According to the above described first embodiment of {TAIL ~ the present invention} using the damage layer, since the photo mask is used only once in {HEAD ~ the step} of defining the damage layer , the procedure may be simplified 
According to the above described first embodiment of { TAIL ~ the present invention } using the damage layer , since the photo mask is used only once in { HEAD ~ the step } of defining the damage layer , the procedure may be simplified
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