The specific scanner disclosed also includes an arrangement for monitoring the profile, position and orientation of the beam spot at a plurality of {HEAD ~ different points} along {TAIL ~ the scan path} 
along
The specific scanner disclosed also includes an arrangement for monitoring the profile , position and orientation of the beam spot at a plurality of { HEAD ~ different points } along { TAIL ~ the scan path }
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD REL TAIL TAIL TAIL TAIL TAIL TAIL TAIL