A processing fixture and method of fabricating micromechanical devices, such as digital micromirror devices, that allows {HEAD ~ fragile structures} on wafer 22 to be protected from {TAIL ~ debris} during the saw operation and subsequent cleaning operations 
A processing fixture and method of fabricating micromechanical devices , such as digital micromirror devices , that allows { HEAD ~ fragile structures } on wafer 22 to be protected from { TAIL ~ debris } during the saw operation and subsequent cleaning operations
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH OTH REL REL REL REL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH