{HEAD ~ Containers} 51, 52, and 53 of {TAIL ~ nitrogen}, phosphine , and silane , respectively, are coupled to tube 37 via pipe 39 under the control of flow controllers 54, 55, and 56, respectively 
{ HEAD ~ Containers } 51 , 52 , and 53 of { TAIL ~ nitrogen } , phosphine , and silane , respectively , are coupled to tube 37 via pipe 39 under the control of flow controllers 54 , 55 , and 56 , respectively
HEAD HEAD HEAD HEAD HEAD OTH OTH OTH OTH OTH OTH REL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH