{HEAD ~ The present invention} generally relates to apparatus and methods of transferring and supporting substrates in {TAIL ~ a batch processing chamber} 
{ HEAD ~ The present invention } generally relates to apparatus and methods of transferring and supporting substrates in { TAIL ~ a batch processing chamber }
HEAD HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH TAIL TAIL TAIL TAIL TAIL TAIL TAIL TAIL