The specific scanner disclosed also includes {HEAD ~ an arrangement} for monitoring the profile, {TAIL ~ position} and orientation of the beam spot at a plurality of different points along the scan path 
for monitoring
The specific scanner disclosed also includes { HEAD ~ an arrangement } for monitoring the profile , { TAIL ~ position } and orientation of the beam spot at a plurality of different points along the scan path
OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD REL REL OTH OTH OTH TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH