{HEAD ~ The storage node} is formed over word lines beginning with a deposition and {TAIL ~ planarization} of an insulator or composite insulator 
{ HEAD ~ The storage node } is formed over word lines beginning with a deposition and { TAIL ~ planarization } of an insulator or composite insulator
HEAD HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH