A method 19, wherein during {HEAD ~ said step} of rotating {TAIL ~ the substrate} a side of said cover that faces away from the substrate is rinsed and dried 
of rotating
A method 19 , wherein during { HEAD ~ said step } of rotating { TAIL ~ the substrate } a side of said cover that faces away from the substrate is rinsed and dried
OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD REL REL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH