The apparatus comprises {HEAD ~ air injection modules}, which serve to float a substrate, and can be independently attached to or detached from {TAIL ~ the substrate transferring apparatus} 
independently attached to
The apparatus comprises { HEAD ~ air injection modules } , which serve to float a substrate , and can be independently attached to or detached from { TAIL ~ the substrate transferring apparatus }
OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH REL REL REL OTH OTH OTH TAIL TAIL TAIL TAIL TAIL TAIL TAIL TAIL