the preprocessing module includes an elevator and an elevator control capable of cooperating with the operation of the transport mechanism to position the rack to receive batches of {HEAD ~ wafers} of {TAIL ~ varying numbers} of wafers without empty positions therebetween 
of
the preprocessing module includes an elevator and an elevator control capable of cooperating with the operation of the transport mechanism to position the rack to receive batches of { HEAD ~ wafers } of { TAIL ~ varying numbers } of wafers without empty positions therebetween
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD REL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH