The substrate heating apparatus 3, wherein the ceramic base comprises at least one of aluminum nitride, silicon nitride, silicon carbide and sialon, and {HEAD ~ the cylindrical member} comprises {TAIL ~ the same material} as the ceramic base 
comprises
The substrate heating apparatus 3 , wherein the ceramic base comprises at least one of aluminum nitride , silicon nitride , silicon carbide and sialon , and { HEAD ~ the cylindrical member } comprises { TAIL ~ the same material } as the ceramic base
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD REL TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH