While {TAIL ~ each} of the above embodiments and examples has been described with reference to {HEAD ~ an ECR plasma generator} serving as plasma generation means, the present invention is not restricted to this but another plasma CVD apparatus such as a high frequency plasma CVD apparatus or a DC plasma CVD apparatus is also employable 
While { TAIL ~ each } of the above embodiments and examples has been described with reference to { HEAD ~ an ECR plasma generator } serving as plasma generation means , the present invention is not restricted to this but another plasma CVD apparatus such as a high frequency plasma CVD apparatus or a DC plasma CVD apparatus is also employable
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