an inspection condition creation means for creating inspection conditions corresponding to a charge up {TAIL ~ phenomenon} on {HEAD ~ a surface} of the object 
an inspection condition creation means for creating inspection conditions corresponding to a charge up { TAIL ~ phenomenon } on { HEAD ~ a surface } of the object
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH TAIL TAIL TAIL TAIL TAIL OTH HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH OTH