In particular {HEAD ~ the present invention} relates to {TAIL ~ a flys eye integrator} suitable for use in a lithographic apparatus or an illuminator for a lithographic apparatus 
relates to
In particular { HEAD ~ the present invention } relates to { TAIL ~ a flys eye integrator } suitable for use in a lithographic apparatus or an illuminator for a lithographic apparatus
OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD REL REL TAIL TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH