{HEAD ~ The thin film plate} 12 is formed by {TAIL ~ patterning} of a silicon nitride film 
is formed by
{ HEAD ~ The thin film plate } 12 is formed by { TAIL ~ patterning } of a silicon nitride film
HEAD HEAD HEAD HEAD HEAD HEAD HEAD HEAD OTH REL REL REL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH