The process consists of {HEAD ~ a step} of placing a plurality of wafers in a shrouded quartz boat or wafer carrier having a plurality of slots cut in {TAIL ~ the walls} thereof to admit reactant gases to the vicinity of the wafers 
The process consists of { HEAD ~ a step } of placing a plurality of wafers in a shrouded quartz boat or wafer carrier having a plurality of slots cut in { TAIL ~ the walls } thereof to admit reactant gases to the vicinity of the wafers
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