{HEAD ~ A processing station} adaptable to {TAIL ~ standard cluster tools} has a vertically translatable pedestal having an upper wafer support surface including a heater plate adapted to be plugged into a unique feedthrough in the pedestal 
adaptable to
{ HEAD ~ A processing station } adaptable to { TAIL ~ standard cluster tools } has a vertically translatable pedestal having an upper wafer support surface including a heater plate adapted to be plugged into a unique feedthrough in the pedestal
HEAD HEAD HEAD HEAD HEAD HEAD HEAD REL REL TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH