A process for depositing porous silicon oxide based films using a sol gel approach utilizing a precursor solution formulation which includes a purified nonionic surfactant and an additive among other components, where the additive is either an ionic additive or an amine additive which forms {TAIL ~ an ionic ammonium type salt} in {HEAD ~ the acidic precursor solution} 
A process for depositing porous silicon oxide based films using a sol gel approach utilizing a precursor solution formulation which includes a purified nonionic surfactant and an additive among other components , where the additive is either an ionic additive or an amine additive which forms { TAIL ~ an ionic ammonium type salt } in { HEAD ~ the acidic precursor solution }
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