In {TAIL ~ this manner}, {HEAD ~ a crystalline silicon film} having a necessary degree of crystallinity in a selective manner can be obtained 
In
In { TAIL ~ this manner } , { HEAD ~ a crystalline silicon film } having a necessary degree of crystallinity in a selective manner can be obtained
REL TAIL TAIL TAIL TAIL TAIL TAIL OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH