The present invention is directed to providing {HEAD ~ a method} and system to measure characteristics of a film disposed on {TAIL ~ a substrate} 
The present invention is directed to providing { HEAD ~ a method } and system to measure characteristics of a film disposed on { TAIL ~ a substrate }
OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH TAIL TAIL TAIL TAIL TAIL TAIL