The present invention relates to a lithographic apparatus and {HEAD ~ a method} for manufacturing {TAIL ~ a device} 
The present invention relates to a lithographic apparatus and { HEAD ~ a method } for manufacturing { TAIL ~ a device }
OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD REL REL TAIL TAIL TAIL TAIL TAIL TAIL