The step of removing portions of the sacrificial layer removes {HEAD ~ portions} of the sacrificial layer that are not covered by {TAIL ~ the first capping structure} to define an intermediate structure 
The step of removing portions of the sacrificial layer removes { HEAD ~ portions } of the sacrificial layer that are not covered by { TAIL ~ the first capping structure } to define an intermediate structure
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD OTH OTH OTH OTH OTH REL REL REL REL TAIL TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH