{HEAD ~ The method} 10, wherein, in step , {TAIL ~ the average thickness} of the Ta layer is set to about 0.1 Å or more and about 0.3 Å or less 
{ HEAD ~ The method } 10 , wherein , in step , { TAIL ~ the average thickness } of the Ta layer is set to about 0.1 Å or more and about 0.3 Å or less
HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH REL OTH OTH OTH OTH TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH