depositing {HEAD ~ a thin cap layer} on {TAIL ~ said diffusion source layer} to prevent the outdiffusion of elemental constituents comprising said structure, 
on
depositing { HEAD ~ a thin cap layer } on { TAIL ~ said diffusion source layer } to prevent the outdiffusion of elemental constituents comprising said structure ,
OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD HEAD REL TAIL TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH