{HEAD ~ The semiconductor structure} includes {TAIL ~ a compound semiconductor substrate} and a high efficiency photonic device is produced after the compound semiconductor substrate is removed 
includes
{ HEAD ~ The semiconductor structure } includes { TAIL ~ a compound semiconductor substrate } and a high efficiency photonic device is produced after the compound semiconductor substrate is removed
HEAD HEAD HEAD HEAD HEAD HEAD HEAD REL TAIL TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH