{HEAD ~ A peripheral edge portion} of the protective sheet is provided at an inside of the peripheral edge portion of {TAIL ~ the semiconductor chip} 
{ HEAD ~ A peripheral edge portion } of the protective sheet is provided at an inside of the peripheral edge portion of { TAIL ~ the semiconductor chip }
HEAD HEAD HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH TAIL TAIL TAIL TAIL TAIL TAIL TAIL