An apparatus is fabricated with a plurality of semiconductor device substrates and MEMS substrates with {TAIL ~ micromachined sensors}, circuits, transducers, and MEMS devices fabricated on the plurality of {HEAD ~ substrates} 
An apparatus is fabricated with a plurality of semiconductor device substrates and MEMS substrates with { TAIL ~ micromachined sensors } , circuits , transducers , and MEMS devices fabricated on the plurality of { HEAD ~ substrates }
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD