the insulative diffusion barrier layer has {HEAD ~ oxygen}, {TAIL ~ silicon} and nitrogen as main constituent elements, a concentration of the nitrogen being from 0.5 to 12.5 atm % 
the insulative diffusion barrier layer has { HEAD ~ oxygen } , { TAIL ~ silicon } and nitrogen as main constituent elements , a concentration of the nitrogen being from 0.5 to 12.5 atm %
OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD OTH TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH