With the arrangement, the apparatus is capable of stable processing of the wafer W in {HEAD ~ spite} of rotating the wafer W at {TAIL ~ a low speed} 
With the arrangement , the apparatus is capable of stable processing of the wafer W in { HEAD ~ spite } of rotating the wafer W at { TAIL ~ a low speed }
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD OTH OTH OTH OTH OTH OTH TAIL TAIL TAIL TAIL TAIL TAIL TAIL