{HEAD ~ A peripheral edge portion} of the protective sheet is provided at {TAIL ~ an inside} of the peripheral edge portion of the semiconductor chip 
is provided at
{ HEAD ~ A peripheral edge portion } of the protective sheet is provided at { TAIL ~ an inside } of the peripheral edge portion of the semiconductor chip
HEAD HEAD HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH OTH OTH REL REL REL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH