second source/drain regions of the first conductivity type having {TAIL ~ shallower depth} than those of said first source/drain regions, said {HEAD ~ second source/drain regions} being formed below said first silicate glass layer 
second source / drain regions of the first conductivity type having { TAIL ~ shallower depth } than those of said first source / drain regions , said { HEAD ~ second source / drain regions } being formed below said first silicate glass layer
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH OTH OTH OTH OTH OTH OTH