The step of removing {HEAD ~ portions} of {TAIL ~ the first capping layer} forms a first capping structure that covers portions of the sacrificial layer 
of
The step of removing { HEAD ~ portions } of { TAIL ~ the first capping layer } forms a first capping structure that covers portions of the sacrificial layer
OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD REL TAIL TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH