{HEAD ~ The thin film plate} 12 is formed by patterning of {TAIL ~ a silicon nitride film} 
{ HEAD ~ The thin film plate } 12 is formed by patterning of { TAIL ~ a silicon nitride film }
HEAD HEAD HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH OTH OTH OTH OTH TAIL TAIL TAIL TAIL TAIL TAIL TAIL TAIL