The sixth aspect of the present invention provides {HEAD ~ the plasma processing apparatus}, wherein {TAIL ~ the ceramic spraying} utilizes a ceramic including at least one element selected from a group consisting of Al, Si and Y, such as Al2O3, SiC and Si3N4, and after forming the ceramic sprayed film, a sealing treatment using polymer is performed 
wherein
The sixth aspect of the present invention provides { HEAD ~ the plasma processing apparatus } , wherein { TAIL ~ the ceramic spraying } utilizes a ceramic including at least one element selected from a group consisting of Al , Si and Y , such as Al2O3 , SiC and Si3N4 , and after forming the ceramic sprayed film , a sealing treatment using polymer is performed
OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD HEAD OTH REL TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH