Preferably, {HEAD ~ the tube pressure} is held at {TAIL ~ 175 millitorr} to 200 millitorr during deposition of the borophosphosilicate glass film 
is held at
Preferably , { HEAD ~ the tube pressure } is held at { TAIL ~ 175 millitorr } to 200 millitorr during deposition of the borophosphosilicate glass film
OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD REL REL REL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH