Because the contact hole is wider than the lower capacitor electrode, unevenness of the surface of the lower capacitor electrode can be reduced thus allowing {HEAD ~ the fabrication} of {TAIL ~ a thin uniform dielectric layer} 
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Because the contact hole is wider than the lower capacitor electrode , unevenness of the surface of the lower capacitor electrode can be reduced thus allowing { HEAD ~ the fabrication } of { TAIL ~ a thin uniform dielectric layer }
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD REL TAIL TAIL TAIL TAIL TAIL TAIL TAIL TAIL TAIL