depositing a thin cap layer on said diffusion source layer to prevent the outdiffusion of {HEAD ~ elemental constituents} comprising {TAIL ~ said structure}, 
comprising
depositing a thin cap layer on said diffusion source layer to prevent the outdiffusion of { HEAD ~ elemental constituents } comprising { TAIL ~ said structure } ,
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD REL TAIL TAIL TAIL TAIL TAIL TAIL OTH