{HEAD ~ An epitaxial SiC single crystal substrate} which reduces {TAIL ~ threading} edge dislocation arrays in SiC epitaxial film is offered, as well as a method of manufacture of the epitaxial SiC single crystal substrate 
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{ HEAD ~ An epitaxial SiC single crystal substrate } which reduces { TAIL ~ threading } edge dislocation arrays in SiC epitaxial film is offered , as well as a method of manufacture of the epitaxial SiC single crystal substrate
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