{TAIL ~ A third thin film polysilicon layer} comprising a storage plane overlies {HEAD ~ the third dielectric layer} 
{ TAIL ~ A third thin film polysilicon layer } comprising a storage plane overlies { HEAD ~ the third dielectric layer }
TAIL TAIL TAIL TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD HEAD