In accordance with the present invention, {HEAD ~ a protective fixture} has been constructed to allow {TAIL ~ efficient wafer processing} of micromechanical devices 
In accordance with the present invention , { HEAD ~ a protective fixture } has been constructed to allow { TAIL ~ efficient wafer processing } of micromechanical devices
OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH REL REL REL TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH