A gas coming into contact with a base material or substrate is purified by dust removing apparatus and adsorption and absorption apparatus so that {HEAD ~ the concentration} of fine particles in the gas is below {TAIL ~ class} 1,000 and a non methane hydrocarbon concentration is below 0.2 ppm 
is below
A gas coming into contact with a base material or substrate is purified by dust removing apparatus and adsorption and absorption apparatus so that { HEAD ~ the concentration } of fine particles in the gas is below { TAIL ~ class } 1,000 and a non methane hydrocarbon concentration is below 0.2 ppm
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH OTH OTH OTH OTH REL REL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH