{HEAD ~ An apparatus} for forming {TAIL ~ Strontium Tantalum Oxide films} and a method thereof using an atomic layer deposition tool are provided 
for forming
{ HEAD ~ An apparatus } for forming { TAIL ~ Strontium Tantalum Oxide films } and a method thereof using an atomic layer deposition tool are provided
HEAD HEAD HEAD HEAD HEAD HEAD REL REL TAIL TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH