The method comprises steps of forming {HEAD ~ a first oxide layer} over {TAIL ~ the substrate} and forming a nitride layer on the first oxide layer 
over
The method comprises steps of forming { HEAD ~ a first oxide layer } over { TAIL ~ the substrate } and forming a nitride layer on the first oxide layer
OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD HEAD REL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH