{HEAD ~ A hydrogenated thin film} is formed in a controlled vacuum on a substrate by evaporating {TAIL ~ one or more solid materials} and passing the resulting vapor and a hydrogen containing gas into a space between two electrodes 
is formed by evaporating
{ HEAD ~ A hydrogenated thin film } is formed in a controlled vacuum on a substrate by evaporating { TAIL ~ one or more solid materials } and passing the resulting vapor and a hydrogen containing gas into a space between two electrodes
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