Thus, even if any one of the air injection modules is damaged, the substrate is prevented from falling because {TAIL ~ other air injection modules} serve to continuously float {HEAD ~ the substrate} 
Thus , even if any one of the air injection modules is damaged , the substrate is prevented from falling because { TAIL ~ other air injection modules } serve to continuously float { HEAD ~ the substrate }
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH TAIL TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD