Hence, it is possible to prevent {HEAD ~ a large amount} of {TAIL ~ CF based reaction products} from being deposited on the surfaces of the components in the chamber 11 during the step S31 
of
Hence , it is possible to prevent { HEAD ~ a large amount } of { TAIL ~ CF based reaction products } from being deposited on the surfaces of the components in the chamber 11 during the step S31
OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD REL TAIL TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH