The process consists of a step of placing a plurality of wafers in a shrouded quartz boat or wafer carrier having a plurality of slots cut in the walls thereof to admit {HEAD ~ reactant gases} to {TAIL ~ the vicinity} of the wafers 
to
The process consists of a step of placing a plurality of wafers in a shrouded quartz boat or wafer carrier having a plurality of slots cut in the walls thereof to admit { HEAD ~ reactant gases } to { TAIL ~ the vicinity } of the wafers
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD REL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH