The cover is preferably turned between successive rotation processes so that a clean side of the cover is always directed to the substrate that is to be treated, whereas {HEAD ~ the side} that has become contaminated from the previous rotation process faces away from {TAIL ~ the substrate} and can be cleaned 
faces away from
The cover is preferably turned between successive rotation processes so that a clean side of the cover is always directed to the substrate that is to be treated , whereas { HEAD ~ the side } that has become contaminated from the previous rotation process faces away from { TAIL ~ the substrate } and can be cleaned
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH OTH OTH OTH OTH OTH OTH OTH REL REL REL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH