A nitride coated boat is used in a method for depositing {HEAD ~ phosphosilicate glass} on {TAIL ~ semiconductor wafers} 
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A nitride coated boat is used in a method for depositing { HEAD ~ phosphosilicate glass } on { TAIL ~ semiconductor wafers }
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD REL TAIL TAIL TAIL TAIL TAIL TAIL