For example, the transfer position 12 is {TAIL ~ a load port} of a semiconductor processing apparatus, a station such as a stocker, or a buffer for temporarily storing {HEAD ~ an article} 
For example , the transfer position 12 is { TAIL ~ a load port } of a semiconductor processing apparatus , a station such as a stocker , or a buffer for temporarily storing { HEAD ~ an article }
OTH OTH OTH OTH OTH OTH OTH OTH TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD