In one embodiment, the first sub portions are formed by ion implantation at {HEAD ~ a dose} about {TAIL ~ E13 cm−2} at an energy level about 25 80 
about
In one embodiment , the first sub portions are formed by ion implantation at { HEAD ~ a dose } about { TAIL ~ E13 cm−2 } at an energy level about 25 80
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD REL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH