A position of an end part of the anti reflection layer inside the via hole may be lower than {HEAD ~ a position} of an end part of the first electrode extending from the first surface to the inside of {TAIL ~ the via hole} 
A position of an end part of the anti reflection layer inside the via hole may be lower than { HEAD ~ a position } of an end part of the first electrode extending from the first surface to the inside of { TAIL ~ the via hole }
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH TAIL TAIL TAIL TAIL TAIL TAIL TAIL