A buried layer with {HEAD ~ doping} of {TAIL ~ a second conductivity type} is formed in a first region of the semiconductor layer, wherein the buried layer is produced at the junction between the semiconductor layer and semiconductor substrate 
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A buried layer with { HEAD ~ doping } of { TAIL ~ a second conductivity type } is formed in a first region of the semiconductor layer , wherein the buried layer is produced at the junction between the semiconductor layer and semiconductor substrate
OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD REL TAIL TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH