{HEAD ~ Intermetal dielectric} and {TAIL ~ interlevel dielectric} that have dielectric constants ranging from 2.0 to 2.6 are prepared from plasma or photon assisted CVD or transport polymerization  
{ HEAD ~ Intermetal dielectric } and { TAIL ~ interlevel dielectric } that have dielectric constants ranging from 2.0 to 2.6 are prepared from plasma or photon assisted CVD or transport polymerization
HEAD HEAD HEAD HEAD HEAD HEAD OTH TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH