{HEAD ~ The concentrations} of predetermined components of a chemical solution 5 present in a cleaning bath 1 are measured by {TAIL ~ a measurement unit} 11 
are measured by
{ HEAD ~ The concentrations } of predetermined components of a chemical solution 5 present in a cleaning bath 1 are measured by { TAIL ~ a measurement unit } 11
HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH REL REL REL TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH