{HEAD ~ A developed photoresist layer} 59 is used to define {TAIL ~ the opposing lateral margins} of the implant 
is used to define
{ HEAD ~ A developed photoresist layer } 59 is used to define { TAIL ~ the opposing lateral margins } of the implant
HEAD HEAD HEAD HEAD HEAD HEAD HEAD HEAD OTH REL REL REL REL TAIL TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH