The low resistance layer 316 reduces {HEAD ~ resistance} of {TAIL ~ a gate} and may be a metal silicide such as tungsten silicide  
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The low resistance layer 316 reduces { HEAD ~ resistance } of { TAIL ~ a gate } and may be a metal silicide such as tungsten silicide
OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD REL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH