In this manner, a crystalline silicon film having {HEAD ~ a necessary degree} of {TAIL ~ crystallinity} in a selective manner can be obtained 
In this manner , a crystalline silicon film having { HEAD ~ a necessary degree } of { TAIL ~ crystallinity } in a selective manner can be obtained
OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD REL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH