A resist composition comprising a compound having an active hydrogen and an alkali soluble siloxane polymer containing in the molecules thereof at least one unit selected from a unit represented by formula and a unit represented by formula ##STR1## wherein the Xs are the same or different and each represents one member selected from {TAIL ~ the group} consisting of {HEAD ~ hydrogen}, ##STR2## ; and a carboxyl group 
A resist composition comprising a compound having an active hydrogen and an alkali soluble siloxane polymer containing in the molecules thereof at least one unit selected from a unit represented by formula and a unit represented by formula # # STR1 # # wherein the Xs are the same or different and each represents one member selected from { TAIL ~ the group } consisting of { HEAD ~ hydrogen } , # # STR2 # # ; and a carboxyl group
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