Components referred to herein can encompass any and all components that, from a performance standpoint, are essential to replace, including any of {HEAD ~ the constituent components} of {TAIL ~ a light source device} for an exposure apparatus, an illumination optical system, and a projection optical system 
of
Components referred to herein can encompass any and all components that , from a performance standpoint , are essential to replace , including any of { HEAD ~ the constituent components } of { TAIL ~ a light source device } for an exposure apparatus , an illumination optical system , and a projection optical system
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD REL TAIL TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH