As shown in FIG 1, an inductively coupled RF ion beam source 10 typically includes {HEAD ~ a plasma discharge vessel} 11 having walls 22 which may be made of {TAIL ~ quartz} 
As shown in FIG 1 , an inductively coupled RF ion beam source 10 typically includes { HEAD ~ a plasma discharge vessel } 11 having walls 22 which may be made of { TAIL ~ quartz }
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH OTH OTH OTH OTH OTH OTH OTH TAIL TAIL TAIL TAIL TAIL