{HEAD ~ Accordingly, polycrystallization} of {TAIL ~ an epitaxially grown semiconductor metal compound layer} can be avoided 
of
{ HEAD ~ Accordingly , polycrystallization } of { TAIL ~ an epitaxially grown semiconductor metal compound layer } can be avoided
HEAD HEAD HEAD HEAD HEAD HEAD HEAD REL TAIL TAIL TAIL TAIL TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH