In {HEAD ~ one embodiment}, an apparatus for delivering gases to a semiconductor processing system includes a plurality of {TAIL ~ gas input} and output lines having inlet and outlet ports 
In { HEAD ~ one embodiment } , an apparatus for delivering gases to a semiconductor processing system includes a plurality of { TAIL ~ gas input } and output lines having inlet and outlet ports
OTH HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH