The channel holes H1 may have a circular or oval shape when viewed from the top, and {HEAD ~ a plurality} of the channel holes H1 may be arranged in {TAIL ~ the form} of a matrix 
arranged in
The channel holes H1 may have a circular or oval shape when viewed from the top , and { HEAD ~ a plurality } of the channel holes H1 may be arranged in { TAIL ~ the form } of a matrix
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH OTH OTH OTH OTH OTH REL REL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH