This permits {HEAD ~ the heat} remaining in {TAIL ~ the high purity steam} leaving the turbine to be used in heating the low purity water to be consumed in the process chamber 
remaining in
This permits { HEAD ~ the heat } remaining in { TAIL ~ the high purity steam } leaving the turbine to be used in heating the low purity water to be consumed in the process chamber
OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD REL REL TAIL TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH