{HEAD ~ The fluid suppliers} 61, 62, 63 are arranged in {TAIL ~ a direction} extending from the circumference of the wafer W to its inside 
are arranged in
{ HEAD ~ The fluid suppliers } 61 , 62 , 63 are arranged in { TAIL ~ a direction } extending from the circumference of the wafer W to its inside
HEAD HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH OTH OTH OTH REL REL REL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH