Also, {HEAD ~ damage} to {TAIL ~ other semiconductor structures}, such as emitters , is thereby prevented 
to
Also , { HEAD ~ damage } to { TAIL ~ other semiconductor structures } , such as emitters , is thereby prevented
OTH OTH HEAD HEAD HEAD HEAD HEAD REL TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH