It is the second object of the present invention to provide {HEAD ~ a film forming apparatus} capable of forming solution films having different film thicknesses by adjusting {TAIL ~ the viscosity} of a single processing solution 
by adjusting
It is the second object of the present invention to provide { HEAD ~ a film forming apparatus } capable of forming solution films having different film thicknesses by adjusting { TAIL ~ the viscosity } of a single processing solution
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH OTH OTH OTH OTH OTH OTH OTH REL REL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH