Note that even this wafer W can be {HEAD ~ a wafer} of having {TAIL ~ improved flatness} when the wafer W is planarized by applying a PACE method 
of having
Note that even this wafer W can be { HEAD ~ a wafer } of having { TAIL ~ improved flatness } when the wafer W is planarized by applying a PACE method
OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD REL REL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH