A gas coming into {HEAD ~ contact} with a base material or substrate is purified by dust removing apparatus and adsorption and absorption apparatus so that the concentration of fine particles in the gas is below class 1,000 and a non methane hydrocarbon concentration is below {TAIL ~ 0.2 ppm} 
A gas coming into { HEAD ~ contact } with a base material or substrate is purified by dust removing apparatus and adsorption and absorption apparatus so that the concentration of fine particles in the gas is below class 1,000 and a non methane hydrocarbon concentration is below { TAIL ~ 0.2 ppm }
OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH TAIL TAIL TAIL TAIL TAIL TAIL