 repeating steps through until {HEAD ~ the desired thickness} of {TAIL ~ stacked monolayers} have been grown 
of
repeating steps through until { HEAD ~ the desired thickness } of { TAIL ~ stacked monolayers } have been grown
OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD REL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH