Consequently, the occurrence of non correlated sequential down {HEAD ~ times} of {TAIL ~ various process chambers} may be significantly reduced, thereby enhancing throughput and availability of complex cluster tools 
of
Consequently , the occurrence of non correlated sequential down { HEAD ~ times } of { TAIL ~ various process chambers } may be significantly reduced , thereby enhancing throughput and availability of complex cluster tools
OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD REL TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH