fourth source/drain regions of the second conductivity type having shallower depth than those of said third source/drain regions, said {HEAD ~ fourth source/drain regions} being formed below said {TAIL ~ second silicate glass layer} 
formed below
fourth source / drain regions of the second conductivity type having shallower depth than those of said third source / drain regions , said { HEAD ~ fourth source / drain regions } being formed below said { TAIL ~ second silicate glass layer }
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD HEAD HEAD OTH REL REL OTH TAIL TAIL TAIL TAIL TAIL TAIL TAIL TAIL