In particular the present invention relates to {HEAD ~ a flys eye integrator} suitable for use in a lithographic apparatus or an illuminator for {TAIL ~ a lithographic apparatus} 
In particular the present invention relates to { HEAD ~ a flys eye integrator } suitable for use in a lithographic apparatus or an illuminator for { TAIL ~ a lithographic apparatus }
OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH TAIL TAIL TAIL TAIL TAIL TAIL TAIL