physics.app-ph
High-yield large-scale suspended graphene membranes over closed cavities for sensor applications
Sebastian Lukas Ardeshir Esteki Nico Rademacher Vikas Jangra Michael Gross Zhenxing Wang Ha Duong Ngo Manuel Bäuscher Piotr Mackowiak Katrin Höppner Dominique Wehenkel Richard van Rijn Max C. Lemme