A second polysilicon layer 13, or {HEAD ~ polylayer}, is, thereupon, deposited into {TAIL ~ the trench} 5 
is deposited into
A second polysilicon layer 13 , or { HEAD ~ polylayer } , is , thereupon , deposited into { TAIL ~ the trench } 5
OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD OTH REL OTH OTH OTH REL REL TAIL TAIL TAIL TAIL TAIL TAIL OTH