{TAIL ~ The collar layer} 12 is, thereupon, removed in the upper region and removed laterally down to {HEAD ~ the upper edge} of the second polysilicon layer 13 
{ TAIL ~ The collar layer } 12 is , thereupon , removed in the upper region and removed laterally down to { HEAD ~ the upper edge } of the second polysilicon layer 13
TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH OTH OTH OTH OTH