First, the backside 96 of the silicon substrate 80 is coated with a suitable contact material that has {HEAD ~ good electrical conductivity} for {TAIL ~ electrochemical etching processes} 
for
First , the backside 96 of the silicon substrate 80 is coated with a suitable contact material that has { HEAD ~ good electrical conductivity } for { TAIL ~ electrochemical etching processes }
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD REL TAIL TAIL TAIL TAIL TAIL TAIL TAIL