The spacer preferably comprises a material selected from {HEAD ~ the group} comprising {TAIL ~ refractory metal silicides} or their associated nitrides, such as, for example, titanium silicide, titanium nitride, and cobalt silicide 
comprising
The spacer preferably comprises a material selected from { HEAD ~ the group } comprising { TAIL ~ refractory metal silicides } or their associated nitrides , such as , for example , titanium silicide , titanium nitride , and cobalt silicide
OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD REL TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH