{HEAD ~ This feature} is suitable for manufacturing equipment which includes a transport chamber and a plurality of process chambers radially placed around and connected with the transport chamber, with the fixed base 200 of the transfer robot {TAIL ~ A1} being placed in the transport chamber 
{ HEAD ~ This feature } is suitable for manufacturing equipment which includes a transport chamber and a plurality of process chambers radially placed around and connected with the transport chamber , with the fixed base 200 of the transfer robot { TAIL ~ A1 } being placed in the transport chamber
HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH