{TAIL ~ A method} 17 in which said step of patterning said {HEAD ~ first conductor} includes etching said first conductor as follow: 
{ TAIL ~ A method } 17 in which said step of patterning said { HEAD ~ first conductor } includes etching said first conductor as follow :
TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH OTH OTH OTH OTH OTH OTH