A method,1, wherein the sequentially exposing step comprises using an inductively coupled power range of {HEAD ~ approximately 120 W} to {TAIL ~ approximately 170 W} 
to
A method,1 , wherein the sequentially exposing step comprises using an inductively coupled power range of { HEAD ~ approximately 120 W } to { TAIL ~ approximately 170 W }
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD REL TAIL TAIL TAIL TAIL TAIL TAIL TAIL