{TAIL ~ A polysilicon layer} 32 is deposited on the entire surface of {HEAD ~ the substrate} 31 including the trench 
{ TAIL ~ A polysilicon layer } 32 is deposited on the entire surface of { HEAD ~ the substrate } 31 including the trench
TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH OTH OTH