A uniform dielectric layer can thus be provided because {HEAD ~ the sidewalls} of the contact hole 120 are not on {TAIL ~ the surface} of the lower capacitor electrode 116 
are not on
A uniform dielectric layer can thus be provided because { HEAD ~ the sidewalls } of the contact hole 120 are not on { TAIL ~ the surface } of the lower capacitor electrode 116
OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH OTH OTH OTH REL REL REL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH