At the transfer position 12, a side buffer is provided on a side of {HEAD ~ a travel rail} at a load port near the ground or in {TAIL ~ the overhead space} 
At the transfer position 12 , a side buffer is provided on a side of { HEAD ~ a travel rail } at a load port near the ground or in { TAIL ~ the overhead space }
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH OTH OTH OTH OTH OTH OTH OTH TAIL TAIL TAIL TAIL TAIL TAIL TAIL