{TAIL ~ first source/drain regions} of the first conductivity type formed in the outward portions from {HEAD ~ said first silicate glass layer} in the primary surface of said substrate 
{ TAIL ~ first source / drain regions } of the first conductivity type formed in the outward portions from { HEAD ~ said first silicate glass layer } in the primary surface of said substrate
TAIL TAIL TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH OTH OTH OTH OTH OTH