Consequently, the occurrence of non correlated sequential down {HEAD ~ times} of various process chambers may be significantly reduced, thereby enhancing throughput and {TAIL ~ availability} of complex cluster tools 
Consequently , the occurrence of non correlated sequential down { HEAD ~ times } of various process chambers may be significantly reduced , thereby enhancing throughput and { TAIL ~ availability } of complex cluster tools
OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH