The FIG 1 embodiment includes {HEAD ~ a liquid jet type X ray generating device} 1 located at {TAIL ~ the most upstream portion} of the depicted optical system of the exposure apparatus 
located at
The FIG 1 embodiment includes { HEAD ~ a liquid jet type X ray generating device } 1 located at { TAIL ~ the most upstream portion } of the depicted optical system of the exposure apparatus
OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD HEAD HEAD HEAD HEAD HEAD OTH REL REL TAIL TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH