{TAIL ~ the insulative diffusion barrier layer} has oxygen, {HEAD ~ silicon} and nitrogen as main constituent elements, a concentration of the nitrogen being from 0.5 to 12.5 atm % 
{ TAIL ~ the insulative diffusion barrier layer } has oxygen , { HEAD ~ silicon } and nitrogen as main constituent elements , a concentration of the nitrogen being from 0.5 to 12.5 atm %
TAIL TAIL TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH HEAD HEAD HEAD HEAD HEAD OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH