This improves the efficiency and {TAIL ~ economy} of the steam supply for {HEAD ~ the process chamber} 38 
This improves the efficiency and { TAIL ~ economy } of the steam supply for { HEAD ~ the process chamber } 38
OTH OTH OTH OTH OTH TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD OTH