The present invention achieves {HEAD ~ technical advantages} by using {TAIL ~ a nanoindenter type device} to determine localized mechanical properties of a substrate as a function of displacement depth or applied load of the nanoindenter tip into the substrate surface, and accurately predicting the electrical property stability of the substrate under test as a function of this data 
by using
The present invention achieves { HEAD ~ technical advantages } by using { TAIL ~ a nanoindenter type device } to determine localized mechanical properties of a substrate as a function of displacement depth or applied load of the nanoindenter tip into the substrate surface , and accurately predicting the electrical property stability of the substrate under test as a function of this data
OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD REL REL TAIL TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH