{TAIL ~ The apparatus} 4, further comprising {HEAD ~ an ion gauge} installed along said processing line between said processing chamber and a point where said bypass line branches from said processing line 
{ TAIL ~ The apparatus } 4 , further comprising { HEAD ~ an ion gauge } installed along said processing line between said processing chamber and a point where said bypass line branches from said processing line
TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH