{HEAD ~ The substrate boat} 13, wherein {TAIL ~ each} of the plurality of substrate supports has a plurality of openings along a perimeter configured to accommodate the substrate holder 
wherein
{ HEAD ~ The substrate boat } 13 , wherein { TAIL ~ each } of the plurality of substrate supports has a plurality of openings along a perimeter configured to accommodate the substrate holder
HEAD HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH REL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH