{HEAD ~ This invention} relates, in general, to semiconductor purposes, and more particularly to {TAIL ~ deposition} on a semiconductor wafer 
relates particularly to
{ HEAD ~ This invention } relates , in general , to semiconductor purposes , and more particularly to { TAIL ~ deposition } on a semiconductor wafer
HEAD HEAD HEAD HEAD HEAD HEAD REL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH REL REL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH