{HEAD ~ Compound films} including {TAIL ~ a Group IIB IVA VA compound} or a Group IB VA VIA compound may be substituted using appropriate substitutions in the method 
including
{ HEAD ~ Compound films } including { TAIL ~ a Group IIB IVA VA compound } or a Group IB VA VIA compound may be substituted using appropriate substitutions in the method
HEAD HEAD HEAD HEAD HEAD HEAD REL TAIL TAIL TAIL TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH