Resist composition comprising a siloxane or silsesquioxane polymer having {HEAD ~ silanol groups} in {TAIL ~ a composition} with a naphthoquinone compound 
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Resist composition comprising a siloxane or silsesquioxane polymer having { HEAD ~ silanol groups } in { TAIL ~ a composition } with a naphthoquinone compound
OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD REL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH