A second ion implantation is carried out under the conditions of a concentration of about 5.0×1015 ions/cm2 and an acceleration energy of about 40 KeV using {HEAD ~ As+ ions} serving as {TAIL ~ carriers} 
serving as
A second ion implantation is carried out under the conditions of a concentration of about 5.0×1015 ions / cm2 and an acceleration energy of about 40 KeV using { HEAD ~ As+ ions } serving as { TAIL ~ carriers }
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD REL REL TAIL TAIL TAIL TAIL TAIL