preparing a SiC single crystal wafer {HEAD ~ whose main surface} is a c plane or {TAIL ~ whose main surface} is a surface which inclines a c plane with an angle of inclination of more than 0 degrees but less than 10 degrees 
is
preparing a SiC single crystal wafer { HEAD ~ whose main surface } is a c plane or { TAIL ~ whose main surface } is a surface which inclines a c plane with an angle of inclination of more than 0 degrees but less than 10 degrees
OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD REL OTH OTH OTH OTH TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH