At a lower position for the pedestal wafers may be transferred to and from the processing station, and at an upper position for the pedestal the pedestal forms {TAIL ~ an annular pumping passage} with a lower circular opening in {HEAD ~ a processing chamber} 
At a lower position for the pedestal wafers may be transferred to and from the processing station , and at an upper position for the pedestal the pedestal forms { TAIL ~ an annular pumping passage } with a lower circular opening in { HEAD ~ a processing chamber }
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH TAIL TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD