The substrate boat 13, wherein {HEAD ~ each} of {TAIL ~ the plurality} of substrate supports has a plurality of openings along a perimeter configured to accommodate the substrate holder 
of
The substrate boat 13 , wherein { HEAD ~ each } of { TAIL ~ the plurality } of substrate supports has a plurality of openings along a perimeter configured to accommodate the substrate holder
OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD REL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH