{TAIL ~ A GaN transitional layer} is grown on the 3D nucleation layer by HVPE under a condition that changes {HEAD ~ the growth mode} from the substantially 3D growth mode to a substantially 2D growth mode 
{ TAIL ~ A GaN transitional layer } is grown on the 3D nucleation layer by HVPE under a condition that changes { HEAD ~ the growth mode } from the substantially 3D growth mode to a substantially 2D growth mode
TAIL TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH