{HEAD ~ A polysilicon layer} 32 is deposited on {TAIL ~ the entire surface} of the substrate 31 including the trench 
is deposited on
{ HEAD ~ A polysilicon layer } 32 is deposited on { TAIL ~ the entire surface } of the substrate 31 including the trench
HEAD HEAD HEAD HEAD HEAD HEAD HEAD OTH REL REL REL TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH