Since the resist pattern thickening material of the present invention contains a compound represented by the General Formula , the resist pattern thickening material can exhibit an effect of thickening the resist pattern efficiently and uniformly, irrespective of the type and the size of {HEAD ~ a material} used for {TAIL ~ the resist pattern} and has less dependency on the type and the size of the material used for the resist pattern 
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Since the resist pattern thickening material of the present invention contains a compound represented by the General Formula , the resist pattern thickening material can exhibit an effect of thickening the resist pattern efficiently and uniformly , irrespective of the type and the size of { HEAD ~ a material } used for { TAIL ~ the resist pattern } and has less dependency on the type and the size of the material used for the resist pattern
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