{HEAD ~ A processing fixture} and method of fabricating {TAIL ~ micromechanical devices}, such as digital micromirror devices, that allows fragile structures on wafer 22 to be protected from debris during the saw operation and subsequent cleaning operations 
of fabricating
{ HEAD ~ A processing fixture } and method of fabricating { TAIL ~ micromechanical devices } , such as digital micromirror devices , that allows fragile structures on wafer 22 to be protected from debris during the saw operation and subsequent cleaning operations
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