The spacer material is etched, so that the sidewalls of {TAIL ~ the second cap layer} are exposed and {HEAD ~ a spacer} is formed beside the gate structure 
The spacer material is etched , so that the sidewalls of { TAIL ~ the second cap layer } are exposed and { HEAD ~ a spacer } is formed beside the gate structure
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH TAIL TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH OTH OTH OTH OTH