Method of eliminating dislocations and lowering {HEAD ~ lattice strain} for {TAIL ~ highly doped N+ substrates} 
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Method of eliminating dislocations and lowering { HEAD ~ lattice strain } for { TAIL ~ highly doped N+ substrates }
OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD REL TAIL TAIL TAIL TAIL TAIL TAIL TAIL TAIL