{TAIL ~ The method} 1, wherein the resistor material comprises tantalum nitride and the dielectric layer comprises {HEAD ~ a polymer} 
{ TAIL ~ The method } 1 , wherein the resistor material comprises tantalum nitride and the dielectric layer comprises { HEAD ~ a polymer }
TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD