The method 1, wherein the resistor material comprises tantalum nitride and {HEAD ~ the dielectric layer} comprises {TAIL ~ a polymer} 
comprises
The method 1 , wherein the resistor material comprises tantalum nitride and { HEAD ~ the dielectric layer } comprises { TAIL ~ a polymer }
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD REL TAIL TAIL TAIL TAIL TAIL TAIL