Typically, the supply line for each supply of gas includes several safety shut off valves that may be employed to terminate {HEAD ~ gas flow} into {TAIL ~ the process chamber} 32 either manually or automatically 
into
Typically , the supply line for each supply of gas includes several safety shut off valves that may be employed to terminate { HEAD ~ gas flow } into { TAIL ~ the process chamber } 32 either manually or automatically
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD REL TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH