The present invention relates to {HEAD ~ a lithographic apparatus} and {TAIL ~ a method} for manufacturing a device 
The present invention relates to { HEAD ~ a lithographic apparatus } and { TAIL ~ a method } for manufacturing a device
OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD OTH TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH