A method for fabricating {HEAD ~ semiconductor substrates} with {TAIL ~ resistivity} below 0.02 ohm cm is provided 
with
A method for fabricating { HEAD ~ semiconductor substrates } with { TAIL ~ resistivity } below 0.02 ohm cm is provided
OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD REL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH