Therefore, a space pattern of resist formed with the thickened resist pattern has a fine structure, exceeding the exposure limit of {HEAD ~ light sources} of {TAIL ~ an available exposure device} 
of
Therefore , a space pattern of resist formed with the thickened resist pattern has a fine structure , exceeding the exposure limit of { HEAD ~ light sources } of { TAIL ~ an available exposure device }
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD REL TAIL TAIL TAIL TAIL TAIL TAIL TAIL TAIL