FIG 2 b schematically illustrates a cluster of {TAIL ~ process chambers} 210 according to {HEAD ~ an illustrative embodiment} in which the cluster 210 may be provided in the form of a cluster tool 200, that is, the process chambers 210 and the corresponding transport capabilities may be provided within a single mainframe, as is also previously explained with reference to the cluster tool 100 
FIG 2 b schematically illustrates a cluster of { TAIL ~ process chambers } 210 according to { HEAD ~ an illustrative embodiment } in which the cluster 210 may be provided in the form of a cluster tool 200 , that is , the process chambers 210 and the corresponding transport capabilities may be provided within a single mainframe , as is also previously explained with reference to the cluster tool 100
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