The fluid suppliers 61, 62, 63 are arranged in {HEAD ~ a direction} extending from the circumference of the wafer W to {TAIL ~ its inside} 
extending to
The fluid suppliers 61 , 62 , 63 are arranged in { HEAD ~ a direction } extending from the circumference of the wafer W to { TAIL ~ its inside }
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD REL OTH OTH OTH OTH OTH OTH OTH REL TAIL TAIL TAIL TAIL TAIL TAIL