Preferably, the tube pressure is held at 175 millitorr to 200 millitorr during {TAIL ~ deposition} of {HEAD ~ the borophosphosilicate glass film} 
Preferably , the tube pressure is held at 175 millitorr to 200 millitorr during { TAIL ~ deposition } of { HEAD ~ the borophosphosilicate glass film }
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH TAIL TAIL TAIL TAIL TAIL OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD HEAD