{TAIL ~ The wiring board} 16, wherein the via plug fills an entirety of the through opening such that side surfaces of the via plug directly abut {HEAD ~ the insulating layer}, and the via plug directly connects to the back surface of the first electrode 
{ TAIL ~ The wiring board } 16 , wherein the via plug fills an entirety of the through opening such that side surfaces of the via plug directly abut { HEAD ~ the insulating layer } , and the via plug directly connects to the back surface of the first electrode
TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH