{HEAD ~ The step} of removing {TAIL ~ portions} of the sacrificial layer removes portions of the sacrificial layer that are not covered by the first capping structure to define an intermediate structure 
of removing
{ HEAD ~ The step } of removing { TAIL ~ portions } of the sacrificial layer removes portions of the sacrificial layer that are not covered by the first capping structure to define an intermediate structure
HEAD HEAD HEAD HEAD HEAD HEAD REL REL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH