The preheat module has a vertically moveable rack and is loaded with {HEAD ~ various sized batches} of {TAIL ~ wafers} with no vacant positions between them 
of
The preheat module has a vertically moveable rack and is loaded with { HEAD ~ various sized batches } of { TAIL ~ wafers } with no vacant positions between them
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD REL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH