Thereafter, heat treatment of high temperature and {HEAD ~ short time} by {TAIL ~ the RTA process} is applied to thereby form diffused layers 410, 411 of the source and drain regions 
Thereafter , heat treatment of high temperature and { HEAD ~ short time } by { TAIL ~ the RTA process } is applied to thereby form diffused layers 410 , 411 of the source and drain regions
OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD REL TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH