Thus, {HEAD ~ the overlap} of the deposition vapor from each electrode assembly 52 contributes to {TAIL ~ the uniformity} of the coating 
Thus , { HEAD ~ the overlap } of the deposition vapor from each electrode assembly 52 contributes to { TAIL ~ the uniformity } of the coating
OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH OTH OTH OTH OTH OTH OTH OTH REL REL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH