In addition, when dry etching is performed after wet etching, a process is simplified not to reduce the throughput compared to {TAIL ~ the case} of performing {HEAD ~ wet etching} 
In addition , when dry etching is performed after wet etching , a process is simplified not to reduce the throughput compared to { TAIL ~ the case } of performing { HEAD ~ wet etching }
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD