{TAIL ~ The concentrations} of predetermined components of a chemical solution 5 present in {HEAD ~ a cleaning bath} 1 are measured by a measurement unit 11 
{ TAIL ~ The concentrations } of predetermined components of a chemical solution 5 present in { HEAD ~ a cleaning bath } 1 are measured by a measurement unit 11
TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH OTH OTH OTH OTH OTH OTH