{TAIL ~ The method} 2, wherein removing {HEAD ~ the portion} of the shared region includes etching the shared region 
{ TAIL ~ The method } 2 , wherein removing { HEAD ~ the portion } of the shared region includes etching the shared region
TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH OTH OTH OTH OTH OTH OTH OTH