While the inert gas is injected from {HEAD ~ the position} opposed to {TAIL ~ the peripheral edge} of the substrate W in the aforementioned embodiment, the inert gas may also be injected from a position opposed to the center of the substrate W 
opposed to
While the inert gas is injected from { HEAD ~ the position } opposed to { TAIL ~ the peripheral edge } of the substrate W in the aforementioned embodiment , the inert gas may also be injected from a position opposed to the center of the substrate W
OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD REL REL TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH