While the plasma is generated in the space between the electrodes, the vapor passes through the second electrode and the hydrogen containing gas is introduced into {HEAD ~ the space} between {TAIL ~ the electrodes}, a thin film of hydrogenated material is formed on the substrate 
between
While the plasma is generated in the space between the electrodes , the vapor passes through the second electrode and the hydrogen containing gas is introduced into { HEAD ~ the space } between { TAIL ~ the electrodes } , a thin film of hydrogenated material is formed on the substrate
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD REL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH