Also, it provides for improved accuracy in controlling {HEAD ~ the extend} of {TAIL ~ impurity species concentration} and the extent of its penetration into the cyrstalline structure so that resulting diffusion profiles in such structures can be systematically reproduced 
of
Also , it provides for improved accuracy in controlling { HEAD ~ the extend } of { TAIL ~ impurity species concentration } and the extent of its penetration into the cyrstalline structure so that resulting diffusion profiles in such structures can be systematically reproduced
OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD REL TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH