The assembly includes {HEAD ~ a source} 24 of {TAIL ~ one or more solid materials} such as silicon, germanium and carbon within the chamber 14 
of
The assembly includes { HEAD ~ a source } 24 of { TAIL ~ one or more solid materials } such as silicon , germanium and carbon within the chamber 14
OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD OTH REL TAIL TAIL TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH