Thereafter, heat treatment of high temperature and short time by the RTA process is applied to thereby form {HEAD ~ diffused layers} 410, 411 of the source and {TAIL ~ drain regions} 
of
Thereafter , heat treatment of high temperature and short time by the RTA process is applied to thereby form { HEAD ~ diffused layers } 410 , 411 of the source and { TAIL ~ drain regions }
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH OTH REL OTH OTH OTH TAIL TAIL TAIL TAIL TAIL TAIL