In accordance with the invention, a method of forming a compound film includes the steps of preparing a source material, depositing the source material on a base to form a precursor film, and heating the precursor film in {HEAD ~ a suitable atmosphere} to form {TAIL ~ a film} 
to form
In accordance with the invention , a method of forming a compound film includes the steps of preparing a source material , depositing the source material on a base to form a precursor film , and heating the precursor film in { HEAD ~ a suitable atmosphere } to form { TAIL ~ a film }
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD REL REL TAIL TAIL TAIL TAIL TAIL TAIL