{TAIL ~ The process} 1, wherein {HEAD ~ the deposited polysilicon granules} have a markedly spherical shape with sphericity values within the range of 0.85 to 1 
{ TAIL ~ The process } 1 , wherein { HEAD ~ the deposited polysilicon granules } have a markedly spherical shape with sphericity values within the range of 0.85 to 1
TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH