forming {TAIL ~ a layer} to be processed via {HEAD ~ a single or plural film layers} on a substrate 
forming { TAIL ~ a layer } to be processed via { HEAD ~ a single or plural film layers } on a substrate
OTH TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH OTH