{HEAD ~ An object} of the present invention is to provide {TAIL ~ a substrate heating apparatus} and a manufacturing method for the same which can achieve a uniform temperature distribution for a substrate while maintaining the strength of the ceramic base 
is to provide
{ HEAD ~ An object } of the present invention is to provide { TAIL ~ a substrate heating apparatus } and a manufacturing method for the same which can achieve a uniform temperature distribution for a substrate while maintaining the strength of the ceramic base
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