{HEAD ~ A transport space} for transporting a substrate without contamination of the surface of {TAIL ~ the substrate} retained therein, which comprises: 
{ HEAD ~ A transport space } for transporting a substrate without contamination of the surface of { TAIL ~ the substrate } retained therein , which comprises :
HEAD HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH