An apparatus for forming the coated substrate especially includes means for forming the intermediate layer and means for forming {HEAD ~ the hard carbon film} in {TAIL ~ the same vacuum chamber} 
in
An apparatus for forming the coated substrate especially includes means for forming the intermediate layer and means for forming { HEAD ~ the hard carbon film } in { TAIL ~ the same vacuum chamber }
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD HEAD REL TAIL TAIL TAIL TAIL TAIL TAIL TAIL TAIL