The angled surfaces of the gate electrodes can be protected using a liner layer that can extend the length of the contact window to define {HEAD ~ the sidewalls} of {TAIL ~ the contact window} 
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The angled surfaces of the gate electrodes can be protected using a liner layer that can extend the length of the contact window to define { HEAD ~ the sidewalls } of { TAIL ~ the contact window }
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD REL TAIL TAIL TAIL TAIL TAIL TAIL TAIL