In accordance with the invention, a method of forming a compound film includes the steps of preparing a source material, depositing {TAIL ~ the source material} on a base to form a precursor film, and heating the precursor film in a suitable atmosphere to form {HEAD ~ a film} 
In accordance with the invention , a method of forming a compound film includes the steps of preparing a source material , depositing { TAIL ~ the source material } on a base to form a precursor film , and heating the precursor film in a suitable atmosphere to form { HEAD ~ a film }
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD