An epitaxial SiC single crystal substrate which reduces threading edge dislocation arrays in {HEAD ~ SiC epitaxial film} is offered, as well as a method of manufacture of {TAIL ~ the epitaxial SiC single crystal substrate} 
An epitaxial SiC single crystal substrate which reduces threading edge dislocation arrays in { HEAD ~ SiC epitaxial film } is offered , as well as a method of manufacture of { TAIL ~ the epitaxial SiC single crystal substrate }
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