{HEAD ~ The coated substrate} 1, wherein {TAIL ~ said intermediate layer} is mainly composed of Ru 
wherein
{ HEAD ~ The coated substrate } 1 , wherein { TAIL ~ said intermediate layer } is mainly composed of Ru
HEAD HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH REL TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH