These openings are then filled with {HEAD ~ conductive material} to form {TAIL ~ self aligned contacts} in the core region 
to form
These openings are then filled with { HEAD ~ conductive material } to form { TAIL ~ self aligned contacts } in the core region
OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD REL REL TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH