{HEAD ~ The gauge} includes a component for verifying whether a dimension of {TAIL ~ a process kit part feature} violates a prescribed size tolerance, the violation indicating that the process kit part has accumulated excessive wear or deposits 
{ HEAD ~ The gauge } includes a component for verifying whether a dimension of { TAIL ~ a process kit part feature } violates a prescribed size tolerance , the violation indicating that the process kit part has accumulated excessive wear or deposits
HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH OTH OTH OTH OTH OTH OTH OTH TAIL TAIL TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH