Consequently, if supplying the substrates according to these percentages, the chambers 211A and 212A may be synchronized with respect to their down times in {HEAD ~ view} of {TAIL ~ the next planned maintenance activity} 
of
Consequently , if supplying the substrates according to these percentages , the chambers 211A and 212A may be synchronized with respect to their down times in { HEAD ~ view } of { TAIL ~ the next planned maintenance activity }
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD REL TAIL TAIL TAIL TAIL TAIL TAIL TAIL TAIL TAIL