Another object of the present invention is to provide a method for forming {HEAD ~ a dual oxide layer} having {TAIL ~ enhanced electrical characteristics} as well as a thickness of 100 Å or less 
having
Another object of the present invention is to provide a method for forming { HEAD ~ a dual oxide layer } having { TAIL ~ enhanced electrical characteristics } as well as a thickness of 100 Å or less
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD HEAD REL TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH