{TAIL ~ A resist composition} comprising a compound having an active hydrogen and an alkali soluble siloxane polymer containing in the molecules thereof at least one unit selected from a unit represented by formula and a unit represented by formula ##STR1## wherein the Xs are the same or different and {HEAD ~ each} represents one member selected from the group consisting of hydrogen, ##STR2## ; and a carboxyl group 
{ TAIL ~ A resist composition } comprising a compound having an active hydrogen and an alkali soluble siloxane polymer containing in the molecules thereof at least one unit selected from a unit represented by formula and a unit represented by formula # # STR1 # # wherein the Xs are the same or different and { HEAD ~ each } represents one member selected from the group consisting of hydrogen , # # STR2 # # ; and a carboxyl group
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