The invention is directed to {HEAD ~ an apparatus} for generating {TAIL ~ soft x radiation}, particularly EUV radiation, by laser induced plasma 
for generating
The invention is directed to { HEAD ~ an apparatus } for generating { TAIL ~ soft x radiation } , particularly EUV radiation , by laser induced plasma
OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD REL REL TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH