For example, {HEAD ~ the transfer position} 12 is {TAIL ~ a load port} of a semiconductor processing apparatus, a station such as a stocker, or a buffer for temporarily storing an article 
is
For example , { HEAD ~ the transfer position } 12 is { TAIL ~ a load port } of a semiconductor processing apparatus , a station such as a stocker , or a buffer for temporarily storing an article
OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD OTH REL TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH