{HEAD ~ fourth source/drain regions} of the second conductivity type having {TAIL ~ shallower depth} than those of said third source/drain regions, said fourth source/drain regions being formed below said second silicate glass layer 
{ HEAD ~ fourth source / drain regions } of the second conductivity type having { TAIL ~ shallower depth } than those of said third source / drain regions , said fourth source / drain regions being formed below said second silicate glass layer
HEAD HEAD HEAD HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH OTH OTH OTH OTH TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH