A process for making borderless contacts through {HEAD ~ an insulating layer} to active regions of {TAIL ~ a semiconductor device} is disclosed 
A process for making borderless contacts through { HEAD ~ an insulating layer } to active regions of { TAIL ~ a semiconductor device } is disclosed
OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH OTH OTH TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH