8576410a-a1b7-4a37-a8aa-5062e6d818b7
prompter
Please generate a JSON representation of the process gasses used for amorphous carbon deposition in PECVD, with the molecular formula as the key, the gas name included in the description, and a "dep rate" key indicating the most likely effect on the carbon deposition rate after increasing the proportion of the gas in a process (with values of "increase", "decrease", or "inconsequential"). Also include a number 1-10 indicating the strength of the belief in the effect described. The header should be "amorphous carbon PECVD".
203b471f-d67f-446a-88d5-445fab3526df
8576410a-a1b7-4a37-a8aa-5062e6d818b7
assistant
Here is the JSON representation you requested:

``` json:

{
  "amorphous carbon PECVD": {
    "CH4": {
      "description": "Methane gas",
      "dep rate": {
        "increase": 8
      }
    },
    "C2H2": {
      "description": "Acetylene gas",
      "dep rate": {
        "increase": 7
      }
    },
    "C2H4": {
      "description": "Ethylene gas",
      "dep rate": {
        "increase": 6
      }
    },
    "C3H8": {
      "description": "Propane gas",
      "dep rate": {
        "increase": 5
      }
    },
    "Ar": {
      "description": "Argon gas",
      "dep rate": {
        "decrease": 2
      }
    },
    "H2": {
      "description": "Hydrogen gas",
      "dep rate": {
        "increase": 7
      }
    },
    "N2": {
      "description": "Nitrogen gas",
      "dep rate": {
        "decrease": 4
      }
    },
    "O2": {
      "description": "Oxygen gas",
      "dep rate": {
        "decrease": 8
      }
    }
  }
}

```

Note that the "dep rate" values are subjective and based on general trends in the literature, and not necessarily indicative of specific conditions or materials. These values should be used as a rough guide only and should not replace actual experimentation and optimization of process conditions.

Here are some sources for more information:
https://www.osti.gov/servlets/purl/1573139
https://www.researchgate.net/publication/229348700_Amorphous_hydrogenated_carbon_films_deposited_by_PECVD_Influence_of_the_substrate_temperature_on_film_growth_and_microstructure