후경화 후의 막두께 10 μm에 있어서의 최소가 되는 개구 홀의 구경을 구하여, 패턴의 형상을 평가하였다.
By measuring the diameter of the opening hole, which becomes the minimum in a film thickness of 10 micrometers after post-curing, the shape of a pattern was evaluated.