The present invention achieves technical advantages by using a nanoindenter type device to determine localized mechanical properties of a substrate as {HEAD ~ a function} of {TAIL ~ displacement depth} or applied load of the nanoindenter tip into the substrate surface, and accurately predicting the electrical property stability of the substrate under test as a function of this data 
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The present invention achieves technical advantages by using a nanoindenter type device to determine localized mechanical properties of a substrate as { HEAD ~ a function } of { TAIL ~ displacement depth } or applied load of the nanoindenter tip into the substrate surface , and accurately predicting the electrical property stability of the substrate under test as a function of this data
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD REL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH