Additionally, it relates to {HEAD ~ X ray emission analysis techniques} for identifying and spatially locating {TAIL ~ defects} found in or on integrated circuit devices 
for identifying
Additionally , it relates to { HEAD ~ X ray emission analysis techniques } for identifying and spatially locating { TAIL ~ defects } found in or on integrated circuit devices
OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD HEAD HEAD REL REL OTH OTH OTH TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH