In {HEAD ~ the processing space} supplied with {TAIL ~ the solvent}, evaporation of the solvent from the resist solution is suppressed 
supplied with
In { HEAD ~ the processing space } supplied with { TAIL ~ the solvent } , evaporation of the solvent from the resist solution is suppressed
OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD REL REL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH