The apparatus for treating the effluent fluid stream from {HEAD ~ one or more semiconductor manufacturing process tools} 17, wherein {TAIL ~ said halogen containing components} comprise perfluorocarbons 
wherein
The apparatus for treating the effluent fluid stream from { HEAD ~ one or more semiconductor manufacturing process tools } 17 , wherein { TAIL ~ said halogen containing components } comprise perfluorocarbons
OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH REL TAIL TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH