FIGS 2 to 4 show {HEAD ~ one embodiment} of the method of manufacturing an imprinting template using {TAIL ~ a semiconductor manufacturing process} according to the present invention 
FIGS 2 to 4 show { HEAD ~ one embodiment } of the method of manufacturing an imprinting template using { TAIL ~ a semiconductor manufacturing process } according to the present invention
OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH OTH OTH OTH OTH OTH OTH OTH TAIL TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH