High purity polysilicon granules are prepared by depositing reaction gas on {HEAD ~ silicon granules} in {TAIL ~ a fluidized bed reactor} having: 
High purity polysilicon granules are prepared by depositing reaction gas on { HEAD ~ silicon granules } in { TAIL ~ a fluidized bed reactor } having :
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD REL TAIL TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH