{HEAD ~ The combination} of the silicon oxide layer and the silicon layer comprise, in turn, {TAIL ~ a composite SRO layer} 
comprise
{ HEAD ~ The combination } of the silicon oxide layer and the silicon layer comprise , in turn , { TAIL ~ a composite SRO layer }
HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH OTH OTH OTH OTH OTH OTH OTH REL OTH OTH OTH OTH TAIL TAIL TAIL TAIL TAIL TAIL TAIL TAIL