At {HEAD ~ a lower position} for {TAIL ~ the pedestal wafers} may be transferred to and from the processing station, and at an upper position for the pedestal the pedestal forms an annular pumping passage with a lower circular opening in a processing chamber 
for
At { HEAD ~ a lower position } for { TAIL ~ the pedestal wafers } may be transferred to and from the processing station , and at an upper position for the pedestal the pedestal forms an annular pumping passage with a lower circular opening in a processing chamber
OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD REL TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH