The invention relates generally to the manufacture of semiconductor devices, and more specifically to {HEAD ~ the method} for defining {TAIL ~ precise, narrow polysilicon features} 
The invention relates generally to the manufacture of semiconductor devices , and more specifically to { HEAD ~ the method } for defining { TAIL ~ precise , narrow polysilicon features }
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD REL REL TAIL TAIL TAIL TAIL TAIL TAIL TAIL TAIL TAIL