{HEAD ~ A peripheral edge portion} of {TAIL ~ the protective sheet} is provided at an inside of the peripheral edge portion of the semiconductor chip 
of
{ HEAD ~ A peripheral edge portion } of { TAIL ~ the protective sheet } is provided at an inside of the peripheral edge portion of the semiconductor chip
HEAD HEAD HEAD HEAD HEAD HEAD HEAD HEAD REL TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH