{HEAD ~ A 3D nucleation GaN layer} is grown on {TAIL ~ the epitaxial nitride layer} by HVPE under a substantially 3D growth mode 
{ HEAD ~ A 3D nucleation GaN layer } is grown on { TAIL ~ the epitaxial nitride layer } by HVPE under a substantially 3D growth mode
HEAD HEAD HEAD HEAD HEAD HEAD HEAD HEAD HEAD REL REL REL TAIL TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH