g) forming a patterned metal layer over {TAIL ~ an upper surface} of {HEAD ~ said one or more upper solid insulation layers} 
g ) forming a patterned metal layer over { TAIL ~ an upper surface } of { HEAD ~ said one or more upper solid insulation layers }
OTH OTH OTH OTH OTH OTH OTH OTH TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD HEAD HEAD HEAD HEAD HEAD