{HEAD ~ An apparatus} for forming the coated substrate especially includes {TAIL ~ means} for forming the intermediate layer and means for forming the hard carbon film in the same vacuum chamber 
includes
{ HEAD ~ An apparatus } for forming the coated substrate especially includes { TAIL ~ means } for forming the intermediate layer and means for forming the hard carbon film in the same vacuum chamber
HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH OTH OTH OTH OTH REL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH