In a semiconductor sensor having a membrane structure, the destruction of the membrane caused by the expansion or contraction of a fluid within a hollow part formed under the membrane while {HEAD ~ the sensor} is in {TAIL ~ use} is prevented 
is in
In a semiconductor sensor having a membrane structure , the destruction of the membrane caused by the expansion or contraction of a fluid within a hollow part formed under the membrane while { HEAD ~ the sensor } is in { TAIL ~ use } is prevented
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