The microvalves can be formed in semiconductor materials by {HEAD ~ simplified methods} utilizing {TAIL ~ a reduced number} of masking levels 
utilizing
The microvalves can be formed in semiconductor materials by { HEAD ~ simplified methods } utilizing { TAIL ~ a reduced number } of masking levels
OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD REL TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH