After annealing {HEAD ~ the concentration} of boron, B, dopant in the regions 64 was from about 1 E 17 atoms/cm3 to {TAIL ~ about 1 E} 18 atoms/cm3 
to
After annealing { HEAD ~ the concentration } of boron , B , dopant in the regions 64 was from about 1 E 17 atoms / cm3 to { TAIL ~ about 1 E } 18 atoms / cm3
OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH REL TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH