{TAIL ~ The loading}, {HEAD ~ unloading}, handling and processing of wafers in the machine can occur while other wafers are being preheated 
{ TAIL ~ The loading } , { HEAD ~ unloading } , handling and processing of wafers in the machine can occur while other wafers are being preheated
TAIL TAIL TAIL TAIL TAIL TAIL OTH HEAD HEAD HEAD HEAD HEAD OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH