In one embodiment, {HEAD ~ a compressed substrate boat} is configured to reduce pumping volume in {TAIL ~ a batch processing chamber} 
In one embodiment , { HEAD ~ a compressed substrate boat } is configured to reduce pumping volume in { TAIL ~ a batch processing chamber }
OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH OTH OTH OTH OTH OTH TAIL TAIL TAIL TAIL TAIL TAIL TAIL TAIL