A method 1, wherein the ion density is greater than 1012 cm−3 and the ion energy is between {TAIL ~ 10 eV} and {HEAD ~ 15 eV} in said forming 
A method 1 , wherein the ion density is greater than 1012 cm−3 and the ion energy is between { TAIL ~ 10 eV } and { HEAD ~ 15 eV } in said forming
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH TAIL TAIL TAIL TAIL TAIL TAIL OTH HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH OTH