A first dopant zone with {HEAD ~ a doping} of {TAIL ~ a first conductivity type} is formed in the first region of the semiconductor layer above the buried layer 
of
A first dopant zone with { HEAD ~ a doping } of { TAIL ~ a first conductivity type } is formed in the first region of the semiconductor layer above the buried layer
OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD REL TAIL TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH