The storage node is formed over word lines beginning with a deposition and {HEAD ~ planarization} of {TAIL ~ an insulator} or composite insulator 
of
The storage node is formed over word lines beginning with a deposition and { HEAD ~ planarization } of { TAIL ~ an insulator } or composite insulator
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD REL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH