In other words, in the second annealing process, the initial temperature of {TAIL ~ the second reactor chamber} can be substantially room temperature, subsequently ramped up to a predetermined process temperature, i.e. the peak temperature of the temperature profile, and then ramped back down to {HEAD ~ the initial room temperature} 
In other words , in the second annealing process , the initial temperature of { TAIL ~ the second reactor chamber } can be substantially room temperature , subsequently ramped up to a predetermined process temperature , i.e. the peak temperature of the temperature profile , and then ramped back down to { HEAD ~ the initial room temperature }
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH TAIL TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD HEAD