A substrate heating apparatus includes a ceramic base having {TAIL ~ a concave heating surface} on which {HEAD ~ a substrate} is placed, and a resistance heating element buried in the ceramic base 
on is placed
A substrate heating apparatus includes a ceramic base having { TAIL ~ a concave heating surface } on which { HEAD ~ a substrate } is placed , and a resistance heating element buried in the ceramic base
OTH OTH OTH OTH OTH OTH OTH OTH OTH TAIL TAIL TAIL TAIL TAIL TAIL TAIL TAIL REL OTH HEAD HEAD HEAD HEAD HEAD HEAD REL REL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH