The gate structures include a gate dielectric layer and {HEAD ~ a gate film stack} that includes {TAIL ~ a conductive layer} and an overlying hard mask 
includes
The gate structures include a gate dielectric layer and { HEAD ~ a gate film stack } that includes { TAIL ~ a conductive layer } and an overlying hard mask
OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD HEAD OTH REL TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH