A photolithographic method 6 wherein {HEAD ~ said imagewise exposing} of said first layer is done by {TAIL ~ computer} controlling a thin beam of actinic radiation 
is done by
A photolithographic method 6 wherein { HEAD ~ said imagewise exposing } of said first layer is done by { TAIL ~ computer } controlling a thin beam of actinic radiation
OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH OTH OTH REL REL REL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH