Consequently, the occurrence of non correlated sequential down {TAIL ~ times} of various process chambers may be significantly reduced, thereby enhancing throughput and availability of {HEAD ~ complex cluster tools} 
Consequently , the occurrence of non correlated sequential down { TAIL ~ times } of various process chambers may be significantly reduced , thereby enhancing throughput and availability of { HEAD ~ complex cluster tools }
OTH OTH OTH OTH OTH OTH OTH OTH OTH TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD