The method 13, further comprising alternating cycles of surface processing and {HEAD ~ examination} of the exposed sample surface using a scanning electron microscope, a focused ion beam microscope, or {TAIL ~ an atomic force microscope} in situ and without opening the vacuum chamber 
using
The method 13 , further comprising alternating cycles of surface processing and { HEAD ~ examination } of the exposed sample surface using a scanning electron microscope , a focused ion beam microscope , or { TAIL ~ an atomic force microscope } in situ and without opening the vacuum chamber
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD OTH OTH OTH OTH OTH REL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH TAIL TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH