{HEAD ~ The aqueous dispersion} for CMP of the invention is characterized by comprising {TAIL ~ an abrasive, water} and a heteropolyacid 
is characterized by comprising
{ HEAD ~ The aqueous dispersion } for CMP of the invention is characterized by comprising { TAIL ~ an abrasive , water } and a heteropolyacid
HEAD HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH OTH OTH OTH REL REL REL REL TAIL TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH