the present invention provides radiation sensitive compositions and methods that comprise novel means for providing relief images of enhanced resolution . in one aspect the invention provides a method for controlling diffusion of photogenerated acid comprising adding a polar compound to a radiation sensitive composition and applying a layer of the composition to a substrate ; exposing the composition layer to activating radiation whereby a latent image is generated comprising a distribution of acid moieties complexed with the polar compound ; and treating the exposed composition layer to provide an activating amount of acid .