Moreover, although CF based reaction products may be generated by the plasma of CF4 gas, {HEAD ~ the amount} of {TAIL ~ CF based reaction products} generated by the plasma of CF4 gas is considerably smaller than the amount of CF based reaction products generated by a plasma of C4F8 gas or C4F6 gas 
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Moreover , although CF based reaction products may be generated by the plasma of CF4 gas , { HEAD ~ the amount } of { TAIL ~ CF based reaction products } generated by the plasma of CF4 gas is considerably smaller than the amount of CF based reaction products generated by a plasma of C4F8 gas or C4F6 gas
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD REL TAIL TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH