초음파 세척기를 이용한 습식세정 하였고, 12시간 저온건조기에서 온풍건조 시킨 후 증착공정을 진행하였다.
Wet cleaning was performed using an ultrasonic cleaner, and after drying with warm air in a low-temperature dryer for 12 hours, the vapor deposition process was performed.