The fluid suppliers 61, 62, 63 are arranged in {TAIL ~ a direction} extending from the circumference of the wafer W to {HEAD ~ its inside} 
The fluid suppliers 61 , 62 , 63 are arranged in { TAIL ~ a direction } extending from the circumference of the wafer W to { HEAD ~ its inside }
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD