This results from, among other things, {TAIL ~ the relatively high chamber pressures} that may be achieved using BTBAS as {HEAD ~ a silicon source} 
This results from , among other things , { TAIL ~ the relatively high chamber pressures } that may be achieved using BTBAS as { HEAD ~ a silicon source }
OTH OTH OTH OTH OTH OTH OTH OTH TAIL TAIL TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD