As shown in FIG 1, {HEAD ~ an inductively coupled RF ion beam source} 10 typically includes {TAIL ~ a plasma discharge vessel} 11 having walls 22 which may be made of quartz 
As shown in FIG 1 , { HEAD ~ an inductively coupled RF ion beam source } 10 typically includes { TAIL ~ a plasma discharge vessel } 11 having walls 22 which may be made of quartz
OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD HEAD HEAD HEAD HEAD OTH REL REL TAIL TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH