The spindle speed is a function of {HEAD ~ the desired mean thickness} of {TAIL ~ the photoresist}, the barometric pressure and the relative humidity 
of
The spindle speed is a function of { HEAD ~ the desired mean thickness } of { TAIL ~ the photoresist } , the barometric pressure and the relative humidity
OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD HEAD REL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH