To attain this object, the present invention provides a method that comprises cleaning a gas in contact with a substrate by {HEAD ~ dust control means} and adsorption and adsorption means so that the concentration of fine particles in said gas is reduced to class 1000 or below whereas the concentrations of {TAIL ~ non methane hydrocarbons} are reduced to 0.2 ppm or below and thereafter exposing the surface of the substrate to said gas 
To attain this object , the present invention provides a method that comprises cleaning a gas in contact with a substrate by { HEAD ~ dust control means } and adsorption and adsorption means so that the concentration of fine particles in said gas is reduced to class 1000 or below whereas the concentrations of { TAIL ~ non methane hydrocarbons } are reduced to 0.2 ppm or below and thereafter exposing the surface of the substrate to said gas
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