Successive etching processes form {HEAD ~ a plurality} of partially etched cavities extending from a front surface of the cap wafer into {TAIL ~ the cap wafer}  
Successive etching processes form { HEAD ~ a plurality } of partially etched cavities extending from a front surface of the cap wafer into { TAIL ~ the cap wafer }
OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH