{HEAD ~ A micro pump} or the like is preferably connected to {TAIL ~ the trench} 210 of the second substrate 200 so as to supply chemicals or samples to the channel 140 
is preferably connected to
{ HEAD ~ A micro pump } or the like is preferably connected to { TAIL ~ the trench } 210 of the second substrate 200 so as to supply chemicals or samples to the channel 140
HEAD HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH OTH REL REL REL REL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH