In some embodiments {HEAD ~ the top} of the processing chamber is removable allowing users to remove {TAIL ~ either pedestals} or heater assemblies 
In some embodiments { HEAD ~ the top } of the processing chamber is removable allowing users to remove { TAIL ~ either pedestals } or heater assemblies
OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH