The microvalves can be formed in semiconductor materials by simplified methods utilizing {HEAD ~ a reduced number} of {TAIL ~ masking levels} 
The microvalves can be formed in semiconductor materials by simplified methods utilizing { HEAD ~ a reduced number } of { TAIL ~ masking levels }
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD REL TAIL TAIL TAIL TAIL TAIL TAIL