the preprocessing module includes an elevator and {HEAD ~ an elevator control} capable of cooperating with {TAIL ~ the operation} of the transport mechanism to position the rack to receive batches of wafers of varying numbers of wafers without empty positions therebetween 
the preprocessing module includes an elevator and { HEAD ~ an elevator control } capable of cooperating with { TAIL ~ the operation } of the transport mechanism to position the rack to receive batches of wafers of varying numbers of wafers without empty positions therebetween
OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD REL REL REL REL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH