{HEAD ~ Method} for {TAIL ~ the deposition} and modification of thin films using a combination of vacuum arcs and plasma immersion ion implantation 
for
{ HEAD ~ Method } for { TAIL ~ the deposition } and modification of thin films using a combination of vacuum arcs and plasma immersion ion implantation
HEAD HEAD HEAD HEAD HEAD REL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH