First, {HEAD ~ the backside} 96 of the silicon substrate 80 is coated with {TAIL ~ a suitable contact material} that has good electrical conductivity for electrochemical etching processes 
is coated with
First , { HEAD ~ the backside } 96 of the silicon substrate 80 is coated with { TAIL ~ a suitable contact material } that has good electrical conductivity for electrochemical etching processes
OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH OTH OTH OTH OTH REL REL REL TAIL TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH