In one embodiment, {HEAD ~ a compressed substrate boat} is configured to reduce {TAIL ~ pumping volume} in a batch processing chamber 
is configured to reduce
In one embodiment , { HEAD ~ a compressed substrate boat } is configured to reduce { TAIL ~ pumping volume } in a batch processing chamber
OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD HEAD REL REL REL REL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH