이후, SNU를 이용하여 패턴의 두께및 넓이를 측정하고, 전과 후의 패턴의 두께 변화로 탄성회복률을 측정하였다.
Thereafter, the thickness and width of the pattern were measured using SNU, and the elastic recovery rate was measured by changing the thickness of the pattern before and after.