The method 13 wherein {HEAD ~ the precursor} comprises silicon and {TAIL ~ oxygen}, and wherein the desired material is silicon dioxide 
The method 13 wherein { HEAD ~ the precursor } comprises silicon and { TAIL ~ oxygen } , and wherein the desired material is silicon dioxide
OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD REL OTH OTH TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH