{HEAD ~ The method} includes controlling acceleration voltage of electron beam and electric field on a sample, beam current, beam diameter, {TAIL ~ image detection rate}, image dimensions, precharge, discharge, or a combination of them, exposing an object to the electron beam, detecting in a sensor a physical change generated from the object, and inspecting or measuring the object on the basis of a signal representing the detected physical change 
includes controlling
{ HEAD ~ The method } includes controlling acceleration voltage of electron beam and electric field on a sample , beam current , beam diameter , { TAIL ~ image detection rate } , image dimensions , precharge , discharge , or a combination of them , exposing an object to the electron beam , detecting in a sensor a physical change generated from the object , and inspecting or measuring the object on the basis of a signal representing the detected physical change
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