A transport space for transporting {HEAD ~ a substrate} without {TAIL ~ contamination} of the surface of the substrate retained therein, which comprises: 
without
A transport space for transporting { HEAD ~ a substrate } without { TAIL ~ contamination } of the surface of the substrate retained therein , which comprises :
OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD REL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH