More particularly, the present invention relates to a micro machined preconcentrator and inlet sample heater with {TAIL ~ a three dimensional structure}, integral heating, and {HEAD ~ a semiconductor substrate} 
More particularly , the present invention relates to a micro machined preconcentrator and inlet sample heater with { TAIL ~ a three dimensional structure } , integral heating , and { HEAD ~ a semiconductor substrate }
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH TAIL TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD