{TAIL ~ The present invention} relates to {HEAD ~ an epitaxial SiC single crystal substrate}, and a method of manufacture of the epitaxial SiC single crystal substrate 
{ TAIL ~ The present invention } relates to { HEAD ~ an epitaxial SiC single crystal substrate } , and a method of manufacture of the epitaxial SiC single crystal substrate
TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH