{HEAD ~ The lid portion} 88 includes {TAIL ~ a throughway} 92 to place the gas distribution assembly 46 in fluid communication with the process chamber 32 
includes
{ HEAD ~ The lid portion } 88 includes { TAIL ~ a throughway } 92 to place the gas distribution assembly 46 in fluid communication with the process chamber 32
HEAD HEAD HEAD HEAD HEAD HEAD HEAD OTH REL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH