{HEAD ~ a third semiconductor layer} formed on the second semiconductor layer in {TAIL ~ exactly the same size} and pattern as the latter 
formed in
{ HEAD ~ a third semiconductor layer } formed on the second semiconductor layer in { TAIL ~ exactly the same size } and pattern as the latter
HEAD HEAD HEAD HEAD HEAD HEAD HEAD HEAD REL OTH OTH OTH OTH OTH REL TAIL TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH