Consequently, if supplying {HEAD ~ the substrates} according to {TAIL ~ these percentages}, the chambers 211A and 212A may be synchronized with respect to their down times in view of the next planned maintenance activity 
according to
Consequently , if supplying { HEAD ~ the substrates } according to { TAIL ~ these percentages } , the chambers 211A and 212A may be synchronized with respect to their down times in view of the next planned maintenance activity
OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD REL REL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH