{TAIL ~ The method} 13 wherein {HEAD ~ the precursor} comprises silicon and oxygen, and wherein the desired material is silicon dioxide 
{ TAIL ~ The method } 13 wherein { HEAD ~ the precursor } comprises silicon and oxygen , and wherein the desired material is silicon dioxide
TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH