An apparatus is fabricated with a plurality of {TAIL ~ semiconductor device substrates} and MEMS substrates with micromachined sensors, circuits, transducers, and {HEAD ~ MEMS devices} fabricated on the plurality of substrates 
An apparatus is fabricated with a plurality of { TAIL ~ semiconductor device substrates } and MEMS substrates with micromachined sensors , circuits , transducers , and { HEAD ~ MEMS devices } fabricated on the plurality of substrates
OTH OTH OTH OTH OTH OTH OTH OTH TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH OTH OTH OTH OTH