The processing chamber and loadlock chambers are connected to {TAIL ~ a vacuum system} having two vacuum pumps for maintaining {HEAD ~ a vacuum} in the chambers 
The processing chamber and loadlock chambers are connected to { TAIL ~ a vacuum system } having two vacuum pumps for maintaining { HEAD ~ a vacuum } in the chambers
OTH OTH OTH OTH OTH OTH OTH OTH OTH TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH OTH