These openings are then filled with {HEAD ~ conductive material} to form self aligned contacts within {TAIL ~ the core region} 
These openings are then filled with { HEAD ~ conductive material } to form self aligned contacts within { TAIL ~ the core region }
OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH OTH OTH OTH OTH TAIL TAIL TAIL TAIL TAIL TAIL TAIL