As shown in FIG 4, {HEAD ~ a second annealing process} is performed in {TAIL ~ a second reactor chamber} 
is performed in
As shown in FIG 4 , { HEAD ~ a second annealing process } is performed in { TAIL ~ a second reactor chamber }
OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD HEAD REL REL REL TAIL TAIL TAIL TAIL TAIL TAIL TAIL TAIL