The method as claimed in clam 1, wherein said doped region of the first conductivity type has {HEAD ~ a doping concentration} in {TAIL ~ a range} of 1×1017 to 1×1019 cm 3 and a junction depth in a range of about 0.5 to 0.8μm 
in
The method as claimed in clam 1 , wherein said doped region of the first conductivity type has { HEAD ~ a doping concentration } in { TAIL ~ a range } of 1×1017 to 1×1019 cm 3 and a junction depth in a range of about 0.5 to 0.8μm
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD REL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH