The lid portion 88 includes a throughway 92 to place the gas distribution assembly 46 in {HEAD ~ fluid communication} with {TAIL ~ the process chamber} 32 
with
The lid portion 88 includes a throughway 92 to place the gas distribution assembly 46 in { HEAD ~ fluid communication } with { TAIL ~ the process chamber } 32
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD REL TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH