A method for manufacturing an electron source 1, wherein {HEAD ~ the electron source} comprises {TAIL ~ a plurality} of electron emitting elements, and the relationship 1≧Sout≧4·n·Sact1−Cin is satisfied, where Sact1 is a consumption rate of the gas for each element, and n is a number of elements simultaneously subjected to the step of forming the carbon film 
comprises
A method for manufacturing an electron source 1 , wherein { HEAD ~ the electron source } comprises { TAIL ~ a plurality } of electron emitting elements , and the relationship 1≧Sout≧4·n·Sact1−Cin is satisfied , where Sact1 is a consumption rate of the gas for each element , and n is a number of elements simultaneously subjected to the step of forming the carbon film
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD REL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH