{HEAD ~ The method} 1, wherein the resistor material comprises tantalum nitride and the dielectric layer comprises {TAIL ~ a polymer} 
{ HEAD ~ The method } 1 , wherein the resistor material comprises tantalum nitride and the dielectric layer comprises { TAIL ~ a polymer }
HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH TAIL TAIL TAIL TAIL TAIL TAIL