The method 1 wherein {HEAD ~ the polishing pad} has {TAIL ~ a density} of about 0.3 g/cm 3 to about 1.5 g/cm 3 
has
The method 1 wherein { HEAD ~ the polishing pad } has { TAIL ~ a density } of about 0.3 g / cm 3 to about 1.5 g / cm 3
OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD REL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH