Then, the treating abilities of chemical solution when the components and ultrapure water are supplemented, are calculated for {HEAD ~ various cases} of {TAIL ~ amounts} supplemented 
of
Then , the treating abilities of chemical solution when the components and ultrapure water are supplemented , are calculated for { HEAD ~ various cases } of { TAIL ~ amounts } supplemented
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD REL TAIL TAIL TAIL TAIL TAIL OTH