A nitride semiconductor substrate having {HEAD ~ properties} preferable for the manufacture of various nitride semiconductor devices is made available, by specifying or controlling the local variation in the off axis angle of {TAIL ~ the principal surface} of the nitride semiconductor substrate 
A nitride semiconductor substrate having { HEAD ~ properties } preferable for the manufacture of various nitride semiconductor devices is made available , by specifying or controlling the local variation in the off axis angle of { TAIL ~ the principal surface } of the nitride semiconductor substrate
OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH