{HEAD ~ a first silicate glass layer} as {TAIL ~ a first solid phase diffusion source} containing an impurity of a first conductivity type, said first silicate glass layer being provided on both sides of said first gate electrode 
as
{ HEAD ~ a first silicate glass layer } as { TAIL ~ a first solid phase diffusion source } containing an impurity of a first conductivity type , said first silicate glass layer being provided on both sides of said first gate electrode
HEAD HEAD HEAD HEAD HEAD HEAD HEAD HEAD HEAD REL TAIL TAIL TAIL TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH