The aqueous dispersion for CMP of the invention is characterized by comprising {TAIL ~ an abrasive, water} and {HEAD ~ a heteropolyacid} 
The aqueous dispersion for CMP of the invention is characterized by comprising { TAIL ~ an abrasive , water } and { HEAD ~ a heteropolyacid }
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH TAIL TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH HEAD HEAD HEAD HEAD HEAD HEAD