The gate structures include a gate dielectric layer and {HEAD ~ a gate film stack} that includes a conductive layer and {TAIL ~ an overlying hard mask} 
includes
The gate structures include a gate dielectric layer and { HEAD ~ a gate film stack } that includes a conductive layer and { TAIL ~ an overlying hard mask }
OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD HEAD OTH REL OTH OTH OTH OTH TAIL TAIL TAIL TAIL TAIL TAIL TAIL TAIL