depositing a thin cap layer on said diffusion source layer to prevent {HEAD ~ the outdiffusion} of {TAIL ~ elemental constituents} comprising said structure, 
of
depositing a thin cap layer on said diffusion source layer to prevent { HEAD ~ the outdiffusion } of { TAIL ~ elemental constituents } comprising said structure ,
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD REL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH