{HEAD ~ The present invention} generally relates to {TAIL ~ apparatus} and methods of transferring and supporting substrates in a batch processing chamber 
generally relates to
{ HEAD ~ The present invention } generally relates to { TAIL ~ apparatus } and methods of transferring and supporting substrates in a batch processing chamber
HEAD HEAD HEAD HEAD HEAD HEAD HEAD REL REL REL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH