In the embodiment, a pressure sensor 56 is provided as an evaporation detector which detects the pressure inside the furnace 11, which is to input to the controller 20 not shown in FIG 7 as a detected signal of the oxygen in {HEAD ~ proceeding} of {TAIL ~ evaporation} 
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In the embodiment , a pressure sensor 56 is provided as an evaporation detector which detects the pressure inside the furnace 11 , which is to input to the controller 20 not shown in FIG 7 as a detected signal of the oxygen in { HEAD ~ proceeding } of { TAIL ~ evaporation }
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