The method 10, wherein, in step , {TAIL ~ the average thickness} of {HEAD ~ the Ta layer} is set to about 0.1 Å or more and about 0.3 Å or less 
The method 10 , wherein , in step , { TAIL ~ the average thickness } of { HEAD ~ the Ta layer } is set to about 0.1 Å or more and about 0.3 Å or less
OTH OTH OTH OTH OTH OTH OTH OTH OTH TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH