Multi level structure may be fabricated according to the method of the invention by repeating the last few steps of {HEAD ~ the method} of {TAIL ~ the invention} 
of
Multi level structure may be fabricated according to the method of the invention by repeating the last few steps of { HEAD ~ the method } of { TAIL ~ the invention }
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD REL TAIL TAIL TAIL TAIL TAIL TAIL