The storage node is formed over word lines beginning with a deposition and {TAIL ~ planarization} of an insulator or {HEAD ~ composite insulator} 
The storage node is formed over word lines beginning with a deposition and { TAIL ~ planarization } of an insulator or { HEAD ~ composite insulator }
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD