The apparatus for treating {HEAD ~ the effluent fluid stream} from {TAIL ~ one or more semiconductor manufacturing process tools} 17, wherein said halogen containing components comprise perfluorocarbons 
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The apparatus for treating { HEAD ~ the effluent fluid stream } from { TAIL ~ one or more semiconductor manufacturing process tools } 17 , wherein said halogen containing components comprise perfluorocarbons
OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD HEAD REL TAIL TAIL TAIL TAIL TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH