The substrate boat 13, wherein each of the plurality of substrate supports has a plurality of openings along {HEAD ~ a perimeter} configured to accommodate {TAIL ~ the substrate holder} 
configured to accommodate
The substrate boat 13 , wherein each of the plurality of substrate supports has a plurality of openings along { HEAD ~ a perimeter } configured to accommodate { TAIL ~ the substrate holder }
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD REL REL REL TAIL TAIL TAIL TAIL TAIL TAIL TAIL