A micro gyroscope determine three dimensional rotational movements is mounted on a substrate on which a plurality of masses tangentially oscillate about {HEAD ~ the z axis} perpendicular to {TAIL ~ the substrate} 
perpendicular to
A micro gyroscope determine three dimensional rotational movements is mounted on a substrate on which a plurality of masses tangentially oscillate about { HEAD ~ the z axis } perpendicular to { TAIL ~ the substrate }
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD REL REL TAIL TAIL TAIL TAIL TAIL TAIL