The substrate heating apparatus 3, wherein the ceramic base comprises at least one of aluminum nitride, silicon nitride, silicon carbide and sialon, and {TAIL ~ the cylindrical member} comprises the same material as {HEAD ~ the ceramic base} 
The substrate heating apparatus 3 , wherein the ceramic base comprises at least one of aluminum nitride , silicon nitride , silicon carbide and sialon , and { TAIL ~ the cylindrical member } comprises the same material as { HEAD ~ the ceramic base }
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD