{HEAD ~ The method} 13, further comprising {TAIL ~ alternating cycles} of surface processing and examination of the exposed sample surface using a scanning electron microscope, a focused ion beam microscope, or an atomic force microscope in situ and without opening the vacuum chamber 
comprising
{ HEAD ~ The method } 13 , further comprising { TAIL ~ alternating cycles } of surface processing and examination of the exposed sample surface using a scanning electron microscope , a focused ion beam microscope , or an atomic force microscope in situ and without opening the vacuum chamber
HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH OTH REL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH