Additionally, an ejection pipe 137 connecting to a tank 136 which contains a solvent, {HEAD ~ i.e., a thinner B}, of {TAIL ~ the resist solution A} is connected to a portion of the circulating pipe line 131 between the air fan 133 and the filter 134 
of
Additionally , an ejection pipe 137 connecting to a tank 136 which contains a solvent , { HEAD ~ i.e. , a thinner B } , of { TAIL ~ the resist solution A } is connected to a portion of the circulating pipe line 131 between the air fan 133 and the filter 134
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD HEAD HEAD OTH REL TAIL TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH