A sputtering target producing few particles, a backing plate or {HEAD ~ a sputtering apparatus}, and {TAIL ~ a sputtering method} producing few particles 
A sputtering target producing few particles , a backing plate or { HEAD ~ a sputtering apparatus } , and { TAIL ~ a sputtering method } producing few particles
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH