Consequently, {HEAD ~ maintenance} may be required for {TAIL ~ the chamber} 212A after processing 6000 substrates in the tool 200, i.e., 3000 substrates in the chamber 212A and 3000 substrates in the chamber 212B 
required for
Consequently , { HEAD ~ maintenance } may be required for { TAIL ~ the chamber } 212A after processing 6000 substrates in the tool 200 , i.e. , 3000 substrates in the chamber 212A and 3000 substrates in the chamber 212B
OTH OTH HEAD HEAD HEAD HEAD HEAD OTH OTH REL REL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH