The interconnection line has a coplanar waveguide structure and is electrically to {HEAD ~ the opto electronic device} to output {TAIL ~ signals} from the opto electronic device 
The interconnection line has a coplanar waveguide structure and is electrically to { HEAD ~ the opto electronic device } to output { TAIL ~ signals } from the opto electronic device
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD HEAD REL REL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH