High purity polysilicon granules are prepared by depositing {HEAD ~ reaction gas} on {TAIL ~ silicon granules} in a fluidized bed reactor having: 
High purity polysilicon granules are prepared by depositing { HEAD ~ reaction gas } on { TAIL ~ silicon granules } in a fluidized bed reactor having :
OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD REL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH