planarizing {HEAD ~ the second layer} of {TAIL ~ dielectric material}, using the plurality of carbon nanotubes as a stopping layer 
of
planarizing { HEAD ~ the second layer } of { TAIL ~ dielectric material } , using the plurality of carbon nanotubes as a stopping layer
OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD REL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH