physics.app-ph cond-mat.mtrl-sci physics.bio-ph
A Method for Fabricating CMOS Back-End-of-Line-Compatible Solid-State Nanopore Devices
Mohamed Yassine Bouhamidi Chunhui Dai Michel Stephan Joyeeta Nag Justin Kinney Lei Wan Matthew Waugh Kyle Briggs Jordan Katine Vincent Tabard-Cossa Daniel Bedau