Various protective layers are useful particularly if effective passivation can be produced without raising the sample temperature above about 250 to 300 degrees C. Particularly useful as {HEAD ~ a protective layer} is {TAIL ~ silicon nitride} put down by plasma chemical vapor deposition 
is
Various protective layers are useful particularly if effective passivation can be produced without raising the sample temperature above about 250 to 300 degrees C. Particularly useful as { HEAD ~ a protective layer } is { TAIL ~ silicon nitride } put down by plasma chemical vapor deposition
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD REL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH