Zirconium nitrate of chemical suppliers. It is used as a source of zirconium for other salts, as an analytical standard, or as a preservative. Zirconium nitrate and nitronium pentanitratozirconate can be used as chemical vapour deposition precursors as they are volatile, and decompose above 100 °C to form zirconia. At 95°C zirconium nitrate sublimes with a pressure of 0.2 mm of Hg and can be deposited as zirconium dioxide on silicon at 285°C. It has the advantage in that it is a single source, meaning it does not have to be mixed with other materials like oxygen, and decomposes at a relatively
Zirconium Zirconium Zirconium is a chemical element with symbol Zr and atomic number 40. The name "zirconium" is taken from the name of the mineral zircon (the word is related to Persian "zargun" (zircon;"zar-gun", "gold-like" or "as gold")), the most important source of zirconium. It is a lustrous, grey-white, strong transition metal that closely resembles hafnium and, to a lesser extent, titanium. Zirconium is mainly used as a refractory and opacifier, although small amounts are used as an alloying agent for its strong resistance to corrosion. Zirconium forms a variety of inorganic and organometallic compounds such as zirconium dioxide and zirconocene