Subsequently, a first annealing process is performed, and {TAIL ~ a process temperature} of the first annealing process is substantially smaller than {HEAD ~ the crystalline temperature} 
Subsequently , a first annealing process is performed , and { TAIL ~ a process temperature } of the first annealing process is substantially smaller than { HEAD ~ the crystalline temperature }
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD