By forming the shield from silicon, {HEAD ~ its coefficient} of {TAIL ~ thermal expansion} substantially matches that of the nozzle array 
of
By forming the shield from silicon , { HEAD ~ its coefficient } of { TAIL ~ thermal expansion } substantially matches that of the nozzle array
OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD REL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH