If {HEAD ~ exposure} of {TAIL ~ all} of the pattern portions of the die are successfully completed, then processing is terminated 
If { HEAD ~ exposure } of { TAIL ~ all } of the pattern portions of the die are successfully completed , then processing is terminated
OTH HEAD HEAD HEAD HEAD HEAD REL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH