During the processing, {HEAD ~ the processing space} is isolated from {TAIL ~ the outer atmosphere} by closing a lid of a processing vessel and a sprayed solvent is supplied into the processing space 
is isolated from
During the processing , { HEAD ~ the processing space } is isolated from { TAIL ~ the outer atmosphere } by closing a lid of a processing vessel and a sprayed solvent is supplied into the processing space
OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD REL REL REL TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH