{TAIL ~ The low K dielectric materials} are prepared from PACVD or TP of some selected siloxanes and F containing {HEAD ~ aromatic compounds} 
{ TAIL ~ The low K dielectric materials } are prepared from PACVD or TP of some selected siloxanes and F containing { HEAD ~ aromatic compounds }
TAIL TAIL TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD