{TAIL ~ The process} consists of a step of placing a plurality of wafers in a shrouded quartz boat or wafer carrier having {HEAD ~ a plurality} of slots cut in the walls thereof to admit reactant gases to the vicinity of the wafers 
{ TAIL ~ The process } consists of a step of placing a plurality of wafers in a shrouded quartz boat or wafer carrier having { HEAD ~ a plurality } of slots cut in the walls thereof to admit reactant gases to the vicinity of the wafers
TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH