Therefore, a space pattern of {HEAD ~ resist} formed with the thickened resist pattern has {TAIL ~ a fine structure}, exceeding the exposure limit of light sources of an available exposure device 
Therefore , a space pattern of { HEAD ~ resist } formed with the thickened resist pattern has { TAIL ~ a fine structure } , exceeding the exposure limit of light sources of an available exposure device
OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD OTH OTH OTH OTH OTH OTH OTH TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH