The first blocking layer contains {HEAD ~ 1×10 4 to 1.0 atomic %} of a Group III or V element in {TAIL ~ the Periodic Table} 
The first blocking layer contains { HEAD ~ 1×10 4 to 1.0 atomic % } of a Group III or V element in { TAIL ~ the Periodic Table }
OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH OTH OTH OTH OTH OTH OTH TAIL TAIL TAIL TAIL TAIL TAIL TAIL