{HEAD ~ The apparatus} 4, further comprising {TAIL ~ an ion gauge} installed along said processing line between said processing chamber and a point where said bypass line branches from said processing line 
comprising
{ HEAD ~ The apparatus } 4 , further comprising { TAIL ~ an ion gauge } installed along said processing line between said processing chamber and a point where said bypass line branches from said processing line
HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH OTH REL TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH