wherein {HEAD ~ a portion} of {TAIL ~ the second interlayer} dielectric film is sandwiched between the second metal patterns and the first metal patterns 
of
wherein { HEAD ~ a portion } of { TAIL ~ the second interlayer } dielectric film is sandwiched between the second metal patterns and the first metal patterns
OTH HEAD HEAD HEAD HEAD HEAD HEAD REL TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH