creating a mask on the dielectric layer, the mask comprising an opening, the shape of which determines {HEAD ~ a lateral shape} of {TAIL ~ the recess}; and 
of
creating a mask on the dielectric layer , the mask comprising an opening , the shape of which determines { HEAD ~ a lateral shape } of { TAIL ~ the recess } ; and
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD REL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH