High purity polysilicon granules are prepared by depositing {HEAD ~ reaction gas} on silicon granules in {TAIL ~ a fluidized bed reactor} having: 
High purity polysilicon granules are prepared by depositing { HEAD ~ reaction gas } on silicon granules in { TAIL ~ a fluidized bed reactor } having :
OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH OTH OTH TAIL TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH