In one embodiment, a compressed substrate boat is configured to reduce {HEAD ~ pumping volume} in {TAIL ~ a batch processing chamber} 
in
In one embodiment , a compressed substrate boat is configured to reduce { HEAD ~ pumping volume } in { TAIL ~ a batch processing chamber }
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD REL TAIL TAIL TAIL TAIL TAIL TAIL TAIL TAIL