{HEAD ~ the insulative diffusion barrier layer} has {TAIL ~ oxygen}, silicon and nitrogen as main constituent elements, a concentration of the nitrogen being from 0.5 to 12.5 atm % 
has
{ HEAD ~ the insulative diffusion barrier layer } has { TAIL ~ oxygen } , silicon and nitrogen as main constituent elements , a concentration of the nitrogen being from 0.5 to 12.5 atm %
HEAD HEAD HEAD HEAD HEAD HEAD HEAD HEAD HEAD REL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH