{HEAD ~ first source/drain regions} of {TAIL ~ the first conductivity type} formed in the outward portions from said first silicate glass layer in the primary surface of said substrate 
of
{ HEAD ~ first source / drain regions } of { TAIL ~ the first conductivity type } formed in the outward portions from said first silicate glass layer in the primary surface of said substrate
HEAD HEAD HEAD HEAD HEAD HEAD HEAD HEAD HEAD REL TAIL TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH