The pressure of the deposition chamber 430 is maintained at a level lower than {HEAD ~ the pressure} of {TAIL ~ the other two chambers} to enable cluster transportation from the cluster forming chamber 410 to the deposition chamber 430 
The pressure of the deposition chamber 430 is maintained at a level lower than { HEAD ~ the pressure } of { TAIL ~ the other two chambers } to enable cluster transportation from the cluster forming chamber 410 to the deposition chamber 430
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD REL TAIL TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH