A method 4, further comprising {HEAD ~ the step} of washing {TAIL ~ the entire substrate} with a solution containing fluoric acid, while carrying out said leveling by chemical and mechanical polishing  
of washing
A method 4 , further comprising { HEAD ~ the step } of washing { TAIL ~ the entire substrate } with a solution containing fluoric acid , while carrying out said leveling by chemical and mechanical polishing
OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD REL REL TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH