At the same time, a quantity of oxygen is flowed into the reactor tube so that the oxygen also contacts the silicon wafer and intermixes and reacts with the silane, phosphine and boron trichloride gases to form layers of {HEAD ~ borophosphosilicate glass} on {TAIL ~ the silicon wafer} 
on
At the same time , a quantity of oxygen is flowed into the reactor tube so that the oxygen also contacts the silicon wafer and intermixes and reacts with the silane , phosphine and boron trichloride gases to form layers of { HEAD ~ borophosphosilicate glass } on { TAIL ~ the silicon wafer }
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