The method comprises steps of forming a first oxide layer over the substrate and forming {HEAD ~ a nitride layer} on {TAIL ~ the first oxide layer} 
on
The method comprises steps of forming a first oxide layer over the substrate and forming { HEAD ~ a nitride layer } on { TAIL ~ the first oxide layer }
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD REL TAIL TAIL TAIL TAIL TAIL TAIL TAIL TAIL