Subsequently, {TAIL ~ the substrate} is heated to about 450 ° C. and {HEAD ~ the coating film} is irradiated with, e.g., ultraviolet radiation having a wavelength of 172 nm 
Subsequently , { TAIL ~ the substrate } is heated to about 450 ° C. and { HEAD ~ the coating film } is irradiated with , e.g. , ultraviolet radiation having a wavelength of 172 nm
OTH OTH TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH