said sidewall surface of said {HEAD ~ main part} including a sharply pointed tip end part defined by two crystal surfaces and located at {TAIL ~ a lower side} of an interface between said gate insulation film and said silicon substrate 
located at
said sidewall surface of said { HEAD ~ main part } including a sharply pointed tip end part defined by two crystal surfaces and located at { TAIL ~ a lower side } of an interface between said gate insulation film and said silicon substrate
OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH REL REL TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH