A wafer transfer device or boat and semiconductor cleaning apparatus including {TAIL ~ a wafer transfer device} and {HEAD ~ a heatable reaction core} is provided 
A wafer transfer device or boat and semiconductor cleaning apparatus including { TAIL ~ a wafer transfer device } and { HEAD ~ a heatable reaction core } is provided
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH TAIL TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH