An apparatus and method for forming a HSG silicon layer on {HEAD ~ a capacitor lower electrode} of {TAIL ~ a semiconductor memory device} 
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An apparatus and method for forming a HSG silicon layer on { HEAD ~ a capacitor lower electrode } of { TAIL ~ a semiconductor memory device }
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD HEAD REL TAIL TAIL TAIL TAIL TAIL TAIL TAIL TAIL