A transport space for transporting a substrate without contamination of {HEAD ~ the surface} of {TAIL ~ the substrate} retained therein, which comprises: 
of
A transport space for transporting a substrate without contamination of { HEAD ~ the surface } of { TAIL ~ the substrate } retained therein , which comprises :
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD REL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH