provided are a substrate floating apparatus , substrate transfer apparatus , and substrate transport apparatus that achieve energy savings , the saving of space , maintenance - free operation , low costs and an increase in controllability of airflow . the substrate floating apparatus according to the present invention floats a substrate above a placing surface by jetting air from a plurality of jetting ports , and includes : a plate having a surface that is the placing surface and including the plurality of jetting ports penetrating the plate in a thickness direction and spaced apart from one another at a given interval ; a plurality of air blowers that blow air toward the plurality of jetting ports from a rear side of the plate by vibrating a diaphragm ; and a controller that controls driving of the plurality of air blowers .