The apparatus includes {TAIL ~ a plurality} of fluid suppliers 61, 61, 63 for supplying {HEAD ~ different processing fluids} 
The apparatus includes { TAIL ~ a plurality } of fluid suppliers 61 , 61 , 63 for supplying { HEAD ~ different processing fluids }
OTH OTH OTH TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD