According to the present invention, {HEAD ~ one processing fluid} supplied from {TAIL ~ the inside fluid supplier} can sweep away another processing fluid supplied from the outside fluid supplier, in a direction apart from the center of the substrate 
supplied from
According to the present invention , { HEAD ~ one processing fluid } supplied from { TAIL ~ the inside fluid supplier } can sweep away another processing fluid supplied from the outside fluid supplier , in a direction apart from the center of the substrate
OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD REL REL TAIL TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH