The invention relates generally to {TAIL ~ the manufacture} of semiconductor devices, and more specifically to the method for defining {HEAD ~ precise, narrow polysilicon features} 
The invention relates generally to { TAIL ~ the manufacture } of semiconductor devices , and more specifically to the method for defining { HEAD ~ precise , narrow polysilicon features }
OTH OTH OTH OTH OTH TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD HEAD HEAD