Methods are disclosed for improving the yield of acceptable product from {TAIL ~ microlithography} using {HEAD ~ a charged particle beam} 
Methods are disclosed for improving the yield of acceptable product from { TAIL ~ microlithography } using { HEAD ~ a charged particle beam }
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH TAIL TAIL TAIL TAIL TAIL OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD HEAD