Then {HEAD ~ a plasma poly etch} of {TAIL ~ the HSG poly} is performed that is followed by a plasma oxide etch 
of
Then { HEAD ~ a plasma poly etch } of { TAIL ~ the HSG poly } is performed that is followed by a plasma oxide etch
OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD HEAD REL TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH