In the preoxidation cleaning step, a solution containing NH4F, HF, and H2O, a standard solution containing {TAIL ~ NH4OH}, {HEAD ~ H2O2}, and H2O, and HF are used 
In the preoxidation cleaning step , a solution containing NH4F , HF , and H2O , a standard solution containing { TAIL ~ NH4OH } , { HEAD ~ H2O2 } , and H2O , and HF are used
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH TAIL TAIL TAIL TAIL TAIL OTH HEAD HEAD HEAD HEAD HEAD OTH OTH OTH OTH OTH OTH OTH OTH