{TAIL ~ A gate dielectric layer} 14 is formed over {HEAD ~ the semiconductor substrate} 10 including the lower pillar 11C 
{ TAIL ~ A gate dielectric layer } 14 is formed over { HEAD ~ the semiconductor substrate } 10 including the lower pillar 11C
TAIL TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH OTH OTH OTH OTH