A method and {HEAD ~ apparatus} for defining {TAIL ~ a circuit operation}, such as a charged particle beam operation to perform a circuit edit and define a probe point 
for defining
A method and { HEAD ~ apparatus } for defining { TAIL ~ a circuit operation } , such as a charged particle beam operation to perform a circuit edit and define a probe point
OTH OTH OTH HEAD HEAD HEAD HEAD HEAD REL REL TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH