A photolithographic method 6 wherein {HEAD ~ said imagewise exposing} of {TAIL ~ said first layer} is done by computer controlling a thin beam of actinic radiation 
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A photolithographic method 6 wherein { HEAD ~ said imagewise exposing } of { TAIL ~ said first layer } is done by computer controlling a thin beam of actinic radiation
OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD REL TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH