Referring to FIG 2E, in {HEAD ~ one embodiment} of {TAIL ~ the invention} the oxygen containing plasma treatment is carried out for a sufficient period of time to substantially remove any remaining polymeric residue remaining in the dual damascene opening including polymeric residues surrounding an upper portion of the via opening 28A also referred to as ‘via fences’ 
of
Referring to FIG 2E , in { HEAD ~ one embodiment } of { TAIL ~ the invention } the oxygen containing plasma treatment is carried out for a sufficient period of time to substantially remove any remaining polymeric residue remaining in the dual damascene opening including polymeric residues surrounding an upper portion of the via opening 28A also referred to as ‘ via fences ’
OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD REL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH