the upper electrode includes {TAIL ~ a vertical portion} extending in parallel to the vertical direction and {HEAD ~ a plurality} of horizontal portions extending in parallel to a surface of the semiconductor substrate, 
the upper electrode includes { TAIL ~ a vertical portion } extending in parallel to the vertical direction and { HEAD ~ a plurality } of horizontal portions extending in parallel to a surface of the semiconductor substrate ,
OTH OTH OTH OTH TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH