Consequently, maintenance may be required for {HEAD ~ the chamber} 212A after processing 6000 substrates in the tool 200, i.e., 3000 substrates in the chamber 212A and {TAIL ~ 3000 substrates} in the chamber 212B 
Consequently , maintenance may be required for { HEAD ~ the chamber } 212A after processing 6000 substrates in the tool 200 , i.e. , 3000 substrates in the chamber 212A and { TAIL ~ 3000 substrates } in the chamber 212B
OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH