A method for fabricating semiconductor substrates with {HEAD ~ resistivity} below {TAIL ~ 0.02 ohm cm} is provided 
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A method for fabricating semiconductor substrates with { HEAD ~ resistivity } below { TAIL ~ 0.02 ohm cm } is provided
OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD REL TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH