Principles of the invention provide techniques for the deposition of {HEAD ~ hydrogenated thin films} such as {TAIL ~ hydrogenated silicon} 
such as
Principles of the invention provide techniques for the deposition of { HEAD ~ hydrogenated thin films } such as { TAIL ~ hydrogenated silicon }
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD REL REL TAIL TAIL TAIL TAIL TAIL TAIL