creating a mask on the dielectric layer, the mask comprising {HEAD ~ an opening}, the shape of which determines {TAIL ~ a lateral shape} of the recess; and 
creating a mask on the dielectric layer , the mask comprising { HEAD ~ an opening } , the shape of which determines { TAIL ~ a lateral shape } of the recess ; and
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH OTH OTH OTH OTH TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH