A coil apparatus includes a coil trace, {HEAD ~ a semiconductor substrate} and a dielectric layer arranged on the semiconductor substrate, {TAIL ~ at least parts} of the coil trace being arranged above a recess in the dielectric layer 
A coil apparatus includes a coil trace , { HEAD ~ a semiconductor substrate } and a dielectric layer arranged on the semiconductor substrate , { TAIL ~ at least parts } of the coil trace being arranged above a recess in the dielectric layer
OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH