Following {HEAD ~ the formation} of {TAIL ~ resist pattern} 112, the first conductor is patterned by removing the areas outside the resist pattern 112, shown generally with dashed lines in FIG 5 
of
Following { HEAD ~ the formation } of { TAIL ~ resist pattern } 112 , the first conductor is patterned by removing the areas outside the resist pattern 112 , shown generally with dashed lines in FIG 5
OTH HEAD HEAD HEAD HEAD HEAD HEAD REL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH