The supporting apparatus is preferably a conductive column that is not removed when {HEAD ~ the recessed} is formed in {TAIL ~ the dielectric layer} 
is formed in
The supporting apparatus is preferably a conductive column that is not removed when { HEAD ~ the recessed } is formed in { TAIL ~ the dielectric layer }
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD REL REL REL TAIL TAIL TAIL TAIL TAIL TAIL TAIL