{HEAD ~ The process} includes {TAIL ~ a step} of placing a silicon wafer within a reactor tube 
includes
{ HEAD ~ The process } includes { TAIL ~ a step } of placing a silicon wafer within a reactor tube
HEAD HEAD HEAD HEAD HEAD HEAD REL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH