This invention also relates to a pattern inspection apparatus which uses {HEAD ~ the image correction technique} to inspect {TAIL ~ a pattern image} for defects 
to inspect
This invention also relates to a pattern inspection apparatus which uses { HEAD ~ the image correction technique } to inspect { TAIL ~ a pattern image } for defects
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD HEAD REL REL TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH