For example, the transfer position 12 is a load port of a semiconductor processing apparatus, {HEAD ~ a station} such as a stocker, or {TAIL ~ a buffer} for temporarily storing an article 
such as
For example , the transfer position 12 is a load port of a semiconductor processing apparatus , { HEAD ~ a station } such as a stocker , or { TAIL ~ a buffer } for temporarily storing an article
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD REL REL OTH OTH OTH OTH TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH