The second alignment system 400 may be formed in the interior or {TAIL ~ exterior} of {HEAD ~ the vacuum processing chamber} 110 
The second alignment system 400 may be formed in the interior or { TAIL ~ exterior } of { HEAD ~ the vacuum processing chamber } 110
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH TAIL TAIL TAIL TAIL TAIL OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD HEAD OTH