Here, the etch stopping layer 12 is formed of {HEAD ~ a material} having an excellent etching selectivity to {TAIL ~ the mold silicon oxide layer} 14 
Here , the etch stopping layer 12 is formed of { HEAD ~ a material } having an excellent etching selectivity to { TAIL ~ the mold silicon oxide layer } 14
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH OTH OTH OTH OTH TAIL TAIL TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH