Zirconium nitrate of chemical suppliers. It is used as a source of zirconium for other salts, as an analytical standard, or as a preservative. Zirconium nitrate and nitronium pentanitratozirconate can be used as chemical vapour deposition precursors as they are volatile, and decompose above 100 °C to form zirconia. At 95°C zirconium nitrate sublimes with a pressure of 0.2 mm of Hg and can be deposited as zirconium dioxide on silicon at 285°C. It has the advantage in that it is a single source, meaning it does not have to be mixed with other materials like oxygen, and decomposes at a relatively
Zirconium nitride Zirconium nitride Zirconium nitride () is an inorganic compound used in a variety of ways due to its properties. ZrN grown by physical vapor deposition (PVD) is a light gold color similar to elemental gold. ZrN has a room-temperature electrical resistivity of 12.0 µΩ·cm, a temperature coefficient of resistivity of 5.6·10 Ω·cm/K, a superconducting transition temperature of 10.4 K, and a relaxed lattice parameter of 0.4575 nm. The hardness of single-crystal ZrN is 22.7±1.7 GPa and elastic modulus is 450 GPa. Zirconium nitride is a hard ceramic material similar to titanium nitride and is a cement-like refractory material. Thus it