{HEAD ~ The apparatus} includes {TAIL ~ a plurality} of fluid suppliers 61, 61, 63 for supplying different processing fluids 
includes
{ HEAD ~ The apparatus } includes { TAIL ~ a plurality } of fluid suppliers 61 , 61 , 63 for supplying different processing fluids
HEAD HEAD HEAD HEAD HEAD HEAD REL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH