Upon rotation of the substrate about any spatial axis, the masses are subjected to {HEAD ~ deflections} caused by {TAIL ~ Corolis forces} that are detected by sensor elements 
caused by
Upon rotation of the substrate about any spatial axis , the masses are subjected to { HEAD ~ deflections } caused by { TAIL ~ Corolis forces } that are detected by sensor elements
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD REL REL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH