A process for forming {HEAD ~ a dielectric layer} over {TAIL ~ a substrate}, said process comprising: 
over
A process for forming { HEAD ~ a dielectric layer } over { TAIL ~ a substrate } , said process comprising :
OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD REL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH