A method for manufacturing {HEAD ~ a piezoelectric resonator element} from {TAIL ~ a substrate} made of piezoelectric material is provided 
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A method for manufacturing { HEAD ~ a piezoelectric resonator element } from { TAIL ~ a substrate } made of piezoelectric material is provided
OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD HEAD REL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH