The apparatus for treating the effluent fluid stream from one or more semiconductor manufacturing process tools 17, wherein {HEAD ~ said halogen containing components} comprise {TAIL ~ perfluorocarbons} 
comprise
The apparatus for treating the effluent fluid stream from one or more semiconductor manufacturing process tools 17 , wherein { HEAD ~ said halogen containing components } comprise { TAIL ~ perfluorocarbons }
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD HEAD REL TAIL TAIL TAIL TAIL TAIL