Moreover, although {HEAD ~ CF based reaction products} may be generated by the plasma of CF4 gas, the amount of CF based reaction products generated by the plasma of {TAIL ~ CF4 gas} is considerably smaller than the amount of CF based reaction products generated by a plasma of C4F8 gas or C4F6 gas 
Moreover , although { HEAD ~ CF based reaction products } may be generated by the plasma of CF4 gas , the amount of CF based reaction products generated by the plasma of { TAIL ~ CF4 gas } is considerably smaller than the amount of CF based reaction products generated by a plasma of C4F8 gas or C4F6 gas
OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH