The concentrations of {HEAD ~ predetermined components} of a chemical solution 5 present in a cleaning bath 1 are measured by {TAIL ~ a measurement unit} 11 
The concentrations of { HEAD ~ predetermined components } of a chemical solution 5 present in a cleaning bath 1 are measured by { TAIL ~ a measurement unit } 11
OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH