{HEAD ~ The method} 1, wherein {TAIL ~ the first depth} is no less than 50% and no more than 80% of a thickness of the interlayer dielectric layer 
wherein
{ HEAD ~ The method } 1 , wherein { TAIL ~ the first depth } is no less than 50 % and no more than 80 % of a thickness of the interlayer dielectric layer
HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH REL TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH