chemically vapor depositing at least one composite layer having a thickness in the range of about 1 μm to about 20 μm by chemically vapor depositing during {TAIL ~ a first cycle} {HEAD ~ a substantially optically transparent first interlayer} of about 5 Å to 1 μm thick and a second interlayer of about 1 μm to 20 μm thick onto said substrate 
chemically vapor depositing at least one composite layer having a thickness in the range of about 1 μm to about 20 μm by chemically vapor depositing during { TAIL ~ a first cycle } { HEAD ~ a substantially optically transparent first interlayer } of about 5 Å to 1 μm thick and a second interlayer of about 1 μm to 20 μm thick onto said substrate
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