A precision system 9, wherein {TAIL ~ said fine displacing means} comprises {HEAD ~ a piezo electric element} 
A precision system 9 , wherein { TAIL ~ said fine displacing means } comprises { HEAD ~ a piezo electric element }
OTH OTH OTH OTH OTH OTH TAIL TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD HEAD