These openings are then filled with conductive material to form {HEAD ~ self aligned contacts} within {TAIL ~ the core region} 
within
These openings are then filled with conductive material to form { HEAD ~ self aligned contacts } within { TAIL ~ the core region }
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD REL TAIL TAIL TAIL TAIL TAIL TAIL TAIL