{HEAD ~ The method} 2, wherein removing {TAIL ~ the portion} of the shared region includes etching the shared region 
wherein removing
{ HEAD ~ The method } 2 , wherein removing { TAIL ~ the portion } of the shared region includes etching the shared region
HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH REL REL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH