Another object of the present invention is to provide {HEAD ~ a method} for forming {TAIL ~ a dual oxide layer} having enhanced electrical characteristics as well as a thickness of 100 Å or less 
for forming
Another object of the present invention is to provide { HEAD ~ a method } for forming { TAIL ~ a dual oxide layer } having enhanced electrical characteristics as well as a thickness of 100 Å or less
OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD REL REL TAIL TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH