{HEAD ~ Multi level structure} may be fabricated according to {TAIL ~ the method} of the invention by repeating the last few steps of the method of the invention 
fabricated according to
{ HEAD ~ Multi level structure } may be fabricated according to { TAIL ~ the method } of the invention by repeating the last few steps of the method of the invention
HEAD HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH REL REL REL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH