An apparatus for forming the coated substrate especially includes {HEAD ~ means} for forming the intermediate layer and means for forming {TAIL ~ the hard carbon film} in the same vacuum chamber 
An apparatus for forming the coated substrate especially includes { HEAD ~ means } for forming the intermediate layer and means for forming { TAIL ~ the hard carbon film } in the same vacuum chamber
OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD OTH OTH OTH OTH OTH OTH OTH OTH OTH TAIL TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH