{HEAD ~ The lid portion} 88 includes a throughway 92 to place the gas distribution assembly 46 in {TAIL ~ fluid communication} with the process chamber 32 
{ HEAD ~ The lid portion } 88 includes a throughway 92 to place the gas distribution assembly 46 in { TAIL ~ fluid communication } with the process chamber 32
HEAD HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH