For example, the averaging can be applied to two laterally displacement measurement axes that are substantially parallel to one another to more accurately determine {HEAD ~ an average angular orientation} of {TAIL ~ the stage} 
of
For example , the averaging can be applied to two laterally displacement measurement axes that are substantially parallel to one another to more accurately determine { HEAD ~ an average angular orientation } of { TAIL ~ the stage }
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD HEAD REL TAIL TAIL TAIL TAIL TAIL TAIL