That is, the high k dielectric layer 12 can be transformed from {TAIL ~ an amorphous film} having a loose structure into the tenser high k dielectric layer 12 having {HEAD ~ a crystalline region} 16, as shown in FIG 5 
That is , the high k dielectric layer 12 can be transformed from { TAIL ~ an amorphous film } having a loose structure into the tenser high k dielectric layer 12 having { HEAD ~ a crystalline region } 16 , as shown in FIG 5
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH OTH OTH OTH OTH OTH