In {HEAD ~ another embodiment}, {TAIL ~ a substrate boat} having removable substrate holder is configured to provide susceptors without dramatically increasing pumping volume 
In { HEAD ~ another embodiment } , { TAIL ~ a substrate boat } having removable substrate holder is configured to provide susceptors without dramatically increasing pumping volume
OTH HEAD HEAD HEAD HEAD HEAD HEAD OTH TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH