A 3D nucleation GaN layer is grown on {HEAD ~ the epitaxial nitride layer} by {TAIL ~ HVPE} under a substantially 3D growth mode 
A 3D nucleation GaN layer is grown on { HEAD ~ the epitaxial nitride layer } by { TAIL ~ HVPE } under a substantially 3D growth mode
OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD HEAD REL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH