By combining different single conditioning heads or a plurality of conditioning heads and adjusting the ejection tube settings in different conditioning sessions, conditioning and cleaning of a polishing pad and {HEAD ~ removal} therefrom of residual diamond particles can be conducted sequentially without switching {TAIL ~ conditioners} 
conducted sequentially without switching
By combining different single conditioning heads or a plurality of conditioning heads and adjusting the ejection tube settings in different conditioning sessions , conditioning and cleaning of a polishing pad and { HEAD ~ removal } therefrom of residual diamond particles can be conducted sequentially without switching { TAIL ~ conditioners }
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD OTH OTH OTH OTH OTH OTH OTH REL REL REL REL TAIL TAIL TAIL TAIL TAIL