{HEAD ~ The FIG 1 embodiment} includes {TAIL ~ a liquid jet type X ray generating device} 1 located at the most upstream portion of the depicted optical system of the exposure apparatus 
includes
{ HEAD ~ The FIG 1 embodiment } includes { TAIL ~ a liquid jet type X ray generating device } 1 located at the most upstream portion of the depicted optical system of the exposure apparatus
HEAD HEAD HEAD HEAD HEAD HEAD HEAD HEAD REL TAIL TAIL TAIL TAIL TAIL TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH