The present invention processes an object by {TAIL ~ repeated irradiation} of {HEAD ~ divided laser beams} which have low energy, taking advantage of energy reduction due to laser beam division at the corners of the polygon mirror, which prevents damages of the object 
The present invention processes an object by { TAIL ~ repeated irradiation } of { HEAD ~ divided laser beams } which have low energy , taking advantage of energy reduction due to laser beam division at the corners of the polygon mirror , which prevents damages of the object
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