{HEAD ~ A thin film transistor} includes {TAIL ~ a substrate} with a trench having first and second sides and a bottom, and a gate electrode at one of the first and second sides of the trench 
includes
{ HEAD ~ A thin film transistor } includes { TAIL ~ a substrate } with a trench having first and second sides and a bottom , and a gate electrode at one of the first and second sides of the trench
HEAD HEAD HEAD HEAD HEAD HEAD HEAD HEAD REL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH