{HEAD ~ The apparatus} includes {TAIL ~ a processing chamber} having a plurality of source gas supply nozzles, the lengths of the nozzles being different from one another so as to uniformly supply a source gas 
includes
{ HEAD ~ The apparatus } includes { TAIL ~ a processing chamber } having a plurality of source gas supply nozzles , the lengths of the nozzles being different from one another so as to uniformly supply a source gas
HEAD HEAD HEAD HEAD HEAD HEAD REL TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH