{HEAD ~ A method} of forming a compound film includes the steps of preparing a source material, depositing the source material on a base to form a precursor film, and heating the precursor film in {TAIL ~ a suitable atmosphere} to form a film 
{ HEAD ~ A method } of forming a compound film includes the steps of preparing a source material , depositing the source material on a base to form a precursor film , and heating the precursor film in { TAIL ~ a suitable atmosphere } to form a film
HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH