{HEAD ~ A method} for protecting a plurality of semiconductor wafers includes {TAIL ~ the steps} of placing the plurality of semiconductor wafers within a heatable reactor core, having a core collector electrode mounted on the outside of the heatable reactor core and having a conductive element located within the reactor core 
includes
{ HEAD ~ A method } for protecting a plurality of semiconductor wafers includes { TAIL ~ the steps } of placing the plurality of semiconductor wafers within a heatable reactor core , having a core collector electrode mounted on the outside of the heatable reactor core and having a conductive element located within the reactor core
HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH OTH OTH OTH OTH OTH REL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH