In particular the present invention relates to a flys eye integrator suitable for {HEAD ~ use} in a lithographic apparatus or {TAIL ~ an illuminator} for a lithographic apparatus 
In particular the present invention relates to a flys eye integrator suitable for { HEAD ~ use } in a lithographic apparatus or { TAIL ~ an illuminator } for a lithographic apparatus
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD OTH OTH OTH OTH OTH TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH