{HEAD ~ A boat} loaded with wafers is moved from the loadlock chamber to {TAIL ~ the processing chamber}, with the boat being rotated while the source gas is supplied 
is moved to
{ HEAD ~ A boat } loaded with wafers is moved from the loadlock chamber to { TAIL ~ the processing chamber } , with the boat being rotated while the source gas is supplied
HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH OTH REL REL OTH OTH OTH OTH REL TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH