In 1602 after the death of Noriyori ARIMA, Toyouji ARIMA, the eldest legitimate son and also the ruler of Fukuchiyama Domain in Tango Province with 60,000 koku, became the successor and annexed Sanda Domain of 20,000 koku to Fukuchiyama Domain, making the total crop yield of Fukuchiyama Domain 80,000 koku.
1602年（慶長7年）有馬則頼が没すると丹波国福知山藩6万石を所領していた嫡男の有馬豊氏が家督を継ぎ、三田藩2万石を併合し福知山藩8万石の所領となった。