In {HEAD ~ the method} of manufacturing a Si film by using a Si solution process according to example embodiments, {TAIL ~ the cyclohexasilane} may be dissolved in, for example, a hydrocarbon based solvent 
In { HEAD ~ the method } of manufacturing a Si film by using a Si solution process according to example embodiments , { TAIL ~ the cyclohexasilane } may be dissolved in , for example , a hydrocarbon based solvent
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