In {HEAD ~ accordance} with {TAIL ~ the invention}, a method of forming a compound film includes the steps of preparing a source material, depositing the source material on a base to form a precursor film, and heating the precursor film in a suitable atmosphere to form a film 
with
In { HEAD ~ accordance } with { TAIL ~ the invention } , a method of forming a compound film includes the steps of preparing a source material , depositing the source material on a base to form a precursor film , and heating the precursor film in a suitable atmosphere to form a film
OTH HEAD HEAD HEAD HEAD HEAD REL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH