{TAIL ~ An apparatus} for forming the coated substrate especially includes means for forming {HEAD ~ the intermediate layer} and means for forming the hard carbon film in the same vacuum chamber 
{ TAIL ~ An apparatus } for forming the coated substrate especially includes means for forming { HEAD ~ the intermediate layer } and means for forming the hard carbon film in the same vacuum chamber
TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH