a second silicate glass layer as a second solid phase diffusion source containing {TAIL ~ an impurity} of {HEAD ~ the first conductivity type}, said second silicate glass layer being provided on both sides of said second gate electrode 
a second silicate glass layer as a second solid phase diffusion source containing { TAIL ~ an impurity } of { HEAD ~ the first conductivity type } , said second silicate glass layer being provided on both sides of said second gate electrode
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH TAIL TAIL TAIL TAIL TAIL TAIL OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH