{TAIL ~ A gate dielectric layer} 14 is formed over the semiconductor substrate 10 including {HEAD ~ the lower pillar} 11C 
{ TAIL ~ A gate dielectric layer } 14 is formed over the semiconductor substrate 10 including { HEAD ~ the lower pillar } 11C
TAIL TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD OTH