The corresponding metrics 207 and in some illustrative embodiments, the corresponding processing capacities of {HEAD ~ the chambers} 210 may be provided to {TAIL ~ the control system} 260 
The corresponding metrics 207 and in some illustrative embodiments , the corresponding processing capacities of { HEAD ~ the chambers } 210 may be provided to { TAIL ~ the control system } 260
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH OTH OTH OTH TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH