A gas coming into contact with a base material or substrate is purified by {TAIL ~ dust} removing apparatus and adsorption and absorption apparatus so that the concentration of fine particles in {HEAD ~ the gas} is below class 1,000 and a non methane hydrocarbon concentration is below 0.2 ppm 
A gas coming into contact with a base material or substrate is purified by { TAIL ~ dust } removing apparatus and adsorption and absorption apparatus so that the concentration of fine particles in { HEAD ~ the gas } is below class 1,000 and a non methane hydrocarbon concentration is below 0.2 ppm
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