The second alignment system 400 may be formed in {HEAD ~ the interior} or exterior of {TAIL ~ the vacuum processing chamber} 110 
of
The second alignment system 400 may be formed in { HEAD ~ the interior } or exterior of { TAIL ~ the vacuum processing chamber } 110
OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH REL TAIL TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH