The invention is {HEAD ~ a procedure} for making {TAIL ~ photodetectors} using compound semiconductors formed on substrates containing phosphorus 
for making
The invention is { HEAD ~ a procedure } for making { TAIL ~ photodetectors } using compound semiconductors formed on substrates containing phosphorus
OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD REL REL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH