A substrate heating apparatus includes a ceramic base having a concave heating surface on which a substrate is placed, and {HEAD ~ a resistance heating element} buried in {TAIL ~ the ceramic base} 
A substrate heating apparatus includes a ceramic base having a concave heating surface on which a substrate is placed , and { HEAD ~ a resistance heating element } buried in { TAIL ~ the ceramic base }
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD HEAD REL REL TAIL TAIL TAIL TAIL TAIL TAIL TAIL