In some embodiments the top of the processing chamber is removable allowing users to remove {TAIL ~ either pedestals} or {HEAD ~ heater assemblies} 
In some embodiments the top of the processing chamber is removable allowing users to remove { TAIL ~ either pedestals } or { HEAD ~ heater assemblies }
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH TAIL TAIL TAIL TAIL TAIL TAIL OTH HEAD HEAD HEAD HEAD HEAD HEAD