Subsequently, the substrate is heated to {TAIL ~ about 450 ° C.} and the coating film is irradiated with, e.g., ultraviolet radiation having a wavelength of {HEAD ~ 172 nm} 
Subsequently , the substrate is heated to { TAIL ~ about 450 ° C. } and the coating film is irradiated with , e.g. , ultraviolet radiation having a wavelength of { HEAD ~ 172 nm }
OTH OTH OTH OTH OTH OTH OTH TAIL TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD