A peripheral edge portion of the protective sheet is provided at {HEAD ~ an inside} of {TAIL ~ the peripheral edge portion} of the semiconductor chip 
of
A peripheral edge portion of the protective sheet is provided at { HEAD ~ an inside } of { TAIL ~ the peripheral edge portion } of the semiconductor chip
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD REL TAIL TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH