The deposition rate of each interlayer 2,4 is generally in {HEAD ~ the range} of {TAIL ~ about 0.1 10 microns/hour} 
of
The deposition rate of each interlayer 2,4 is generally in { HEAD ~ the range } of { TAIL ~ about 0.1 10 microns / hour }
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD REL TAIL TAIL TAIL TAIL TAIL TAIL TAIL TAIL TAIL TAIL