{HEAD ~ A sputtering target} producing {TAIL ~ few particles}, a backing plate or a sputtering apparatus, and a sputtering method producing few particles 
producing
{ HEAD ~ A sputtering target } producing { TAIL ~ few particles } , a backing plate or a sputtering apparatus , and a sputtering method producing few particles
HEAD HEAD HEAD HEAD HEAD HEAD HEAD REL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH