The precursor and {HEAD ~ supercritical fluid mixture} is initially provided in the chamber under the conditions at which the precursor is {TAIL ~ relatively non reactive} 
The precursor and { HEAD ~ supercritical fluid mixture } is initially provided in the chamber under the conditions at which the precursor is { TAIL ~ relatively non reactive }
OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH TAIL TAIL TAIL TAIL TAIL TAIL TAIL