For instance, the corresponding metrics, i.e., the remaining wafer processing capability, may be provided in {HEAD ~ the form} of a number of {TAIL ~ substrates} that can be processed until the next maintenance activity is required 
For instance , the corresponding metrics , i.e. , the remaining wafer processing capability , may be provided in { HEAD ~ the form } of a number of { TAIL ~ substrates } that can be processed until the next maintenance activity is required
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH OTH OTH TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH