In {TAIL ~ one embodiment}, {HEAD ~ an apparatus} for delivering gases to a semiconductor processing system includes a plurality of gas input lines each having an inlet port and a plurality of gas output lines each having an outlet port 
In
In { TAIL ~ one embodiment } , { HEAD ~ an apparatus } for delivering gases to a semiconductor processing system includes a plurality of gas input lines each having an inlet port and a plurality of gas output lines each having an outlet port
REL TAIL TAIL TAIL TAIL TAIL TAIL OTH HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH