The present invention is directed to providing {HEAD ~ a method} and system to measure {TAIL ~ characteristics} of a film disposed on a substrate 
The present invention is directed to providing { HEAD ~ a method } and system to measure { TAIL ~ characteristics } of a film disposed on a substrate
OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH REL REL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH