A supply 94 of deposition and carrier gases is in {HEAD ~ fluid communication} with the gas distribution assembly 46 via {TAIL ~ a mixing manifold} 96 
A supply 94 of deposition and carrier gases is in { HEAD ~ fluid communication } with the gas distribution assembly 46 via { TAIL ~ a mixing manifold } 96
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH OTH OTH OTH OTH REL TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH