Temperature sensors, such as {TAIL ~ pyrometers}, that do not contact {HEAD ~ the wafers} being preheated, measure temperature for control of the heating of the lamps 
Temperature sensors , such as { TAIL ~ pyrometers } , that do not contact { HEAD ~ the wafers } being preheated , measure temperature for control of the heating of the lamps
OTH OTH OTH OTH OTH TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH