The inspection area of the wafer is limited by the size of the e beam diameter and {HEAD ~ the detected X rays} are limited by {TAIL ~ the number} of X rays emitted from the excited volume of sample  
are limited by
The inspection area of the wafer is limited by the size of the e beam diameter and { HEAD ~ the detected X rays } are limited by { TAIL ~ the number } of X rays emitted from the excited volume of sample
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD HEAD REL REL REL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH