While the inert gas is injected from the position opposed to the peripheral edge of the substrate W in {HEAD ~ the aforementioned embodiment}, the inert gas may also be injected from a position opposed to {TAIL ~ the center} of the substrate W 
While the inert gas is injected from the position opposed to the peripheral edge of the substrate W in { HEAD ~ the aforementioned embodiment } , the inert gas may also be injected from a position opposed to { TAIL ~ the center } of the substrate W
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH