{HEAD ~ The method} for growing {TAIL ~ a superlattice structure} on a substrate 11 wherein Al, Ga, and As are to be deposited on a substrate to form stacked monolayers of AlAs and GaAs and said step of causing the control means to include and not include respective ones of the elements within the beam in a pre established pattern of time periods includes the steps of: 
for growing
{ HEAD ~ The method } for growing { TAIL ~ a superlattice structure } on a substrate 11 wherein Al , Ga , and As are to be deposited on a substrate to form stacked monolayers of AlAs and GaAs and said step of causing the control means to include and not include respective ones of the elements within the beam in a pre established pattern of time periods includes the steps of :
HEAD HEAD HEAD HEAD HEAD HEAD REL REL TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH