The invention also provides {HEAD ~ a polishing pad} having {TAIL ~ a layer} of the cushion for a polishing pad and a polishing layer 
having
The invention also provides { HEAD ~ a polishing pad } having { TAIL ~ a layer } of the cushion for a polishing pad and a polishing layer
OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD REL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH