Consequently, in the example illustrated above, the next maintenance of one of the “bottleneck” chambers, i.e., the process chamber 212A, may be required after the processing of {TAIL ~ 3000 substrates} in {HEAD ~ the chamber} 212A 
Consequently , in the example illustrated above , the next maintenance of one of the “ bottleneck ” chambers , i.e. , the process chamber 212A , may be required after the processing of { TAIL ~ 3000 substrates } in { HEAD ~ the chamber } 212A
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