A hydrogenated thin film is formed in {HEAD ~ a controlled vacuum} on a substrate by evaporating one or more solid materials and passing the resulting vapor and a hydrogen containing gas into {TAIL ~ a space} between two electrodes 
A hydrogenated thin film is formed in { HEAD ~ a controlled vacuum } on a substrate by evaporating one or more solid materials and passing the resulting vapor and a hydrogen containing gas into { TAIL ~ a space } between two electrodes
OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH