This invention relates to the field of integrated circuit processing, more particularly to {HEAD ~ micromechanical device fabrication}, including {TAIL ~ deformable micromirror devices} 
including
This invention relates to the field of integrated circuit processing , more particularly to { HEAD ~ micromechanical device fabrication } , including { TAIL ~ deformable micromirror devices }
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD OTH REL TAIL TAIL TAIL TAIL TAIL TAIL TAIL