an inspection condition creation means for creating inspection conditions corresponding to a charge up {HEAD ~ phenomenon} on {TAIL ~ a surface} of the object 
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an inspection condition creation means for creating inspection conditions corresponding to a charge up { HEAD ~ phenomenon } on { TAIL ~ a surface } of the object
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD REL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH