In a nitride semiconductor single crystal wafer having {TAIL ~ a flat principal surface}, the crystallographic plane orientation of the principal surface of {HEAD ~ the nitride semiconductor single crystal wafer} varies locally within a predetermined angular range 
In a nitride semiconductor single crystal wafer having { TAIL ~ a flat principal surface } , the crystallographic plane orientation of the principal surface of { HEAD ~ the nitride semiconductor single crystal wafer } varies locally within a predetermined angular range
OTH OTH OTH OTH OTH OTH OTH OTH TAIL TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH OTH OTH OTH OTH OTH