According to {TAIL ~ the method} of manufacturing the Si film, {HEAD ~ the Si film} may be manufactured by preparing a Si forming solution 
According to
According to { TAIL ~ the method } of manufacturing the Si film , { HEAD ~ the Si film } may be manufactured by preparing a Si forming solution
REL REL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH OTH OTH OTH OTH OTH OTH OTH