A method in accordance 10 wherein said wordlines are formed of {HEAD ~ polysilicon} deposited by {TAIL ~ chemical vapor deposition} followed by doping 
deposited by
A method in accordance 10 wherein said wordlines are formed of { HEAD ~ polysilicon } deposited by { TAIL ~ chemical vapor deposition } followed by doping
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD REL REL TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH