PROCESS ENGINEERING INTERN Profile PhD cleanroom expert looking opportunity work full- time module/process engineer Lam Research Experience working research cleanroom facility semiconductor fab. Hands experience fabrication methods plasma etching, photolithography, wet etch processing, PVD Well understanding Statistical Process Control (SPC) Design Experiments (DOE) Professional Experience Process Engineering Intern June 2014 August 2014 Company Name － City State Worked short-loop study qualifying new metal etch platform Performed edge exclusion standardization measurement tools Etch/CMP/Wet Etch area Wrote "Klarity ACE" recipes provide scheduled/automated reports inline parameters capability, tool-tool (chamber-chamber) matching, PT-Inline cross-correlations plasma etch module engineers Generated internal documentation sampling plans Etch/CMP/ Wet Etch area Academic Cleanroom Experience Washington Nanofabrication Facility, UNIVERSITY OF WASHINGTON. Research Assistant January 2008 Current City State Project: "A NEW INTEGRATED ENDOSCOPE SYSTEM" Developed full MEMS fabrication process mechanical resonance based scanning device. Integrated Laser fiber optics enable 2D micro-displays scanning system Setup benchtop spin coater (SCS 6800) sputter (Denton Desk V) lab. Graduate Researcher January 2003 January 2005 Company Name － City Education Ph. D Mechanical Engineering April, 2015 University Washington － City State GPA: GPA: 3.52 4.0 Mechanical Engineering GPA: 3.52 4.0 Dissertation: "Design Fabrication Mechanical Resonance Based Scanning Endoscope" M. S Bio-Industrial Mechatronics Engineering 2006 National Taiwan University － City Taiwan GPA: GPA: 3.9 4.0 Bio-Industrial Mechatronics Engineering GPA: 3.9 4.0 Thesis: "Integration Fabrication 2D Phononic Crystals Surface Acoustic Wave Micro Device" B. S Mechanical Engineering 2003 National Central University Taiwan Mechanical Engineering Affiliations National Society Professional Engineers (NSPE) Accomplishments Design, Experimental, Analysis Investigation Novel Micromachined Phononic Crystals- Development High-Frequency Surface Acoustic Waveguides" Micro-fabricated MEMS phononic crystals, integrated surface acoustic wave (SAW) micro devices silicon wafers Related Class Projects Process Flow Device Mask Design foran N-MOS Transistor" EE527 "Solid-State Lab Techniques" final project Designed CAD layout completed fabrication flow n-MOS transistor Cross-Sectional In*uence FinFET Characteristics" EE539A "Semiconductor Devices" final project Discussed basic device physics FinFETs, compared FinFETs competing UTB-SOI technology Simulated cross-sectional influences characteristics FinFETs using SILVACO Atlas Experiment Study Internal Stress SU-8 Photoresist Cantilever Structure" ME561 "Thin Films" final project Calculate value residual stress SU-8 Photoresist due difference coefficient thermal expansion (CTE) mismatch film substrate Optimized process recipes (PEB temperature/duration) reduce photoresist cracking/delamination/buckling due residue stress Tool Proficiency Photolithography: mask writer (Heidelberg µPG 101), Aligner (Karl Suss MA6, ABM, EVG 620), Spin coater (SCS SCS 6800 series, Headway PWM32), HMDS oven (Yield Engineering Systems), wet bench Dry Etch: RIE (Trion Phantom RIE Advanced Vacuum Vision RIE), Deep RIE (STS Multiplex Oxford Instruments Plasmalab 100 ICP-380) PVD: Sputter (Kurt J. Lesker Lab 18, Denton Desk V), e-beam evaporator, thermal evaporator Metrology: SEM (FEI Sirion JEOL JSM-7400F), Optical profiler (Veeco Wyko NT Series), profilometer (KLA Tencor P-15 Alphasteps), nanospec (Nanometrics) Others: Wet process (Piranha, RCA Clean, HF/BOE), Cu platting, CMP, furnace (annealing/sintering/oxidation). Publications Gu, Kebin, Chi-June Lee, Chun-Wei Wu, Chih-Hsuan Chien, Wei-Chih Wang. "A 2D piezoelectric actuated scanning image acquisition." In SPIE Smart Structures Materials+ Nondestructive Evaluation Health Monitoring, pp. 86952F-86952F. International Society Optics Photonics, 2013. Wang, Wei-Chih, William Soetanto, Kebin Gu. "Fiberoptic microphone using polymeric cavity." In SPIE Smart Structures Materials+ Nondestructive Evaluation Health Monitoring, pp. 79842B-79842B. International Society Optics Photonics, 2011. Gu, Kebin, C-C. Lee, W. Cui, M. Wu, W-C. Wang. "Design fabrication mechanical resonance based scanning endoscope." In Solid-State Sensors, Actuators Microsystems Conference (TRANSDUCERS), 2011 16th International, pp. 1574-1577. IEEE, 2011. Gu, Kebin, C-L. Chang, J-C. Shieh, W-P. Shih. "Design fabrication 2d phononic crystals surface acoustic wave micro devices." In Micro Electro Mechanical Systems, 2006. MEMS 2006 Istanbul. 19th IEEE International Conference on, pp. 686-689. IEEE, 2006. Thesis: Design And Fabrication 2D Phononic Crystals Surface Acoustic Wave Micro Device Thesis: Design And Fabrication 2D Phononic Crystals Surface Acoustic Wave Micro Device Dissertation: Design Fabrication Mechanical Resonance Based Scanning Endoscope Dissertation: Design Fabrication Mechanical Resonance Based Scanning Endoscope Skills Academic, documentation, edge, fiber optics, Laser, Mechanical, Scanning