The collar layer 12 is, thereupon, removed in the upper region and removed laterally down to {HEAD ~ the upper edge} of {TAIL ~ the second polysilicon layer} 13 
of
The collar layer 12 is , thereupon , removed in the upper region and removed laterally down to { HEAD ~ the upper edge } of { TAIL ~ the second polysilicon layer } 13
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD REL TAIL TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH