The aqueous dispersion for {TAIL ~ CMP} of the invention is characterized by comprising {HEAD ~ an abrasive, water} and a heteropolyacid 
The aqueous dispersion for { TAIL ~ CMP } of the invention is characterized by comprising { HEAD ~ an abrasive , water } and a heteropolyacid
OTH OTH OTH OTH TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH OTH