A method 4, further comprising the step of washing {HEAD ~ the entire substrate} with {TAIL ~ a solution} containing fluoric acid, while carrying out said leveling by chemical and mechanical polishing  
with
A method 4 , further comprising the step of washing { HEAD ~ the entire substrate } with { TAIL ~ a solution } containing fluoric acid , while carrying out said leveling by chemical and mechanical polishing
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD REL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH