{HEAD ~ A process} for forming {TAIL ~ a dielectric layer} over a substrate, said process comprising: 
for forming
{ HEAD ~ A process } for forming { TAIL ~ a dielectric layer } over a substrate , said process comprising :
HEAD HEAD HEAD HEAD HEAD HEAD REL REL TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH