a method of fabricating a suspended structure . first , a substrate including a photoresist layer hardened by heat is provided . subsequently , the hardened photoresist layer is etched so as to turn the photoresist layer into a predetermined edge profile . thereafter , a structure layer is formed on parts of the substrate and parts of the photoresist layer . next , a dry etching process is performed so as to remove the photoresist layer , and to turn the structure layer into a suspended structure .