{HEAD ~ The invention} is directed to {TAIL ~ a process} whereby layers of borophosphosilicate glass are deposited at low pressure on a plurality of silicon wafers located within a process tube 
is directed to
{ HEAD ~ The invention } is directed to { TAIL ~ a process } whereby layers of borophosphosilicate glass are deposited at low pressure on a plurality of silicon wafers located within a process tube
HEAD HEAD HEAD HEAD HEAD HEAD REL REL REL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH