the specification describes matched capacitor pairs that employ interconnect metal in an interdigitated form , and are made with an area efficient configuration . in addition , structural variations between capacitors in the capacitor pair are minimized to provide optimum matching . according to the invention , the capacitor pairs are interdigitated in a manner that ensures that the plates of each pair occupy common area on the substrate . structural anomalies due to process conditions are compensated in that a given anomaly affects both capacitors in the same way . two of the capacitor plates , one in each pair , are formed of comb structures , with the fingers of the combs interdigitated . the other plates are formed using one or more plates interleaved between the interdigitated plates .