An apparatus 1, further comprising {HEAD ~ dry air supply means} for supplying {TAIL ~ dry air} to the processing atmosphere in said processing vessel 
for supplying
An apparatus 1 , further comprising { HEAD ~ dry air supply means } for supplying { TAIL ~ dry air } to the processing atmosphere in said processing vessel
OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD HEAD REL REL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH