The present invention has been made to solve the above problems, and it is an object of the present invention to provide a substrate transferring apparatus appropriate for {HEAD ~ efficient transfer} of {TAIL ~ a large area substrate} 
The present invention has been made to solve the above problems , and it is an object of the present invention to provide a substrate transferring apparatus appropriate for { HEAD ~ efficient transfer } of { TAIL ~ a large area substrate }
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD REL TAIL TAIL TAIL TAIL TAIL TAIL TAIL TAIL