a second silicate glass layer as a second solid phase diffusion source containing {HEAD ~ an impurity} of {TAIL ~ the first conductivity type}, said second silicate glass layer being provided on both sides of said second gate electrode 
of
a second silicate glass layer as a second solid phase diffusion source containing { HEAD ~ an impurity } of { TAIL ~ the first conductivity type } , said second silicate glass layer being provided on both sides of said second gate electrode
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD REL TAIL TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH