This Agreement shall remain in effect until the earliest to occur of (i) the Expiration Date, (ii) the Closing and (iii) any delivery of written notice by the Parent to the Stockholder of termination of this Agreement, and upon the occurrence of the earliest of such events this Agreement shall terminate and be of no further force; provided , however , that the provisions of this Section  6.1 , Section  6.2 and Sections 6.4 through 6.12 shall survive any termination of this Agreement. Nothing in this Section  6.1 and no termination of this Agreement shall relieve or otherwise limit any party of liability for willful breach of this Agreement.