At least one other mass is configured to deflect radially to the z axis in a x y plane parallel to {HEAD ~ the plane} of {TAIL ~ the substrate} 
of
At least one other mass is configured to deflect radially to the z axis in a x y plane parallel to { HEAD ~ the plane } of { TAIL ~ the substrate }
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD REL TAIL TAIL TAIL TAIL TAIL TAIL