The device 17, wherein the downstream optical system comprises {TAIL ~ an illumination optical system} of {HEAD ~ an X ray exposure apparatus} 
The device 17 , wherein the downstream optical system comprises { TAIL ~ an illumination optical system } of { HEAD ~ an X ray exposure apparatus }
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH TAIL TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD HEAD HEAD