The hydrocarbon based solvent may have {TAIL ~ a lower boiling point} than that of cyclohexasilane and {HEAD ~ a higher coefficient} of viscosity than that of cyclohexasilane so that the quality of a Si film may be improved 
The hydrocarbon based solvent may have { TAIL ~ a lower boiling point } than that of cyclohexasilane and { HEAD ~ a higher coefficient } of viscosity than that of cyclohexasilane so that the quality of a Si film may be improved
OTH OTH OTH OTH OTH OTH TAIL TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH