This first source/drain implant is performed, for example, with phosphorus, at {HEAD ~ an energy} of {TAIL ~ approximately 80 KeV} and a dose of approximately 4×1014 cm 2 
of
This first source / drain implant is performed , for example , with phosphorus , at { HEAD ~ an energy } of { TAIL ~ approximately 80 KeV } and a dose of approximately 4×1014 cm 2
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD REL TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH