The method 1, wherein the source material of step b) is vaporized at a temperature within a range of {HEAD ~ 155° C.} to {TAIL ~ 165° C} 
to
The method 1 , wherein the source material of step b ) is vaporized at a temperature within a range of { HEAD ~ 155 ° C. } to { TAIL ~ 165 ° C }
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD REL TAIL TAIL TAIL TAIL TAIL TAIL TAIL