Therefore, a space pattern of {TAIL ~ resist} formed with the thickened resist pattern has a fine structure, exceeding the exposure limit of light sources of {HEAD ~ an available exposure device} 
Therefore , a space pattern of { TAIL ~ resist } formed with the thickened resist pattern has a fine structure , exceeding the exposure limit of light sources of { HEAD ~ an available exposure device }
OTH OTH OTH OTH OTH OTH TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD HEAD