{HEAD ~ A third thin film polysilicon layer} comprising a storage plane overlies {TAIL ~ the third dielectric layer} 
overlies
{ HEAD ~ A third thin film polysilicon layer } comprising a storage plane overlies { TAIL ~ the third dielectric layer }
HEAD HEAD HEAD HEAD HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH OTH OTH REL TAIL TAIL TAIL TAIL TAIL TAIL TAIL TAIL