Subsequently, a first annealing process is performed, and {HEAD ~ a process temperature} of the first annealing process is substantially smaller than {TAIL ~ the crystalline temperature} 
is substantially smaller than
Subsequently , a first annealing process is performed , and { HEAD ~ a process temperature } of the first annealing process is substantially smaller than { TAIL ~ the crystalline temperature }
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH OTH OTH OTH REL REL REL REL TAIL TAIL TAIL TAIL TAIL TAIL TAIL