placing said substrate into a chemical vapor deposition reactor vacuum chamber and evacuating {HEAD ~ the air} from {TAIL ~ said chamber} 
from
placing said substrate into a chemical vapor deposition reactor vacuum chamber and evacuating { HEAD ~ the air } from { TAIL ~ said chamber }
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD REL TAIL TAIL TAIL TAIL TAIL TAIL