{TAIL ~ Sputtering target} producing few particles, backing plate or sputtering apparatus and {HEAD ~ sputtering method} producing few particles 
{ TAIL ~ Sputtering target } producing few particles , backing plate or sputtering apparatus and { HEAD ~ sputtering method } producing few particles
TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH OTH