{HEAD ~ Another object} of {TAIL ~ the present invention} to minimize ESD effects during ion beam processing 
of
{ HEAD ~ Another object } of { TAIL ~ the present invention } to minimize ESD effects during ion beam processing
HEAD HEAD HEAD HEAD HEAD HEAD REL TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH