In some illustrative embodiments, {HEAD ~ the sequencing} of {TAIL ~ substrates} to the chambers 212A, 212B, i.e., the bottleneck step, may be in an alternating manner in order to maintain 100% of the total capacity of the cluster tool 200 
of
In some illustrative embodiments , { HEAD ~ the sequencing } of { TAIL ~ substrates } to the chambers 212A , 212B , i.e. , the bottleneck step , may be in an alternating manner in order to maintain 100 % of the total capacity of the cluster tool 200
OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD REL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH