These interconnect materials include {TAIL ~ doped polysilicon}, {HEAD ~ polycides}, and tungsten metal 
These interconnect materials include { TAIL ~ doped polysilicon } , { HEAD ~ polycides } , and tungsten metal
OTH OTH OTH OTH TAIL TAIL TAIL TAIL TAIL TAIL OTH HEAD HEAD HEAD HEAD HEAD OTH OTH OTH OTH