{HEAD ~ The interconnection line} has {TAIL ~ a coplanar waveguide structure} and is electrically to the opto electronic device to output signals from the opto electronic device 
has
{ HEAD ~ The interconnection line } has { TAIL ~ a coplanar waveguide structure } and is electrically to the opto electronic device to output signals from the opto electronic device
HEAD HEAD HEAD HEAD HEAD HEAD HEAD REL TAIL TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH