There is provided {TAIL ~ a method} of forming a damascene pattern including a via and a trench in a damascene process of forming {HEAD ~ a copper metal interconnection} 
There is provided { TAIL ~ a method } of forming a damascene pattern including a via and a trench in a damascene process of forming { HEAD ~ a copper metal interconnection }
OTH OTH OTH TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD HEAD