The substrate boat 13, wherein each of the plurality of substrate supports has {HEAD ~ a plurality} of openings along {TAIL ~ a perimeter} configured to accommodate the substrate holder 
along
The substrate boat 13 , wherein each of the plurality of substrate supports has { HEAD ~ a plurality } of openings along { TAIL ~ a perimeter } configured to accommodate the substrate holder
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH REL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH