Method of using {HEAD ~ a o quinone diazide sensitized phenol formaldehyde resist} as {TAIL ~ a deep ultraviolet light exposure mask} 
as
Method of using { HEAD ~ a o quinone diazide sensitized phenol formaldehyde resist } as { TAIL ~ a deep ultraviolet light exposure mask }
OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD HEAD HEAD HEAD HEAD HEAD REL TAIL TAIL TAIL TAIL TAIL TAIL TAIL TAIL TAIL TAIL