A go no go gauge and method for verifying whether {HEAD ~ a process kit part} used within {TAIL ~ a plasma chamber} of a plasma processing tool has accumulated excessive wear or deposits 
used within
A go no go gauge and method for verifying whether { HEAD ~ a process kit part } used within { TAIL ~ a plasma chamber } of a plasma processing tool has accumulated excessive wear or deposits
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD HEAD REL REL TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH