Method and system for synchronizing {HEAD ~ chamber} down {TAIL ~ times} by controlling transport sequencing in a process tool 
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Method and system for synchronizing { HEAD ~ chamber } down { TAIL ~ times } by controlling transport sequencing in a process tool
OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD REL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH