physics.ins-det astro-ph.IM
Jiamin Sun Shibo Shu Ye Chai Lin Zhu Lingmei Zhang Yongping Li Zhouhui Liu Zhengwei Li Yu Xu Daikang Yan Weijie Guo Yiwen Wang Congzhan Liu
Cryogenic microwave performance of silicon nitride and amorphous silicon deposited using low-temperature ICPCVD