{HEAD ~ A method} 4, further comprising {TAIL ~ the step} of washing the entire substrate with a solution containing fluoric acid, while carrying out said leveling by chemical and mechanical polishing  
{ HEAD ~ A method } 4 , further comprising { TAIL ~ the step } of washing the entire substrate with a solution containing fluoric acid , while carrying out said leveling by chemical and mechanical polishing
HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH OTH REL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH