In particular aspects, the invention pertains to {HEAD ~ methods} of {TAIL ~ forming trenched isolation regions} 
of
In particular aspects , the invention pertains to { HEAD ~ methods } of { TAIL ~ forming trenched isolation regions }
OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD REL TAIL TAIL TAIL TAIL TAIL TAIL TAIL TAIL