The substrate processing apparatus 1, further comprising {HEAD ~ an under plate} which is arranged below {TAIL ~ the substrate} so as to oppose the substrate and which is movable up and down 
The substrate processing apparatus 1 , further comprising { HEAD ~ an under plate } which is arranged below { TAIL ~ the substrate } so as to oppose the substrate and which is movable up and down
OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD OTH REL REL REL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH