A method 1, wherein {HEAD ~ the ion density} is greater than 1012 cm−3 and the ion energy is between 10 eV and {TAIL ~ 15 eV} in said forming 
A method 1 , wherein { HEAD ~ the ion density } is greater than 1012 cm−3 and the ion energy is between 10 eV and { TAIL ~ 15 eV } in said forming
OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH