In some illustrative embodiments, {HEAD ~ the sequencing} of substrates to the chambers 212A, 212B, i.e., the bottleneck step, may be in {TAIL ~ an alternating manner} in order to maintain 100% of the total capacity of the cluster tool 200 
in
In some illustrative embodiments , { HEAD ~ the sequencing } of substrates to the chambers 212A , 212B , i.e. , the bottleneck step , may be in { TAIL ~ an alternating manner } in order to maintain 100 % of the total capacity of the cluster tool 200
OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH REL TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH