A method 19, wherein during {TAIL ~ said step} of rotating the substrate a side of said cover that faces away from {HEAD ~ the substrate} is rinsed and dried 
A method 19 , wherein during { TAIL ~ said step } of rotating the substrate a side of said cover that faces away from { HEAD ~ the substrate } is rinsed and dried
OTH OTH OTH OTH OTH OTH TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH OTH OTH