A wafer processing cluster tool, having one or more load locks, is provided with {HEAD ~ one or more batch preheating modules} that receive {TAIL ~ wafers} only from the cluster tool transport module at the internal vacuum pressure of the machine 
receive
A wafer processing cluster tool , having one or more load locks , is provided with { HEAD ~ one or more batch preheating modules } that receive { TAIL ~ wafers } only from the cluster tool transport module at the internal vacuum pressure of the machine
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD HEAD HEAD HEAD OTH REL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH