{HEAD ~ The method} for manufacturing {TAIL ~ a piezoelectric resonator element} 4, further comprising removing the second dry etching mask in a mask removing process after the second dry etching process 
for manufacturing
{ HEAD ~ The method } for manufacturing { TAIL ~ a piezoelectric resonator element } 4 , further comprising removing the second dry etching mask in a mask removing process after the second dry etching process
HEAD HEAD HEAD HEAD HEAD HEAD REL REL TAIL TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH