depositing {TAIL ~ a thin cap layer} on said diffusion source layer to prevent the outdiffusion of {HEAD ~ elemental constituents} comprising said structure, 
depositing { TAIL ~ a thin cap layer } on said diffusion source layer to prevent the outdiffusion of { HEAD ~ elemental constituents } comprising said structure ,
OTH TAIL TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH OTH OTH