The present invention relates to an epitaxial SiC single crystal substrate, and a method of {HEAD ~ manufacture} of {TAIL ~ the epitaxial SiC single crystal substrate} 
of
The present invention relates to an epitaxial SiC single crystal substrate , and a method of { HEAD ~ manufacture } of { TAIL ~ the epitaxial SiC single crystal substrate }
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD REL TAIL TAIL TAIL TAIL TAIL TAIL TAIL TAIL TAIL TAIL