A method 1 wherein {HEAD ~ the thickness} of {TAIL ~ the first layer} of said antireflective coating is between 300 and 1500 angstroms, and the second layer is in the range of 170 to 330 angstroms 
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A method 1 wherein { HEAD ~ the thickness } of { TAIL ~ the first layer } of said antireflective coating is between 300 and 1500 angstroms , and the second layer is in the range of 170 to 330 angstroms
OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD REL TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH