A coil apparatus includes a coil trace, a semiconductor substrate and {HEAD ~ a dielectric layer} arranged on {TAIL ~ the semiconductor substrate}, at least parts of the coil trace being arranged above a recess in the dielectric layer 
arranged on
A coil apparatus includes a coil trace , a semiconductor substrate and { HEAD ~ a dielectric layer } arranged on { TAIL ~ the semiconductor substrate } , at least parts of the coil trace being arranged above a recess in the dielectric layer
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD REL REL TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH