Method and system for synchronizing chamber down times by controlling {HEAD ~ transport} sequencing in {TAIL ~ a process tool} 
sequencing in
Method and system for synchronizing chamber down times by controlling { HEAD ~ transport } sequencing in { TAIL ~ a process tool }
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD REL REL TAIL TAIL TAIL TAIL TAIL TAIL TAIL