placing said {TAIL ~ substrate} into {HEAD ~ a chemical vapor deposition reactor vacuum chamber} and evacuating the air from said chamber 
placing said { TAIL ~ substrate } into { HEAD ~ a chemical vapor deposition reactor vacuum chamber } and evacuating the air from said chamber
OTH OTH TAIL TAIL TAIL TAIL TAIL OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH OTH OTH OTH OTH OTH