This invention also relates to {TAIL ~ a pattern inspection apparatus} which uses the image correction technique to inspect {HEAD ~ a pattern image} for defects 
This invention also relates to { TAIL ~ a pattern inspection apparatus } which uses the image correction technique to inspect { HEAD ~ a pattern image } for defects
OTH OTH OTH OTH OTH TAIL TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH