This feature is suitable for manufacturing equipment which includes a transport chamber and a plurality of process chambers radially placed around and connected with the transport chamber, with the fixed base 200 of the transfer robot {HEAD ~ A1} being placed in {TAIL ~ the transport chamber} 
placed in
This feature is suitable for manufacturing equipment which includes a transport chamber and a plurality of process chambers radially placed around and connected with the transport chamber , with the fixed base 200 of the transfer robot { HEAD ~ A1 } being placed in { TAIL ~ the transport chamber }
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD OTH REL REL TAIL TAIL TAIL TAIL TAIL TAIL TAIL