The step of removing portions of the sacrificial layer removes {HEAD ~ portions} of {TAIL ~ the sacrificial layer} that are not covered by the first capping structure to define an intermediate structure 
of
The step of removing portions of the sacrificial layer removes { HEAD ~ portions } of { TAIL ~ the sacrificial layer } that are not covered by the first capping structure to define an intermediate structure
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD REL TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH