In some embodiments the top of {TAIL ~ the processing chamber} is removable allowing users to remove {HEAD ~ either pedestals} or heater assemblies 
In some embodiments the top of { TAIL ~ the processing chamber } is removable allowing users to remove { HEAD ~ either pedestals } or heater assemblies
OTH OTH OTH OTH OTH OTH TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH OTH