Sputtering target producing few particles, backing plate or sputtering apparatus and {HEAD ~ sputtering method} producing {TAIL ~ few particles} 
Sputtering target producing few particles , backing plate or sputtering apparatus and { HEAD ~ sputtering method } producing { TAIL ~ few particles }
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD REL TAIL TAIL TAIL TAIL TAIL TAIL