In one embodiment, the dual layer dielectric stack includes a first dielectric layer that is planar and mechanically strong and {HEAD ~ the second dielectric layer} can be patterned by photolithography to {TAIL ~ the required critical dimensions} 
patterned to
In one embodiment , the dual layer dielectric stack includes a first dielectric layer that is planar and mechanically strong and { HEAD ~ the second dielectric layer } can be patterned by photolithography to { TAIL ~ the required critical dimensions }
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH REL OTH OTH REL TAIL TAIL TAIL TAIL TAIL TAIL TAIL TAIL