forming a tunnel dielectric layer overlying the carbon nanotubes and adjoining the semiconductor substrate in the at least one portion of the semiconductor substrate within {HEAD ~ the plurality} of {TAIL ~ carbon nanotubes} 
of
forming a tunnel dielectric layer overlying the carbon nanotubes and adjoining the semiconductor substrate in the at least one portion of the semiconductor substrate within { HEAD ~ the plurality } of { TAIL ~ carbon nanotubes }
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD REL TAIL TAIL TAIL TAIL TAIL TAIL