{TAIL ~ A collar layer} 12, preferably including a silicon oxide deposited by a CVD method, is, subsequently, applied to the side walls of {HEAD ~ the trench} 5 
{ TAIL ~ A collar layer } 12 , preferably including a silicon oxide deposited by a CVD method , is , subsequently , applied to the side walls of { HEAD ~ the trench } 5
TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD OTH