A supply 94 of {TAIL ~ deposition and carrier gases} is in fluid communication with {HEAD ~ the gas distribution assembly} 46 via a mixing manifold 96 
A supply 94 of { TAIL ~ deposition and carrier gases } is in fluid communication with { HEAD ~ the gas distribution assembly } 46 via a mixing manifold 96
OTH OTH OTH OTH TAIL TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH OTH OTH OTH OTH