Consequently, {HEAD ~ the reproducibility} of {TAIL ~ treatment} of semiconductor substrate with chemical solution can be enhanced, and improvements in yield and reliability of semiconductor device can be expected 
of
Consequently , { HEAD ~ the reproducibility } of { TAIL ~ treatment } of semiconductor substrate with chemical solution can be enhanced , and improvements in yield and reliability of semiconductor device can be expected
OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD REL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH