The assembly includes a source 24 of one or more solid materials such as silicon, germanium and {HEAD ~ carbon} within {TAIL ~ the chamber} 14 
within
The assembly includes a source 24 of one or more solid materials such as silicon , germanium and { HEAD ~ carbon } within { TAIL ~ the chamber } 14
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD REL TAIL TAIL TAIL TAIL TAIL TAIL OTH