In some embodiments {HEAD ~ the top} of {TAIL ~ the processing chamber} is removable allowing users to remove either pedestals or heater assemblies 
of
In some embodiments { HEAD ~ the top } of { TAIL ~ the processing chamber } is removable allowing users to remove either pedestals or heater assemblies
OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD REL TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH