The method 1, wherein the resistor material comprises {HEAD ~ tantalum nitride} and the dielectric layer comprises {TAIL ~ a polymer} 
The method 1 , wherein the resistor material comprises { HEAD ~ tantalum nitride } and the dielectric layer comprises { TAIL ~ a polymer }
OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH OTH OTH OTH TAIL TAIL TAIL TAIL TAIL TAIL