{TAIL ~ The present invention} has been made to solve the above problems, and it is an object of the present invention to provide {HEAD ~ a substrate transferring apparatus} appropriate for efficient transfer of a large area substrate 
{ TAIL ~ The present invention } has been made to solve the above problems , and it is an object of the present invention to provide { HEAD ~ a substrate transferring apparatus } appropriate for efficient transfer of a large area substrate
TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH OTH OTH OTH OTH OTH OTH OTH