{HEAD ~ A gas} coming into {TAIL ~ contact} with a base material or substrate is purified by dust removing apparatus and adsorption and absorption apparatus so that the concentration of fine particles in the gas is below class 1,000 and a non methane hydrocarbon concentration is below 0.2 ppm 
coming into
{ HEAD ~ A gas } coming into { TAIL ~ contact } with a base material or substrate is purified by dust removing apparatus and adsorption and absorption apparatus so that the concentration of fine particles in the gas is below class 1,000 and a non methane hydrocarbon concentration is below 0.2 ppm
HEAD HEAD HEAD HEAD HEAD HEAD REL REL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH