A GaN transitional layer is grown on {TAIL ~ the 3D nucleation layer} by {HEAD ~ HVPE} under a condition that changes the growth mode from the substantially 3D growth mode to a substantially 2D growth mode 
A GaN transitional layer is grown on { TAIL ~ the 3D nucleation layer } by { HEAD ~ HVPE } under a condition that changes the growth mode from the substantially 3D growth mode to a substantially 2D growth mode
OTH OTH OTH OTH OTH OTH OTH TAIL TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH HEAD HEAD HEAD HEAD HEAD OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH