In accordance with the invention, a method of forming a compound film includes the steps of preparing a source material, depositing the source material on a base to form a precursor film, and heating {HEAD ~ the precursor film} in {TAIL ~ a suitable atmosphere} to form a film 
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In accordance with the invention , a method of forming a compound film includes the steps of preparing a source material , depositing the source material on a base to form a precursor film , and heating { HEAD ~ the precursor film } in { TAIL ~ a suitable atmosphere } to form a film
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