{TAIL ~ A third thin film polysilicon layer} comprising {HEAD ~ a storage plane} overlies the third dielectric layer 
{ TAIL ~ A third thin film polysilicon layer } comprising { HEAD ~ a storage plane } overlies the third dielectric layer
TAIL TAIL TAIL TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH OTH OTH OTH