{HEAD ~ The second alignment system} 400 may be formed in the interior or {TAIL ~ exterior} of the vacuum processing chamber 110 
formed in
{ HEAD ~ The second alignment system } 400 may be formed in the interior or { TAIL ~ exterior } of the vacuum processing chamber 110
HEAD HEAD HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH OTH REL REL OTH OTH OTH TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH