Further, it is possible to improve {TAIL ~ a throughput} of the apparatus in {HEAD ~ resist processing} 
Further , it is possible to improve { TAIL ~ a throughput } of the apparatus in { HEAD ~ resist processing }
OTH OTH OTH OTH OTH OTH OTH TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD