A cluster tool may be operated on the basis of an enhanced sequencing regime in which the supply of substrates is controlled such that {HEAD ~ a planned time} of maintenance is reached for {TAIL ~ two or more process chambers} simultaneously 
A cluster tool may be operated on the basis of an enhanced sequencing regime in which the supply of substrates is controlled such that { HEAD ~ a planned time } of maintenance is reached for { TAIL ~ two or more process chambers } simultaneously
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH REL REL REL TAIL TAIL TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH