A substrate is loaded into a chamber, the temperature is adjusted to between about 400° C. and about 500° C., and {HEAD ~ the chamber} is filed with {TAIL ~ hydrogen} to create a pressure between about 0.5 and about 3 Torr 
is filed with
A substrate is loaded into a chamber , the temperature is adjusted to between about 400 ° C. and about 500 ° C. , and { HEAD ~ the chamber } is filed with { TAIL ~ hydrogen } to create a pressure between about 0.5 and about 3 Torr
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD REL REL REL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH