Example embodiments of the invention include methods of manufacturing silicon rich oxide layers that provide both improved step coverage and improved control over {HEAD ~ the silicon:oxygen ratio} within {TAIL ~ the resulting SRO materials} 
within
Example embodiments of the invention include methods of manufacturing silicon rich oxide layers that provide both improved step coverage and improved control over { HEAD ~ the silicon : oxygen ratio } within { TAIL ~ the resulting SRO materials }
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD HEAD HEAD REL TAIL TAIL TAIL TAIL TAIL TAIL TAIL TAIL