{TAIL ~ The method} 1, wherein the first depth is no less than 50% and no more than 80% of {HEAD ~ a thickness} of the interlayer dielectric layer 
{ TAIL ~ The method } 1 , wherein the first depth is no less than 50 % and no more than 80 % of { HEAD ~ a thickness } of the interlayer dielectric layer
TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH OTH OTH OTH