A spacer material is formed to entirely cover the second cap layer, {TAIL ~ the fin} shaped structure and {HEAD ~ the substrate} 
A spacer material is formed to entirely cover the second cap layer , { TAIL ~ the fin } shaped structure and { HEAD ~ the substrate }
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD