For example, {HEAD ~ the averaging} can be applied to {TAIL ~ two laterally displacement measurement axes} that are substantially parallel to one another to more accurately determine an average angular orientation of the stage 
applied to
For example , { HEAD ~ the averaging } can be applied to { TAIL ~ two laterally displacement measurement axes } that are substantially parallel to one another to more accurately determine an average angular orientation of the stage
OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH REL REL TAIL TAIL TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH