The substrate heating apparatus 3, wherein the ceramic base comprises at least one of aluminum nitride, silicon nitride, silicon carbide and sialon, and the cylindrical member comprises {HEAD ~ the same material} as {TAIL ~ the ceramic base} 
as
The substrate heating apparatus 3 , wherein the ceramic base comprises at least one of aluminum nitride , silicon nitride , silicon carbide and sialon , and the cylindrical member comprises { HEAD ~ the same material } as { TAIL ~ the ceramic base }
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD REL TAIL TAIL TAIL TAIL TAIL TAIL TAIL