These openings are then filled with conductive material to form {HEAD ~ self aligned contacts} in {TAIL ~ the core region} 
in
These openings are then filled with conductive material to form { HEAD ~ self aligned contacts } in { TAIL ~ the core region }
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD REL TAIL TAIL TAIL TAIL TAIL TAIL TAIL