{HEAD ~ The transducers} can be {TAIL ~ leadless SOI transducers}, each having an active deflection area associated with a semiconductor substrate 
be
{ HEAD ~ The transducers } can be { TAIL ~ leadless SOI transducers } , each having an active deflection area associated with a semiconductor substrate
HEAD HEAD HEAD HEAD HEAD HEAD OTH REL TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH