The invention features a system and method for reducing the contribution of cyclic errors to {HEAD ~ an interferometric position measurement} of {TAIL ~ a movable stage} 
of
The invention features a system and method for reducing the contribution of cyclic errors to { HEAD ~ an interferometric position measurement } of { TAIL ~ a movable stage }
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD HEAD REL TAIL TAIL TAIL TAIL TAIL TAIL TAIL