The apparatus comprises {HEAD ~ air injection modules}, which serve to float {TAIL ~ a substrate}, and can be independently attached to or detached from the substrate transferring apparatus 
serve to float
The apparatus comprises { HEAD ~ air injection modules } , which serve to float { TAIL ~ a substrate } , and can be independently attached to or detached from the substrate transferring apparatus
OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH REL REL REL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH