The gauge includes a component for verifying whether a dimension of a process kit part feature violates a prescribed size tolerance, the violation indicating that {HEAD ~ the process kit part} has accumulated {TAIL ~ excessive wear} or deposits 
accumulated
The gauge includes a component for verifying whether a dimension of a process kit part feature violates a prescribed size tolerance , the violation indicating that { HEAD ~ the process kit part } has accumulated { TAIL ~ excessive wear } or deposits
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD HEAD OTH REL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH