Thus, it may again be verified whether the greater of these percentages is within the processing capacity of the chambers 213A, 213B. Hence, since 7/12 corresponds to 58.3% of the overall throughput of the tool 200, this required processing capacity is well within {HEAD ~ the capacities} of {TAIL ~ the process chambers} 213A, 
of
Thus , it may again be verified whether the greater of these percentages is within the processing capacity of the chambers 213A , 213B. Hence , since 7/12 corresponds to 58.3 % of the overall throughput of the tool 200 , this required processing capacity is well within { HEAD ~ the capacities } of { TAIL ~ the process chambers } 213A ,
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD REL TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH