Then, the treating abilities of {TAIL ~ chemical solution} when the components and ultrapure water are supplemented, are calculated for various cases of {HEAD ~ amounts} supplemented 
Then , the treating abilities of { TAIL ~ chemical solution } when the components and ultrapure water are supplemented , are calculated for various cases of { HEAD ~ amounts } supplemented
OTH OTH OTH OTH OTH OTH TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD OTH