The next step is forming from the hydrogen gas a plasma having {TAIL ~ an ion density} in the range between 1010 and 1013 cm−3 and {HEAD ~ an ion energy} lower than 30 eV The last step is exposing the workpiece to the plasma for a predetermined time 
The next step is forming from the hydrogen gas a plasma having { TAIL ~ an ion density } in the range between 1010 and 1013 cm−3 and { HEAD ~ an ion energy } lower than 30 eV The last step is exposing the workpiece to the plasma for a predetermined time
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH