{HEAD ~ The step} of recessing the sidewalls recesses {TAIL ~ sidewalls} of the intermediate structure relative to edge regions of the first capping structure to form a sacrificial structure having recessed sidewalls 
recesses
{ HEAD ~ The step } of recessing the sidewalls recesses { TAIL ~ sidewalls } of the intermediate structure relative to edge regions of the first capping structure to form a sacrificial structure having recessed sidewalls
HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH OTH OTH REL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH