In the area of the line L, the detection quantity of {HEAD ~ secondary electrons} in {TAIL ~ the reference profile} is substantially equal to that in the intended profile 
in
In the area of the line L , the detection quantity of { HEAD ~ secondary electrons } in { TAIL ~ the reference profile } is substantially equal to that in the intended profile
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD REL TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH