first source/drain regions of the first conductivity type formed in the outward portions from said first silicate glass layer in {TAIL ~ the primary surface} of {HEAD ~ said substrate} 
first source / drain regions of the first conductivity type formed in the outward portions from said first silicate glass layer in { TAIL ~ the primary surface } of { HEAD ~ said substrate }
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH HEAD HEAD HEAD HEAD HEAD HEAD