Resist {HEAD ~ composition} comprising {TAIL ~ a siloxane or silsesquioxane polymer} having silanol groups in a composition with a naphthoquinone compound 
comprising
Resist { HEAD ~ composition } comprising { TAIL ~ a siloxane or silsesquioxane polymer } having silanol groups in a composition with a naphthoquinone compound
OTH HEAD HEAD HEAD HEAD HEAD REL TAIL TAIL TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH