{HEAD ~ High purity polysilicon granules} are prepared by depositing reaction gas on {TAIL ~ silicon granules} in a fluidized bed reactor having: 
{ HEAD ~ High purity polysilicon granules } are prepared by depositing reaction gas on { TAIL ~ silicon granules } in a fluidized bed reactor having :
HEAD HEAD HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH OTH OTH OTH OTH OTH TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH