At least one other mass is configured to deflect radially to the z axis in {HEAD ~ a x y plane} parallel to {TAIL ~ the plane} of the substrate 
parallel to
At least one other mass is configured to deflect radially to the z axis in { HEAD ~ a x y plane } parallel to { TAIL ~ the plane } of the substrate
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD HEAD REL REL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH