Consequently, the yield of accepted products of {HEAD ~ reflection masks} as {TAIL ~ optical elements} of the present invention is raised 
as
Consequently , the yield of accepted products of { HEAD ~ reflection masks } as { TAIL ~ optical elements } of the present invention is raised
OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD REL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH