In particular {HEAD ~ the present invention} relates to a flys eye integrator suitable for use in {TAIL ~ a lithographic apparatus} or an illuminator for a lithographic apparatus 
In particular { HEAD ~ the present invention } relates to a flys eye integrator suitable for use in { TAIL ~ a lithographic apparatus } or an illuminator for a lithographic apparatus
OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH