An apparatus is fabricated with a plurality of semiconductor device substrates and MEMS substrates with micromachined sensors, circuits, transducers, and {HEAD ~ MEMS devices} fabricated on {TAIL ~ the plurality} of substrates 
fabricated on
An apparatus is fabricated with a plurality of semiconductor device substrates and MEMS substrates with micromachined sensors , circuits , transducers , and { HEAD ~ MEMS devices } fabricated on { TAIL ~ the plurality } of substrates
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD REL REL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH