The step of recessing the sidewalls recesses sidewalls of the intermediate structure relative to {HEAD ~ edge regions} of {TAIL ~ the first capping structure} to form a sacrificial structure having recessed sidewalls 
of
The step of recessing the sidewalls recesses sidewalls of the intermediate structure relative to { HEAD ~ edge regions } of { TAIL ~ the first capping structure } to form a sacrificial structure having recessed sidewalls
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD REL TAIL TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH