An apparatus and a method for stopping {HEAD ~ the propagation} of {TAIL ~ an ignited flammable gas} in a conduit used in semiconductor processing are proposed and described 
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An apparatus and a method for stopping { HEAD ~ the propagation } of { TAIL ~ an ignited flammable gas } in a conduit used in semiconductor processing are proposed and described
OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD REL TAIL TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH