That is, the high k dielectric layer 12 can be transformed from an amorphous film having a loose structure into {TAIL ~ the tenser high k dielectric layer} 12 having {HEAD ~ a crystalline region} 16, as shown in FIG 5 
That is , the high k dielectric layer 12 can be transformed from an amorphous film having a loose structure into { TAIL ~ the tenser high k dielectric layer } 12 having { HEAD ~ a crystalline region } 16 , as shown in FIG 5
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH TAIL TAIL TAIL TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH OTH OTH OTH OTH OTH