A position of an end part of the anti reflection layer inside the via hole may be lower than a position of an end part of {HEAD ~ the first electrode} extending from {TAIL ~ the first surface} to the inside of the via hole 
A position of an end part of the anti reflection layer inside the via hole may be lower than a position of an end part of { HEAD ~ the first electrode } extending from { TAIL ~ the first surface } to the inside of the via hole
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD REL REL TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH