In {TAIL ~ another embodiment}, {HEAD ~ a substrate boat} having removable substrate holder is configured to provide susceptors without dramatically increasing pumping volume 
In
In { TAIL ~ another embodiment } , { HEAD ~ a substrate boat } having removable substrate holder is configured to provide susceptors without dramatically increasing pumping volume
REL TAIL TAIL TAIL TAIL TAIL TAIL OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH