The method 2, wherein the sixth masking process uses {HEAD ~ a diffraction mask} defined into a transmission region, a semipermeable region with slits, and {TAIL ~ a blocking region} 
The method 2 , wherein the sixth masking process uses { HEAD ~ a diffraction mask } defined into a transmission region , a semipermeable region with slits , and { TAIL ~ a blocking region }
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD REL REL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH TAIL TAIL TAIL TAIL TAIL TAIL TAIL