The invention is an apparatus and {HEAD ~ method} for cleaving a semiconductor bar and coating {TAIL ~ the cleaved facets} within a vacuum environment 
for coating
The invention is an apparatus and { HEAD ~ method } for cleaving a semiconductor bar and coating { TAIL ~ the cleaved facets } within a vacuum environment
OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD REL OTH OTH OTH OTH OTH REL TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH