{HEAD ~ The microvalves} can be formed in semiconductor materials by {TAIL ~ simplified methods} utilizing a reduced number of masking levels 
formed by
{ HEAD ~ The microvalves } can be formed in semiconductor materials by { TAIL ~ simplified methods } utilizing a reduced number of masking levels
HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH REL OTH OTH OTH REL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH