The inspection area of the wafer is limited by the size of the e beam diameter and the detected X rays are limited by the number of {HEAD ~ X rays} emitted from the excited volume of {TAIL ~ sample}  
The inspection area of the wafer is limited by the size of the e beam diameter and the detected X rays are limited by the number of { HEAD ~ X rays } emitted from the excited volume of { TAIL ~ sample }
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH OTH OTH OTH OTH TAIL TAIL TAIL TAIL TAIL OTH