A process for making {HEAD ~ borderless contacts} through an insulating layer to {TAIL ~ active regions} of a semiconductor device is disclosed 
to
A process for making { HEAD ~ borderless contacts } through an insulating layer to { TAIL ~ active regions } of a semiconductor device is disclosed
OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH OTH OTH REL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH