The apparatus includes a processing chamber having {HEAD ~ a plurality} of {TAIL ~ source gas supply nozzles}, the lengths of the nozzles being different from one another so as to uniformly supply a source gas 
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The apparatus includes a processing chamber having { HEAD ~ a plurality } of { TAIL ~ source gas supply nozzles } , the lengths of the nozzles being different from one another so as to uniformly supply a source gas
OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD REL TAIL TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH