{HEAD ~ A coil apparatus} includes a coil trace, a semiconductor substrate and a dielectric layer arranged on the semiconductor substrate, {TAIL ~ at least parts} of the coil trace being arranged above a recess in the dielectric layer 
includes
{ HEAD ~ A coil apparatus } includes a coil trace , a semiconductor substrate and a dielectric layer arranged on the semiconductor substrate , { TAIL ~ at least parts } of the coil trace being arranged above a recess in the dielectric layer
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