If the first alignment system 200 is designed to align the first and second substrates 510 and 520 more precisely as compared with the second alignment system 400, then the first alignment camera 220 of the first alignment system 200 may be provided in the interior of the vacuum processing chamber 110, and {HEAD ~ the second alignment camera} 420 may be provided in {TAIL ~ the exterior} of the vacuum processing chamber 110 
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If the first alignment system 200 is designed to align the first and second substrates 510 and 520 more precisely as compared with the second alignment system 400 , then the first alignment camera 220 of the first alignment system 200 may be provided in the interior of the vacuum processing chamber 110 , and { HEAD ~ the second alignment camera } 420 may be provided in { TAIL ~ the exterior } of the vacuum processing chamber 110
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