{HEAD ~ The step} of removing portions of the first capping layer forms {TAIL ~ a first capping structure} that covers portions of the sacrificial layer 
forms
{ HEAD ~ The step } of removing portions of the first capping layer forms { TAIL ~ a first capping structure } that covers portions of the sacrificial layer
HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH OTH OTH OTH OTH OTH OTH REL TAIL TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH