{HEAD ~ The apparatus} comprises {TAIL ~ air injection modules}, which serve to float a substrate, and can be independently attached to or detached from the substrate transferring apparatus 
comprises
{ HEAD ~ The apparatus } comprises { TAIL ~ air injection modules } , which serve to float a substrate , and can be independently attached to or detached from the substrate transferring apparatus
HEAD HEAD HEAD HEAD HEAD HEAD REL TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH