The transducers can be leadless SOI transducers, {HEAD ~ each} having {TAIL ~ an active deflection area} associated with a semiconductor substrate 
having
The transducers can be leadless SOI transducers , { HEAD ~ each } having { TAIL ~ an active deflection area } associated with a semiconductor substrate
OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD REL TAIL TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH