An object of the invention, therefore, was to provide a process for {HEAD ~ the continuous production} of {TAIL ~ high purity}, homogenously polycrystalline silicon granules in which wall deposition is greatly reduced, or wholly suppressed, such that efficient heating of the fluidized bed and a long operating campaign of the reactor are made possible 
of
An object of the invention , therefore , was to provide a process for { HEAD ~ the continuous production } of { TAIL ~ high purity } , homogenously polycrystalline silicon granules in which wall deposition is greatly reduced , or wholly suppressed , such that efficient heating of the fluidized bed and a long operating campaign of the reactor are made possible
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD REL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH