{HEAD ~ The concentrations} of {TAIL ~ predetermined components} of a chemical solution 5 present in a cleaning bath 1 are measured by a measurement unit 11 
{ HEAD ~ The concentrations } of { TAIL ~ predetermined components } of a chemical solution 5 present in a cleaning bath 1 are measured by a measurement unit 11
HEAD HEAD HEAD HEAD HEAD HEAD REL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH