{HEAD ~ The invention} relates generally to {TAIL ~ a method} for forming dielectric/insulating oxide film, and more particularly to a method for fabricating a Strontium Tantalum Oxide thin film 
relates generally to
{ HEAD ~ The invention } relates generally to { TAIL ~ a method } for forming dielectric / insulating oxide film , and more particularly to a method for fabricating a Strontium Tantalum Oxide thin film
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