In {TAIL ~ this case}, {HEAD ~ silicon nitride} is also deposited on the formed silicon nitride film 5, so that the thickness of the passivation film 5 of silicon nitride is increased 
In
In { TAIL ~ this case } , { HEAD ~ silicon nitride } is also deposited on the formed silicon nitride film 5 , so that the thickness of the passivation film 5 of silicon nitride is increased
REL TAIL TAIL TAIL TAIL TAIL TAIL OTH HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH