At a lower position for {HEAD ~ the pedestal wafers} may be transferred to and from {TAIL ~ the processing station}, and at an upper position for the pedestal the pedestal forms an annular pumping passage with a lower circular opening in a processing chamber 
transferred to
At a lower position for { HEAD ~ the pedestal wafers } may be transferred to and from { TAIL ~ the processing station } , and at an upper position for the pedestal the pedestal forms an annular pumping passage with a lower circular opening in a processing chamber
OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH REL REL OTH OTH TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH