{HEAD ~ A substrate} is loaded into {TAIL ~ a chamber}, the temperature is adjusted to between about 400° C. and about 500° C., and the chamber is filed with hydrogen to create a pressure between about 0.5 and about 3 Torr 
is loaded into
{ HEAD ~ A substrate } is loaded into { TAIL ~ a chamber } , the temperature is adjusted to between about 400 ° C. and about 500 ° C. , and the chamber is filed with hydrogen to create a pressure between about 0.5 and about 3 Torr
HEAD HEAD HEAD HEAD HEAD HEAD REL REL REL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH