In {HEAD ~ another mode}, the support structure MT is kept essentially stationary holding a programmable patterning device, and the substrate table WT is moved or scanned while a pattern imparted to the radiation beam is projected onto {TAIL ~ a target portion} C 
In { HEAD ~ another mode } , the support structure MT is kept essentially stationary holding a programmable patterning device , and the substrate table WT is moved or scanned while a pattern imparted to the radiation beam is projected onto { TAIL ~ a target portion } C
OTH HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH