Three dimensional structures of arbitrary shape are fabricated on {HEAD ~ the surface} of a substrate through {TAIL ~ a series} of processing steps wherein a monolithic structure is fabricated in successive layers 
through
Three dimensional structures of arbitrary shape are fabricated on { HEAD ~ the surface } of a substrate through { TAIL ~ a series } of processing steps wherein a monolithic structure is fabricated in successive layers
OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH OTH REL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH