{HEAD ~ The X rays} are emitted in {TAIL ~ response} to an impinging beam, such as an electron beam, directed towards the sample surface where a defect resides 
are emitted in
{ HEAD ~ The X rays } are emitted in { TAIL ~ response } to an impinging beam , such as an electron beam , directed towards the sample surface where a defect resides
HEAD HEAD HEAD HEAD HEAD HEAD HEAD REL REL REL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH