{HEAD ~ The microvalves} can be formed in {TAIL ~ semiconductor materials} by simplified methods utilizing a reduced number of masking levels 
formed in
{ HEAD ~ The microvalves } can be formed in { TAIL ~ semiconductor materials } by simplified methods utilizing a reduced number of masking levels
HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH REL REL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH