There is provided {HEAD ~ a method} of forming {TAIL ~ a damascene pattern} including a via and a trench in a damascene process of forming a copper metal interconnection 
of forming
There is provided { HEAD ~ a method } of forming { TAIL ~ a damascene pattern } including a via and a trench in a damascene process of forming a copper metal interconnection
OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD REL REL TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH