{HEAD ~ A first dopant zone} with a doping of a first conductivity type is formed in {TAIL ~ the first region} of the semiconductor layer above the buried layer 
is formed in
{ HEAD ~ A first dopant zone } with a doping of a first conductivity type is formed in { TAIL ~ the first region } of the semiconductor layer above the buried layer
HEAD HEAD HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH OTH OTH OTH OTH OTH OTH REL REL REL TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH