The microvalves can be formed in {TAIL ~ semiconductor materials} by simplified methods utilizing {HEAD ~ a reduced number} of masking levels 
The microvalves can be formed in { TAIL ~ semiconductor materials } by simplified methods utilizing { HEAD ~ a reduced number } of masking levels
OTH OTH OTH OTH OTH OTH TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH OTH