In order to utilize hydrogen halides, such as {TAIL ~ hydrogen chloride gas}, in {HEAD ~ the manufacture} of electronic devices, it is essential that the hydrogen halide contain low amounts of retained water vapor or moisture, i.e. less than 0.5 ppm water 
In order to utilize hydrogen halides , such as { TAIL ~ hydrogen chloride gas } , in { HEAD ~ the manufacture } of electronic devices , it is essential that the hydrogen halide contain low amounts of retained water vapor or moisture , i.e. less than 0.5 ppm water
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