{HEAD ~ second source/drain regions} of {TAIL ~ the first conductivity type} having shallower depth than those of said first source/drain regions, said second source/drain regions being formed below said first silicate glass layer 
{ HEAD ~ second source / drain regions } of { TAIL ~ the first conductivity type } having shallower depth than those of said first source / drain regions , said second source / drain regions being formed below said first silicate glass layer
HEAD HEAD HEAD HEAD HEAD HEAD HEAD HEAD HEAD REL TAIL TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH