a deformable mirror device and manufacturing method therefor . the method includes the steps of forming an electrode layer on a substrate in a predetermined pattern , forming a thick film on the upper surfaces of the substrate and the electrode layer , forming a support plate on the upper surface of the thick film , and partially etching the thick film to form at least one through hole . the method further includes separating the support plate into single portions , forming a post on one side of the inner surface of the through hole , forming a reflecting plate on the upper surface of the support plate , and removing the thick film .