A method of manufacturing an optical element having a good reflection preventing characteristic is provided in which an irregularity structure having {TAIL ~ a reflection preventing function} can be formed at {HEAD ~ low temperature} 
A method of manufacturing an optical element having a good reflection preventing characteristic is provided in which an irregularity structure having { TAIL ~ a reflection preventing function } can be formed at { HEAD ~ low temperature }
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH TAIL TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD