A cluster tool may be operated on the basis of an enhanced sequencing regime in which {HEAD ~ the supply} of substrates is controlled such that {TAIL ~ a planned time} of maintenance is reached for two or more process chambers simultaneously 
is controlled such that
A cluster tool may be operated on the basis of an enhanced sequencing regime in which { HEAD ~ the supply } of substrates is controlled such that { TAIL ~ a planned time } of maintenance is reached for two or more process chambers simultaneously
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH REL REL REL REL TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH