In the area of the line L, {HEAD ~ the detection quantity} of {TAIL ~ secondary electrons} in the reference profile is substantially equal to that in the intended profile 
of
In the area of the line L , { HEAD ~ the detection quantity } of { TAIL ~ secondary electrons } in the reference profile is substantially equal to that in the intended profile
OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD REL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH