{HEAD ~ Detecting method} of {TAIL ~ impurity concentration} in crystal, method for producing single crystal and apparatus for the pull up of a single crystal 
of
{ HEAD ~ Detecting method } of { TAIL ~ impurity concentration } in crystal , method for producing single crystal and apparatus for the pull up of a single crystal
HEAD HEAD HEAD HEAD HEAD HEAD REL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH