The substrate boat 13, wherein each of the plurality of substrate supports has a plurality of {TAIL ~ openings} along {HEAD ~ a perimeter} configured to accommodate the substrate holder 
The substrate boat 13 , wherein each of the plurality of substrate supports has a plurality of { TAIL ~ openings } along { HEAD ~ a perimeter } configured to accommodate the substrate holder
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH TAIL TAIL TAIL TAIL TAIL OTH HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH OTH OTH OTH OTH