Afterward, the dielectric layer 10 is removed again from the upper region of the trench, i.e., above the polysilicon layer 11, from {HEAD ~ the side walls} of {TAIL ~ the trench} 5 
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Afterward , the dielectric layer 10 is removed again from the upper region of the trench , i.e. , above the polysilicon layer 11 , from { HEAD ~ the side walls } of { TAIL ~ the trench } 5
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD REL TAIL TAIL TAIL TAIL TAIL TAIL OTH