a buffer insulating layer between the silicon nitride liner and the self aligned contact pad at {HEAD ~ the top portions} of {TAIL ~ the first and second gate electrodes}, 
of
a buffer insulating layer between the silicon nitride liner and the self aligned contact pad at { HEAD ~ the top portions } of { TAIL ~ the first and second gate electrodes } ,
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD REL TAIL TAIL TAIL TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH