Further, in accordance with a preferred embodiment of the present invention, the wafer transfer device has a first unit receives a first group of semiconductor wafers and a second unit which receives {HEAD ~ a second group} of {TAIL ~ semiconductor wafers} 
of
Further , in accordance with a preferred embodiment of the present invention , the wafer transfer device has a first unit receives a first group of semiconductor wafers and a second unit which receives { HEAD ~ a second group } of { TAIL ~ semiconductor wafers }
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD REL TAIL TAIL TAIL TAIL TAIL TAIL