{HEAD ~ The step} of forming {TAIL ~ fin structures} forms fin structures adjacent to the recessed sidewalls 
of forming
{ HEAD ~ The step } of forming { TAIL ~ fin structures } forms fin structures adjacent to the recessed sidewalls
HEAD HEAD HEAD HEAD HEAD HEAD REL REL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH