Preferably, the tube pressure is held at 175 millitorr to 200 millitorr during {HEAD ~ deposition} of {TAIL ~ the borophosphosilicate glass film} 
of
Preferably , the tube pressure is held at 175 millitorr to 200 millitorr during { HEAD ~ deposition } of { TAIL ~ the borophosphosilicate glass film }
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD REL TAIL TAIL TAIL TAIL TAIL TAIL TAIL TAIL