Further, micro passageways are formed that penetrate the first surface of the substrate from the second surface by a porous silicon process, and integrates the micro passageways, thereby forming the bodies and {HEAD ~ channels} of {TAIL ~ micro needles} 
of
Further , micro passageways are formed that penetrate the first surface of the substrate from the second surface by a porous silicon process , and integrates the micro passageways , thereby forming the bodies and { HEAD ~ channels } of { TAIL ~ micro needles }
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