In {TAIL ~ the preoxidation cleaning step}, {HEAD ~ a solution} containing NH4F, HF, and H2O, a standard solution containing NH4OH, H2O2, and H2O, and HF are used 
In
In { TAIL ~ the preoxidation cleaning step } , { HEAD ~ a solution } containing NH4F , HF , and H2O , a standard solution containing NH4OH , H2O2 , and H2O , and HF are used
REL TAIL TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH