Cin is satisfied, where Cin is the conductance from the gas inlet to the position of the substrate nearest to the gas inlet, Cx is the conductance from the position of the substrate nearest to the gas inlet to the position of the substrate nearest to the gas outlet, Sout is the effective exhaust rate, Sact is the consumption rate of the gas, and Cz is {HEAD ~ the conductance} from {TAIL ~ the substrate} to the gas outlet 
from
Cin is satisfied , where Cin is the conductance from the gas inlet to the position of the substrate nearest to the gas inlet , Cx is the conductance from the position of the substrate nearest to the gas inlet to the position of the substrate nearest to the gas outlet , Sout is the effective exhaust rate , Sact is the consumption rate of the gas , and Cz is { HEAD ~ the conductance } from { TAIL ~ the substrate } to the gas outlet
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD REL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH