A method for manufacturing {HEAD ~ an electron source} 1, wherein the electron source comprises a plurality of electron emitting elements, and the relationship 1≧Sout≧4·n·Sact1−Cin is satisfied, where Sact1 is a consumption rate of the gas for each element, and n is a number of {TAIL ~ elements} simultaneously subjected to the step of forming the carbon film 
A method for manufacturing { HEAD ~ an electron source } 1 , wherein the electron source comprises a plurality of electron emitting elements , and the relationship 1≧Sout≧4·n·Sact1−Cin is satisfied , where Sact1 is a consumption rate of the gas for each element , and n is a number of { TAIL ~ elements } simultaneously subjected to the step of forming the carbon film
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