A transport space for transporting a substrate without {HEAD ~ contamination} of {TAIL ~ the surface} of the substrate retained therein, which comprises: 
of
A transport space for transporting a substrate without { HEAD ~ contamination } of { TAIL ~ the surface } of the substrate retained therein , which comprises :
OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD REL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH