The diffraction pattern is preferably formed on {TAIL ~ the quartz master} using {HEAD ~ VLSI photolithography} 
The diffraction pattern is preferably formed on { TAIL ~ the quartz master } using { HEAD ~ VLSI photolithography }
OTH OTH OTH OTH OTH OTH OTH TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH HEAD HEAD HEAD HEAD HEAD HEAD