During the processing, {TAIL ~ the processing space} is isolated from the outer atmosphere by closing {HEAD ~ a lid} of a processing vessel and a sprayed solvent is supplied into the processing space 
During the processing , { TAIL ~ the processing space } is isolated from the outer atmosphere by closing { HEAD ~ a lid } of a processing vessel and a sprayed solvent is supplied into the processing space
OTH OTH OTH OTH TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH