In a preferred method for depositing of these materials, capacitive coupling forms a highly uniform, selectively energized stream of {HEAD ~ ions} from {TAIL ~ a dense, inductively ionized plasma} 
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In a preferred method for depositing of these materials , capacitive coupling forms a highly uniform , selectively energized stream of { HEAD ~ ions } from { TAIL ~ a dense , inductively ionized plasma }
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD REL TAIL TAIL TAIL TAIL TAIL TAIL TAIL TAIL TAIL TAIL