an inspection condition creation means for creating inspection conditions corresponding to a charge up phenomenon on {HEAD ~ a surface} of {TAIL ~ the object} 
of
an inspection condition creation means for creating inspection conditions corresponding to a charge up phenomenon on { HEAD ~ a surface } of { TAIL ~ the object }
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD REL TAIL TAIL TAIL TAIL TAIL TAIL