213B. Consequently, the distribution of substrates to the chambers corresponding to step 3 may be accomplished on the basis of the previously determined percentages, thereby also synchronizing the down time of chamber 213A of step 3 with {HEAD ~ the down times} of {TAIL ~ the chambers} 211A, 212A 
of
213B. Consequently , the distribution of substrates to the chambers corresponding to step 3 may be accomplished on the basis of the previously determined percentages , thereby also synchronizing the down time of chamber 213A of step 3 with { HEAD ~ the down times } of { TAIL ~ the chambers } 211A , 212A
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