For instance, the corresponding metrics, i.e., the remaining wafer processing capability, may be provided in the form of a number of {HEAD ~ substrates} that can be processed until {TAIL ~ the next maintenance activity} is required 
processed until
For instance , the corresponding metrics , i.e. , the remaining wafer processing capability , may be provided in the form of a number of { HEAD ~ substrates } that can be processed until { TAIL ~ the next maintenance activity } is required
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD OTH OTH OTH REL REL TAIL TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH