A substrate is loaded into a chamber, {HEAD ~ the temperature} is adjusted to {TAIL ~ between about 400° C.} and about 500° C., and the chamber is filed with hydrogen to create a pressure between about 0.5 and about 3 Torr 
is adjusted to
A substrate is loaded into a chamber , { HEAD ~ the temperature } is adjusted to { TAIL ~ between about 400 ° C. } and about 500 ° C. , and the chamber is filed with hydrogen to create a pressure between about 0.5 and about 3 Torr
OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD REL REL REL TAIL TAIL TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH