A second dopant zone with {HEAD ~ a doping} of {TAIL ~ a second conductivity type} is formed in a second region of the semiconductor layer 
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A second dopant zone with { HEAD ~ a doping } of { TAIL ~ a second conductivity type } is formed in a second region of the semiconductor layer
OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD REL TAIL TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH