{HEAD ~ A passivation layer} is formed overlying the first dielectric layer and has {TAIL ~ an opening}, in which the opening corresponds to the bonding region and the sensing region and exposes the dielectric island and a part of the first conductive layer 
has
{ HEAD ~ A passivation layer } is formed overlying the first dielectric layer and has { TAIL ~ an opening } , in which the opening corresponds to the bonding region and the sensing region and exposes the dielectric island and a part of the first conductive layer
HEAD HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH OTH OTH OTH OTH OTH OTH REL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH