d) removing {HEAD ~ any degraded photosensitive organometallic compound residue} and unaffected photosensitive organometallic compound from {TAIL ~ said substrate} 
from
d ) removing { HEAD ~ any degraded photosensitive organometallic compound residue } and unaffected photosensitive organometallic compound from { TAIL ~ said substrate }
OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH OTH OTH OTH REL TAIL TAIL TAIL TAIL TAIL TAIL