Next, {HEAD ~ channels} and bodies 150 are formed on {TAIL ~ the first substrate} 100 in accordance with the macro porous silicon process described for the previous exemplary embodiment, so a micro needle array is formed 
are formed on
Next , { HEAD ~ channels } and bodies 150 are formed on { TAIL ~ the first substrate } 100 in accordance with the macro porous silicon process described for the previous exemplary embodiment , so a micro needle array is formed
OTH OTH HEAD HEAD HEAD HEAD HEAD OTH OTH OTH REL REL REL TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH