The method 13, further comprising alternating cycles of surface processing and examination of the exposed sample surface using a scanning electron microscope, {HEAD ~ a focused ion beam microscope}, or an atomic force microscope in situ and without opening {TAIL ~ the vacuum chamber} 
The method 13 , further comprising alternating cycles of surface processing and examination of the exposed sample surface using a scanning electron microscope , { HEAD ~ a focused ion beam microscope } , or an atomic force microscope in situ and without opening { TAIL ~ the vacuum chamber }
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH TAIL TAIL TAIL TAIL TAIL TAIL TAIL