A method for fabricating semiconductor substrates with {TAIL ~ resistivity} below {HEAD ~ 0.02 ohm cm} is provided 
A method for fabricating semiconductor substrates with { TAIL ~ resistivity } below { HEAD ~ 0.02 ohm cm } is provided
OTH OTH OTH OTH OTH OTH OTH TAIL TAIL TAIL TAIL TAIL OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH