This feature is suitable for {HEAD ~ manufacturing equipment} which includes {TAIL ~ a transport chamber} and a plurality of process chambers radially placed around and connected with the transport chamber, with the fixed base 200 of the transfer robot A1 being placed in the transport chamber 
includes
This feature is suitable for { HEAD ~ manufacturing equipment } which includes { TAIL ~ a transport chamber } and a plurality of process chambers radially placed around and connected with the transport chamber , with the fixed base 200 of the transfer robot A1 being placed in the transport chamber
OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD OTH REL TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH