Consequently, the yield of accepted products of reflection masks as {HEAD ~ optical elements} of {TAIL ~ the present invention} is raised 
Consequently , the yield of accepted products of reflection masks as { HEAD ~ optical elements } of { TAIL ~ the present invention } is raised
OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH OTH HEAD HEAD HEAD HEAD HEAD HEAD REL TAIL TAIL TAIL TAIL TAIL TAIL TAIL OTH OTH