It is {HEAD ~ the second object} of {TAIL ~ the present invention} to provide a film forming apparatus capable of forming solution films having different film thicknesses by adjusting the viscosity of a single processing solution 
of
It is { HEAD ~ the second object } of { TAIL ~ the present invention } to provide a film forming apparatus capable of forming solution films having different film thicknesses by adjusting the viscosity of a single processing solution
OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD REL TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH