In {HEAD ~ a preferred method} for depositing of {TAIL ~ these materials}, capacitive coupling forms a highly uniform, selectively energized stream of ions from a dense, inductively ionized plasma 
for depositing of
In { HEAD ~ a preferred method } for depositing of { TAIL ~ these materials } , capacitive coupling forms a highly uniform , selectively energized stream of ions from a dense , inductively ionized plasma
OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD REL REL REL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH