{HEAD ~ A method} 1, wherein the ion density is greater than 1012 cm−3 and the ion energy is between {TAIL ~ 10 eV} and 15 eV in said forming 
{ HEAD ~ A method } 1 , wherein the ion density is greater than 1012 cm−3 and the ion energy is between { TAIL ~ 10 eV } and 15 eV in said forming
HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH