cooling said {HEAD ~ coated substrate} by extinguishing {TAIL ~ said deposition process} and passing an inert gas over said substrate until the temperature of said substrate has reached substantially room temperature during said cool down step; and 
by extinguishing
cooling said { HEAD ~ coated substrate } by extinguishing { TAIL ~ said deposition process } and passing an inert gas over said substrate until the temperature of said substrate has reached substantially room temperature during said cool down step ; and
OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD REL REL TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH