Thermal treatment of the semiconductor substrate forms {HEAD ~ an asymmetrically disposed source/drain junction} between {TAIL ~ adjacent gate stacks} 
between
Thermal treatment of the semiconductor substrate forms { HEAD ~ an asymmetrically disposed source / drain junction } between { TAIL ~ adjacent gate stacks }
OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD HEAD HEAD HEAD HEAD REL TAIL TAIL TAIL TAIL TAIL TAIL TAIL