A method 19, wherein during said step of rotating the substrate {HEAD ~ a side} of {TAIL ~ said cover} that faces away from the substrate is rinsed and dried 
of
A method 19 , wherein during said step of rotating the substrate { HEAD ~ a side } of { TAIL ~ said cover } that faces away from the substrate is rinsed and dried
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD REL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH