A mixture of silane, phosphine and boron trichloride is flowed into the reactor tube through {HEAD ~ a first pair} of {TAIL ~ silane injectors} 
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A mixture of silane , phosphine and boron trichloride is flowed into the reactor tube through { HEAD ~ a first pair } of { TAIL ~ silane injectors }
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD REL TAIL TAIL TAIL TAIL TAIL TAIL