{HEAD ~ The gate structures} include a gate dielectric layer and a gate film stack that includes a conductive layer and {TAIL ~ an overlying hard mask} 
{ HEAD ~ The gate structures } include a gate dielectric layer and a gate film stack that includes a conductive layer and { TAIL ~ an overlying hard mask }
HEAD HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH TAIL TAIL TAIL TAIL TAIL TAIL TAIL TAIL