Subsequently, the substrate is heated to about 450 ° C. and the coating film is irradiated with, e.g., {HEAD ~ ultraviolet radiation} having {TAIL ~ a wavelength} of 172 nm 
Subsequently , the substrate is heated to about 450 ° C. and the coating film is irradiated with , e.g. , { HEAD ~ ultraviolet radiation } having { TAIL ~ a wavelength } of 172 nm
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD REL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH