Upon rotation of {TAIL ~ the substrate} about {HEAD ~ any spatial axis}, the masses are subjected to deflections caused by Corolis forces that are detected by sensor elements 
Upon rotation of { TAIL ~ the substrate } about { HEAD ~ any spatial axis } , the masses are subjected to deflections caused by Corolis forces that are detected by sensor elements
OTH OTH OTH TAIL TAIL TAIL TAIL TAIL TAIL OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH