As shown in FIG 1, an inductively coupled RF ion beam source 10 typically includes {HEAD ~ a plasma discharge vessel} 11 having {TAIL ~ walls} 22 which may be made of quartz 
having
As shown in FIG 1 , an inductively coupled RF ion beam source 10 typically includes { HEAD ~ a plasma discharge vessel } 11 having { TAIL ~ walls } 22 which may be made of quartz
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD HEAD OTH REL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH