By combining different single conditioning heads or a plurality of conditioning heads and adjusting the ejection tube settings in different conditioning sessions, conditioning and cleaning of a polishing pad and {HEAD ~ removal} therefrom of {TAIL ~ residual diamond particles} can be conducted sequentially without switching conditioners 
By combining different single conditioning heads or a plurality of conditioning heads and adjusting the ejection tube settings in different conditioning sessions , conditioning and cleaning of a polishing pad and { HEAD ~ removal } therefrom of { TAIL ~ residual diamond particles } can be conducted sequentially without switching conditioners
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD OTH REL TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH