{TAIL ~ The lid portion} 88 includes {HEAD ~ a throughway} 92 to place the gas distribution assembly 46 in fluid communication with the process chamber 32 
{ TAIL ~ The lid portion } 88 includes { HEAD ~ a throughway } 92 to place the gas distribution assembly 46 in fluid communication with the process chamber 32
TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH