forming {HEAD ~ a tunnel dielectric layer} overlying {TAIL ~ the carbon nanotubes} and adjoining the semiconductor substrate in the at least one portion of the semiconductor substrate within the plurality of carbon nanotubes 
overlying
forming { HEAD ~ a tunnel dielectric layer } overlying { TAIL ~ the carbon nanotubes } and adjoining the semiconductor substrate in the at least one portion of the semiconductor substrate within the plurality of carbon nanotubes
OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD HEAD REL TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH