In particular aspects, {HEAD ~ the invention} pertains to {TAIL ~ methods} of forming trenched isolation regions 
pertains to
In particular aspects , { HEAD ~ the invention } pertains to { TAIL ~ methods } of forming trenched isolation regions
OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD REL REL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH