In the preoxidation cleaning step, a solution containing {TAIL ~ NH4F}, HF, and {HEAD ~ H2O}, a standard solution containing NH4OH, H2O2, and H2O, and HF are used 
In the preoxidation cleaning step , a solution containing { TAIL ~ NH4F } , HF , and { HEAD ~ H2O } , a standard solution containing NH4OH , H2O2 , and H2O , and HF are used
OTH OTH OTH OTH OTH OTH OTH OTH OTH TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH