The wafer transfer device has a first unit with {HEAD ~ a plurality} of first slots for receiving {TAIL ~ a first group} of semiconductor wafers and a second unit with a plurality of slots for receiving a second group of semiconductor wafers 
for receiving
The wafer transfer device has a first unit with { HEAD ~ a plurality } of first slots for receiving { TAIL ~ a first group } of semiconductor wafers and a second unit with a plurality of slots for receiving a second group of semiconductor wafers
OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH OTH REL REL TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH