In one aspect, the invention pertains to {HEAD ~ a method} of forming {TAIL ~ a layer} of material on a substrate 
In one aspect , the invention pertains to { HEAD ~ a method } of forming { TAIL ~ a layer } of material on a substrate
OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD REL REL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH