Further, it is possible to improve {HEAD ~ a throughput} of the apparatus in {TAIL ~ resist processing} 
Further , it is possible to improve { HEAD ~ a throughput } of the apparatus in { TAIL ~ resist processing }
OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH OTH OTH TAIL TAIL TAIL TAIL TAIL TAIL