More specifically, {HEAD ~ the invention} relates to {TAIL ~ the art} of contamination control of the surfaces of substrates as raw materials, semi finished products and finished products in high technology industries such as the manufacture of semiconductors and liquid crystals 
relates to
More specifically , { HEAD ~ the invention } relates to { TAIL ~ the art } of contamination control of the surfaces of substrates as raw materials , semi finished products and finished products in high technology industries such as the manufacture of semiconductors and liquid crystals
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