During the processing, the processing space is isolated from the outer atmosphere by closing a lid of a processing vessel and {HEAD ~ a sprayed solvent} is supplied into {TAIL ~ the processing space} 
is supplied into
During the processing , the processing space is isolated from the outer atmosphere by closing a lid of a processing vessel and { HEAD ~ a sprayed solvent } is supplied into { TAIL ~ the processing space }
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD REL REL REL TAIL TAIL TAIL TAIL TAIL TAIL TAIL