This invention relates to {HEAD ~ a scanning micro element} for {TAIL ~ an optical system}, characterized in that it comprises: 
This invention relates to { HEAD ~ a scanning micro element } for { TAIL ~ an optical system } , characterized in that it comprises :
OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD HEAD REL TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH