Consequently, {HEAD ~ the yield} of {TAIL ~ accepted products} of reflection masks as optical elements of the present invention is raised 
of
Consequently , { HEAD ~ the yield } of { TAIL ~ accepted products } of reflection masks as optical elements of the present invention is raised
OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD REL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH