{TAIL ~ A position} of an end part of the anti reflection layer inside the via hole may be lower than a position of an end part of the first electrode extending from the first surface to the inside of {HEAD ~ the via hole} 
{ TAIL ~ A position } of an end part of the anti reflection layer inside the via hole may be lower than a position of an end part of the first electrode extending from the first surface to the inside of { HEAD ~ the via hole }
TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD