Thus, deflection resulting in {HEAD ~ the central portion} of {TAIL ~ a large sized substrate} can be controlled 
Thus , deflection resulting in { HEAD ~ the central portion } of { TAIL ~ a large sized substrate } can be controlled
OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD REL TAIL TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH