{HEAD ~ The second laminate} is provided over {TAIL ~ the first laminate} and includes a second interlayer dielectric film having a mechanical strength higher than that of the first mechanical strength 
is provided over
{ HEAD ~ The second laminate } is provided over { TAIL ~ the first laminate } and includes a second interlayer dielectric film having a mechanical strength higher than that of the first mechanical strength
HEAD HEAD HEAD HEAD HEAD HEAD HEAD REL REL REL TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH