{HEAD ~ The carrier and deposition gases} may be intermingled in {TAIL ~ the mixing manifold} 96 before flowing into the gas distribution assembly 46 via conduit 100 
intermingled in
{ HEAD ~ The carrier and deposition gases } may be intermingled in { TAIL ~ the mixing manifold } 96 before flowing into the gas distribution assembly 46 via conduit 100
HEAD HEAD HEAD HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH REL REL TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH