{HEAD ~ The method} 9, further including {TAIL ~ the step} of post treating the polymeric film in a plasma field after the step of curing the precursor 
including
{ HEAD ~ The method } 9 , further including { TAIL ~ the step } of post treating the polymeric film in a plasma field after the step of curing the precursor
HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH OTH REL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH