The etch stopping layer 12 prevents {HEAD ~ a material} formed under {TAIL ~ the etch stopping layer} 12 from being etched when etching the mold silicon oxide layer 14 
formed under
The etch stopping layer 12 prevents { HEAD ~ a material } formed under { TAIL ~ the etch stopping layer } 12 from being etched when etching the mold silicon oxide layer 14
OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD REL REL TAIL TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH