In {TAIL ~ this exemplary embodiment}, {HEAD ~ N type conductivity} determining ions, such as phosphorus or arsenic, are implanted 
In
In { TAIL ~ this exemplary embodiment } , { HEAD ~ N type conductivity } determining ions , such as phosphorus or arsenic , are implanted
REL TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH