terahertz metamaterials comprise a periodic array of resonator elements disposed on a dielectric substrate or thin membrane , wherein the resonator elements have a structure that provides a tunable magnetic permeability or a tunable electric permittivity for incident electromagnetic radiation at a frequency greater than about 100 ghz and the periodic array has a lattice constant that is smaller than the wavelength of the incident electromagnetic radiation . microfabricated metamaterials exhibit lower losses and can be assembled into three - dimensional structures that enable full coupling of incident electromagnetic terahertz radiation in two or three orthogonal directions . furthermore , polarization sensitive and insensitive metamaterials at terahertz frequencies can enable new devices and applications .