In such a layout as described above, by appropriately swiveling {TAIL ~ the linear transfer mechanism B1} of {HEAD ~ the transfer robot} A1, the hands 21 a, 21 b can be extended into whichever of the process chambers to receive/deliver works W 
In such a layout as described above , by appropriately swiveling { TAIL ~ the linear transfer mechanism B1 } of { HEAD ~ the transfer robot } A1 , the hands 21 a , 21 b can be extended into whichever of the process chambers to receive / deliver works W
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH TAIL TAIL TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH