A pattern inspection apparatus 1, wherein said irradiator includes a pair of {HEAD ~ swing mirrors} which reflect {TAIL ~ said deep ultraviolet laser} by mutually swinging at different directions 
reflect
A pattern inspection apparatus 1 , wherein said irradiator includes a pair of { HEAD ~ swing mirrors } which reflect { TAIL ~ said deep ultraviolet laser } by mutually swinging at different directions
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD OTH REL TAIL TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH