{HEAD ~ The gate structures} include a gate dielectric layer and {TAIL ~ a gate film stack} that includes a conductive layer and an overlying hard mask 
include
{ HEAD ~ The gate structures } include a gate dielectric layer and { TAIL ~ a gate film stack } that includes a conductive layer and an overlying hard mask
HEAD HEAD HEAD HEAD HEAD HEAD HEAD REL OTH OTH OTH OTH OTH TAIL TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH