According to the present invention, one processing fluid supplied from {HEAD ~ the inside fluid supplier} can sweep away another processing fluid supplied from the outside fluid supplier, in a direction apart from the center of {TAIL ~ the substrate} 
According to the present invention , one processing fluid supplied from { HEAD ~ the inside fluid supplier } can sweep away another processing fluid supplied from the outside fluid supplier , in a direction apart from the center of { TAIL ~ the substrate }
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH TAIL TAIL TAIL TAIL TAIL TAIL