{HEAD ~ The purpose} of the transfer chamber is to prevent {TAIL ~ the workpiece} from being exposed to contaminants after it has been cleaned in the first vacuum processing chamber 
is to prevent
{ HEAD ~ The purpose } of the transfer chamber is to prevent { TAIL ~ the workpiece } from being exposed to contaminants after it has been cleaned in the first vacuum processing chamber
HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH OTH OTH REL REL REL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH