The prediction is based on {HEAD ~ the processing tool control parameters} of {TAIL ~ a substantially similar processing tool}, being used in a substantially similar fashion to the given situation, which has significant utilization history 
The prediction is based on { HEAD ~ the processing tool control parameters } of { TAIL ~ a substantially similar processing tool } , being used in a substantially similar fashion to the given situation , which has significant utilization history
OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD HEAD HEAD REL TAIL TAIL TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH