It should be appreciated that the second annealing process has {TAIL ~ a process temperature} that is substantially larger than the crystalline temperature of the high k dielectric layer 12; accordingly, the second annealing process can assist {HEAD ~ the transformation} of the high k dielectric layer 12 
It should be appreciated that the second annealing process has { TAIL ~ a process temperature } that is substantially larger than the crystalline temperature of the high k dielectric layer 12 ; accordingly , the second annealing process can assist { HEAD ~ the transformation } of the high k dielectric layer 12
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