In particular the present invention relates to a flys eye integrator suitable for {HEAD ~ use} in {TAIL ~ a lithographic apparatus} or an illuminator for a lithographic apparatus 
in
In particular the present invention relates to a flys eye integrator suitable for { HEAD ~ use } in { TAIL ~ a lithographic apparatus } or an illuminator for a lithographic apparatus
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD REL TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH