Note that even this wafer W can be a wafer of having improved flatness when {TAIL ~ the wafer} W is planarized by applying {HEAD ~ a PACE method} 
Note that even this wafer W can be a wafer of having improved flatness when { TAIL ~ the wafer } W is planarized by applying { HEAD ~ a PACE method }
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD