 stopping {HEAD ~ the depositing} of {TAIL ~ Al} when sufficient atoms of Al have been deposited to form the desired Al monolayer 
of
stopping { HEAD ~ the depositing } of { TAIL ~ Al } when sufficient atoms of Al have been deposited to form the desired Al monolayer
OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD REL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH