{TAIL ~ The supporting apparatus} is preferably {HEAD ~ a conductive column} that is not removed when the recessed is formed in the dielectric layer 
{ TAIL ~ The supporting apparatus } is preferably { HEAD ~ a conductive column } that is not removed when the recessed is formed in the dielectric layer
TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH