A method for manufacturing an electron source 1, wherein the electron source comprises a plurality of electron emitting elements, and the relationship 1≧Sout≧4·n·Sact1−Cin is satisfied, where Sact1 is a consumption rate of {HEAD ~ the gas} for {TAIL ~ each element}, and n is a number of elements simultaneously subjected to the step of forming the carbon film 
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A method for manufacturing an electron source 1 , wherein the electron source comprises a plurality of electron emitting elements , and the relationship 1≧Sout≧4·n·Sact1−Cin is satisfied , where Sact1 is a consumption rate of { HEAD ~ the gas } for { TAIL ~ each element } , and n is a number of elements simultaneously subjected to the step of forming the carbon film
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