According to the methods, {HEAD ~ exposure defects} caused by {TAIL ~ an unsuitable stage velocity} are reduced, and exposure defect areas can be re exposed after detection of an exposure defect 
caused by
According to the methods , { HEAD ~ exposure defects } caused by { TAIL ~ an unsuitable stage velocity } are reduced , and exposure defect areas can be re exposed after detection of an exposure defect
OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD REL REL TAIL TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH