wherein at least a portion of the surface on the periphery of the metal wiring has {HEAD ~ a region} made of {TAIL ~ a material} comprising copper as a main ingredient, 
made of
wherein at least a portion of the surface on the periphery of the metal wiring has { HEAD ~ a region } made of { TAIL ~ a material } comprising copper as a main ingredient ,
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD REL REL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH