A sputtering target producing {TAIL ~ few particles}, a backing plate or a sputtering apparatus, and a sputtering method producing {HEAD ~ few particles} 
A sputtering target producing { TAIL ~ few particles } , a backing plate or a sputtering apparatus , and a sputtering method producing { HEAD ~ few particles }
OTH OTH OTH OTH TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD