The device 17, wherein {TAIL ~ the downstream optical system} comprises {HEAD ~ an illumination optical system} of an X ray exposure apparatus 
The device 17 , wherein { TAIL ~ the downstream optical system } comprises { HEAD ~ an illumination optical system } of an X ray exposure apparatus
OTH OTH OTH OTH OTH TAIL TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH OTH OTH OTH OTH