Because the contact hole is wider than {TAIL ~ the lower capacitor electrode}, unevenness of the surface of the lower capacitor electrode can be reduced thus allowing {HEAD ~ the fabrication} of a thin uniform dielectric layer 
Because the contact hole is wider than { TAIL ~ the lower capacitor electrode } , unevenness of the surface of the lower capacitor electrode can be reduced thus allowing { HEAD ~ the fabrication } of a thin uniform dielectric layer
OTH OTH OTH OTH OTH OTH OTH TAIL TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH OTH OTH OTH OTH