There is provided a method of forming a damascene pattern including a via and a trench in {HEAD ~ a damascene process} of forming {TAIL ~ a copper metal interconnection} 
of forming
There is provided a method of forming a damascene pattern including a via and a trench in { HEAD ~ a damascene process } of forming { TAIL ~ a copper metal interconnection }
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD REL REL TAIL TAIL TAIL TAIL TAIL TAIL TAIL TAIL