This invention also relates to a pattern inspection apparatus which uses {HEAD ~ the image correction technique} to inspect a pattern image for {TAIL ~ defects} 
This invention also relates to a pattern inspection apparatus which uses { HEAD ~ the image correction technique } to inspect a pattern image for { TAIL ~ defects }
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH OTH OTH OTH OTH TAIL TAIL TAIL TAIL TAIL