First, the backside 96 of the silicon substrate 80 is coated with {HEAD ~ a suitable contact material} that has {TAIL ~ good electrical conductivity} for electrochemical etching processes 
has
First , the backside 96 of the silicon substrate 80 is coated with { HEAD ~ a suitable contact material } that has { TAIL ~ good electrical conductivity } for electrochemical etching processes
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD HEAD OTH REL TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH