A photolithographic method 6 wherein said imagewise exposing of {HEAD ~ said first layer} is done by computer controlling a thin beam of {TAIL ~ actinic radiation} 
A photolithographic method 6 wherein said imagewise exposing of { HEAD ~ said first layer } is done by computer controlling a thin beam of { TAIL ~ actinic radiation }
OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH OTH OTH OTH OTH OTH OTH OTH TAIL TAIL TAIL TAIL TAIL TAIL