{HEAD ~ The method} includes {TAIL ~ the actual ion beam processing step} combined with the thermal and chemical conditioning of the ion source and a special cleaning step 
includes
{ HEAD ~ The method } includes { TAIL ~ the actual ion beam processing step } combined with the thermal and chemical conditioning of the ion source and a special cleaning step
HEAD HEAD HEAD HEAD HEAD HEAD REL TAIL TAIL TAIL TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH