A coil apparatus includes a coil trace, a semiconductor substrate and a dielectric layer arranged on the semiconductor substrate, at least parts of the coil trace being arranged above {HEAD ~ a recess} in {TAIL ~ the dielectric layer} 
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A coil apparatus includes a coil trace , a semiconductor substrate and a dielectric layer arranged on the semiconductor substrate , at least parts of the coil trace being arranged above { HEAD ~ a recess } in { TAIL ~ the dielectric layer }
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD REL TAIL TAIL TAIL TAIL TAIL TAIL TAIL