Typical parameters for a high-energy, Argon GCIB are acceleration voltage 30 kV, average cluster size 10,400 atoms, average cluster charge +3.2, average cluster energy 64 keV, average cluster velocity 6.5 km/s, with a total electric current of 200 µA or more. When an Argon cluster with these parameters strikes a surface, a shallow crater is formed with a diameter of approximately 20 nm and a depth of 10 nm. When imaged using atomic force microscope (AFM) the craters have an appearance much like craters on planetary bodies.
High-energy Argon GCIB parameters consist of an acceleration voltage of 30 kV, an average cluster size of 10,400 atoms, a charge of +3.2, an energy level of 64 keV, and a velocity of 6.5 km/s. Upon impact with a surface, this cluster generates a shallow crater with a diameter of about 20 nm and a depth of 10 nm. When observed through an atomic force microscope (AFM), these craters exhibit characteristics similar to those found on planetary surfaces.