{HEAD ~ The pressure range} of the cluster forming chamber 410, {TAIL ~ the encapsulation chamber} 429 and the deposition chamber 430 can be set to about 0.1–1 Torr, 10−4 Torr, and 10−6 Torr, respectively 
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{ HEAD ~ The pressure range } of the cluster forming chamber 410 , { TAIL ~ the encapsulation chamber } 429 and the deposition chamber 430 can be set to about 0.1–1 Torr , 10−4 Torr , and 10−6 Torr , respectively
HEAD HEAD HEAD HEAD HEAD HEAD HEAD REL OTH OTH OTH OTH OTH OTH TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH