The invention also provides a polishing pad having a layer of {HEAD ~ the cushion} for a polishing pad and {TAIL ~ a polishing layer} 
for
The invention also provides a polishing pad having a layer of { HEAD ~ the cushion } for a polishing pad and { TAIL ~ a polishing layer }
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD REL OTH OTH OTH OTH TAIL TAIL TAIL TAIL TAIL TAIL TAIL