{TAIL ~ A method} in accordance 10 wherein said wordlines are formed of polysilicon deposited by {HEAD ~ chemical vapor deposition} followed by doping 
{ TAIL ~ A method } in accordance 10 wherein said wordlines are formed of polysilicon deposited by { HEAD ~ chemical vapor deposition } followed by doping
TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH OTH