For example, {HEAD ~ the transfer position} 12 is a load port of a semiconductor processing apparatus, a station such as {TAIL ~ a stocker}, or a buffer for temporarily storing an article 
For example , { HEAD ~ the transfer position } 12 is a load port of a semiconductor processing apparatus , a station such as { TAIL ~ a stocker } , or a buffer for temporarily storing an article
OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH