an evaporation detector arranged in said furnace and detecting at least any one of the amount of {HEAD ~ evaporation} of {TAIL ~ impurity} from said crucible, the temperature above said molten liquid, or the pressure inside of said furnace; and 
of
an evaporation detector arranged in said furnace and detecting at least any one of the amount of { HEAD ~ evaporation } of { TAIL ~ impurity } from said crucible , the temperature above said molten liquid , or the pressure inside of said furnace ; and
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD REL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH