This invention relates to the field of integrated circuit processing, more particularly to {TAIL ~ micromechanical device fabrication}, including {HEAD ~ deformable micromirror devices} 
This invention relates to the field of integrated circuit processing , more particularly to { TAIL ~ micromechanical device fabrication } , including { HEAD ~ deformable micromirror devices }
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD