A pattern inspection apparatus 1, wherein said irradiator includes {HEAD ~ a pair} of {TAIL ~ swing mirrors} which reflect said deep ultraviolet laser by mutually swinging at different directions 
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A pattern inspection apparatus 1 , wherein said irradiator includes { HEAD ~ a pair } of { TAIL ~ swing mirrors } which reflect said deep ultraviolet laser by mutually swinging at different directions
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD REL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH