{HEAD ~ The second alignment system} 400 may be formed in the interior or exterior of {TAIL ~ the vacuum processing chamber} 110 
{ HEAD ~ The second alignment system } 400 may be formed in the interior or exterior of { TAIL ~ the vacuum processing chamber } 110
HEAD HEAD HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH TAIL TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH