According to the methods, exposure defects caused by an unsuitable stage velocity are reduced, and exposure defect areas can be re exposed after {HEAD ~ detection} of {TAIL ~ an exposure defect} 
of
According to the methods , exposure defects caused by an unsuitable stage velocity are reduced , and exposure defect areas can be re exposed after { HEAD ~ detection } of { TAIL ~ an exposure defect }
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD REL TAIL TAIL TAIL TAIL TAIL TAIL TAIL