forming a tunnel dielectric layer overlying the carbon nanotubes and adjoining the semiconductor substrate in {HEAD ~ the at least one portion} of {TAIL ~ the semiconductor substrate} within the plurality of carbon nanotubes 
of
forming a tunnel dielectric layer overlying the carbon nanotubes and adjoining the semiconductor substrate in { HEAD ~ the at least one portion } of { TAIL ~ the semiconductor substrate } within the plurality of carbon nanotubes
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD HEAD HEAD REL TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH