The process consists of {HEAD ~ a step} of placing {TAIL ~ a plurality} of wafers in a shrouded quartz boat or wafer carrier having a plurality of slots cut in the walls thereof to admit reactant gases to the vicinity of the wafers 
The process consists of { HEAD ~ a step } of placing { TAIL ~ a plurality } of wafers in a shrouded quartz boat or wafer carrier having a plurality of slots cut in the walls thereof to admit reactant gases to the vicinity of the wafers
OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD REL REL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH