This improves {HEAD ~ the efficiency} and {TAIL ~ economy} of the steam supply for the process chamber 38 
This improves { HEAD ~ the efficiency } and { TAIL ~ economy } of the steam supply for the process chamber 38
OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD OTH TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH