modules is too small for background subtraction to take place and separate SH or LH background observations do not exist for any of the galaxies in this sample. We therefore did not perform any background subtraction on any of the observations presented in this work. The overall calibration uncertainty for the fluxes we report in this paper is 25 to 30% for all mapping observations and 15% for staring observations.

Results
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 Line Fluxes and Spectral Line Fits 
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In Table 3 we list the line fluxes, statistical errors and upper limits for the SH and LH observations for the \[NeV\] 14.3$\mu$m and 24.3$\mu$m lines, as well as the 26$\mu$m \[OIV\] line. The apertures from which these fluxes were extracted are listed in Table 2. In all cases, detections were defined when the line flux was at least 3$\sigma$. We detected either the \[NeV\] 14.3$\mu$m or 24.3$\mu$m line in 7 out of the 32 galaxies, providing strong evidence for the presence of an AGN in these galaxies.. The \[OIV\] 26$\mu$m line (ionization potential = 55 eV) was detected in 12 out of the 32 galaxies. Although this line is generally strong in powerful AGN (e.g. Genzel et al. 1998, Sturm 