Method of eliminating {TAIL ~ dislocations} and lowering {HEAD ~ lattice strain} for highly doped N+ substrates 
Method of eliminating { TAIL ~ dislocations } and lowering { HEAD ~ lattice strain } for highly doped N+ substrates
OTH OTH OTH TAIL TAIL TAIL TAIL TAIL OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH OTH OTH OTH