A process for making {HEAD ~ borderless contacts} through {TAIL ~ an insulating layer} to active regions of a semiconductor device is disclosed 
through
A process for making { HEAD ~ borderless contacts } through { TAIL ~ an insulating layer } to active regions of a semiconductor device is disclosed
OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD REL TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH