Method for discriminating anomaly in {HEAD ~ gas composition} and {TAIL ~ discharge excitation type gas laser oscillator} 
Method for discriminating anomaly in { HEAD ~ gas composition } and { TAIL ~ discharge excitation type gas laser oscillator }
OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD OTH TAIL TAIL TAIL TAIL TAIL TAIL TAIL TAIL TAIL TAIL