{HEAD ~ A protective structure} is produced by providing a semiconductor substrate with {TAIL ~ a doping} of a first conductivity type 
{ HEAD ~ A protective structure } is produced by providing a semiconductor substrate with { TAIL ~ a doping } of a first conductivity type
HEAD HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH OTH OTH OTH OTH OTH OTH TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH