{HEAD ~ A gate dielectric layer} 14 is formed over {TAIL ~ the semiconductor substrate} 10 including the lower pillar 11C 
{ HEAD ~ A gate dielectric layer } 14 is formed over { TAIL ~ the semiconductor substrate } 10 including the lower pillar 11C
HEAD HEAD HEAD HEAD HEAD HEAD HEAD HEAD OTH REL REL REL TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH