{TAIL ~ The purpose} of the transfer chamber is to prevent {HEAD ~ the workpiece} from being exposed to contaminants after it has been cleaned in the first vacuum processing chamber 
{ TAIL ~ The purpose } of the transfer chamber is to prevent { HEAD ~ the workpiece } from being exposed to contaminants after it has been cleaned in the first vacuum processing chamber
TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH