The present invention generally relates to apparatus and methods of transferring and supporting {HEAD ~ substrates} in {TAIL ~ a batch processing chamber} 
in
The present invention generally relates to apparatus and methods of transferring and supporting { HEAD ~ substrates } in { TAIL ~ a batch processing chamber }
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD REL TAIL TAIL TAIL TAIL TAIL TAIL TAIL TAIL