In {TAIL ~ some embodiments} {HEAD ~ the top} of the processing chamber is removable allowing users to remove either pedestals or heater assemblies 
In
In { TAIL ~ some embodiments } { HEAD ~ the top } of the processing chamber is removable allowing users to remove either pedestals or heater assemblies
REL TAIL TAIL TAIL TAIL TAIL TAIL HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH