In the processing space supplied with the solvent, evaporation of {HEAD ~ the solvent} from {TAIL ~ the resist solution} is suppressed 
In the processing space supplied with the solvent , evaporation of { HEAD ~ the solvent } from { TAIL ~ the resist solution } is suppressed
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD OTH TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH