The method 9, further including the step of post treating {HEAD ~ the polymeric film} in {TAIL ~ a plasma field} after the step of curing the precursor 
in
The method 9 , further including the step of post treating { HEAD ~ the polymeric film } in { TAIL ~ a plasma field } after the step of curing the precursor
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD REL TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH