These low K materials, LKD, are prepared by {HEAD ~ photon assisted and plasma enhanced transport polymerization} or chemical vapor deposition of {TAIL ~ some selected siloxanes} and F containing aromatic compounds 
These low K materials , LKD , are prepared by { HEAD ~ photon assisted and plasma enhanced transport polymerization } or chemical vapor deposition of { TAIL ~ some selected siloxanes } and F containing aromatic compounds
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH OTH OTH REL TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH