{HEAD ~ This invention} is in the field of apparatus and methods for performing Chemical Vapor Deposition , and relates more particularly to {TAIL ~ Atomic Layer Deposition Processes} 
relates particularly to
{ HEAD ~ This invention } is in the field of apparatus and methods for performing Chemical Vapor Deposition , and relates more particularly to { TAIL ~ Atomic Layer Deposition Processes }
HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH REL OTH REL REL TAIL TAIL TAIL TAIL TAIL TAIL TAIL TAIL