{HEAD ~ The step} of removing {TAIL ~ portions} of the first capping layer forms a first capping structure that covers portions of the sacrificial layer 
of removing
{ HEAD ~ The step } of removing { TAIL ~ portions } of the first capping layer forms a first capping structure that covers portions of the sacrificial layer
HEAD HEAD HEAD HEAD HEAD HEAD REL REL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH