110 
The second alignment system 400 may be formed in { HEAD ~ the interior } or { TAIL ~ exterior } of the vacuum processing chamber 110
OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD OTH TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH