While {HEAD ~ the inert gas} is injected from {TAIL ~ the position} opposed to the peripheral edge of the substrate W in the aforementioned embodiment, the inert gas may also be injected from a position opposed to the center of the substrate W 
is injected from
While { HEAD ~ the inert gas } is injected from { TAIL ~ the position } opposed to the peripheral edge of the substrate W in the aforementioned embodiment , the inert gas may also be injected from a position opposed to the center of the substrate W
OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD REL REL REL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH