To form the cap layer, resist layers are deposited and patterned, and {TAIL ~ material layers} are deposited over {HEAD ~ the resist layers} 
To form the cap layer , resist layers are deposited and patterned , and { TAIL ~ material layers } are deposited over { HEAD ~ the resist layers }
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD