growing {HEAD ~ the plurality} of {TAIL ~ carbon nanotubes} from the at least one exposed portion of the semiconductor substrate 
of
growing { HEAD ~ the plurality } of { TAIL ~ carbon nanotubes } from the at least one exposed portion of the semiconductor substrate
OTH HEAD HEAD HEAD HEAD HEAD HEAD REL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH