In some embodiments the top of the processing chamber is removable allowing {HEAD ~ users} to remove either pedestals or {TAIL ~ heater assemblies} 
In some embodiments the top of the processing chamber is removable allowing { HEAD ~ users } to remove either pedestals or { TAIL ~ heater assemblies }
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD REL REL OTH OTH OTH TAIL TAIL TAIL TAIL TAIL TAIL