a compact wafer carrier for storing spaced semiconductor wafers in parallel with each other , is provided for fabrication processes of a semiconductor device requiring a high particulate contamination control . the wafer carrier has an air cleaning device , including a secondary battery as a power source , a motor fan , and a particulate air filter , and a storing chamber directly connected to the air cleaning device for storing the wafers . the storing chamber has a first opening for receiving the filtered air flow , and a second opening for loading and unloading the wafers , both openings facing each other . as a result , the major part of the filtered air flows in a laminated stream passing along the surfaces of the wafers stored with a fairy high speed , serving to protect the wafers from the intrusion of the particles contained in the environmental air , and removing the particles originally adhered to the surfaces of the wafers .