The go no go gauge 1, wherein the identification feature comprises a unique marking that specifies at least one of said chamber kit part, a feature of {TAIL ~ the chamber kit part} and {HEAD ~ a process} to which the chamber kit part will be exposed 
The go no go gauge 1 , wherein the identification feature comprises a unique marking that specifies at least one of said chamber kit part , a feature of { TAIL ~ the chamber kit part } and { HEAD ~ a process } to which the chamber kit part will be exposed
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH TAIL TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH OTH OTH OTH OTH OTH OTH OTH