An object of {TAIL ~ the invention}, therefore, was to provide {HEAD ~ a process} for the continuous production of high purity, homogenously polycrystalline silicon granules in which wall deposition is greatly reduced, or wholly suppressed, such that efficient heating of the fluidized bed and a long operating campaign of the reactor are made possible 
An object of { TAIL ~ the invention } , therefore , was to provide { HEAD ~ a process } for the continuous production of high purity , homogenously polycrystalline silicon granules in which wall deposition is greatly reduced , or wholly suppressed , such that efficient heating of the fluidized bed and a long operating campaign of the reactor are made possible
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