According to another aspect of the present invention, there is provided an interface evaluation system of {HEAD ~ a type} measuring the interface steepness of stacked films by a secondary ion mass spectrometry, said interface evaluation system comprising: a unit for calculating the scatter, which is the reference of the interface steepness, from {TAIL ~ a result} of a secondary ion mass spectrometry of a subject element in the direction of the thickness; and a calculating unit for displaying said scatter with respect to the subject parameter of the secondary ion mass spectrometry 
According to another aspect of the present invention , there is provided an interface evaluation system of { HEAD ~ a type } measuring the interface steepness of stacked films by a secondary ion mass spectrometry , said interface evaluation system comprising : a unit for calculating the scatter , which is the reference of the interface steepness , from { TAIL ~ a result } of a secondary ion mass spectrometry of a subject element in the direction of the thickness ; and a calculating unit for displaying said scatter with respect to the subject parameter of the secondary ion mass spectrometry
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