The substrate is bombarded with the ionized particles to form {HEAD ~ carbon nitrides} with {TAIL ~ variable / ratios}, referred to as CNx 
with
The substrate is bombarded with the ionized particles to form { HEAD ~ carbon nitrides } with { TAIL ~ variable / ratios } , referred to as CNx
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD REL TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH