{HEAD ~ A passivation layer} is formed overlying {TAIL ~ the first dielectric layer} and has an opening, in which the opening corresponds to the bonding region and the sensing region and exposes the dielectric island and a part of the first conductive layer 
is formed overlying
{ HEAD ~ A passivation layer } is formed overlying { TAIL ~ the first dielectric layer } and has an opening , in which the opening corresponds to the bonding region and the sensing region and exposes the dielectric island and a part of the first conductive layer
HEAD HEAD HEAD HEAD HEAD HEAD HEAD REL REL REL TAIL TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH