Method of {HEAD ~ enhanced introduction} of {TAIL ~ impurity species} into a semiconductor structure from a deposited source and application thereof 
of
Method of { HEAD ~ enhanced introduction } of { TAIL ~ impurity species } into a semiconductor structure from a deposited source and application thereof
OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD REL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH