Method for the deposition and modification of {HEAD ~ thin films} using {TAIL ~ a combination} of vacuum arcs and plasma immersion ion implantation 
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Method for the deposition and modification of { HEAD ~ thin films } using { TAIL ~ a combination } of vacuum arcs and plasma immersion ion implantation
OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD REL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH