The method for forming {HEAD ~ a resist pattern} 1, wherein after {TAIL ~ the heating} of the resist pattern thickening material, the resist pattern thickening material is rinsed 
wherein
The method for forming { HEAD ~ a resist pattern } 1 , wherein after { TAIL ~ the heating } of the resist pattern thickening material , the resist pattern thickening material is rinsed
OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH REL OTH TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH