For instance, the next maintenance step for the degas chamber 211A may be after {TAIL ~ processing} of {HEAD ~ 4000 substrates}, while, for the degas chamber 211B, 7000 substrates can be processed 
For instance , the next maintenance step for the degas chamber 211A may be after { TAIL ~ processing } of { HEAD ~ 4000 substrates } , while , for the degas chamber 211B , 7000 substrates can be processed
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH TAIL TAIL TAIL TAIL TAIL OTH HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH