fourth source/drain regions of {HEAD ~ the second conductivity type} having {TAIL ~ shallower depth} than those of said third source/drain regions, said fourth source/drain regions being formed below said second silicate glass layer 
having
fourth source / drain regions of { HEAD ~ the second conductivity type } having { TAIL ~ shallower depth } than those of said third source / drain regions , said fourth source / drain regions being formed below said second silicate glass layer
OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD HEAD REL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH