For example, the transfer position 12 is a load port of a semiconductor processing apparatus, a station such as {TAIL ~ a stocker}, or {HEAD ~ a buffer} for temporarily storing an article 
For example , the transfer position 12 is a load port of a semiconductor processing apparatus , a station such as { TAIL ~ a stocker } , or { HEAD ~ a buffer } for temporarily storing an article
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH OTH OTH OTH