In general, in another aspect, the invention features a nano electromechanical energy conversion assembly including {HEAD ~ a piezoelectric flexible membrane} supported on at least two sides by {TAIL ~ a chamber} 
supported by
In general , in another aspect , the invention features a nano electromechanical energy conversion assembly including { HEAD ~ a piezoelectric flexible membrane } supported on at least two sides by { TAIL ~ a chamber }
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD HEAD REL OTH OTH OTH OTH OTH REL TAIL TAIL TAIL TAIL TAIL TAIL