A pattern inspection apparatus 1, wherein said irradiator includes a pair of swing mirrors which reflect {HEAD ~ said deep ultraviolet laser} by mutually swinging at {TAIL ~ different directions} 
by mutually swinging at
A pattern inspection apparatus 1 , wherein said irradiator includes a pair of swing mirrors which reflect { HEAD ~ said deep ultraviolet laser } by mutually swinging at { TAIL ~ different directions }
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD HEAD REL REL REL REL TAIL TAIL TAIL TAIL TAIL TAIL