First, {HEAD ~ a pad} used in {TAIL ~ semiconductor device fabrication} is rotated in a first direction  
used in
First , { HEAD ~ a pad } used in { TAIL ~ semiconductor device fabrication } is rotated in a first direction
OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD REL REL TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH