A capacitor according to the present invention enables the HSG layer to grow on an internal wall of a storage electrode, thereby preventing a micro bridge between storage electrodes resulting from {HEAD ~ abnormal growth} or overgrowth of {TAIL ~ the HSG layer} 
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A capacitor according to the present invention enables the HSG layer to grow on an internal wall of a storage electrode , thereby preventing a micro bridge between storage electrodes resulting from { HEAD ~ abnormal growth } or overgrowth of { TAIL ~ the HSG layer }
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH REL TAIL TAIL TAIL TAIL TAIL TAIL TAIL