{HEAD ~ A process temperature} of {TAIL ~ the second annealing process} is substantially larger than the crystalline temperature of the high k dielectric layer 12: for example, the process temperature of the second annealing process is substantially larger than 500 C 
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{ HEAD ~ A process temperature } of { TAIL ~ the second annealing process } is substantially larger than the crystalline temperature of the high k dielectric layer 12 : for example , the process temperature of the second annealing process is substantially larger than 500 C
HEAD HEAD HEAD HEAD HEAD HEAD HEAD REL TAIL TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH