The microvalve includes a flap that is flexed by pressure exerted on the flap by the vapor on the fluid in {HEAD ~ the channel} to prevent {TAIL ~ the fluid} from flowing into portions of the channel 
to prevent
The microvalve includes a flap that is flexed by pressure exerted on the flap by the vapor on the fluid in { HEAD ~ the channel } to prevent { TAIL ~ the fluid } from flowing into portions of the channel
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD REL REL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH