For example, the transfer position 12 is a load port of a semiconductor processing apparatus, a station such as a stocker, or {HEAD ~ a buffer} for temporarily storing {TAIL ~ an article} 
for temporarily storing
For example , the transfer position 12 is a load port of a semiconductor processing apparatus , a station such as a stocker , or { HEAD ~ a buffer } for temporarily storing { TAIL ~ an article }
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD REL REL REL TAIL TAIL TAIL TAIL TAIL TAIL