{HEAD ~ A cluster tool} may be operated on the basis of an enhanced sequencing regime in which {TAIL ~ the supply} of substrates is controlled such that a planned time of maintenance is reached for two or more process chambers simultaneously 
{ HEAD ~ A cluster tool } may be operated on the basis of an enhanced sequencing regime in which { TAIL ~ the supply } of substrates is controlled such that a planned time of maintenance is reached for two or more process chambers simultaneously
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