a semiconductor processing device with bearing means for supporting a plate with one plate plane . the plate has a function region with evenness , a bearing region which surrounds the function region at least in sections , and an action region which is located outside the function region and outside the bearing region . the bearing means is made to support the plate in the bearing region and the action means is controllable such that by deformation of the function region the evenness can be adjusted and / or changed and / or influenced and / or re - set . the action means comprise at least one vacuum region which allows a deformation of the plate in the bearing region .