In this manner, a crystalline silicon film having {HEAD ~ a necessary degree} of crystallinity in {TAIL ~ a selective manner} can be obtained 
in
In this manner , a crystalline silicon film having { HEAD ~ a necessary degree } of crystallinity in { TAIL ~ a selective manner } can be obtained
OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH REL TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH