physics.ins-det astro-ph.IM
Cryogenic microwave performance of silicon nitride and amorphous silicon deposited using low-temperature ICPCVD
Jiamin Sun Shibo Shu Ye Chai Lin Zhu Lingmei Zhang Yongping Li Zhouhui Liu Zhengwei Li Yu Xu Daikang Yan Weijie Guo Yiwen Wang Congzhan Liu