More particularly, the present invention relates to {HEAD ~ a micro machined preconcentrator and inlet sample heater} with a three dimensional structure, {TAIL ~ integral heating}, and a semiconductor substrate 
with
More particularly , the present invention relates to { HEAD ~ a micro machined preconcentrator and inlet sample heater } with a three dimensional structure , { TAIL ~ integral heating } , and a semiconductor substrate
OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD HEAD HEAD HEAD HEAD HEAD REL OTH OTH OTH OTH OTH TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH