{TAIL ~ A boat} loaded with wafers is moved from the loadlock chamber to {HEAD ~ the processing chamber}, with the boat being rotated while the source gas is supplied 
{ TAIL ~ A boat } loaded with wafers is moved from the loadlock chamber to { HEAD ~ the processing chamber } , with the boat being rotated while the source gas is supplied
TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH