{HEAD ~ The method} 13 wherein {TAIL ~ the precursor} comprises silicon and oxygen, and wherein the desired material is silicon dioxide 
wherein
{ HEAD ~ The method } 13 wherein { TAIL ~ the precursor } comprises silicon and oxygen , and wherein the desired material is silicon dioxide
HEAD HEAD HEAD HEAD HEAD HEAD OTH REL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH