forming a tunnel dielectric layer overlying the carbon nanotubes and adjoining the semiconductor substrate in the at least one portion of {HEAD ~ the semiconductor substrate} within {TAIL ~ the plurality} of carbon nanotubes 
within
forming a tunnel dielectric layer overlying the carbon nanotubes and adjoining the semiconductor substrate in the at least one portion of { HEAD ~ the semiconductor substrate } within { TAIL ~ the plurality } of carbon nanotubes
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD REL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH