{HEAD ~ A hydrogenated thin film} is formed in a controlled vacuum on {TAIL ~ a substrate} by evaporating one or more solid materials and passing the resulting vapor and a hydrogen containing gas into a space between two electrodes 
{ HEAD ~ A hydrogenated thin film } is formed in a controlled vacuum on { TAIL ~ a substrate } by evaporating one or more solid materials and passing the resulting vapor and a hydrogen containing gas into a space between two electrodes
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