{HEAD ~ A precision system} 9, wherein {TAIL ~ said fine displacing means} comprises a piezo electric element 
wherein
{ HEAD ~ A precision system } 9 , wherein { TAIL ~ said fine displacing means } comprises a piezo electric element
HEAD HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH REL TAIL TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH