In some illustrative embodiments, it may be verified whether a percentage determined for each of the process chambers in step 1 may be within {HEAD ~ the processing capacity} of the process chambers 211A, 211B. That is, {TAIL ~ the processing capacity} of the chambers have to be equal to or greater than the required percentage 
In some illustrative embodiments , it may be verified whether a percentage determined for each of the process chambers in step 1 may be within { HEAD ~ the processing capacity } of the process chambers 211A , 211B. That is , { TAIL ~ the processing capacity } of the chambers have to be equal to or greater than the required percentage
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