Consequently, the yield of accepted products of {TAIL ~ reflection masks} as {HEAD ~ optical elements} of the present invention is raised 
Consequently , the yield of accepted products of { TAIL ~ reflection masks } as { HEAD ~ optical elements } of the present invention is raised
OTH OTH OTH OTH OTH OTH OTH OTH TAIL TAIL TAIL TAIL TAIL TAIL OTH HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH OTH OTH OTH OTH