{HEAD ~ This invention} relates to a method and {TAIL ~ an apparatus} for the contamination control of substrate surfaces in spaces 
relates to
{ HEAD ~ This invention } relates to a method and { TAIL ~ an apparatus } for the contamination control of substrate surfaces in spaces
HEAD HEAD HEAD HEAD HEAD HEAD REL REL OTH OTH OTH TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH