The next step is forming from the hydrogen gas a plasma having an ion density in the range between 1010 and 1013 cm−3 and an ion energy lower than 30 eV {HEAD ~ The last step} is exposing {TAIL ~ the workpiece} to the plasma for a predetermined time 
is exposing
The next step is forming from the hydrogen gas a plasma having an ion density in the range between 1010 and 1013 cm−3 and an ion energy lower than 30 eV { HEAD ~ The last step } is exposing { TAIL ~ the workpiece } to the plasma for a predetermined time
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD REL REL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH