According to {HEAD ~ the method} of manufacturing {TAIL ~ the Si film}, the Si film may be manufactured by preparing a Si forming solution 
of manufacturing
According to { HEAD ~ the method } of manufacturing { TAIL ~ the Si film } , the Si film may be manufactured by preparing a Si forming solution
OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD REL REL TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH