This invention relates generally to {HEAD ~ pads} used in semiconductor device fabrication, such as in {TAIL ~ chemical mechanical polishing} , and more particularly to cleaning such pads 
This invention relates generally to { HEAD ~ pads } used in semiconductor device fabrication , such as in { TAIL ~ chemical mechanical polishing } , and more particularly to cleaning such pads
OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD OTH OTH OTH OTH OTH OTH OTH OTH OTH TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH