This first source/drain implant is performed, for example, with phosphorus, at an energy of approximately 80 KeV and {HEAD ~ a dose} of {TAIL ~ approximately 4×1014 cm} 2 
of
This first source / drain implant is performed , for example , with phosphorus , at an energy of approximately 80 KeV and { HEAD ~ a dose } of { TAIL ~ approximately 4×1014 cm } 2
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD REL TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH