Resist {TAIL ~ composition} comprising a siloxane or silsesquioxane polymer having {HEAD ~ silanol groups} in a composition with a naphthoquinone compound 
Resist { TAIL ~ composition } comprising a siloxane or silsesquioxane polymer having { HEAD ~ silanol groups } in a composition with a naphthoquinone compound
OTH TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH OTH OTH OTH OTH OTH