creating a mask on the dielectric layer, {HEAD ~ the mask} comprising {TAIL ~ an opening}, the shape of which determines a lateral shape of the recess; and 
comprising
creating a mask on the dielectric layer , { HEAD ~ the mask } comprising { TAIL ~ an opening } , the shape of which determines a lateral shape of the recess ; and
OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD REL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH