depositing a thin cap layer on {HEAD ~ said diffusion source layer} to prevent {TAIL ~ the outdiffusion} of elemental constituents comprising said structure, 
depositing a thin cap layer on { HEAD ~ said diffusion source layer } to prevent { TAIL ~ the outdiffusion } of elemental constituents comprising said structure ,
OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD HEAD REL REL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH