When dry etching is performed after wet etching, a throughput is increased compared to {HEAD ~ the case} of performing {TAIL ~ only dry etching} 
of performing
When dry etching is performed after wet etching , a throughput is increased compared to { HEAD ~ the case } of performing { TAIL ~ only dry etching }
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD REL REL TAIL TAIL TAIL TAIL TAIL TAIL TAIL