{TAIL ~ The specific scanner} disclosed also includes an arrangement for monitoring the profile, position and orientation of the beam spot at {HEAD ~ a plurality} of different points along the scan path 
{ TAIL ~ The specific scanner } disclosed also includes an arrangement for monitoring the profile , position and orientation of the beam spot at { HEAD ~ a plurality } of different points along the scan path
TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH OTH OTH OTH OTH OTH