A hydrogenated thin film is formed in a controlled vacuum on a substrate by evaporating {TAIL ~ one or more solid materials} and passing {HEAD ~ the resulting vapor} and a hydrogen containing gas into a space between two electrodes 
A hydrogenated thin film is formed in a controlled vacuum on a substrate by evaporating { TAIL ~ one or more solid materials } and passing { HEAD ~ the resulting vapor } and a hydrogen containing gas into a space between two electrodes
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH TAIL TAIL TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH