{HEAD ~ a silicon nitride liner} on {TAIL ~ the sidewalls} and on the top surface of each gate electrode 
on
{ HEAD ~ a silicon nitride liner } on { TAIL ~ the sidewalls } and on the top surface of each gate electrode
HEAD HEAD HEAD HEAD HEAD HEAD HEAD HEAD REL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH