A nitride semiconductor substrate having {HEAD ~ properties} preferable for {TAIL ~ the manufacture} of various nitride semiconductor devices is made available, by specifying or controlling the local variation in the off axis angle of the principal surface of the nitride semiconductor substrate 
preferable for
A nitride semiconductor substrate having { HEAD ~ properties } preferable for { TAIL ~ the manufacture } of various nitride semiconductor devices is made available , by specifying or controlling the local variation in the off axis angle of the principal surface of the nitride semiconductor substrate
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