There is provided {TAIL ~ a method} of forming a damascene pattern including {HEAD ~ a via} and a trench in a damascene process of forming a copper metal interconnection 
There is provided { TAIL ~ a method } of forming a damascene pattern including { HEAD ~ a via } and a trench in a damascene process of forming a copper metal interconnection
OTH OTH OTH TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH