The SAM is disposed around the semiconductor pattern and {HEAD ~ a conductive pattern} including {TAIL ~ the data line} 
including
The SAM is disposed around the semiconductor pattern and { HEAD ~ a conductive pattern } including { TAIL ~ the data line }
OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD REL TAIL TAIL TAIL TAIL TAIL TAIL TAIL