In accordance with the invention, {HEAD ~ a method} of forming a compound film includes the steps of preparing a source material, depositing the source material on {TAIL ~ a base} to form a precursor film, and heating the precursor film in a suitable atmosphere to form a film 
In accordance with the invention , { HEAD ~ a method } of forming a compound film includes the steps of preparing a source material , depositing the source material on { TAIL ~ a base } to form a precursor film , and heating the precursor film in a suitable atmosphere to form a film
OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH