The process 1, wherein the deposited polysilicon granules have {HEAD ~ a markedly spherical shape} with {TAIL ~ sphericity values} within the range of 0.85 to 1 
with
The process 1 , wherein the deposited polysilicon granules have { HEAD ~ a markedly spherical shape } with { TAIL ~ sphericity values } within the range of 0.85 to 1
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD HEAD REL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH