The invention is {TAIL ~ a procedure} for making photodetectors using compound semiconductors formed on {HEAD ~ substrates} containing phosphorus 
The invention is { TAIL ~ a procedure } for making photodetectors using compound semiconductors formed on { HEAD ~ substrates } containing phosphorus
OTH OTH OTH TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD OTH OTH