{HEAD ~ A substrate processing apparatus} 3, wherein {TAIL ~ said gas heating tube} extends from said first gas introducing section side toward said gas exhausting section side, is bent back before an end of said substrate at said gas exhausting section side, and extends from said gas exhausting section side toward said first gas introducing section side 
wherein
{ HEAD ~ A substrate processing apparatus } 3 , wherein { TAIL ~ said gas heating tube } extends from said first gas introducing section side toward said gas exhausting section side , is bent back before an end of said substrate at said gas exhausting section side , and extends from said gas exhausting section side toward said first gas introducing section side
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