Disclosed are {HEAD ~ methods} and apparatus for characterizing {TAIL ~ defects} by using X ray emission analysis techniques 
for characterizing
Disclosed are { HEAD ~ methods } and apparatus for characterizing { TAIL ~ defects } by using X ray emission analysis techniques
OTH OTH HEAD HEAD HEAD HEAD HEAD OTH OTH REL REL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH