In a nitride semiconductor single crystal wafer having a flat principal surface, {HEAD ~ the crystallographic plane orientation} of {TAIL ~ the principal surface} of the nitride semiconductor single crystal wafer varies locally within a predetermined angular range 
of
In a nitride semiconductor single crystal wafer having a flat principal surface , { HEAD ~ the crystallographic plane orientation } of { TAIL ~ the principal surface } of the nitride semiconductor single crystal wafer varies locally within a predetermined angular range
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD HEAD REL TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH