A transport space for transporting {TAIL ~ a substrate} without contamination of {HEAD ~ the surface} of the substrate retained therein, which comprises: 
A transport space for transporting { TAIL ~ a substrate } without contamination of { HEAD ~ the surface } of the substrate retained therein , which comprises :
OTH OTH OTH OTH OTH TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH OTH OTH OTH OTH OTH OTH OTH