cooling said coated substrate by extinguishing said deposition process and passing an inert gas over said substrate until {HEAD ~ the temperature} of {TAIL ~ said substrate} has reached substantially room temperature during said cool down step; and 
of
cooling said coated substrate by extinguishing said deposition process and passing an inert gas over said substrate until { HEAD ~ the temperature } of { TAIL ~ said substrate } has reached substantially room temperature during said cool down step ; and
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD REL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH