This allows excimer lasers to fire at high repetition rates. The other advantage is that this beam does not pass through a solid glass which distorts the beam, requiring smoothing once created. In 2013, the Electra laser was able to demonstrate over 90,000 shots in 1o hours using KRF gas.
Excimer lasers can fire at high repetition rates due to this feature. This beam does not pass through a solid glass, which would distort it and require smoothing after creation. In 2013, the Electra laser was able to demonstrate over 90,000 shots in 10 hours using KRF gas.