The fluid suppliers 61, 62, 63 are arranged in {TAIL ~ a direction} extending from {HEAD ~ the circumference} of the wafer W to its inside 
The fluid suppliers 61 , 62 , 63 are arranged in { TAIL ~ a direction } extending from { HEAD ~ the circumference } of the wafer W to its inside
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH OTH OTH OTH OTH OTH