Method for producing {HEAD ~ an optical semiconductor device} having {TAIL ~ a carrier injection path} or an electric field applying path 
having
Method for producing { HEAD ~ an optical semiconductor device } having { TAIL ~ a carrier injection path } or an electric field applying path
OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD HEAD REL TAIL TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH