This will facilitate {HEAD ~ the performance} of {TAIL ~ the semiconductor device} into which the high k dielectric layer 12 is later integrated 
of
This will facilitate { HEAD ~ the performance } of { TAIL ~ the semiconductor device } into which the high k dielectric layer 12 is later integrated
OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD REL TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH