A polysilicon layer 32 is deposited on {HEAD ~ the entire surface} of the substrate 31 including {TAIL ~ the trench} 
A polysilicon layer 32 is deposited on { HEAD ~ the entire surface } of the substrate 31 including { TAIL ~ the trench }
OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH OTH OTH OTH TAIL TAIL TAIL TAIL TAIL TAIL