{HEAD ~ A process} for forming a dielectric layer over {TAIL ~ a substrate}, said process comprising: 
{ HEAD ~ A process } for forming a dielectric layer over { TAIL ~ a substrate } , said process comprising :
HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH OTH OTH OTH OTH TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH