{HEAD ~ Such apparatus} and methods have {TAIL ~ especial utility} in the manufacture of LSI integrated circuits, displays, etc 
have
{ HEAD ~ Such apparatus } and methods have { TAIL ~ especial utility } in the manufacture of LSI integrated circuits , displays , etc
HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH REL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH