The method includes the actual ion beam processing step combined with {HEAD ~ the thermal and chemical conditioning} of the ion source and {TAIL ~ a special cleaning step} 
The method includes the actual ion beam processing step combined with { HEAD ~ the thermal and chemical conditioning } of the ion source and { TAIL ~ a special cleaning step }
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD HEAD HEAD HEAD OTH OTH OTH OTH OTH TAIL TAIL TAIL TAIL TAIL TAIL TAIL TAIL