According to the present invention, {HEAD ~ one processing fluid} supplied from the inside fluid supplier can sweep away another processing fluid supplied from the outside fluid supplier, in {TAIL ~ a direction} apart from the center of the substrate 
sweep in
According to the present invention , { HEAD ~ one processing fluid } supplied from the inside fluid supplier can sweep away another processing fluid supplied from the outside fluid supplier , in { TAIL ~ a direction } apart from the center of the substrate
OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH OTH OTH OTH OTH OTH REL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH REL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH