{TAIL ~ The method} 1, wherein the grooves are formed by irradiating {HEAD ~ the laser beams} while changing irradiation directions in a state wherein the semiconductor package is fixed 
{ TAIL ~ The method } 1 , wherein the grooves are formed by irradiating { HEAD ~ the laser beams } while changing irradiation directions in a state wherein the semiconductor package is fixed
TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH