Consequently, if supplying {TAIL ~ the substrates} according to these percentages, the chambers 211A and {HEAD ~ 212A} may be synchronized with respect to their down times in view of the next planned maintenance activity 
Consequently , if supplying { TAIL ~ the substrates } according to these percentages , the chambers 211A and { HEAD ~ 212A } may be synchronized with respect to their down times in view of the next planned maintenance activity
OTH OTH OTH OTH TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH