After annealing {HEAD ~ the concentration} of boron, {TAIL ~ B}, dopant in the regions 64 was from about 1 E 17 atoms/cm3 to about 1 E 18 atoms/cm3 
of
After annealing { HEAD ~ the concentration } of boron , { TAIL ~ B } , dopant in the regions 64 was from about 1 E 17 atoms / cm3 to about 1 E 18 atoms / cm3
OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD REL OTH OTH TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH