There is provided a method of forming {HEAD ~ a damascene pattern} including a via and {TAIL ~ a trench} in a damascene process of forming a copper metal interconnection 
including
There is provided a method of forming { HEAD ~ a damascene pattern } including a via and { TAIL ~ a trench } in a damascene process of forming a copper metal interconnection
OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD REL OTH OTH OTH TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH