{HEAD ~ A method} 1, wherein the ion density is greater than 1012 cm−3 and {TAIL ~ the ion energy} is between 10 eV and 15 eV in said forming 
{ HEAD ~ A method } 1 , wherein the ion density is greater than 1012 cm−3 and { TAIL ~ the ion energy } is between 10 eV and 15 eV in said forming
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