Multi level structure may be fabricated according to {HEAD ~ the method} of the invention by repeating {TAIL ~ the last few steps} of the method of the invention 
by repeating
Multi level structure may be fabricated according to { HEAD ~ the method } of the invention by repeating { TAIL ~ the last few steps } of the method of the invention
OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH OTH REL REL TAIL TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH