In processing a wafer W, the substrate processing apparatus moves {HEAD ~ the fluid suppliers} 61, 62, 63 along {TAIL ~ the peripheral part} of the wafer W relatively 
along
In processing a wafer W , the substrate processing apparatus moves { HEAD ~ the fluid suppliers } 61 , 62 , 63 along { TAIL ~ the peripheral part } of the wafer W relatively
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH OTH OTH OTH REL TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH