After annealing {HEAD ~ the concentration} of boron, B, {TAIL ~ dopant} in the regions 64 was from about 1 E 17 atoms/cm3 to about 1 E 18 atoms/cm3 
After annealing { HEAD ~ the concentration } of boron , B , { TAIL ~ dopant } in the regions 64 was from about 1 E 17 atoms / cm3 to about 1 E 18 atoms / cm3
OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD REL OTH OTH OTH OTH TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH