{HEAD ~ An arc} spraying {TAIL ~ coating film} and a plasma spraying coating film over the former are formed on the sputtering target, a backing plate, or another surface in the sputtering apparatus, where an unwanted film might be formed 
{ HEAD ~ An arc } spraying { TAIL ~ coating film } and a plasma spraying coating film over the former are formed on the sputtering target , a backing plate , or another surface in the sputtering apparatus , where an unwanted film might be formed
HEAD HEAD HEAD HEAD HEAD HEAD REL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH