A resist composition comprising a compound having an active hydrogen and an alkali soluble siloxane polymer containing in the molecules thereof at least one unit selected from a unit represented by formula and {HEAD ~ a unit} represented by {TAIL ~ formula} ##STR1## wherein the Xs are the same or different and each represents one member selected from the group consisting of hydrogen, ##STR2## ; and a carboxyl group 
A resist composition comprising a compound having an active hydrogen and an alkali soluble siloxane polymer containing in the molecules thereof at least one unit selected from a unit represented by formula and { HEAD ~ a unit } represented by { TAIL ~ formula } # # STR1 # # wherein the Xs are the same or different and each represents one member selected from the group consisting of hydrogen , # # STR2 # # ; and a carboxyl group
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