A process temperature of the second annealing process is substantially larger than the crystalline temperature of the high k dielectric layer 12: for example, {HEAD ~ the process temperature} of {TAIL ~ the second annealing process} is substantially larger than 500 C 
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A process temperature of the second annealing process is substantially larger than the crystalline temperature of the high k dielectric layer 12 : for example , { HEAD ~ the process temperature } of { TAIL ~ the second annealing process } is substantially larger than 500 C
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD REL TAIL TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH