{HEAD ~ Deposition} of the insulating layer 30 can be by sputtering, chemical vapor deposition, or {TAIL ~ other methods} 
by
{ HEAD ~ Deposition } of the insulating layer 30 can be by sputtering , chemical vapor deposition , or { TAIL ~ other methods }
HEAD HEAD HEAD HEAD HEAD OTH OTH OTH OTH OTH OTH OTH REL OTH OTH OTH OTH OTH OTH OTH TAIL TAIL TAIL TAIL TAIL TAIL