This two step impurity induced disordering {HEAD ~ anneal process} enhances the amount of and {TAIL ~ depth} of impurity species or diffusant penetration into the crystalline structure undergoing IID treatment 
enhances
This two step impurity induced disordering { HEAD ~ anneal process } enhances the amount of and { TAIL ~ depth } of impurity species or diffusant penetration into the crystalline structure undergoing IID treatment
OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD REL OTH OTH OTH OTH TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH