In the preoxidation cleaning step, {HEAD ~ a solution} containing {TAIL ~ NH4F}, HF, and H2O, a standard solution containing NH4OH, H2O2, and H2O, and HF are used 
containing
In the preoxidation cleaning step , { HEAD ~ a solution } containing { TAIL ~ NH4F } , HF , and H2O , a standard solution containing NH4OH , H2O2 , and H2O , and HF are used
OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD REL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH