This improves {HEAD ~ the efficiency} and economy of {TAIL ~ the steam supply} for the process chamber 38 
of
This improves { HEAD ~ the efficiency } and economy of { TAIL ~ the steam supply } for the process chamber 38
OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH REL TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH