{TAIL ~ The inspection area} of the wafer is limited by the size of the e beam diameter and the detected X rays are limited by the number of X rays emitted from {HEAD ~ the excited volume} of sample  
{ TAIL ~ The inspection area } of the wafer is limited by the size of the e beam diameter and the detected X rays are limited by the number of X rays emitted from { HEAD ~ the excited volume } of sample
TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH OTH