This invention relates to a mask blank for semiconductor manufacture and, in particular, relates to acquisition and management of mask blank quality information and {HEAD ~ the manufacture} of a mask blank and {TAIL ~ a mask} 
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This invention relates to a mask blank for semiconductor manufacture and , in particular , relates to acquisition and management of mask blank quality information and { HEAD ~ the manufacture } of a mask blank and { TAIL ~ a mask }
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD REL OTH OTH OTH OTH TAIL TAIL TAIL TAIL TAIL TAIL