In one aspect, the invention pertains to {TAIL ~ a method} of forming a layer of material on {HEAD ~ a substrate} 
In one aspect , the invention pertains to { TAIL ~ a method } of forming a layer of material on { HEAD ~ a substrate }
OTH OTH OTH OTH OTH OTH OTH OTH TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD