A solvent of a resist solution is dropped from a solvent supply nozzle onto the surface of {TAIL ~ a semiconductor wafer} held by {HEAD ~ a spin chuck} 
A solvent of a resist solution is dropped from a solvent supply nozzle onto the surface of { TAIL ~ a semiconductor wafer } held by { HEAD ~ a spin chuck }
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD