These low K materials, LKD, are prepared by photon assisted and plasma enhanced transport polymerization or {HEAD ~ chemical vapor deposition} of some selected siloxanes and {TAIL ~ F} containing aromatic compounds 
of
These low K materials , LKD , are prepared by photon assisted and plasma enhanced transport polymerization or { HEAD ~ chemical vapor deposition } of some selected siloxanes and { TAIL ~ F } containing aromatic compounds
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD REL OTH OTH OTH OTH TAIL TAIL TAIL TAIL TAIL OTH OTH OTH