Since no reflected radiation escapes from {HEAD ~ the outer side} of the right hand side boundary 47 of the pattern 221 formed from a multilayer, the reflected radiation intensity at the boundary of {TAIL ~ the pattern} 221 is improved similarly as in the reflection mask shown in FIG 10 
Since no reflected radiation escapes from { HEAD ~ the outer side } of the right hand side boundary 47 of the pattern 221 formed from a multilayer , the reflected radiation intensity at the boundary of { TAIL ~ the pattern } 221 is improved similarly as in the reflection mask shown in FIG 10
OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH