By way of example, {HEAD ~ this polishing step} may be accomplished by {TAIL ~ means} of chemical mechanical polishing 
By way of example , { HEAD ~ this polishing step } may be accomplished by { TAIL ~ means } of chemical mechanical polishing
OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH REL REL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH