The special cleaning step effect robust removal of the precipitates accumulated in the operating source due to {TAIL ~ the decomposition} of carbon containing gases such as hydrocarbons and halocarbons Precipitate removal is achieved by employing ions and radicals formed in {HEAD ~ an inert gas plasma} or a mixture of inert gas and oxygen to reactively etch or bombard the precipitates 
The special cleaning step effect robust removal of the precipitates accumulated in the operating source due to { TAIL ~ the decomposition } of carbon containing gases such as hydrocarbons and halocarbons Precipitate removal is achieved by employing ions and radicals formed in { HEAD ~ an inert gas plasma } or a mixture of inert gas and oxygen to reactively etch or bombard the precipitates
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