Also, it is possible to raise or lower the works W appropriately in each process chamber in accordance with {HEAD ~ a height} required in {TAIL ~ the specific process} to be performed 
Also , it is possible to raise or lower the works W appropriately in each process chamber in accordance with { HEAD ~ a height } required in { TAIL ~ the specific process } to be performed
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD REL REL TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH