The process consists of a step of placing a plurality of wafers in a shrouded quartz boat or wafer carrier having {HEAD ~ a plurality} of {TAIL ~ slots} cut in the walls thereof to admit reactant gases to the vicinity of the wafers 
The process consists of a step of placing a plurality of wafers in a shrouded quartz boat or wafer carrier having { HEAD ~ a plurality } of { TAIL ~ slots } cut in the walls thereof to admit reactant gases to the vicinity of the wafers
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