{HEAD ~ Each} of {TAIL ~ the flow rates} of the reactant gases is accurately controlled by conventional, commercially available mass flow controllers, such as those from Tylan Corporation, in a manner well known in the art 
of
{ HEAD ~ Each } of { TAIL ~ the flow rates } of the reactant gases is accurately controlled by conventional , commercially available mass flow controllers , such as those from Tylan Corporation , in a manner well known in the art
HEAD HEAD HEAD HEAD HEAD REL TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH