Then, {HEAD ~ the treating abilities} of {TAIL ~ chemical solution} when the components and ultrapure water are supplemented, are calculated for various cases of amounts supplemented 
of
Then , { HEAD ~ the treating abilities } of { TAIL ~ chemical solution } when the components and ultrapure water are supplemented , are calculated for various cases of amounts supplemented
OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD REL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH