first source/drain regions of the first conductivity type formed in {HEAD ~ the outward portions} from said first silicate glass layer in {TAIL ~ the primary surface} of said substrate 
first source / drain regions of the first conductivity type formed in { HEAD ~ the outward portions } from said first silicate glass layer in { TAIL ~ the primary surface } of said substrate
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH OTH OTH OTH OTH OTH TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH