{HEAD ~ The substrate boat} 13, wherein each of the plurality of substrate supports has {TAIL ~ a plurality} of openings along a perimeter configured to accommodate the substrate holder 
{ HEAD ~ The substrate boat } 13 , wherein each of the plurality of substrate supports has { TAIL ~ a plurality } of openings along a perimeter configured to accommodate the substrate holder
HEAD HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH