{HEAD ~ the insulative diffusion barrier layer} has oxygen, silicon and nitrogen as main constituent elements, {TAIL ~ a concentration} of the nitrogen being from 0.5 to 12.5 atm % 
has
{ HEAD ~ the insulative diffusion barrier layer } has oxygen , silicon and nitrogen as main constituent elements , { TAIL ~ a concentration } of the nitrogen being from 0.5 to 12.5 atm %
HEAD HEAD HEAD HEAD HEAD HEAD HEAD HEAD HEAD REL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH