In processing a wafer W, the substrate processing apparatus moves the fluid suppliers 61, 62, 63 along {HEAD ~ the peripheral part} of {TAIL ~ the wafer W} relatively 
of
In processing a wafer W , the substrate processing apparatus moves the fluid suppliers 61 , 62 , 63 along { HEAD ~ the peripheral part } of { TAIL ~ the wafer W } relatively
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD REL TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH