A process for chemical vapor deposition of borophosphosilicate glass on {HEAD ~ a silicon wafer} at {TAIL ~ reduced pressure} is disclosed herein 
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A process for chemical vapor deposition of borophosphosilicate glass on { HEAD ~ a silicon wafer } at { TAIL ~ reduced pressure } is disclosed herein
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD REL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH