It is the second object of the present invention to provide a film forming apparatus capable of forming {HEAD ~ solution films} having {TAIL ~ different film thicknesses} by adjusting the viscosity of a single processing solution 
It is the second object of the present invention to provide a film forming apparatus capable of forming { HEAD ~ solution films } having { TAIL ~ different film thicknesses } by adjusting the viscosity of a single processing solution
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD REL TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH