As a result, {HEAD ~ roughness} of {TAIL ~ the resist} after processing the anti reflection coating can be suppressed, and pitting and striations after processing a next film to be processed, that is an insulating film, can be prevented 
As a result , { HEAD ~ roughness } of { TAIL ~ the resist } after processing the anti reflection coating can be suppressed , and pitting and striations after processing a next film to be processed , that is an insulating film , can be prevented
OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD REL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH