As shown in FIG 1, an inductively coupled RF ion beam source 10 typically includes a plasma discharge vessel 11 having {HEAD ~ walls} 22 which may be made of {TAIL ~ quartz} 
made of
As shown in FIG 1 , an inductively coupled RF ion beam source 10 typically includes a plasma discharge vessel 11 having { HEAD ~ walls } 22 which may be made of { TAIL ~ quartz }
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD OTH OTH OTH OTH REL REL TAIL TAIL TAIL TAIL TAIL