For example, {HEAD ~ the high k dielectric layer} 12 is heated by the laser source and surrounded by {TAIL ~ the second process gas} such as nitrogen in the second annealing process, and the diagram of the temperature versus time is a spike 
is surrounded by
For example , { HEAD ~ the high k dielectric layer } 12 is heated by the laser source and surrounded by { TAIL ~ the second process gas } such as nitrogen in the second annealing process , and the diagram of the temperature versus time is a spike
OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD HEAD HEAD OTH REL OTH OTH OTH OTH OTH OTH REL REL TAIL TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH