The current detected by current detecting section 22 is compared in a output comparison section 27 of controller unit 4 shown in FIG 2 with {HEAD ~ the normal current value} of {TAIL ~ DC power supply section} 20 that would have been detected at the same gas pressure when the gas composition of laser gas 6 is normal 
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The current detected by current detecting section 22 is compared in a output comparison section 27 of controller unit 4 shown in FIG 2 with { HEAD ~ the normal current value } of { TAIL ~ DC power supply section } 20 that would have been detected at the same gas pressure when the gas composition of laser gas 6 is normal
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD HEAD REL TAIL TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH