{TAIL ~ The first blocking layer} contains 1×10 4 to 1.0 atomic % of a Group III or V element in {HEAD ~ the Periodic Table} 
{ TAIL ~ The first blocking layer } contains 1×10 4 to 1.0 atomic % of a Group III or V element in { HEAD ~ the Periodic Table }
TAIL TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD