Note that even this wafer W can be a wafer of having {HEAD ~ improved flatness} when {TAIL ~ the wafer} W is planarized by applying a PACE method 
when
Note that even this wafer W can be a wafer of having { HEAD ~ improved flatness } when { TAIL ~ the wafer } W is planarized by applying a PACE method
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD REL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH