{TAIL ~ RF power supplies} 60 and 70, gas supply system 80, vacuum pump system 90 and {HEAD ~ workpiece handling} and robotic system 94 are all electronically connected to and controlled by a main control system 100 
{ TAIL ~ RF power supplies } 60 and 70 , gas supply system 80 , vacuum pump system 90 and { HEAD ~ workpiece handling } and robotic system 94 are all electronically connected to and controlled by a main control system 100
TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH