The step of recessing the sidewalls recesses sidewalls of the intermediate structure relative to {HEAD ~ edge regions} of the first capping structure to form {TAIL ~ a sacrificial structure} having recessed sidewalls 
to form
The step of recessing the sidewalls recesses sidewalls of the intermediate structure relative to { HEAD ~ edge regions } of the first capping structure to form { TAIL ~ a sacrificial structure } having recessed sidewalls
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH OTH OTH OTH REL REL TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH