A photolithographic method 6 wherein said imagewise exposing of said first layer is done by computer controlling {HEAD ~ a thin beam} of {TAIL ~ actinic radiation} 
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A photolithographic method 6 wherein said imagewise exposing of said first layer is done by computer controlling { HEAD ~ a thin beam } of { TAIL ~ actinic radiation }
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD REL TAIL TAIL TAIL TAIL TAIL TAIL