{HEAD ~ The method} 1 wherein {TAIL ~ the polishing pad} has a density of about 0.3 g/cm 3 to about 1.5 g/cm 3 
wherein
{ HEAD ~ The method } 1 wherein { TAIL ~ the polishing pad } has a density of about 0.3 g / cm 3 to about 1.5 g / cm 3
HEAD HEAD HEAD HEAD HEAD HEAD OTH REL TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH