Also disclosed are methods for identifying the elemental composition of defects and spatially locating {HEAD ~ different elemental components} of {TAIL ~ defects} 
of
Also disclosed are methods for identifying the elemental composition of defects and spatially locating { HEAD ~ different elemental components } of { TAIL ~ defects }
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD REL TAIL TAIL TAIL TAIL TAIL