Further, it is possible to improve {HEAD ~ a throughput} of {TAIL ~ the apparatus} in resist processing 
of
Further , it is possible to improve { HEAD ~ a throughput } of { TAIL ~ the apparatus } in resist processing
OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD REL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH