The present invention processes an object by repeated irradiation of divided laser beams which have low energy, taking advantage of energy reduction due to {HEAD ~ laser beam division} at {TAIL ~ the corners} of the polygon mirror, which prevents damages of the object 
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The present invention processes an object by repeated irradiation of divided laser beams which have low energy , taking advantage of energy reduction due to { HEAD ~ laser beam division } at { TAIL ~ the corners } of the polygon mirror , which prevents damages of the object
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