The MEMS arrays include polysilicon or polysilicon germanium components that are mechanically superior to {HEAD ~ metals} used in {TAIL ~ other MEMS applications}, but that require process temperatures not compatible with conventional CMOS technologies 
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The MEMS arrays include polysilicon or polysilicon germanium components that are mechanically superior to { HEAD ~ metals } used in { TAIL ~ other MEMS applications } , but that require process temperatures not compatible with conventional CMOS technologies
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