Afterward, the dielectric layer 10 is removed again from the upper region of {HEAD ~ the trench}, i.e., above the polysilicon layer 11, from the side walls of {TAIL ~ the trench} 5 
Afterward , the dielectric layer 10 is removed again from the upper region of { HEAD ~ the trench } , i.e. , above the polysilicon layer 11 , from the side walls of { TAIL ~ the trench } 5
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH TAIL TAIL TAIL TAIL TAIL TAIL OTH