The purge line 154 is coupled to a foreline 138 exiting {HEAD ~ the processing chamber} 114 which runs to {TAIL ~ the facility} exhaust 136 
runs to
The purge line 154 is coupled to a foreline 138 exiting { HEAD ~ the processing chamber } 114 which runs to { TAIL ~ the facility } exhaust 136
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH REL REL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH