{HEAD ~ The low K dielectric materials} are prepared from {TAIL ~ PACVD} or TP of some selected siloxanes and F containing aromatic compounds 
{ HEAD ~ The low K dielectric materials } are prepared from { TAIL ~ PACVD } or TP of some selected siloxanes and F containing aromatic compounds
HEAD HEAD HEAD HEAD HEAD HEAD HEAD HEAD HEAD REL REL REL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH