A spacer material is formed to entirely cover the second cap layer, {HEAD ~ the fin} shaped structure and {TAIL ~ the substrate} 
A spacer material is formed to entirely cover the second cap layer , { HEAD ~ the fin } shaped structure and { TAIL ~ the substrate }
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD REL OTH OTH TAIL TAIL TAIL TAIL TAIL TAIL