In some illustrative embodiments, the sequencing of substrates to the chambers 212A, 212B, i.e., the bottleneck step, may be in an alternating manner in {HEAD ~ order} to maintain {TAIL ~ 100%} of the total capacity of the cluster tool 200 
to maintain
In some illustrative embodiments , the sequencing of substrates to the chambers 212A , 212B , i.e. , the bottleneck step , may be in an alternating manner in { HEAD ~ order } to maintain { TAIL ~ 100 % } of the total capacity of the cluster tool 200
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD REL REL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH