It is the second object of {HEAD ~ the present invention} to provide {TAIL ~ a film forming apparatus} capable of forming solution films having different film thicknesses by adjusting the viscosity of a single processing solution 
to provide
It is the second object of { HEAD ~ the present invention } to provide { TAIL ~ a film forming apparatus } capable of forming solution films having different film thicknesses by adjusting the viscosity of a single processing solution
OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD REL REL TAIL TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH