In another exemplary embodiment, the groove is formed in one of two substrates and the two substrates are laminated such that {HEAD ~ the surface} of {TAIL ~ the substrate} on which the groove is formed, faces toward the other substrate 
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In another exemplary embodiment , the groove is formed in one of two substrates and the two substrates are laminated such that { HEAD ~ the surface } of { TAIL ~ the substrate } on which the groove is formed , faces toward the other substrate
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD REL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH