a second silicate glass layer as a second solid phase diffusion source containing an impurity of the first conductivity type, said {HEAD ~ second silicate glass layer} being provided on {TAIL ~ both sides} of said second gate electrode 
provided on
a second silicate glass layer as a second solid phase diffusion source containing an impurity of the first conductivity type , said { HEAD ~ second silicate glass layer } being provided on { TAIL ~ both sides } of said second gate electrode
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD HEAD OTH REL REL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH