While {HEAD ~ the plasma} is generated in {TAIL ~ the space} between the electrodes, the vapor passes through the second electrode and the hydrogen containing gas is introduced into the space between the electrodes, a thin film of hydrogenated material is formed on the substrate 
is generated in
While { HEAD ~ the plasma } is generated in { TAIL ~ the space } between the electrodes , the vapor passes through the second electrode and the hydrogen containing gas is introduced into the space between the electrodes , a thin film of hydrogenated material is formed on the substrate
OTH HEAD HEAD HEAD HEAD HEAD HEAD REL REL REL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH