{HEAD ~ Method} of eliminating {TAIL ~ dislocations} and lowering lattice strain for highly doped N+ substrates 
{ HEAD ~ Method } of eliminating { TAIL ~ dislocations } and lowering lattice strain for highly doped N+ substrates
HEAD HEAD HEAD HEAD HEAD REL REL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH