An apparatus for forming the coated substrate especially includes {HEAD ~ means} for forming {TAIL ~ the intermediate layer} and means for forming the hard carbon film in the same vacuum chamber 
for forming
An apparatus for forming the coated substrate especially includes { HEAD ~ means } for forming { TAIL ~ the intermediate layer } and means for forming the hard carbon film in the same vacuum chamber
OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD REL REL TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH