A passivation layer is formed overlying the first dielectric layer and has an opening, in which the opening corresponds to the bonding region and the sensing region and exposes the dielectric island and {HEAD ~ a part} of {TAIL ~ the first conductive layer} 
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A passivation layer is formed overlying the first dielectric layer and has an opening , in which the opening corresponds to the bonding region and the sensing region and exposes the dielectric island and { HEAD ~ a part } of { TAIL ~ the first conductive layer }
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD REL TAIL TAIL TAIL TAIL TAIL TAIL TAIL TAIL