It is the second object of the present invention to provide a film forming apparatus capable of forming solution films having {HEAD ~ different film thicknesses} by adjusting the viscosity of {TAIL ~ a single processing solution} 
It is the second object of the present invention to provide a film forming apparatus capable of forming solution films having { HEAD ~ different film thicknesses } by adjusting the viscosity of { TAIL ~ a single processing solution }
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH OTH OTH OTH TAIL TAIL TAIL TAIL TAIL TAIL TAIL TAIL