After distributing {HEAD ~ a nonmetal element} in {TAIL ~ a region} in the vicinity of a surface portion of a semiconductor layer, a metal film is deposited on the semiconductor layer 
in
After distributing { HEAD ~ a nonmetal element } in { TAIL ~ a region } in the vicinity of a surface portion of a semiconductor layer , a metal film is deposited on the semiconductor layer
OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD REL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH