{HEAD ~ The present invention} has been made to solve {TAIL ~ the above problems}, and it is an object of the present invention to provide a substrate transferring apparatus appropriate for efficient transfer of a large area substrate 
made to solve
{ HEAD ~ The present invention } has been made to solve { TAIL ~ the above problems } , and it is an object of the present invention to provide a substrate transferring apparatus appropriate for efficient transfer of a large area substrate
HEAD HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH REL REL REL TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH