{HEAD ~ The method} includes the actual ion beam processing step combined with the thermal and chemical conditioning of the ion source and {TAIL ~ a special cleaning step} 
includes
{ HEAD ~ The method } includes the actual ion beam processing step combined with the thermal and chemical conditioning of the ion source and { TAIL ~ a special cleaning step }
HEAD HEAD HEAD HEAD HEAD HEAD REL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH TAIL TAIL TAIL TAIL TAIL TAIL TAIL TAIL