The process consists of a step of placing a plurality of {TAIL ~ wafers} in a shrouded quartz boat or wafer carrier having a plurality of slots cut in the walls thereof to admit reactant gases to the vicinity of {HEAD ~ the wafers} 
The process consists of a step of placing a plurality of { TAIL ~ wafers } in a shrouded quartz boat or wafer carrier having a plurality of slots cut in the walls thereof to admit reactant gases to the vicinity of { HEAD ~ the wafers }
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD