{HEAD ~ The hydrocarbon based solvent} may have a lower boiling point than that of cyclohexasilane and {TAIL ~ a higher coefficient} of viscosity than that of cyclohexasilane so that the quality of a Si film may be improved 
have
{ HEAD ~ The hydrocarbon based solvent } may have a lower boiling point than that of cyclohexasilane and { TAIL ~ a higher coefficient } of viscosity than that of cyclohexasilane so that the quality of a Si film may be improved
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