The method 1, wherein the source material of step b) is vaporized at a temperature within {HEAD ~ a range} of {TAIL ~ 155° C.} to 165° C 
of
The method 1 , wherein the source material of step b ) is vaporized at a temperature within { HEAD ~ a range } of { TAIL ~ 155 ° C. } to 165 ° C
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD REL TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH