{HEAD ~ A supply} 94 of deposition and carrier gases is in {TAIL ~ fluid communication} with the gas distribution assembly 46 via a mixing manifold 96 
is in
{ HEAD ~ A supply } 94 of deposition and carrier gases is in { TAIL ~ fluid communication } with the gas distribution assembly 46 via a mixing manifold 96
HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH OTH OTH OTH OTH REL REL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH