That is, {HEAD ~ the high k dielectric layer} 12 can be transformed from {TAIL ~ an amorphous film} having a loose structure into the tenser high k dielectric layer 12 having a crystalline region 16, as shown in FIG 5 
transformed from
That is , { HEAD ~ the high k dielectric layer } 12 can be transformed from { TAIL ~ an amorphous film } having a loose structure into the tenser high k dielectric layer 12 having a crystalline region 16 , as shown in FIG 5
OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH OTH REL REL TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH