{HEAD ~ The injection side feature}, through {TAIL ~ substrate fluid channel}, ejection side features, and controlling electrodes—are formed monolithically from a monocrystalline silicon substrate 
through
{ HEAD ~ The injection side feature } , through { TAIL ~ substrate fluid channel } , ejection side features , and controlling electrodes — are formed monolithically from a monocrystalline silicon substrate
HEAD HEAD HEAD HEAD HEAD HEAD HEAD HEAD OTH REL TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH