{TAIL ~ The second alignment system} 400 may be formed in the interior or exterior of {HEAD ~ the vacuum processing chamber} 110 
{ TAIL ~ The second alignment system } 400 may be formed in the interior or exterior of { HEAD ~ the vacuum processing chamber } 110
TAIL TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD HEAD OTH