{HEAD ~ Self aligned contact openings} are formed that extend through the pre metal dielectric film and through {TAIL ~ the barrier layer} in the core region 
extend through
{ HEAD ~ Self aligned contact openings } are formed that extend through the pre metal dielectric film and through { TAIL ~ the barrier layer } in the core region
HEAD HEAD HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH OTH REL OTH OTH OTH OTH OTH OTH OTH REL TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH