Components referred to herein can encompass any and all components that, from a performance standpoint, are essential to replace, including any of {HEAD ~ the constituent components} of a light source device for {TAIL ~ an exposure apparatus}, an illumination optical system, and a projection optical system 
for
Components referred to herein can encompass any and all components that , from a performance standpoint , are essential to replace , including any of { HEAD ~ the constituent components } of a light source device for { TAIL ~ an exposure apparatus } , an illumination optical system , and a projection optical system
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH OTH OTH OTH REL TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH