{HEAD ~ These low K materials}, LKD, are prepared by {TAIL ~ photon assisted and plasma enhanced transport polymerization} or chemical vapor deposition of some selected siloxanes and F containing aromatic compounds 
{ HEAD ~ These low K materials } , LKD , are prepared by { TAIL ~ photon assisted and plasma enhanced transport polymerization } or chemical vapor deposition of some selected siloxanes and F containing aromatic compounds
HEAD HEAD HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH OTH REL REL REL TAIL TAIL TAIL TAIL TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH