{TAIL ~ A process} for forming a dielectric layer over {HEAD ~ a substrate}, said process comprising: 
{ TAIL ~ A process } for forming a dielectric layer over { HEAD ~ a substrate } , said process comprising :
TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH OTH OTH OTH