Principles of the invention provide {HEAD ~ techniques} for {TAIL ~ the deposition} of hydrogenated thin films such as hydrogenated silicon 
for
Principles of the invention provide { HEAD ~ techniques } for { TAIL ~ the deposition } of hydrogenated thin films such as hydrogenated silicon
OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD REL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH