The step of recessing the sidewalls recesses sidewalls of the intermediate structure relative to {TAIL ~ edge regions} of the first capping structure to form a sacrificial structure having recessed {HEAD ~ sidewalls} 
The step of recessing the sidewalls recesses sidewalls of the intermediate structure relative to { TAIL ~ edge regions } of the first capping structure to form a sacrificial structure having recessed { HEAD ~ sidewalls }
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD