Under {HEAD ~ previous processes} in {TAIL ~ the related art}, surface roughness and sloped sidewall problems occur 
in
Under { HEAD ~ previous processes } in { TAIL ~ the related art } , surface roughness and sloped sidewall problems occur
OTH HEAD HEAD HEAD HEAD HEAD HEAD REL TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH