{TAIL ~ A method} of forming a compound film includes the steps of preparing a source material, depositing the source material on a base to form a precursor film, and heating {HEAD ~ the precursor film} in a suitable atmosphere to form a film 
{ TAIL ~ A method } of forming a compound film includes the steps of preparing a source material , depositing the source material on a base to form a precursor film , and heating { HEAD ~ the precursor film } in a suitable atmosphere to form a film
TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH OTH OTH OTH OTH OTH OTH