{TAIL ~ A method} 4, further comprising the step of washing {HEAD ~ the entire substrate} with a solution containing fluoric acid, while carrying out said leveling by chemical and mechanical polishing  
{ TAIL ~ A method } 4 , further comprising the step of washing { HEAD ~ the entire substrate } with a solution containing fluoric acid , while carrying out said leveling by chemical and mechanical polishing
TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH