In {TAIL ~ a preferred method} for depositing of these materials, {HEAD ~ capacitive coupling} forms a highly uniform, selectively energized stream of ions from a dense, inductively ionized plasma 
In { TAIL ~ a preferred method } for depositing of these materials , { HEAD ~ capacitive coupling } forms a highly uniform , selectively energized stream of ions from a dense , inductively ionized plasma
REL TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH