RF power supplies 60 and 70, gas supply system 80, vacuum pump system 90 and {HEAD ~ workpiece handling} and robotic system 94 are all electronically connected to and controlled by {TAIL ~ a main control system} 100 
are controlled by
RF power supplies 60 and 70 , gas supply system 80 , vacuum pump system 90 and { HEAD ~ workpiece handling } and robotic system 94 are all electronically connected to and controlled by { TAIL ~ a main control system } 100
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH OTH OTH REL OTH OTH OTH OTH OTH REL REL TAIL TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH