Thus, {HEAD ~ deflection} resulting in {TAIL ~ the central portion} of a large sized substrate can be controlled 
resulting in
Thus , { HEAD ~ deflection } resulting in { TAIL ~ the central portion } of a large sized substrate can be controlled
OTH OTH HEAD HEAD HEAD HEAD HEAD REL REL TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH