The cavity may include a plurality of pedestals and {HEAD ~ protrusions} configured to create {TAIL ~ one or more spirals} flow paths of a gas traveling through the cavity 
configured to create
The cavity may include a plurality of pedestals and { HEAD ~ protrusions } configured to create { TAIL ~ one or more spirals } flow paths of a gas traveling through the cavity
OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD REL REL REL TAIL TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH