A boat loaded with wafers is moved from {TAIL ~ the loadlock chamber} to {HEAD ~ the processing chamber}, with the boat being rotated while the source gas is supplied 
A boat loaded with wafers is moved from { TAIL ~ the loadlock chamber } to { HEAD ~ the processing chamber } , with the boat being rotated while the source gas is supplied
OTH OTH OTH OTH OTH OTH OTH OTH TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH