Finally, logic causes control apparatus to include and not include respective ones of the materials within the beam in a pre established pattern of time periods which will cause the materials to be deposited on {HEAD ~ the steps} in {TAIL ~ a series} of stacked monolayers 
in
Finally , logic causes control apparatus to include and not include respective ones of the materials within the beam in a pre established pattern of time periods which will cause the materials to be deposited on { HEAD ~ the steps } in { TAIL ~ a series } of stacked monolayers
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD REL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH