In {TAIL ~ one embodiment}, a compressed substrate boat is configured to reduce {HEAD ~ pumping volume} in a batch processing chamber 
In { TAIL ~ one embodiment } , a compressed substrate boat is configured to reduce { HEAD ~ pumping volume } in a batch processing chamber
OTH TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH OTH OTH OTH