second source/drain regions of {HEAD ~ the first conductivity type} having {TAIL ~ shallower depth} than those of said first source/drain regions, said second source/drain regions being formed below said first silicate glass layer 
having
second source / drain regions of { HEAD ~ the first conductivity type } having { TAIL ~ shallower depth } than those of said first source / drain regions , said second source / drain regions being formed below said first silicate glass layer
OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD HEAD REL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH