An insulating material layer is {HEAD ~ conformally deposited overlying exposed portions} of {TAIL ~ the semiconductor substrate} 
of
An insulating material layer is { HEAD ~ conformally deposited overlying exposed portions } of { TAIL ~ the semiconductor substrate }
OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD HEAD HEAD REL TAIL TAIL TAIL TAIL TAIL TAIL TAIL