Furthermore, {TAIL ~ the conditioner set} occupies {HEAD ~ only a single area} above the polishing table of the polishing station 
Furthermore , { TAIL ~ the conditioner set } occupies { HEAD ~ only a single area } above the polishing table of the polishing station
OTH OTH TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH OTH OTH OTH OTH OTH OTH