Note that even this wafer W can be a wafer of having improved flatness when the wafer {HEAD ~ W} is planarized by applying {TAIL ~ a PACE method} 
is planarized by applying
Note that even this wafer W can be a wafer of having improved flatness when the wafer { HEAD ~ W } is planarized by applying { TAIL ~ a PACE method }
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD REL REL REL REL TAIL TAIL TAIL TAIL TAIL TAIL TAIL