A cluster tool may be operated on the basis of {TAIL ~ an enhanced sequencing regime} in which {HEAD ~ the supply} of substrates is controlled such that a planned time of maintenance is reached for two or more process chambers simultaneously 
in
A cluster tool may be operated on the basis of { TAIL ~ an enhanced sequencing regime } in which { HEAD ~ the supply } of substrates is controlled such that a planned time of maintenance is reached for two or more process chambers simultaneously
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH TAIL TAIL TAIL TAIL TAIL TAIL TAIL TAIL REL OTH HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH