As a consequence, accidental scratching and breakage of {HEAD ~ workpieces} such as semiconductor wafers and {TAIL ~ display substrates} may be reduced or eliminated 
such as
As a consequence , accidental scratching and breakage of { HEAD ~ workpieces } such as semiconductor wafers and { TAIL ~ display substrates } may be reduced or eliminated
OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD REL REL OTH OTH OTH TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH