physics.app-ph
Piezoresistive PtSe$_2$ pressure sensors with reliable high sensitivity and their integration into CMOS ASIC substrates
Sebastian Lukas Nico Rademacher Sofía Cruces Michael Gross Eva Desgué Stefan Heiserer Nikolas Dominik Maximilian Prechtl Oliver Hartwig Cormac Ó Coileáin Tanja Stimpel-Lindner Pierre Legagneux Arto Rantala Juha-Matti Saari Miika Soikkeli Georg S. Duesberg Max C. Lemme