{HEAD ~ The intermediate layer} is mainly composed of Ru, Si, {TAIL ~ Ge} or carbon, or is a mixed layer including Ru, Si, or Ge mixed with at least one of carbon, nitrogen or oxygen, with a composition gradient across its thickness 
{ HEAD ~ The intermediate layer } is mainly composed of Ru , Si , { TAIL ~ Ge } or carbon , or is a mixed layer including Ru , Si , or Ge mixed with at least one of carbon , nitrogen or oxygen , with a composition gradient across its thickness
HEAD HEAD HEAD HEAD HEAD HEAD HEAD REL REL REL REL OTH OTH OTH OTH TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH