The first and second electrodes are separately disposed on the epitaxial layer structure, and the epitaxial layer structure has {HEAD ~ a RMS roughness} less than {TAIL ~ 3 nm} on a surface wherein the second electrode is formed 
less than
The first and second electrodes are separately disposed on the epitaxial layer structure , and the epitaxial layer structure has { HEAD ~ a RMS roughness } less than { TAIL ~ 3 nm } on a surface wherein the second electrode is formed
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD REL REL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH