By this RTA process, on {HEAD ~ both the surfaces} of the gate electrode, {TAIL ~ the peak concentration} equals 5×1018 cm 3 and the depth equals 0.04 μm 
By this RTA process , on { HEAD ~ both the surfaces } of the gate electrode , { TAIL ~ the peak concentration } equals 5×1018 cm 3 and the depth equals 0.04 μm
OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH OTH OTH OTH TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH