A 3D nucleation GaN layer is grown on the epitaxial nitride layer by {HEAD ~ HVPE} under {TAIL ~ a substantially 3D growth mode} 
under
A 3D nucleation GaN layer is grown on the epitaxial nitride layer by { HEAD ~ HVPE } under { TAIL ~ a substantially 3D growth mode }
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD REL TAIL TAIL TAIL TAIL TAIL TAIL TAIL TAIL TAIL