The fluid suppliers 61, 62, 63 are arranged in {HEAD ~ a direction} extending from {TAIL ~ the circumference} of the wafer W to its inside 
extending from
The fluid suppliers 61 , 62 , 63 are arranged in { HEAD ~ a direction } extending from { TAIL ~ the circumference } of the wafer W to its inside
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD REL REL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH