quantitative understanding of neural and biological activity at a sub - millimeter scale requires an integrated probe platform that combines biomarker sensors together with electrical stimulus / recording sites . optically addressed biomarker sensors within such an integrated probe platform allows remote interrogation from the activity being measured . monolithic or hybrid integrated silicon probe platforms would beneficially allow for accurate control of neural prosthetics , brain machine interfaces , etc as well as helping with complex brain diseases and disorders . according to the invention a silicon probe platform is provided employing ultra - thin silicon in conjunction with optical waveguides , optoelectronic interfaces , porous filter elements , and integrated cmos circuitry . such probes allowing simultaneously analysis of both neural electrical activities along with chemical activity derived from multiple biomolecular sensors with porous membrane filters . such porous silicon and polymer filters providing biomolecular filtering and optical filtering being compatible with post - processing wafers with integrated cmos electronics .