Subsequently, a first annealing process is performed, and {TAIL ~ a process temperature} of {HEAD ~ the first annealing process} is substantially smaller than the crystalline temperature 
Subsequently , a first annealing process is performed , and { TAIL ~ a process temperature } of { HEAD ~ the first annealing process } is substantially smaller than the crystalline temperature
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH OTH OTH OTH OTH OTH