The apparatus 6 including a deflecting surface projecting from the outer edge of said bowl inwardly to a level above the top surface of a substrate positioned on said top surface of said chuck member, {HEAD ~ said deflecting surface} having {TAIL ~ a rounded deflector lip} at the inner edge thereof and projecting downward toward said bowl 
having
The apparatus 6 including a deflecting surface projecting from the outer edge of said bowl inwardly to a level above the top surface of a substrate positioned on said top surface of said chuck member , { HEAD ~ said deflecting surface } having { TAIL ~ a rounded deflector lip } at the inner edge thereof and projecting downward toward said bowl
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