{HEAD ~ The inspection area} of {TAIL ~ the wafer} is limited by the size of the e beam diameter and the detected X rays are limited by the number of X rays emitted from the excited volume of sample  
of
{ HEAD ~ The inspection area } of { TAIL ~ the wafer } is limited by the size of the e beam diameter and the detected X rays are limited by the number of X rays emitted from the excited volume of sample
HEAD HEAD HEAD HEAD HEAD HEAD HEAD REL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH