Then a plasma poly etch of {HEAD ~ the HSG poly} is performed that is followed by {TAIL ~ a plasma oxide etch} 
Then a plasma poly etch of { HEAD ~ the HSG poly } is performed that is followed by { TAIL ~ a plasma oxide etch }
OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH OTH OTH OTH OTH TAIL TAIL TAIL TAIL TAIL TAIL TAIL TAIL