The precursor reacts under {HEAD ~ the second conditions} to form {TAIL ~ the desired material}, and at least some of the desired material forms a layer on the substrate 
to form
The precursor reacts under { HEAD ~ the second conditions } to form { TAIL ~ the desired material } , and at least some of the desired material forms a layer on the substrate
OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD REL REL TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH