Next {HEAD ~ an oxide layer} is deposited and is followed by {TAIL ~ deposition} of HSG poly 
Next { HEAD ~ an oxide layer } is deposited and is followed by { TAIL ~ deposition } of HSG poly
OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH OTH REL REL REL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH