The low K dielectric materials are prepared from PACVD or TP of {TAIL ~ some selected siloxanes} and F containing {HEAD ~ aromatic compounds} 
The low K dielectric materials are prepared from PACVD or TP of { TAIL ~ some selected siloxanes } and F containing { HEAD ~ aromatic compounds }
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD