In general, in another aspect, the invention features {HEAD ~ a nano electromechanical energy conversion assembly} including a piezoelectric flexible membrane supported on at least two sides by {TAIL ~ a chamber} 
In general , in another aspect , the invention features { HEAD ~ a nano electromechanical energy conversion assembly } including a piezoelectric flexible membrane supported on at least two sides by { TAIL ~ a chamber }
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH TAIL TAIL TAIL TAIL TAIL TAIL