A supply 94 of deposition and carrier gases is in {TAIL ~ fluid communication} with {HEAD ~ the gas distribution assembly} 46 via a mixing manifold 96 
A supply 94 of deposition and carrier gases is in { TAIL ~ fluid communication } with { HEAD ~ the gas distribution assembly } 46 via a mixing manifold 96
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH TAIL TAIL TAIL TAIL TAIL TAIL OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH OTH OTH OTH OTH