{HEAD ~ A material layer} may be filled into the holes and a part of {TAIL ~ the oxide layer} is removed to form an imprinting template having a plurality of pillar shaped protrusions 
{ HEAD ~ A material layer } may be filled into the holes and a part of { TAIL ~ the oxide layer } is removed to form an imprinting template having a plurality of pillar shaped protrusions
HEAD HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH