A micro gyroscope determine three dimensional rotational movements is mounted on {TAIL ~ a substrate} on which {HEAD ~ a plurality} of masses tangentially oscillate about the z axis perpendicular to the substrate 
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A micro gyroscope determine three dimensional rotational movements is mounted on { TAIL ~ a substrate } on which { HEAD ~ a plurality } of masses tangentially oscillate about the z axis perpendicular to the substrate
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH TAIL TAIL TAIL TAIL TAIL TAIL REL OTH HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH