{HEAD ~ This invention} also relates to {TAIL ~ a pattern inspection apparatus} which uses the image correction technique to inspect a pattern image for defects 
{ HEAD ~ This invention } also relates to { TAIL ~ a pattern inspection apparatus } which uses the image correction technique to inspect a pattern image for defects
HEAD HEAD HEAD HEAD HEAD HEAD OTH REL REL TAIL TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH