The spacer preferably comprises a material selected from the group comprising {TAIL ~ refractory metal silicides} or their associated nitrides, such as, for example, titanium silicide, titanium nitride, and {HEAD ~ cobalt silicide} 
The spacer preferably comprises a material selected from the group comprising { TAIL ~ refractory metal silicides } or their associated nitrides , such as , for example , titanium silicide , titanium nitride , and { HEAD ~ cobalt silicide }
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD