A process for forming a low dielectric constant insulation layer on {HEAD ~ an integrated circuit structure} on {TAIL ~ a semiconductor wafer} which comprises: 
on
A process for forming a low dielectric constant insulation layer on { HEAD ~ an integrated circuit structure } on { TAIL ~ a semiconductor wafer } which comprises :
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD HEAD REL TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH