{TAIL ~ The step} of recessing the sidewalls recesses sidewalls of the intermediate structure relative to {HEAD ~ edge regions} of the first capping structure to form a sacrificial structure having recessed sidewalls 
{ TAIL ~ The step } of recessing the sidewalls recesses sidewalls of the intermediate structure relative to { HEAD ~ edge regions } of the first capping structure to form a sacrificial structure having recessed sidewalls
TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH