{HEAD ~ These openings} are then filled with {TAIL ~ conductive material} to form self aligned contacts in the core region 
are filled with
{ HEAD ~ These openings } are then filled with { TAIL ~ conductive material } to form self aligned contacts in the core region
HEAD HEAD HEAD HEAD HEAD HEAD REL OTH REL REL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH