{TAIL ~ A method} 17 in which {HEAD ~ said step} of patterning said first conductor includes etching said first conductor as follow: 
in
{ TAIL ~ A method } 17 in which { HEAD ~ said step } of patterning said first conductor includes etching said first conductor as follow :
TAIL TAIL TAIL TAIL TAIL TAIL OTH REL OTH HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH