an inspection condition creation means for creating inspection conditions corresponding to a charge up {TAIL ~ phenomenon} on a surface of {HEAD ~ the object} 
an inspection condition creation means for creating inspection conditions corresponding to a charge up { TAIL ~ phenomenon } on a surface of { HEAD ~ the object }
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD