This invention relates to a mask blank for semiconductor manufacture and, in particular, relates to acquisition and management of mask blank quality information and {HEAD ~ the manufacture} of {TAIL ~ a mask blank} and a mask 
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This invention relates to a mask blank for semiconductor manufacture and , in particular , relates to acquisition and management of mask blank quality information and { HEAD ~ the manufacture } of { TAIL ~ a mask blank } and a mask
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD REL TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH