{HEAD ~ The assembly} includes {TAIL ~ a source} 24 of one or more solid materials such as silicon, germanium and carbon within the chamber 14 
includes
{ HEAD ~ The assembly } includes { TAIL ~ a source } 24 of one or more solid materials such as silicon , germanium and carbon within the chamber 14
HEAD HEAD HEAD HEAD HEAD HEAD REL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH