{TAIL ~ A lithographic apparatus} for immersion lithography is disclosed in which {HEAD ~ a seal} between different parts of the substrate table may be arranged to reduce the transmission of forces between the different parts 
in
{ TAIL ~ A lithographic apparatus } for immersion lithography is disclosed in which { HEAD ~ a seal } between different parts of the substrate table may be arranged to reduce the transmission of forces between the different parts
TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH REL OTH HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH