The low K dielectric materials are prepared from {HEAD ~ PACVD} or TP of {TAIL ~ some selected siloxanes} and F containing aromatic compounds 
The low K dielectric materials are prepared from { HEAD ~ PACVD } or TP of { TAIL ~ some selected siloxanes } and F containing aromatic compounds
OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD OTH OTH REL TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH