Technologies are generally described for methods, {HEAD ~ systems}, and structures that include patterns formed by {TAIL ~ optical lithography} 
Technologies are generally described for methods , { HEAD ~ systems } , and structures that include patterns formed by { TAIL ~ optical lithography }
OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD OTH OTH OTH OTH OTH OTH OTH OTH TAIL TAIL TAIL TAIL TAIL TAIL