These features provide the many advantageous qualities that make {HEAD ~ this invention} suitable for monitoring {TAIL ~ fab process changes} that may impact contact resistance 
suitable for monitoring
These features provide the many advantageous qualities that make { HEAD ~ this invention } suitable for monitoring { TAIL ~ fab process changes } that may impact contact resistance
OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD REL REL REL TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH