The storage node is formed over {HEAD ~ word lines} beginning with a deposition and {TAIL ~ planarization} of an insulator or composite insulator 
The storage node is formed over { HEAD ~ word lines } beginning with a deposition and { TAIL ~ planarization } of an insulator or composite insulator
OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD REL REL OTH OTH OTH TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH