In the present invention, for the purpose of precluding defective image caused by stains adhering on the surfaces of a semiconductor device and a color filter of a solid state color image sensor, a semiconductor device excellent in the water and oil repellency, anti soiling property and durability is provided, by forming on the each surface a uniform water and oil repellent protective film with a thickness on {HEAD ~ the order} of {TAIL ~ nanometer}, by treating with a nonaqueous solvent containing a chlorosilane surface treating agent having a fluoroalkyl 
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In the present invention , for the purpose of precluding defective image caused by stains adhering on the surfaces of a semiconductor device and a color filter of a solid state color image sensor , a semiconductor device excellent in the water and oil repellency , anti soiling property and durability is provided , by forming on the each surface a uniform water and oil repellent protective film with a thickness on { HEAD ~ the order } of { TAIL ~ nanometer } , by treating with a nonaqueous solvent containing a chlorosilane surface treating agent having a fluoroalkyl
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