In another mode, the support structure MT is kept essentially stationary holding a programmable patterning device, and the substrate table WT is moved or scanned while {HEAD ~ a pattern} imparted to the radiation beam is projected onto {TAIL ~ a target portion} C 
is projected onto
In another mode , the support structure MT is kept essentially stationary holding a programmable patterning device , and the substrate table WT is moved or scanned while { HEAD ~ a pattern } imparted to the radiation beam is projected onto { TAIL ~ a target portion } C
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH OTH OTH OTH REL REL REL TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH