Copper metal gates and source/drain electrodes are provided, yielding TFTs of a quality comparable to {TAIL ~ TFTs} employing aluminum electrodes and {HEAD ~ conductors} 
Copper metal gates and source / drain electrodes are provided , yielding TFTs of a quality comparable to { TAIL ~ TFTs } employing aluminum electrodes and { HEAD ~ conductors }
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD