{TAIL ~ At least one transverse pn reverse junction portion} is also formed during {HEAD ~ the regrowth performing step} 
{ TAIL ~ At least one transverse pn reverse junction portion } is also formed during { HEAD ~ the regrowth performing step }
TAIL TAIL TAIL TAIL TAIL TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD HEAD