The apparatus 8, further including {TAIL ~ a second alignment system} provided above {HEAD ~ the vacuum processing chamber} for aligning the first and second substrates through the first through hole of the upper substrate 
The apparatus 8 , further including { TAIL ~ a second alignment system } provided above { HEAD ~ the vacuum processing chamber } for aligning the first and second substrates through the first through hole of the upper substrate
OTH OTH OTH OTH OTH OTH TAIL TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH