In {HEAD ~ an annealing step} by {TAIL ~ laser light illumination}, laser light is selectively applied to a semiconductor thin film by partially masking it 
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In { HEAD ~ an annealing step } by { TAIL ~ laser light illumination } , laser light is selectively applied to a semiconductor thin film by partially masking it
OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD REL TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH