After annealing the concentration of {TAIL ~ boron}, B, dopant in the regions 64 was from about 1 E 17 atoms/cm3 to {HEAD ~ about 1 E} 18 atoms/cm3 
After annealing the concentration of { TAIL ~ boron } , B , dopant in the regions 64 was from about 1 E 17 atoms / cm3 to { HEAD ~ about 1 E } 18 atoms / cm3
OTH OTH OTH OTH OTH TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH OTH OTH