{HEAD ~ A mixture} of {TAIL ~ silane, phosphine and boron trichloride} is flowed into the reactor tube through a first pair of silane injectors 
of
{ HEAD ~ A mixture } of { TAIL ~ silane , phosphine and boron trichloride } is flowed into the reactor tube through a first pair of silane injectors
HEAD HEAD HEAD HEAD HEAD HEAD REL TAIL TAIL TAIL TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH