{HEAD ~ A protective structure} is produced by providing {TAIL ~ a semiconductor substrate} with a doping of a first conductivity type 
is produced by providing
{ HEAD ~ A protective structure } is produced by providing { TAIL ~ a semiconductor substrate } with a doping of a first conductivity type
HEAD HEAD HEAD HEAD HEAD HEAD HEAD REL REL REL REL TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH