{TAIL ~ The method} 13 wherein the precursor comprises silicon and {HEAD ~ oxygen}, and wherein the desired material is silicon dioxide 
{ TAIL ~ The method } 13 wherein the precursor comprises silicon and { HEAD ~ oxygen } , and wherein the desired material is silicon dioxide
TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD OTH OTH OTH OTH OTH OTH OTH OTH OTH