A process for chemical vapor deposition of {HEAD ~ borophosphosilicate glass} on {TAIL ~ a silicon wafer} at reduced pressure is disclosed herein 
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A process for chemical vapor deposition of { HEAD ~ borophosphosilicate glass } on { TAIL ~ a silicon wafer } at reduced pressure is disclosed herein
OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD REL TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH