A method in accordance 10 wherein {HEAD ~ said wordlines} are formed of {TAIL ~ polysilicon} deposited by chemical vapor deposition followed by doping 
are formed of
A method in accordance 10 wherein { HEAD ~ said wordlines } are formed of { TAIL ~ polysilicon } deposited by chemical vapor deposition followed by doping
OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD REL REL REL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH