The method 2, wherein the sixth masking process uses a diffraction mask defined into a transmission region, {HEAD ~ a semipermeable region} with {TAIL ~ slits}, and a blocking region 
The method 2 , wherein the sixth masking process uses a diffraction mask defined into a transmission region , { HEAD ~ a semipermeable region } with { TAIL ~ slits } , and a blocking region
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD REL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH