The method for manufacturing {TAIL ~ a piezoelectric resonator element} 4, further comprising removing the second dry etching mask in {HEAD ~ a mask removing process} after the second dry etching process 
The method for manufacturing { TAIL ~ a piezoelectric resonator element } 4 , further comprising removing the second dry etching mask in { HEAD ~ a mask removing process } after the second dry etching process
OTH OTH OTH OTH TAIL TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH OTH OTH OTH OTH