Another aqueous dispersion for CMP according to the invention is characterized by comprising {HEAD ~ an abrasive, water}, a heteropolyacid and {TAIL ~ an organic acid} 
Another aqueous dispersion for CMP according to the invention is characterized by comprising { HEAD ~ an abrasive , water } , a heteropolyacid and { TAIL ~ an organic acid }
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH OTH OTH TAIL TAIL TAIL TAIL TAIL TAIL TAIL