Finally, logic causes control apparatus to include and not include respective ones of the materials within the beam in {HEAD ~ a pre established pattern} of {TAIL ~ time periods} which will cause the materials to be deposited on the steps in a series of stacked monolayers 
of
Finally , logic causes control apparatus to include and not include respective ones of the materials within the beam in { HEAD ~ a pre established pattern } of { TAIL ~ time periods } which will cause the materials to be deposited on the steps in a series of stacked monolayers
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD HEAD REL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH