The lid portion 88 includes {HEAD ~ a throughway} 92 to place {TAIL ~ the gas distribution assembly} 46 in fluid communication with the process chamber 32 
to place
The lid portion 88 includes { HEAD ~ a throughway } 92 to place { TAIL ~ the gas distribution assembly } 46 in fluid communication with the process chamber 32
OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD OTH REL REL TAIL TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH