{HEAD ~ A method} 1, wherein {TAIL ~ the step} of obliquely cutting is performed by partially beveling said one or more corner portions of each of said series resonators 
wherein
{ HEAD ~ A method } 1 , wherein { TAIL ~ the step } of obliquely cutting is performed by partially beveling said one or more corner portions of each of said series resonators
HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH REL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH