Because {HEAD ~ the contact hole} is wider than {TAIL ~ the lower capacitor electrode}, unevenness of the surface of the lower capacitor electrode can be reduced thus allowing the fabrication of a thin uniform dielectric layer 
is wider than
Because { HEAD ~ the contact hole } is wider than { TAIL ~ the lower capacitor electrode } , unevenness of the surface of the lower capacitor electrode can be reduced thus allowing the fabrication of a thin uniform dielectric layer
OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD REL REL REL TAIL TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH