The apparatus includes a plurality of {HEAD ~ fluid suppliers} 61, 61, 63 for supplying {TAIL ~ different processing fluids} 
for supplying
The apparatus includes a plurality of { HEAD ~ fluid suppliers } 61 , 61 , 63 for supplying { TAIL ~ different processing fluids }
OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH OTH OTH OTH REL REL TAIL TAIL TAIL TAIL TAIL TAIL TAIL