While each of the above embodiments and examples has been described with reference to an ECR plasma generator serving as plasma generation means, the present invention is not restricted to this but {HEAD ~ another plasma CVD apparatus} such as a high frequency plasma CVD apparatus or {TAIL ~ a DC plasma CVD apparatus} is also employable 
such as
While each of the above embodiments and examples has been described with reference to an ECR plasma generator serving as plasma generation means , the present invention is not restricted to this but { HEAD ~ another plasma CVD apparatus } such as a high frequency plasma CVD apparatus or { TAIL ~ a DC plasma CVD apparatus } is also employable
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