Resist composition comprising a siloxane or silsesquioxane polymer having silanol groups in {HEAD ~ a composition} with {TAIL ~ a naphthoquinone compound} 
with
Resist composition comprising a siloxane or silsesquioxane polymer having silanol groups in { HEAD ~ a composition } with { TAIL ~ a naphthoquinone compound }
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD REL TAIL TAIL TAIL TAIL TAIL TAIL TAIL