Another object of the present invention is to provide a method for forming {TAIL ~ a dual oxide layer} having enhanced electrical characteristics as well as {HEAD ~ a thickness} of 100 Å or less 
Another object of the present invention is to provide a method for forming { TAIL ~ a dual oxide layer } having enhanced electrical characteristics as well as { HEAD ~ a thickness } of 100 Å or less
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH TAIL TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH OTH OTH OTH