In order to prepare {TAIL ~ the solid electrolyte} of {HEAD ~ the present invention}, it is necessary to use a lithium orthophosphate target or deposition source and another target or deposition source for introducing the transition metal element 
In order to prepare { TAIL ~ the solid electrolyte } of { HEAD ~ the present invention } , it is necessary to use a lithium orthophosphate target or deposition source and another target or deposition source for introducing the transition metal element
OTH OTH OTH OTH TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH