For this reason, a surface layer or a mixing layer formed as a result of an interaction between the resist pattern thickening material and the resist pattern is efficiently formed on the surface of the resist pattern in a state where {HEAD ~ the resist pattern} constitutes {TAIL ~ the innerlayer} thereof 
constitutes
For this reason , a surface layer or a mixing layer formed as a result of an interaction between the resist pattern thickening material and the resist pattern is efficiently formed on the surface of the resist pattern in a state where { HEAD ~ the resist pattern } constitutes { TAIL ~ the innerlayer } thereof
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