That is, {HEAD ~ the first alignment system} 200 may be provided at {TAIL ~ a minimum distance} from the alignment marks 511 and 521 of the first and second substrates 510 and 520, and the second alignment system may support the first alignment system 200 to precisely align the first and second substrates 510 and 520 
provided at
That is , { HEAD ~ the first alignment system } 200 may be provided at { TAIL ~ a minimum distance } from the alignment marks 511 and 521 of the first and second substrates 510 and 520 , and the second alignment system may support the first alignment system 200 to precisely align the first and second substrates 510 and 520
OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH OTH REL REL TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH