System and method to predict {HEAD ~ the state} of {TAIL ~ a process controller} in a semiconductor manufacturing facility 
of
System and method to predict { HEAD ~ the state } of { TAIL ~ a process controller } in a semiconductor manufacturing facility
OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD REL TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH