Next an oxide layer is deposited and is followed by {HEAD ~ deposition} of {TAIL ~ HSG poly} 
of
Next an oxide layer is deposited and is followed by { HEAD ~ deposition } of { TAIL ~ HSG poly }
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD REL TAIL TAIL TAIL TAIL TAIL TAIL