In one embodiment, an apparatus for delivering {HEAD ~ gases} to {TAIL ~ a semiconductor processing system} includes a plurality of gas input lines each having an inlet port and a plurality of gas output lines each having an outlet port 
to
In one embodiment , an apparatus for delivering { HEAD ~ gases } to { TAIL ~ a semiconductor processing system } includes a plurality of gas input lines each having an inlet port and a plurality of gas output lines each having an outlet port
OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD REL TAIL TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH