{HEAD ~ The present inventors} have studied various investigations to solve the problems and, as a result, found that the above problems can be solved by correlating a plurality of lines of the treatment facilities as {TAIL ~ a specific structure} respectively, and have thus completed the present invention 
{ HEAD ~ The present inventors } have studied various investigations to solve the problems and , as a result , found that the above problems can be solved by correlating a plurality of lines of the treatment facilities as { TAIL ~ a specific structure } respectively , and have thus completed the present invention
HEAD HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH