a first silicate glass layer as a first solid phase diffusion source containing an impurity of a first conductivity type, said {HEAD ~ first silicate glass layer} being provided on {TAIL ~ both sides} of said first gate electrode 
provided on
a first silicate glass layer as a first solid phase diffusion source containing an impurity of a first conductivity type , said { HEAD ~ first silicate glass layer } being provided on { TAIL ~ both sides } of said first gate electrode
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD HEAD OTH REL REL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH