An aqueous dispersion for chemical mechanical polishing according to above, characterized by being used for polishing of {HEAD ~ a polishing surface} with {TAIL ~ a tungsten film} 
with
An aqueous dispersion for chemical mechanical polishing according to above , characterized by being used for polishing of { HEAD ~ a polishing surface } with { TAIL ~ a tungsten film }
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD REL TAIL TAIL TAIL TAIL TAIL TAIL TAIL