Referring to FIG 3, the support substrate 10 is formed on one surface of {HEAD ~ the nitride semiconductor substrate} 20 for structurally supporting {TAIL ~ the nitride semiconductor substrate} 20 
for structurally supporting
Referring to FIG 3 , the support substrate 10 is formed on one surface of { HEAD ~ the nitride semiconductor substrate } 20 for structurally supporting { TAIL ~ the nitride semiconductor substrate } 20
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD HEAD OTH REL REL REL TAIL TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH