Technologies are generally described for methods, systems, and {HEAD ~ structures} that include {TAIL ~ patterns} formed by optical lithography 
include
Technologies are generally described for methods , systems , and { HEAD ~ structures } that include { TAIL ~ patterns } formed by optical lithography
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD OTH REL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH