Then {HEAD ~ a plasma poly etch} of the HSG poly is performed that is followed by {TAIL ~ a plasma oxide etch} 
is followed by
Then { HEAD ~ a plasma poly etch } of the HSG poly is performed that is followed by { TAIL ~ a plasma oxide etch }
OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH OTH OTH OTH OTH OTH REL REL REL TAIL TAIL TAIL TAIL TAIL TAIL TAIL TAIL