The method 2, wherein {TAIL ~ the sixth masking process} uses a diffraction mask defined into a transmission region, {HEAD ~ a semipermeable region} with slits, and a blocking region 
The method 2 , wherein { TAIL ~ the sixth masking process } uses a diffraction mask defined into a transmission region , { HEAD ~ a semipermeable region } with slits , and a blocking region
OTH OTH OTH OTH OTH TAIL TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH OTH OTH OTH OTH OTH