The LKD materials are particularly useful for manufacturing integrated circuits that have {HEAD ~ features} smaller than {TAIL ~ 0.18 μm} 
smaller than
The LKD materials are particularly useful for manufacturing integrated circuits that have { HEAD ~ features } smaller than { TAIL ~ 0.18 μm }
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD REL REL TAIL TAIL TAIL TAIL TAIL TAIL