The inspection area of the wafer is limited by the size of the e beam diameter and the detected X rays are limited by {HEAD ~ the number} of {TAIL ~ X rays} emitted from the excited volume of sample  
of
The inspection area of the wafer is limited by the size of the e beam diameter and the detected X rays are limited by { HEAD ~ the number } of { TAIL ~ X rays } emitted from the excited volume of sample
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD REL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH