{TAIL ~ The thin film plate} 12 is formed by {HEAD ~ patterning} of a silicon nitride film 
{ TAIL ~ The thin film plate } 12 is formed by { HEAD ~ patterning } of a silicon nitride film
TAIL TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD OTH OTH OTH OTH OTH