{HEAD ~ a second silicate glass layer} as {TAIL ~ a second solid phase diffusion source} containing an impurity of the first conductivity type, said second silicate glass layer being provided on both sides of said second gate electrode 
as
{ HEAD ~ a second silicate glass layer } as { TAIL ~ a second solid phase diffusion source } containing an impurity of the first conductivity type , said second silicate glass layer being provided on both sides of said second gate electrode
HEAD HEAD HEAD HEAD HEAD HEAD HEAD HEAD HEAD REL TAIL TAIL TAIL TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH