A substrate heating apparatus includes {HEAD ~ a ceramic base} having {TAIL ~ a concave heating surface} on which a substrate is placed, and a resistance heating element buried in the ceramic base 
having
A substrate heating apparatus includes { HEAD ~ a ceramic base } having { TAIL ~ a concave heating surface } on which a substrate is placed , and a resistance heating element buried in the ceramic base
OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD REL TAIL TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH