Finally, logic causes control apparatus to include and not include respective ones of the materials within {HEAD ~ the beam} in a pre established pattern of time periods which will cause the materials to be deposited on the steps in a series of {TAIL ~ stacked monolayers} 
Finally , logic causes control apparatus to include and not include respective ones of the materials within { HEAD ~ the beam } in a pre established pattern of time periods which will cause the materials to be deposited on the steps in a series of { TAIL ~ stacked monolayers }
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH TAIL TAIL TAIL TAIL TAIL TAIL