{HEAD ~ A boat} loaded with wafers is moved from {TAIL ~ the loadlock chamber} to the processing chamber, with the boat being rotated while the source gas is supplied 
is moved from
{ HEAD ~ A boat } loaded with wafers is moved from { TAIL ~ the loadlock chamber } to the processing chamber , with the boat being rotated while the source gas is supplied
HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH OTH REL REL REL TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH