The inspection area of the wafer is limited by the size of {HEAD ~ the e beam diameter} and the detected X rays are limited by {TAIL ~ the number} of X rays emitted from the excited volume of sample  
The inspection area of the wafer is limited by the size of { HEAD ~ the e beam diameter } and the detected X rays are limited by { TAIL ~ the number } of X rays emitted from the excited volume of sample
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH OTH OTH OTH OTH OTH OTH TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH