{HEAD ~ High purity polysilicon granules} are prepared by depositing {TAIL ~ reaction gas} on silicon granules in a fluidized bed reactor having: 
are prepared by depositing
{ HEAD ~ High purity polysilicon granules } are prepared by depositing { TAIL ~ reaction gas } on silicon granules in a fluidized bed reactor having :
HEAD HEAD HEAD HEAD HEAD HEAD HEAD HEAD REL REL REL REL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH