A process for forming {HEAD ~ a thin film} of {TAIL ~ amorphous silicon} of a uniform thickness on a relatively large glass plate 
of
A process for forming { HEAD ~ a thin film } of { TAIL ~ amorphous silicon } of a uniform thickness on a relatively large glass plate
OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD REL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH