A mask blank is provided by forming a plurality of films, including {TAIL ~ at least a thin film} to be {HEAD ~ a transfer pattern}, on a board 
A mask blank is provided by forming a plurality of films , including { TAIL ~ at least a thin film } to be { HEAD ~ a transfer pattern } , on a board
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH TAIL TAIL TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH OTH OTH