The concentrations of predetermined components of {TAIL ~ a chemical solution} 5 present in a cleaning bath 1 are measured by {HEAD ~ a measurement unit} 11 
The concentrations of predetermined components of { TAIL ~ a chemical solution } 5 present in a cleaning bath 1 are measured by { HEAD ~ a measurement unit } 11
OTH OTH OTH OTH OTH OTH TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD OTH