In {HEAD ~ the process} according to the present invention the high frequency discharge is turned off before {TAIL ~ the DC bias voltage} attains a saturated state, i.e., before the plasma density distribution becomes nonuniform 
In { HEAD ~ the process } according to the present invention the high frequency discharge is turned off before { TAIL ~ the DC bias voltage } attains a saturated state , i.e. , before the plasma density distribution becomes nonuniform
OTH HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH TAIL TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH