The method comprises providing a gate structure over the semiconductor substrate, wherein a dopant material is implanted at {HEAD ~ an angle} around {TAIL ~ the gate structure} to form a halo structure in a source/drain region of the substrate and underlying a portion of the gate structure 
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The method comprises providing a gate structure over the semiconductor substrate , wherein a dopant material is implanted at { HEAD ~ an angle } around { TAIL ~ the gate structure } to form a halo structure in a source / drain region of the substrate and underlying a portion of the gate structure
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD REL TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH