Consequently, if supplying the substrates according to these percentages, the chambers 211A and 212A may be synchronized with respect to {HEAD ~ their down times} in {TAIL ~ view} of the next planned maintenance activity 
in
Consequently , if supplying the substrates according to these percentages , the chambers 211A and 212A may be synchronized with respect to { HEAD ~ their down times } in { TAIL ~ view } of the next planned maintenance activity
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD REL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH