In the method of manufacturing a Si film by using {TAIL ~ a Si solution process} according to {HEAD ~ example embodiments}, the cyclohexasilane may be dissolved in, for example, a hydrocarbon based solvent 
In the method of manufacturing a Si film by using { TAIL ~ a Si solution process } according to { HEAD ~ example embodiments } , the cyclohexasilane may be dissolved in , for example , a hydrocarbon based solvent
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