The first blocking layer contains 1×10 4 to 1.0 atomic % of {HEAD ~ a Group III or V element} in {TAIL ~ the Periodic Table} 
in
The first blocking layer contains 1×10 4 to 1.0 atomic % of { HEAD ~ a Group III or V element } in { TAIL ~ the Periodic Table }
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD HEAD HEAD HEAD REL TAIL TAIL TAIL TAIL TAIL TAIL TAIL