At a lower position for the pedestal wafers may be transferred to and from the processing station, and at an upper position for the pedestal the pedestal forms an annular pumping passage with {HEAD ~ a lower circular opening} in {TAIL ~ a processing chamber} 
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At a lower position for the pedestal wafers may be transferred to and from the processing station , and at an upper position for the pedestal the pedestal forms an annular pumping passage with { HEAD ~ a lower circular opening } in { TAIL ~ a processing chamber }
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD HEAD REL TAIL TAIL TAIL TAIL TAIL TAIL TAIL