The first blocking layer contains {HEAD ~ 1×10 4 to 1.0 atomic %} of {TAIL ~ a Group III or V element} in the Periodic Table 
of
The first blocking layer contains { HEAD ~ 1×10 4 to 1.0 atomic % } of { TAIL ~ a Group III or V element } in the Periodic Table
OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD HEAD HEAD HEAD REL TAIL TAIL TAIL TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH