In one aspect, {HEAD ~ the invention} pertains to {TAIL ~ a method} of forming a layer of material on a substrate 
pertains to
In one aspect , { HEAD ~ the invention } pertains to { TAIL ~ a method } of forming a layer of material on a substrate
OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD REL REL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH