In particular, also when these insulating film and metallic film form patterns, a polishing rate and polishing uniformity are excellent in convex portions in the patterns, and when a polishing layer is a resin layer with a non foam structure, the above described effects are significant, and particularly when an insulating film or a metallic film on which a pattern is formed is polished, a polishing rate and polishing {HEAD ~ uniformity} are excellent also in {TAIL ~ a concave portion} 
excellent in
In particular , also when these insulating film and metallic film form patterns , a polishing rate and polishing uniformity are excellent in convex portions in the patterns , and when a polishing layer is a resin layer with a non foam structure , the above described effects are significant , and particularly when an insulating film or a metallic film on which a pattern is formed is polished , a polishing rate and polishing { HEAD ~ uniformity } are excellent also in { TAIL ~ a concave portion }
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