{HEAD ~ A GaN transitional layer} is grown on {TAIL ~ the 3D nucleation layer} by HVPE under a condition that changes the growth mode from the substantially 3D growth mode to a substantially 2D growth mode 
is grown on
{ HEAD ~ A GaN transitional layer } is grown on { TAIL ~ the 3D nucleation layer } by HVPE under a condition that changes the growth mode from the substantially 3D growth mode to a substantially 2D growth mode
HEAD HEAD HEAD HEAD HEAD HEAD HEAD HEAD REL REL REL TAIL TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH