{TAIL ~ The apparatus} comprises {HEAD ~ air injection modules}, which serve to float a substrate, and can be independently attached to or detached from the substrate transferring apparatus 
{ TAIL ~ The apparatus } comprises { HEAD ~ air injection modules } , which serve to float a substrate , and can be independently attached to or detached from the substrate transferring apparatus
TAIL TAIL TAIL TAIL TAIL TAIL OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH