A solvent of a resist solution is dropped from a solvent supply nozzle onto the surface of {HEAD ~ a semiconductor wafer} held by {TAIL ~ a spin chuck} 
held by
A solvent of a resist solution is dropped from a solvent supply nozzle onto the surface of { HEAD ~ a semiconductor wafer } held by { TAIL ~ a spin chuck }
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD REL REL TAIL TAIL TAIL TAIL TAIL TAIL TAIL