The method comprises {HEAD ~ steps} of forming {TAIL ~ a first oxide layer} over the substrate and forming a nitride layer on the first oxide layer 
of forming
The method comprises { HEAD ~ steps } of forming { TAIL ~ a first oxide layer } over the substrate and forming a nitride layer on the first oxide layer
OTH OTH OTH HEAD HEAD HEAD HEAD HEAD REL REL TAIL TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH