FIG 5 is {HEAD ~ a schematic diagram} of {TAIL ~ a method} for vacuum sealing of a micro space by using indium particles 
of
FIG 5 is { HEAD ~ a schematic diagram } of { TAIL ~ a method } for vacuum sealing of a micro space by using indium particles
OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD REL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH