{HEAD ~ The flow rates} of the respective gases into the vacuum chamber will depend upon {TAIL ~ the size} of the chamber and the desired deposition rate, while the ratio of the gases to one another will be dependent upon the desired ratio in the composite layer being deposited 
depend upon
{ HEAD ~ The flow rates } of the respective gases into the vacuum chamber will depend upon { TAIL ~ the size } of the chamber and the desired deposition rate , while the ratio of the gases to one another will be dependent upon the desired ratio in the composite layer being deposited
HEAD HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH OTH OTH OTH OTH OTH OTH OTH REL REL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH