{HEAD ~ A method} 1 wherein the thickness of the first layer of said antireflective coating is {TAIL ~ between 300 and 1500 angstroms}, and the second layer is in the range of 170 to 330 angstroms 
{ HEAD ~ A method } 1 wherein the thickness of the first layer of said antireflective coating is { TAIL ~ between 300 and 1500 angstroms } , and the second layer is in the range of 170 to 330 angstroms
HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH TAIL TAIL TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH