{HEAD ~ The planes} of {TAIL ~ the channel layer} made of this crystalline oxide semiconductor are crystal planes on which only metal atoms are arranged 
of
{ HEAD ~ The planes } of { TAIL ~ the channel layer } made of this crystalline oxide semiconductor are crystal planes on which only metal atoms are arranged
HEAD HEAD HEAD HEAD HEAD HEAD REL TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH