A method in {HEAD ~ accordance} 10 wherein said wordlines are formed of polysilicon deposited by {TAIL ~ chemical vapor deposition} followed by doping 
A method in { HEAD ~ accordance } 10 wherein said wordlines are formed of polysilicon deposited by { TAIL ~ chemical vapor deposition } followed by doping
OTH OTH OTH HEAD HEAD HEAD HEAD HEAD OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH