{HEAD ~ Method} and system for synchronizing {TAIL ~ chamber} down times by controlling transport sequencing in a process tool 
for synchronizing
{ HEAD ~ Method } and system for synchronizing { TAIL ~ chamber } down times by controlling transport sequencing in a process tool
HEAD HEAD HEAD HEAD HEAD OTH OTH REL REL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH