The invention is directed to {TAIL ~ an apparatus} for generating {HEAD ~ soft x radiation}, particularly EUV radiation, by laser induced plasma 
The invention is directed to { TAIL ~ an apparatus } for generating { HEAD ~ soft x radiation } , particularly EUV radiation , by laser induced plasma
OTH OTH OTH OTH OTH TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH OTH OTH OTH OTH OTH OTH OTH