Additionally, {HEAD ~ an ejection pipe} 137 connecting to a tank 136 which contains a solvent, {TAIL ~ i.e., a thinner B}, of the resist solution A is connected to a portion of the circulating pipe line 131 between the air fan 133 and the filter 134 
Additionally , { HEAD ~ an ejection pipe } 137 connecting to a tank 136 which contains a solvent , { TAIL ~ i.e. , a thinner B } , of the resist solution A is connected to a portion of the circulating pipe line 131 between the air fan 133 and the filter 134
OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH TAIL TAIL TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH