The invention features {TAIL ~ a system} and method for reducing the contribution of cyclic errors to {HEAD ~ an interferometric position measurement} of a movable stage 
The invention features { TAIL ~ a system } and method for reducing the contribution of cyclic errors to { HEAD ~ an interferometric position measurement } of a movable stage
OTH OTH OTH TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH OTH OTH