{TAIL ~ a wiring layer} provided on and in {HEAD ~ direct contact} with the interlayer dielectric layer, 
{ TAIL ~ a wiring layer } provided on and in { HEAD ~ direct contact } with the interlayer dielectric layer ,
TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH OTH OTH OTH OTH