If {HEAD ~ the stage velocity} is greater than {TAIL ~ the specified value}, the stage velocity is decreased to avoid exceeding a velocity limit at which continuous exposure is impossible 
If { HEAD ~ the stage velocity } is greater than { TAIL ~ the specified value } , the stage velocity is decreased to avoid exceeding a velocity limit at which continuous exposure is impossible
OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD REL REL REL TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH