After annealing the concentration of boron, {HEAD ~ B}, dopant in {TAIL ~ the regions} 64 was from about 1 E 17 atoms/cm3 to about 1 E 18 atoms/cm3 
After annealing the concentration of boron , { HEAD ~ B } , dopant in { TAIL ~ the regions } 64 was from about 1 E 17 atoms / cm3 to about 1 E 18 atoms / cm3
OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD OTH OTH OTH TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH