Method and {HEAD ~ system} for synchronizing {TAIL ~ chamber} down times by controlling transport sequencing in a process tool 
for synchronizing
Method and { HEAD ~ system } for synchronizing { TAIL ~ chamber } down times by controlling transport sequencing in a process tool
OTH OTH HEAD HEAD HEAD HEAD HEAD REL REL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH