The processing chamber and {HEAD ~ loadlock chambers} are connected to a vacuum system having two vacuum pumps for maintaining a vacuum in {TAIL ~ the chambers} 
The processing chamber and { HEAD ~ loadlock chambers } are connected to a vacuum system having two vacuum pumps for maintaining a vacuum in { TAIL ~ the chambers }
OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH TAIL TAIL TAIL TAIL TAIL TAIL