Subsequently, {HEAD ~ the substrate} is heated to {TAIL ~ about 450 ° C.} and the coating film is irradiated with, e.g., ultraviolet radiation having a wavelength of 172 nm 
is heated to
Subsequently , { HEAD ~ the substrate } is heated to { TAIL ~ about 450 ° C. } and the coating film is irradiated with , e.g. , ultraviolet radiation having a wavelength of 172 nm
OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD REL REL REL TAIL TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH