{TAIL ~ The pressure range} of {HEAD ~ the cluster forming chamber} 410, the encapsulation chamber 429 and the deposition chamber 430 can be set to about 0.1–1 Torr, 10−4 Torr, and 10−6 Torr, respectively 
{ TAIL ~ The pressure range } of { HEAD ~ the cluster forming chamber } 410 , the encapsulation chamber 429 and the deposition chamber 430 can be set to about 0.1–1 Torr , 10−4 Torr , and 10−6 Torr , respectively
TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH