{HEAD ~ The invention} relates generally to the manufacture of semiconductor devices, and more specifically to {TAIL ~ the method} for defining precise, narrow polysilicon features 
relates specifically to
{ HEAD ~ The invention } relates generally to the manufacture of semiconductor devices , and more specifically to { TAIL ~ the method } for defining precise , narrow polysilicon features
HEAD HEAD HEAD HEAD HEAD HEAD REL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH REL REL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH