Furthermore, as the pressure can be brought to a very low level, an ESEM will revert to typical SEM operation without the above disadvantages. Therefore, one may trade-off the ESEM characteristics with those of SEM by operating in a vacuum. A reconciliation of all these disadvantages and advantages can be attained by a properly designed and operated universal ESEM.
Furthermore, as the pressure can be significantly reduced, an ESEM will revert to typical SEM operation without these drawbacks. Therefore, one may trade-off the ESEM characteristics with those of SEM by operating in a vacuum. A resolution of all these disadvantages and advantages can be achieved through a well-designed and operated universal ESEM.