{TAIL ~ Intermetal dielectric} and {HEAD ~ interlevel dielectric} that have dielectric constants ranging from 2.0 to 2.6 are prepared from plasma or photon assisted CVD or transport polymerization  
{ TAIL ~ Intermetal dielectric } and { HEAD ~ interlevel dielectric } that have dielectric constants ranging from 2.0 to 2.6 are prepared from plasma or photon assisted CVD or transport polymerization
TAIL TAIL TAIL TAIL TAIL TAIL OTH HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH