The process 1, wherein the deposited polysilicon granules have a markedly spherical shape with {HEAD ~ sphericity values} within {TAIL ~ the range} of 0.85 to 1 
within
The process 1 , wherein the deposited polysilicon granules have a markedly spherical shape with { HEAD ~ sphericity values } within { TAIL ~ the range } of 0.85 to 1
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD REL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH