The step of removing portions of {TAIL ~ the first capping layer} forms {HEAD ~ a first capping structure} that covers portions of the sacrificial layer 
The step of removing portions of { TAIL ~ the first capping layer } forms { HEAD ~ a first capping structure } that covers portions of the sacrificial layer
OTH OTH OTH OTH OTH OTH TAIL TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH OTH OTH OTH OTH OTH