{HEAD ~ A hydrogenated thin film} is formed in a controlled vacuum on a substrate by evaporating one or more solid materials and passing the resulting vapor and {TAIL ~ a hydrogen} containing gas into a space between two electrodes 
is formed by passing
{ HEAD ~ A hydrogenated thin film } is formed in a controlled vacuum on a substrate by evaporating one or more solid materials and passing the resulting vapor and { TAIL ~ a hydrogen } containing gas into a space between two electrodes
HEAD HEAD HEAD HEAD HEAD HEAD HEAD HEAD REL REL OTH OTH OTH OTH OTH OTH OTH REL OTH OTH OTH OTH OTH OTH OTH REL OTH OTH OTH OTH TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH