A method 1, wherein {HEAD ~ the ion density} is greater than {TAIL ~ 1012 cm−3} and the ion energy is between 10 eV and 15 eV in said forming 
is greater than
A method 1 , wherein { HEAD ~ the ion density } is greater than { TAIL ~ 1012 cm−3 } and the ion energy is between 10 eV and 15 eV in said forming
OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD REL REL REL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH