The invention is a process for making optical devices comprising compound semiconductors on substrates containing {TAIL ~ phosphorus} in which a protective layer is put down on the active region prior to exposure of the device to temperatures over {HEAD ~ about 300 degrees C} 
The invention is a process for making optical devices comprising compound semiconductors on substrates containing { TAIL ~ phosphorus } in which a protective layer is put down on the active region prior to exposure of the device to temperatures over { HEAD ~ about 300 degrees C }
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD HEAD