The insulating layer is commonly silicon nitride, but can also be a SiNx:H film , a titanium oxide film, {TAIL ~ a silicon oxide film}, a silicon nitride film containing carbon, {HEAD ~ a silicon oxide film} containing carbon, a silicon oxynitride film containing carbon, or a silicon oxide/titanium oxide film 
The insulating layer is commonly silicon nitride , but can also be a SiNx : H film , a titanium oxide film , { TAIL ~ a silicon oxide film } , a silicon nitride film containing carbon , { HEAD ~ a silicon oxide film } containing carbon , a silicon oxynitride film containing carbon , or a silicon oxide / titanium oxide film
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