The step of recessing the sidewalls recesses {HEAD ~ sidewalls} of the intermediate structure relative to edge regions of the first capping structure to form a sacrificial structure having recessed {TAIL ~ sidewalls} 
The step of recessing the sidewalls recesses { HEAD ~ sidewalls } of the intermediate structure relative to edge regions of the first capping structure to form a sacrificial structure having recessed { TAIL ~ sidewalls }
OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH TAIL TAIL TAIL TAIL TAIL