A collar layer 12, preferably including a silicon oxide deposited by a CVD method, is, subsequently, applied to {HEAD ~ the side walls} of {TAIL ~ the trench} 5 
of
A collar layer 12 , preferably including a silicon oxide deposited by a CVD method , is , subsequently , applied to { HEAD ~ the side walls } of { TAIL ~ the trench } 5
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD REL TAIL TAIL TAIL TAIL TAIL TAIL OTH