etching {TAIL ~ the organic anti reflection coating} using the resist pattern as {HEAD ~ a mask}; and 
etching { TAIL ~ the organic anti reflection coating } using the resist pattern as { HEAD ~ a mask } ; and
OTH TAIL TAIL TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH