g) forming a patterned metal layer over {HEAD ~ an upper surface} of {TAIL ~ said one or more upper solid insulation layers} 
g ) forming a patterned metal layer over { HEAD ~ an upper surface } of { TAIL ~ said one or more upper solid insulation layers }
OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD REL TAIL TAIL TAIL TAIL TAIL TAIL TAIL TAIL TAIL TAIL TAIL TAIL