a first silicate glass layer as a first solid phase diffusion source containing {HEAD ~ an impurity} of a first conductivity type, said {TAIL ~ first silicate glass layer} being provided on both sides of said first gate electrode 
a first silicate glass layer as a first solid phase diffusion source containing { HEAD ~ an impurity } of a first conductivity type , said { TAIL ~ first silicate glass layer } being provided on both sides of said first gate electrode
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH OTH OTH OTH OTH OTH TAIL TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH