A selective etch process is performed so as to form {TAIL ~ self aligned contact openings} that extend through the pre metal dielectric film and through the barrier layer in {HEAD ~ the core region} 
A selective etch process is performed so as to form { TAIL ~ self aligned contact openings } that extend through the pre metal dielectric film and through the barrier layer in { HEAD ~ the core region }
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH TAIL TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD