{HEAD ~ The present invention} is directed to providing a method and system to measure characteristics of {TAIL ~ a film} disposed on a substrate 
{ HEAD ~ The present invention } is directed to providing a method and system to measure characteristics of { TAIL ~ a film } disposed on a substrate
HEAD HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH