The method for forming a resist pattern 1, wherein after {TAIL ~ the heating} of the resist pattern thickening material, {HEAD ~ the resist pattern thickening material} is rinsed 
after is rinsed
The method for forming a resist pattern 1 , wherein after { TAIL ~ the heating } of the resist pattern thickening material , { HEAD ~ the resist pattern thickening material } is rinsed
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH REL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD HEAD HEAD REL REL