In another embodiment, {HEAD ~ a substrate boat} having {TAIL ~ removable substrate holder} is configured to provide susceptors without dramatically increasing pumping volume 
having
In another embodiment , { HEAD ~ a substrate boat } having { TAIL ~ removable substrate holder } is configured to provide susceptors without dramatically increasing pumping volume
OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD REL TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH