{HEAD ~ The method} 11, wherein {TAIL ~ the at least one IMD layer} comprises at least one of fluorinated silicate glass and carbon doped silicon dioxide 
wherein
{ HEAD ~ The method } 11 , wherein { TAIL ~ the at least one IMD layer } comprises at least one of fluorinated silicate glass and carbon doped silicon dioxide
HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH REL TAIL TAIL TAIL TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH