cooling said coated substrate by extinguishing said deposition process and passing an inert gas over said substrate until the temperature of {HEAD ~ said substrate} has reached {TAIL ~ substantially room temperature} during said cool down step; and 
cooling said coated substrate by extinguishing said deposition process and passing an inert gas over said substrate until the temperature of { HEAD ~ said substrate } has reached { TAIL ~ substantially room temperature } during said cool down step ; and
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH