S3 is performed on a predetermined parameter setting, which may result in a processing capacity of 77% for the process chambers 211A, 211B, while a capacity of 50% may be obtained for the chambers 212A, 212B and a capacity of 79% may be obtained for {HEAD ~ the chambers} 213A, 213B. Furthermore, the current state of the cluster tool 200 with respect to a “time” to the next planned maintenance event for each of {TAIL ~ the chambers} 210 may be determined 
S3 is performed on a predetermined parameter setting , which may result in a processing capacity of 77 % for the process chambers 211A , 211B , while a capacity of 50 % may be obtained for the chambers 212A , 212B and a capacity of 79 % may be obtained for { HEAD ~ the chambers } 213A , 213B. Furthermore , the current state of the cluster tool 200 with respect to a “ time ” to the next planned maintenance event for each of { TAIL ~ the chambers } 210 may be determined
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