The method 10, wherein, in step , {HEAD ~ the average thickness} of {TAIL ~ the Ta layer} is set to about 0.1 Å or more and about 0.3 Å or less 
of
The method 10 , wherein , in step , { HEAD ~ the average thickness } of { TAIL ~ the Ta layer } is set to about 0.1 Å or more and about 0.3 Å or less
OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD REL TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH