A process for forming a thin film of {TAIL ~ amorphous silicon} of a uniform thickness on {HEAD ~ a relatively large glass plate} 
A process for forming a thin film of { TAIL ~ amorphous silicon } of a uniform thickness on { HEAD ~ a relatively large glass plate }
OTH OTH OTH OTH OTH OTH OTH OTH TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD HEAD HEAD