{HEAD ~ A processing station} adaptable to standard cluster tools has {TAIL ~ a vertically translatable pedestal} having an upper wafer support surface including a heater plate adapted to be plugged into a unique feedthrough in the pedestal 
{ HEAD ~ A processing station } adaptable to standard cluster tools has { TAIL ~ a vertically translatable pedestal } having an upper wafer support surface including a heater plate adapted to be plugged into a unique feedthrough in the pedestal
HEAD HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH OTH OTH OTH REL TAIL TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH