{HEAD ~ an evaporation detector} arranged in {TAIL ~ said furnace} and detecting at least any one of the amount of evaporation of impurity from said crucible, the temperature above said molten liquid, or the pressure inside of said furnace; and 
arranged in
{ HEAD ~ an evaporation detector } arranged in { TAIL ~ said furnace } and detecting at least any one of the amount of evaporation of impurity from said crucible , the temperature above said molten liquid , or the pressure inside of said furnace ; and
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