According to {HEAD ~ the methods}, {TAIL ~ exposure defects} caused by an unsuitable stage velocity are reduced, and exposure defect areas can be re exposed after detection of an exposure defect 
According to { HEAD ~ the methods } , { TAIL ~ exposure defects } caused by an unsuitable stage velocity are reduced , and exposure defect areas can be re exposed after detection of an exposure defect
OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD OTH TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH