{HEAD ~ A method} for measuring {TAIL ~ characteristics} of a film disposed on a substrate, said method comprising: 
for measuring
{ HEAD ~ A method } for measuring { TAIL ~ characteristics } of a film disposed on a substrate , said method comprising :
HEAD HEAD HEAD HEAD HEAD HEAD REL REL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH