In particular the present invention relates to a flys eye integrator suitable for use in a lithographic apparatus or {HEAD ~ an illuminator} for {TAIL ~ a lithographic apparatus} 
for
In particular the present invention relates to a flys eye integrator suitable for use in a lithographic apparatus or { HEAD ~ an illuminator } for { TAIL ~ a lithographic apparatus }
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD REL TAIL TAIL TAIL TAIL TAIL TAIL TAIL