Cathodic/anodic vacuum arc sources with plasma ion implantation deposition system for depositing high quality thin film coatings of {HEAD ~ complex compounds} on {TAIL ~ a workpiece} 
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Cathodic / anodic vacuum arc sources with plasma ion implantation deposition system for depositing high quality thin film coatings of { HEAD ~ complex compounds } on { TAIL ~ a workpiece }
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD REL TAIL TAIL TAIL TAIL TAIL TAIL