A process for chemical vapor deposition of {HEAD ~ borophosphosilicate glass} on a silicon wafer at {TAIL ~ reduced pressure} is disclosed herein 
A process for chemical vapor deposition of { HEAD ~ borophosphosilicate glass } on a silicon wafer at { TAIL ~ reduced pressure } is disclosed herein
OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH OTH OTH OTH TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH