A method 1, wherein the ion density is greater than 1012 cm−3 and {HEAD ~ the ion energy} is between 10 eV and {TAIL ~ 15 eV} in said forming 
is between
A method 1 , wherein the ion density is greater than 1012 cm−3 and { HEAD ~ the ion energy } is between 10 eV and { TAIL ~ 15 eV } in said forming
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD REL REL OTH OTH OTH TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH