In one embodiment, {HEAD ~ an apparatus} for delivering {TAIL ~ gases} to a semiconductor processing system includes a plurality of gas input and output lines having inlet and outlet ports 
for delivering
In one embodiment , { HEAD ~ an apparatus } for delivering { TAIL ~ gases } to a semiconductor processing system includes a plurality of gas input and output lines having inlet and outlet ports
OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD REL REL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH