In processing a wafer W, {HEAD ~ the substrate processing apparatus} moves {TAIL ~ the fluid suppliers} 61, 62, 63 along the peripheral part of the wafer W relatively 
moves
In processing a wafer W , { HEAD ~ the substrate processing apparatus } moves { TAIL ~ the fluid suppliers } 61 , 62 , 63 along the peripheral part of the wafer W relatively
OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD HEAD REL TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH