213B. Consequently, the distribution of substrates to {HEAD ~ the chambers} corresponding to step 3 may be accomplished on the basis of the previously determined percentages, thereby also synchronizing the down time of chamber 213A of {TAIL ~ step} 3 with the down times of the chambers 211A, 212A 
213B. Consequently , the distribution of substrates to { HEAD ~ the chambers } corresponding to step 3 may be accomplished on the basis of the previously determined percentages , thereby also synchronizing the down time of chamber 213A of { TAIL ~ step } 3 with the down times of the chambers 211A , 212A
OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH