Accordingly, {HEAD ~ the complementary microstructures} may be superimposed in a controlled manner by {TAIL ~ operation} of micro alignment means also formed in the substrate by an etching or similar process 
superimposed by
Accordingly , { HEAD ~ the complementary microstructures } may be superimposed in a controlled manner by { TAIL ~ operation } of micro alignment means also formed in the substrate by an etching or similar process
OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH REL OTH OTH OTH OTH REL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH