A micro gyroscope determine three dimensional rotational movements is mounted on a substrate on which {HEAD ~ a plurality} of {TAIL ~ masses} tangentially oscillate about the z axis perpendicular to the substrate 
A micro gyroscope determine three dimensional rotational movements is mounted on a substrate on which { HEAD ~ a plurality } of { TAIL ~ masses } tangentially oscillate about the z axis perpendicular to the substrate
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD REL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH