Further, there has also been known that a transparent electroconductive layer having an uneven surface is formed between the reflection layer and the semiconductor layer to obtain a light confining effect that an optical distance of reflected light is prolonged to obtain an effect of suppressing an excessive current flowing at the time of {HEAD ~ an occurrence} of {TAIL ~ a shunt phenomenon} 
of
Further , there has also been known that a transparent electroconductive layer having an uneven surface is formed between the reflection layer and the semiconductor layer to obtain a light confining effect that an optical distance of reflected light is prolonged to obtain an effect of suppressing an excessive current flowing at the time of { HEAD ~ an occurrence } of { TAIL ~ a shunt phenomenon }
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