{TAIL ~ The substrate boat} 13, wherein each of the plurality of substrate supports has {HEAD ~ a plurality} of openings along a perimeter configured to accommodate the substrate holder 
{ TAIL ~ The substrate boat } 13 , wherein each of the plurality of substrate supports has { HEAD ~ a plurality } of openings along a perimeter configured to accommodate the substrate holder
TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH