If exposure of {HEAD ~ all} of {TAIL ~ the pattern portions} of the die are successfully completed, then processing is terminated 
of
If exposure of { HEAD ~ all } of { TAIL ~ the pattern portions } of the die are successfully completed , then processing is terminated
OTH OTH OTH HEAD HEAD HEAD HEAD HEAD REL TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH