{HEAD ~ an irradiating optical system} for {TAIL ~ focusing and irradiating light output} from the light source device onto a processing spot within the workpiece; and 
for
{ HEAD ~ an irradiating optical system } for { TAIL ~ focusing and irradiating light output } from the light source device onto a processing spot within the workpiece ; and
HEAD HEAD HEAD HEAD HEAD HEAD HEAD HEAD REL TAIL TAIL TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH