The process 8 wherein said source and drain regions include {HEAD ~ a layer} of {TAIL ~ silicide} 
of
The process 8 wherein said source and drain regions include { HEAD ~ a layer } of { TAIL ~ silicide }
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD REL TAIL TAIL TAIL TAIL TAIL