wherein said high frequency power supply unit comprises a DC power supply section for converting {TAIL ~ an AC power source} to said DC power source, and {HEAD ~ a high frequency power source section} for converting said DC power source to a high frequency power source, and 
wherein said high frequency power supply unit comprises a DC power supply section for converting { TAIL ~ an AC power source } to said DC power source , and { HEAD ~ a high frequency power source section } for converting said DC power source to a high frequency power source , and
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH TAIL TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH