The processing chamber and loadlock chambers are connected to a vacuum system having two vacuum pumps for maintaining {HEAD ~ a vacuum} in {TAIL ~ the chambers} 
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The processing chamber and loadlock chambers are connected to a vacuum system having two vacuum pumps for maintaining { HEAD ~ a vacuum } in { TAIL ~ the chambers }
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD REL TAIL TAIL TAIL TAIL TAIL TAIL