A material layer may be filled into the holes and {HEAD ~ a part} of {TAIL ~ the oxide layer} is removed to form an imprinting template having a plurality of pillar shaped protrusions 
A material layer may be filled into the holes and { HEAD ~ a part } of { TAIL ~ the oxide layer } is removed to form an imprinting template having a plurality of pillar shaped protrusions
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD REL TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH