The polarization direction of S polarized light can be defined by the optical axis of the illumination optical system and {HEAD ~ the polarization} split {TAIL ~ film} as the S polarization direction 
split
The polarization direction of S polarized light can be defined by the optical axis of the illumination optical system and { HEAD ~ the polarization } split { TAIL ~ film } as the S polarization direction
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD REL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH