Here, the etch stopping layer 12 is formed of a material having {TAIL ~ an excellent etching selectivity} to {HEAD ~ the mold silicon oxide layer} 14 
Here , the etch stopping layer 12 is formed of a material having { TAIL ~ an excellent etching selectivity } to { HEAD ~ the mold silicon oxide layer } 14
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH TAIL TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD HEAD HEAD OTH