It is an object of the invention to provide {HEAD ~ a process} for making {TAIL ~ borderless contact windows} on a semiconductor chip 
for making
It is an object of the invention to provide { HEAD ~ a process } for making { TAIL ~ borderless contact windows } on a semiconductor chip
OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD REL REL TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH