This results from, among other things, the relatively high chamber pressures that may be achieved using {HEAD ~ BTBAS} as {TAIL ~ a silicon source} 
as
This results from , among other things , the relatively high chamber pressures that may be achieved using { HEAD ~ BTBAS } as { TAIL ~ a silicon source }
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD REL TAIL TAIL TAIL TAIL TAIL TAIL TAIL