A processing station adaptable to standard cluster tools has {HEAD ~ a vertically translatable pedestal} having {TAIL ~ an upper wafer support surface} including a heater plate adapted to be plugged into a unique feedthrough in the pedestal 
having
A processing station adaptable to standard cluster tools has { HEAD ~ a vertically translatable pedestal } having { TAIL ~ an upper wafer support surface } including a heater plate adapted to be plugged into a unique feedthrough in the pedestal
OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD HEAD REL TAIL TAIL TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH