{TAIL ~ The fluid suppliers} 61, 62, 63 are arranged in {HEAD ~ a direction} extending from the circumference of the wafer W to its inside 
{ TAIL ~ The fluid suppliers } 61 , 62 , 63 are arranged in { HEAD ~ a direction } extending from the circumference of the wafer W to its inside
TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH