The method 1, wherein the source material of {HEAD ~ step} b) is vaporized at a temperature within a range of {TAIL ~ 155° C.} to 165° C 
The method 1 , wherein the source material of { HEAD ~ step } b ) is vaporized at a temperature within a range of { TAIL ~ 155 ° C. } to 165 ° C
OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH