{HEAD ~ Containers} 51, 52, and 53 of nitrogen, phosphine , and silane , respectively, are coupled to tube 37 via {TAIL ~ pipe} 39 under the control of flow controllers 54, 55, and 56, respectively 
are coupled via
{ HEAD ~ Containers } 51 , 52 , and 53 of nitrogen , phosphine , and silane , respectively , are coupled to tube 37 via { TAIL ~ pipe } 39 under the control of flow controllers 54 , 55 , and 56 , respectively
HEAD HEAD HEAD HEAD HEAD OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH REL REL OTH OTH OTH REL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH