Subsequently, {HEAD ~ the substrate} is heated to about 450 ° C. and the coating film is irradiated with, e.g., {TAIL ~ ultraviolet radiation} having a wavelength of 172 nm 
Subsequently , { HEAD ~ the substrate } is heated to about 450 ° C. and the coating film is irradiated with , e.g. , { TAIL ~ ultraviolet radiation } having a wavelength of 172 nm
OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH