A supply 94 of deposition and carrier gases is in {HEAD ~ fluid communication} with {TAIL ~ the gas distribution assembly} 46 via a mixing manifold 96 
with
A supply 94 of deposition and carrier gases is in { HEAD ~ fluid communication } with { TAIL ~ the gas distribution assembly } 46 via a mixing manifold 96
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD REL TAIL TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH