In {HEAD ~ the area} of {TAIL ~ the line L}, the detection quantity of secondary electrons in the reference profile is substantially equal to that in the intended profile 
of
In { HEAD ~ the area } of { TAIL ~ the line L } , the detection quantity of secondary electrons in the reference profile is substantially equal to that in the intended profile
OTH HEAD HEAD HEAD HEAD HEAD HEAD REL TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH