It is {HEAD ~ the second object} of the present invention to provide a film forming apparatus capable of forming {TAIL ~ solution films} having different film thicknesses by adjusting the viscosity of a single processing solution 
It is { HEAD ~ the second object } of the present invention to provide a film forming apparatus capable of forming { TAIL ~ solution films } having different film thicknesses by adjusting the viscosity of a single processing solution
OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH