{TAIL ~ A semiconductor sensor,11, the relief holes} being provided at respective corners of {HEAD ~ the membrane} 
{ TAIL ~ A semiconductor sensor,11 , the relief holes } being provided at respective corners of { HEAD ~ the membrane }
TAIL TAIL TAIL TAIL TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD