A processing station adaptable to {HEAD ~ standard cluster tools} has {TAIL ~ a vertically translatable pedestal} having an upper wafer support surface including a heater plate adapted to be plugged into a unique feedthrough in the pedestal 
A processing station adaptable to { HEAD ~ standard cluster tools } has { TAIL ~ a vertically translatable pedestal } having an upper wafer support surface including a heater plate adapted to be plugged into a unique feedthrough in the pedestal
OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD OTH TAIL TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH