Method of forming polycrystalline silicon TFTs with {HEAD ~ TiN/Cu/TiN interconnections} for {TAIL ~ a liquid crystal display pixel array} 
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Method of forming polycrystalline silicon TFTs with { HEAD ~ TiN / Cu / TiN interconnections } for { TAIL ~ a liquid crystal display pixel array }
OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD HEAD HEAD HEAD REL TAIL TAIL TAIL TAIL TAIL TAIL TAIL TAIL TAIL TAIL