{HEAD ~ The inspection area} of the wafer is limited by {TAIL ~ the size} of the e beam diameter and the detected X rays are limited by the number of X rays emitted from the excited volume of sample  
{ HEAD ~ The inspection area } of the wafer is limited by { TAIL ~ the size } of the e beam diameter and the detected X rays are limited by the number of X rays emitted from the excited volume of sample
HEAD HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH OTH REL REL REL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH