In {HEAD ~ accordance} with the invention, a method of forming a compound film includes the steps of preparing a source material, depositing the source material on a base to form a precursor film, and heating the precursor film in a suitable atmosphere to form {TAIL ~ a film} 
In { HEAD ~ accordance } with the invention , a method of forming a compound film includes the steps of preparing a source material , depositing the source material on a base to form a precursor film , and heating the precursor film in a suitable atmosphere to form { TAIL ~ a film }
OTH HEAD HEAD HEAD HEAD HEAD OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH TAIL TAIL TAIL TAIL TAIL TAIL