{HEAD ~ A nitride semiconductor substrate} having {TAIL ~ properties} preferable for the manufacture of various nitride semiconductor devices is made available, by specifying or controlling the local variation in the off axis angle of the principal surface of the nitride semiconductor substrate 
having
{ HEAD ~ A nitride semiconductor substrate } having { TAIL ~ properties } preferable for the manufacture of various nitride semiconductor devices is made available , by specifying or controlling the local variation in the off axis angle of the principal surface of the nitride semiconductor substrate
HEAD HEAD HEAD HEAD HEAD HEAD HEAD HEAD REL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH