Resist composition comprising {HEAD ~ a siloxane or silsesquioxane polymer} having {TAIL ~ silanol groups} in a composition with a naphthoquinone compound 
having
Resist composition comprising { HEAD ~ a siloxane or silsesquioxane polymer } having { TAIL ~ silanol groups } in a composition with a naphthoquinone compound
OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD HEAD HEAD REL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH