The specific scanner disclosed also includes an arrangement for monitoring the profile, position and orientation of the beam spot at {HEAD ~ a plurality} of different points along {TAIL ~ the scan path} 
The specific scanner disclosed also includes an arrangement for monitoring the profile , position and orientation of the beam spot at { HEAD ~ a plurality } of different points along { TAIL ~ the scan path }
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH OTH OTH TAIL TAIL TAIL TAIL TAIL TAIL TAIL