{HEAD ~ A second dopant zone} with {TAIL ~ a doping} of a second conductivity type is formed in a second region of the semiconductor layer 
with
{ HEAD ~ A second dopant zone } with { TAIL ~ a doping } of a second conductivity type is formed in a second region of the semiconductor layer
HEAD HEAD HEAD HEAD HEAD HEAD HEAD HEAD REL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH