In a semiconductor sensor having a membrane structure, the destruction of the membrane caused by {TAIL ~ the expansion} or {HEAD ~ contraction} of a fluid within a hollow part formed under the membrane while the sensor is in use is prevented 
In a semiconductor sensor having a membrane structure , the destruction of the membrane caused by { TAIL ~ the expansion } or { HEAD ~ contraction } of a fluid within a hollow part formed under the membrane while the sensor is in use is prevented
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH TAIL TAIL TAIL TAIL TAIL TAIL OTH HEAD HEAD HEAD HEAD HEAD OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH