first source/drain regions of {HEAD ~ the first conductivity type} formed in {TAIL ~ the outward portions} from said first silicate glass layer in the primary surface of said substrate 
formed in
first source / drain regions of { HEAD ~ the first conductivity type } formed in { TAIL ~ the outward portions } from said first silicate glass layer in the primary surface of said substrate
OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD HEAD REL REL TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH