{TAIL ~ A substrate heating apparatus} includes a ceramic base having a concave heating surface on which {HEAD ~ a substrate} is placed, and a resistance heating element buried in the ceramic base 
{ TAIL ~ A substrate heating apparatus } includes a ceramic base having a concave heating surface on which { HEAD ~ a substrate } is placed , and a resistance heating element buried in the ceramic base
TAIL TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH