The method 10, wherein, in step , the average thickness of {TAIL ~ the Ta layer} is set to {HEAD ~ about 0.1 Å} or more and about 0.3 Å or less 
The method 10 , wherein , in step , the average thickness of { TAIL ~ the Ta layer } is set to { HEAD ~ about 0.1 Å } or more and about 0.3 Å or less
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH OTH OTH OTH OTH OTH OTH