forming {TAIL ~ a layer} to be processed via a single or plural film layers on {HEAD ~ a substrate} 
forming { TAIL ~ a layer } to be processed via a single or plural film layers on { HEAD ~ a substrate }
OTH TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD