The step of removing portions of the first capping layer forms {HEAD ~ a first capping structure} that covers {TAIL ~ portions} of the sacrificial layer 
covers
The step of removing portions of the first capping layer forms { HEAD ~ a first capping structure } that covers { TAIL ~ portions } of the sacrificial layer
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD HEAD OTH REL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH