Principles of the invention provide techniques for {HEAD ~ the deposition} of {TAIL ~ hydrogenated thin films} such as hydrogenated silicon 
of
Principles of the invention provide techniques for { HEAD ~ the deposition } of { TAIL ~ hydrogenated thin films } such as hydrogenated silicon
OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD REL TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH