A photolithographic method 6 wherein said imagewise exposing of said first layer is done by {HEAD ~ computer} controlling {TAIL ~ a thin beam} of actinic radiation 
controlling
A photolithographic method 6 wherein said imagewise exposing of said first layer is done by { HEAD ~ computer } controlling { TAIL ~ a thin beam } of actinic radiation
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD REL TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH