The lithographic apparatus may be of {HEAD ~ a type} having {TAIL ~ two or more substrate tables}  
having
The lithographic apparatus may be of { HEAD ~ a type } having { TAIL ~ two or more substrate tables }
OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD REL TAIL TAIL TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH