In the preoxidation cleaning step, a solution containing NH4F, {HEAD ~ HF}, and H2O, a standard solution containing NH4OH, H2O2, and H2O, and {TAIL ~ HF} are used 
In the preoxidation cleaning step , a solution containing NH4F , { HEAD ~ HF } , and H2O , a standard solution containing NH4OH , H2O2 , and H2O , and { TAIL ~ HF } are used
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH TAIL TAIL TAIL TAIL TAIL OTH OTH