Multi level structure may be fabricated according to the method of the invention by repeating {HEAD ~ the last few steps} of {TAIL ~ the method} of the invention 
of
Multi level structure may be fabricated according to the method of the invention by repeating { HEAD ~ the last few steps } of { TAIL ~ the method } of the invention
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD HEAD REL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH