The present invention generally relates to {HEAD ~ apparatus} and methods of transferring and supporting {TAIL ~ substrates} in a batch processing chamber 
of supporting
The present invention generally relates to { HEAD ~ apparatus } and methods of transferring and supporting { TAIL ~ substrates } in a batch processing chamber
OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD OTH OTH REL OTH OTH REL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH