The method for producing {HEAD ~ a resist pattern} of the present invention includes {TAIL ~ steps} of: 
The method for producing { HEAD ~ a resist pattern } of the present invention includes { TAIL ~ steps } of :
OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH OTH OTH OTH TAIL TAIL TAIL TAIL TAIL OTH OTH