A sputtering target producing few particles, {HEAD ~ a backing plate} or a sputtering apparatus, and a sputtering method producing {TAIL ~ few particles} 
A sputtering target producing few particles , { HEAD ~ a backing plate } or a sputtering apparatus , and a sputtering method producing { TAIL ~ few particles }
OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH TAIL TAIL TAIL TAIL TAIL TAIL