Thus, {TAIL ~ the overlap} of the deposition vapor from each electrode assembly 52 contributes to {HEAD ~ the uniformity} of the coating 
Thus , { TAIL ~ the overlap } of the deposition vapor from each electrode assembly 52 contributes to { HEAD ~ the uniformity } of the coating
OTH OTH TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH OTH