The intermediate layer is mainly composed of Ru, {HEAD ~ Si}, Ge or carbon, or is a mixed layer including Ru, Si, or {TAIL ~ Ge} mixed with at least one of carbon, nitrogen or oxygen, with a composition gradient across its thickness 
The intermediate layer is mainly composed of Ru , { HEAD ~ Si } , Ge or carbon , or is a mixed layer including Ru , Si , or { TAIL ~ Ge } mixed with at least one of carbon , nitrogen or oxygen , with a composition gradient across its thickness
OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH