Thereafter, BSG film side walls 414, 415 are caused to be left by the RIE process to carry out {HEAD ~ the salicide process} to thereby form {TAIL ~ metal silicide films} 416, 417 on the source and drain diffused layers 410, 411  
to form
Thereafter , BSG film side walls 414 , 415 are caused to be left by the RIE process to carry out { HEAD ~ the salicide process } to thereby form { TAIL ~ metal silicide films } 416 , 417 on the source and drain diffused layers 410 , 411
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD REL OTH REL TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH