forming {HEAD ~ a layer} to be processed via {TAIL ~ a single or plural film layers} on a substrate 
to be processed via
forming { HEAD ~ a layer } to be processed via { TAIL ~ a single or plural film layers } on a substrate
OTH HEAD HEAD HEAD HEAD HEAD HEAD REL REL REL REL TAIL TAIL TAIL TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH