The apparatus 4, further comprising {TAIL ~ an ion gauge} installed along {HEAD ~ said processing line} between said processing chamber and a point where said bypass line branches from said processing line 
The apparatus 4 , further comprising { TAIL ~ an ion gauge } installed along { HEAD ~ said processing line } between said processing chamber and a point where said bypass line branches from said processing line
OTH OTH OTH OTH OTH OTH TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH