{HEAD ~ The specific surface construction} of the baffle is disclosed as {TAIL ~ part} of a plenum member as well as a deflecting surface that projects to a level above the top surface of the substrate 
is disclosed as
{ HEAD ~ The specific surface construction } of the baffle is disclosed as { TAIL ~ part } of a plenum member as well as a deflecting surface that projects to a level above the top surface of the substrate
HEAD HEAD HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH OTH REL REL REL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH