The inspection area of the wafer is limited by the size of the e beam diameter and the detected X rays are limited by the number of X rays emitted from {HEAD ~ the excited volume} of {TAIL ~ sample}  
The inspection area of the wafer is limited by the size of the e beam diameter and the detected X rays are limited by the number of X rays emitted from { HEAD ~ the excited volume } of { TAIL ~ sample }
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD REL TAIL TAIL TAIL TAIL TAIL OTH