{TAIL ~ a first silicate glass layer} as a first solid phase diffusion source containing an impurity of {HEAD ~ a first conductivity type}, said first silicate glass layer being provided on both sides of said first gate electrode 
{ TAIL ~ a first silicate glass layer } as a first solid phase diffusion source containing an impurity of { HEAD ~ a first conductivity type } , said first silicate glass layer being provided on both sides of said first gate electrode
TAIL TAIL TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH