a first silicate glass layer as a first solid phase diffusion source containing {HEAD ~ an impurity} of {TAIL ~ a first conductivity type}, said first silicate glass layer being provided on both sides of said first gate electrode 
of
a first silicate glass layer as a first solid phase diffusion source containing { HEAD ~ an impurity } of { TAIL ~ a first conductivity type } , said first silicate glass layer being provided on both sides of said first gate electrode
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD REL TAIL TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH