The method for growing a superlattice structure on a substrate 11 wherein Al, Ga, and As are to be deposited on a substrate to form stacked monolayers of AlAs and GaAs and said step of causing the control means to include and not include {HEAD ~ respective ones} of the elements within the beam in {TAIL ~ a pre established pattern} of time periods includes the steps of: 
The method for growing a superlattice structure on a substrate 11 wherein Al , Ga , and As are to be deposited on a substrate to form stacked monolayers of AlAs and GaAs and said step of causing the control means to include and not include { HEAD ~ respective ones } of the elements within the beam in { TAIL ~ a pre established pattern } of time periods includes the steps of :
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