In some embodiments {HEAD ~ the top} of the processing chamber is removable allowing {TAIL ~ users} to remove either pedestals or heater assemblies 
is removable allowing
In some embodiments { HEAD ~ the top } of the processing chamber is removable allowing { TAIL ~ users } to remove either pedestals or heater assemblies
OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH OTH OTH REL REL REL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH