It is an object of {HEAD ~ the invention} to provide {TAIL ~ a process} for making borderless contact windows on a semiconductor chip 
to provide
It is an object of { HEAD ~ the invention } to provide { TAIL ~ a process } for making borderless contact windows on a semiconductor chip
OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD REL REL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH