placing said {HEAD ~ substrate} into {TAIL ~ a chemical vapor deposition reactor vacuum chamber} and evacuating the air from said chamber 
into
placing said { HEAD ~ substrate } into { TAIL ~ a chemical vapor deposition reactor vacuum chamber } and evacuating the air from said chamber
OTH OTH HEAD HEAD HEAD HEAD HEAD REL TAIL TAIL TAIL TAIL TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH