The low K dielectric materials are prepared from {TAIL ~ PACVD} or TP of some selected siloxanes and {HEAD ~ F} containing aromatic compounds 
The low K dielectric materials are prepared from { TAIL ~ PACVD } or TP of some selected siloxanes and { HEAD ~ F } containing aromatic compounds
OTH OTH OTH OTH OTH OTH OTH OTH TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD OTH OTH OTH