A polysilicon layer 32 is deposited on {HEAD ~ the entire surface} of {TAIL ~ the substrate} 31 including the trench 
of
A polysilicon layer 32 is deposited on { HEAD ~ the entire surface } of { TAIL ~ the substrate } 31 including the trench
OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD REL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH