The method includes {TAIL ~ the actual ion beam processing step} combined with {HEAD ~ the thermal and chemical conditioning} of the ion source and a special cleaning step 
The method includes { TAIL ~ the actual ion beam processing step } combined with { HEAD ~ the thermal and chemical conditioning } of the ion source and a special cleaning step
OTH OTH OTH TAIL TAIL TAIL TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH OTH OTH OTH OTH OTH OTH OTH