In other words, in the second annealing process, {HEAD ~ the initial temperature} of the second reactor chamber can be substantially room temperature, subsequently ramped up to {TAIL ~ a predetermined process temperature}, i.e. the peak temperature of the temperature profile, and then ramped back down to the initial room temperature 
ramped up to
In other words , in the second annealing process , { HEAD ~ the initial temperature } of the second reactor chamber can be substantially room temperature , subsequently ramped up to { TAIL ~ a predetermined process temperature } , i.e. the peak temperature of the temperature profile , and then ramped back down to the initial room temperature
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH REL REL REL TAIL TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH