An apparatus for forming the coated substrate especially includes {HEAD ~ means} for forming the intermediate layer and means for forming the hard carbon film in {TAIL ~ the same vacuum chamber} 
An apparatus for forming the coated substrate especially includes { HEAD ~ means } for forming the intermediate layer and means for forming the hard carbon film in { TAIL ~ the same vacuum chamber }
OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH TAIL TAIL TAIL TAIL TAIL TAIL TAIL TAIL