A mask blank is provided by forming a plurality of films, including {HEAD ~ at least a thin film} to be {TAIL ~ a transfer pattern}, on a board 
to be
A mask blank is provided by forming a plurality of films , including { HEAD ~ at least a thin film } to be { TAIL ~ a transfer pattern } , on a board
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD HEAD HEAD REL REL TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH