{HEAD ~ A transport space} for transporting {TAIL ~ a substrate} without contamination of the surface of the substrate retained therein, which comprises: 
{ HEAD ~ A transport space } for transporting { TAIL ~ a substrate } without contamination of the surface of the substrate retained therein , which comprises :
HEAD HEAD HEAD HEAD HEAD HEAD HEAD REL REL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH