At the transfer position 12, a side buffer is provided on {TAIL ~ a side} of {HEAD ~ a travel rail} at a load port near the ground or in the overhead space 
At the transfer position 12 , a side buffer is provided on { TAIL ~ a side } of { HEAD ~ a travel rail } at a load port near the ground or in the overhead space
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH TAIL TAIL TAIL TAIL TAIL TAIL OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH