{HEAD ~ The processing chamber} and loadlock chambers are connected to {TAIL ~ a vacuum system} having two vacuum pumps for maintaining a vacuum in the chambers 
are connected to
{ HEAD ~ The processing chamber } and loadlock chambers are connected to { TAIL ~ a vacuum system } having two vacuum pumps for maintaining a vacuum in the chambers
HEAD HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH OTH REL REL REL TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH