The LKD materials are particularly useful for manufacturing {HEAD ~ integrated circuits} that have {TAIL ~ features} smaller than 0.18 μm 
have
The LKD materials are particularly useful for manufacturing { HEAD ~ integrated circuits } that have { TAIL ~ features } smaller than 0.18 μm
OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD OTH REL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH