Consequently, if, for the sake of convenience, {HEAD ~ the first process} in {TAIL ~ the present invention} is termed the “filling process,” and the second process is termed the “planarization process,” the present invention contains the following eight types of methods: 
in
Consequently , if , for the sake of convenience , { HEAD ~ the first process } in { TAIL ~ the present invention } is termed the “ filling process , ” and the second process is termed the “ planarization process , ” the present invention contains the following eight types of methods :
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD REL TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH