The apparatus 3, wherein each of the buffering members comprises a substrate contact portion contacting the substrate, and an impact absorbing portion coupled to a lower portion of the substrate contact portion to absorb {HEAD ~ impact} applied to {TAIL ~ the substrate contact portion} 
applied to
The apparatus 3 , wherein each of the buffering members comprises a substrate contact portion contacting the substrate , and an impact absorbing portion coupled to a lower portion of the substrate contact portion to absorb { HEAD ~ impact } applied to { TAIL ~ the substrate contact portion }
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD REL REL TAIL TAIL TAIL TAIL TAIL TAIL TAIL TAIL