The nitride semiconductor wafer 1, wherein Δθ varies non continuously within an angular range of {HEAD ~ greater than 0.05°} and {TAIL ~ less than 1°} 
The nitride semiconductor wafer 1 , wherein Δθ varies non continuously within an angular range of { HEAD ~ greater than 0.05 ° } and { TAIL ~ less than 1 ° }
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD HEAD OTH TAIL TAIL TAIL TAIL TAIL TAIL TAIL TAIL