A sputtering target producing few particles, a backing plate or a sputtering apparatus, and {HEAD ~ a sputtering method} producing {TAIL ~ few particles} 
A sputtering target producing few particles , a backing plate or a sputtering apparatus , and { HEAD ~ a sputtering method } producing { TAIL ~ few particles }
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD REL TAIL TAIL TAIL TAIL TAIL TAIL