Method and apparatus for processing a workpiece in {HEAD ~ a chemical bath liquid} contained in {TAIL ~ a liquid container} 
contained in
Method and apparatus for processing a workpiece in { HEAD ~ a chemical bath liquid } contained in { TAIL ~ a liquid container }
OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD HEAD REL REL TAIL TAIL TAIL TAIL TAIL TAIL TAIL