The low K dielectric materials are prepared from PACVD or TP of some selected siloxanes and {HEAD ~ F} containing {TAIL ~ aromatic compounds} 
containing
The low K dielectric materials are prepared from PACVD or TP of some selected siloxanes and { HEAD ~ F } containing { TAIL ~ aromatic compounds }
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD REL TAIL TAIL TAIL TAIL TAIL TAIL