{HEAD ~ The device} 17, wherein {TAIL ~ the downstream optical system} comprises an illumination optical system of an X ray exposure apparatus 
wherein
{ HEAD ~ The device } 17 , wherein { TAIL ~ the downstream optical system } comprises an illumination optical system of an X ray exposure apparatus
HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH REL TAIL TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH