The method 11 wherein calculating a multiple processing demand time comprises calculating a multiple processing demand time between the second tool and the third tool wherein {HEAD ~ the multiple processing demand time} is determined by {TAIL ~ the formula} MPDT  = Q  λ  
is determined by
The method 11 wherein calculating a multiple processing demand time comprises calculating a multiple processing demand time between the second tool and the third tool wherein { HEAD ~ the multiple processing demand time } is determined by { TAIL ~ the formula } MPDT  = Q  λ 
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD HEAD HEAD REL REL REL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH