According to the present invention, it is possible to reduce {TAIL ~ the occurrence} of threading {HEAD ~ edge dislocation} arrays in SiC epitaxial film of epitaxial SiC single crystal substrates 
According to the present invention , it is possible to reduce { TAIL ~ the occurrence } of threading { HEAD ~ edge dislocation } arrays in SiC epitaxial film of epitaxial SiC single crystal substrates
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH