The method for producing {HEAD ~ a resist pattern} of {TAIL ~ the present invention} includes steps of: 
of
The method for producing { HEAD ~ a resist pattern } of { TAIL ~ the present invention } includes steps of :
OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD REL TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH