For some embodiments, the tunnel dielectric layer may adjoin the substrate in {HEAD ~ at least a portion} of {TAIL ~ the channel region} 
of
For some embodiments , the tunnel dielectric layer may adjoin the substrate in { HEAD ~ at least a portion } of { TAIL ~ the channel region }
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD HEAD REL TAIL TAIL TAIL TAIL TAIL TAIL TAIL