A processing fixture and {HEAD ~ method} of fabricating micromechanical devices, such as digital micromirror devices, that allows fragile structures on wafer 22 to be protected from {TAIL ~ debris} during the saw operation and subsequent cleaning operations 
A processing fixture and { HEAD ~ method } of fabricating micromechanical devices , such as digital micromirror devices , that allows fragile structures on wafer 22 to be protected from { TAIL ~ debris } during the saw operation and subsequent cleaning operations
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