The present invention relates generally to inspection of semiconductor devices for {HEAD ~ the purpose} of identifying {TAIL ~ defects} thereon 
of identifying
The present invention relates generally to inspection of semiconductor devices for { HEAD ~ the purpose } of identifying { TAIL ~ defects } thereon
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD REL REL TAIL TAIL TAIL TAIL TAIL OTH