The pressure range of the cluster forming chamber 410, {HEAD ~ the encapsulation chamber} 429 and {TAIL ~ the deposition chamber} 430 can be set to about 0.1–1 Torr, 10−4 Torr, and 10−6 Torr, respectively 
The pressure range of the cluster forming chamber 410 , { HEAD ~ the encapsulation chamber } 429 and { TAIL ~ the deposition chamber } 430 can be set to about 0.1–1 Torr , 10−4 Torr , and 10−6 Torr , respectively
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH