The method includes the actual ion beam processing step combined with {HEAD ~ the thermal and chemical conditioning} of {TAIL ~ the ion source} and a special cleaning step 
of
The method includes the actual ion beam processing step combined with { HEAD ~ the thermal and chemical conditioning } of { TAIL ~ the ion source } and a special cleaning step
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD HEAD HEAD REL TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH