Consequently, in the example illustrated above, the next maintenance of one of the “bottleneck” chambers, i.e., the process chamber {HEAD ~ 212A}, may be required after {TAIL ~ the processing} of 3000 substrates in the chamber 212A 
required after
Consequently , in the example illustrated above , the next maintenance of one of the “ bottleneck ” chambers , i.e. , the process chamber { HEAD ~ 212A } , may be required after { TAIL ~ the processing } of 3000 substrates in the chamber 212A
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD OTH OTH OTH REL REL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH