The diffraction pattern is preferably formed on {HEAD ~ the quartz master} using {TAIL ~ VLSI photolithography} 
The diffraction pattern is preferably formed on { HEAD ~ the quartz master } using { TAIL ~ VLSI photolithography }
OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD OTH TAIL TAIL TAIL TAIL TAIL TAIL