The method 2, wherein the sixth masking process uses {TAIL ~ a diffraction mask} defined into a transmission region, a semipermeable region with {HEAD ~ slits}, and a blocking region 
The method 2 , wherein the sixth masking process uses { TAIL ~ a diffraction mask } defined into a transmission region , a semipermeable region with { HEAD ~ slits } , and a blocking region
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD OTH OTH OTH OTH OTH