{HEAD ~ The substrate} is bombarded with {TAIL ~ the ionized particles} to form carbon nitrides with variable / ratios, referred to as CNx 
is bombarded with
{ HEAD ~ The substrate } is bombarded with { TAIL ~ the ionized particles } to form carbon nitrides with variable / ratios , referred to as CNx
HEAD HEAD HEAD HEAD HEAD HEAD REL REL REL TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH