In this coating apparatus, a refrigerated roll of substrate is placed on {HEAD ~ a pay out reel} 72 in {TAIL ~ a vacuum system} 73 
In this coating apparatus , a refrigerated roll of substrate is placed on { HEAD ~ a pay out reel } 72 in { TAIL ~ a vacuum system } 73
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD HEAD OTH REL TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH