The gauge includes a component for verifying whether a dimension of a process kit part feature violates {HEAD ~ a prescribed size tolerance}, the violation indicating that the process kit part has accumulated excessive wear or {TAIL ~ deposits} 
The gauge includes a component for verifying whether a dimension of a process kit part feature violates { HEAD ~ a prescribed size tolerance } , the violation indicating that the process kit part has accumulated excessive wear or { TAIL ~ deposits }
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH TAIL TAIL TAIL TAIL TAIL