{TAIL ~ A 3D nucleation GaN layer} is grown on the epitaxial nitride layer by {HEAD ~ HVPE} under a substantially 3D growth mode 
{ TAIL ~ A 3D nucleation GaN layer } is grown on the epitaxial nitride layer by { HEAD ~ HVPE } under a substantially 3D growth mode
TAIL TAIL TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD OTH OTH OTH OTH OTH OTH