A hydrogenated thin film is formed in {HEAD ~ a controlled vacuum} on {TAIL ~ a substrate} by evaporating one or more solid materials and passing the resulting vapor and a hydrogen containing gas into a space between two electrodes 
A hydrogenated thin film is formed in { HEAD ~ a controlled vacuum } on { TAIL ~ a substrate } by evaporating one or more solid materials and passing the resulting vapor and a hydrogen containing gas into a space between two electrodes
OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD REL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH