Further included in the apparatus is {HEAD ~ a vacuum transfer chamber} connecting {TAIL ~ the first and second chambers} 
connecting
Further included in the apparatus is { HEAD ~ a vacuum transfer chamber } connecting { TAIL ~ the first and second chambers }
OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD HEAD REL TAIL TAIL TAIL TAIL TAIL TAIL TAIL TAIL TAIL