{HEAD ~ Method} of using {TAIL ~ a o quinone diazide sensitized phenol formaldehyde resist} as a deep ultraviolet light exposure mask 
of using
{ HEAD ~ Method } of using { TAIL ~ a o quinone diazide sensitized phenol formaldehyde resist } as a deep ultraviolet light exposure mask
HEAD HEAD HEAD HEAD HEAD REL REL TAIL TAIL TAIL TAIL TAIL TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH