The apparatus 4, further comprising an ion gauge installed along {HEAD ~ said processing line} between said processing chamber and {TAIL ~ a point} where said bypass line branches from said processing line 
The apparatus 4 , further comprising an ion gauge installed along { HEAD ~ said processing line } between said processing chamber and { TAIL ~ a point } where said bypass line branches from said processing line
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD REL OTH OTH OTH OTH TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH