{HEAD ~ A method} for making {TAIL ~ a passivation coated semiconductor structure} 1, further comprising: 
for making
{ HEAD ~ A method } for making { TAIL ~ a passivation coated semiconductor structure } 1 , further comprising :
HEAD HEAD HEAD HEAD HEAD HEAD REL REL TAIL TAIL TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH