A process for depositing porous silicon oxide based films using a sol gel approach utilizing {HEAD ~ a precursor solution formulation} which includes a purified nonionic surfactant and an additive among other components, where the additive is {TAIL ~ either an ionic additive} or an amine additive which forms an ionic ammonium type salt in the acidic precursor solution 
A process for depositing porous silicon oxide based films using a sol gel approach utilizing { HEAD ~ a precursor solution formulation } which includes a purified nonionic surfactant and an additive among other components , where the additive is { TAIL ~ either an ionic additive } or an amine additive which forms an ionic ammonium type salt in the acidic precursor solution
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