The gate structures include {TAIL ~ a gate dielectric layer} and a gate film stack that includes a conductive layer and {HEAD ~ an overlying hard mask} 
The gate structures include { TAIL ~ a gate dielectric layer } and a gate film stack that includes a conductive layer and { HEAD ~ an overlying hard mask }
OTH OTH OTH OTH TAIL TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD HEAD