{HEAD ~ A nitride coated boat} is used in {TAIL ~ a method} for depositing phosphosilicate glass on semiconductor wafers 
is used in
{ HEAD ~ A nitride coated boat } is used in { TAIL ~ a method } for depositing phosphosilicate glass on semiconductor wafers
HEAD HEAD HEAD HEAD HEAD HEAD HEAD HEAD REL REL REL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH