In a nitride semiconductor single crystal wafer having a flat principal surface, {HEAD ~ the crystallographic plane orientation} of the principal surface of the nitride semiconductor single crystal wafer varies locally within {TAIL ~ a predetermined angular range} 
In a nitride semiconductor single crystal wafer having a flat principal surface , { HEAD ~ the crystallographic plane orientation } of the principal surface of the nitride semiconductor single crystal wafer varies locally within { TAIL ~ a predetermined angular range }
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH REL REL REL TAIL TAIL TAIL TAIL TAIL TAIL TAIL TAIL