a peeling system includes : a carry - in / carry - out station that loads / unloads substrates to be processed , support substrates , or stacked substrates in which these are made to adhere ; a peeling process station that carries out prescribed processing on substrates to be processed , support substrates and stacked substrates ; and a transport station provided between the carry - in / carry - out station and the peeling process station . the peeling process station has a peeling device that peels the stacked substrates , a first washing apparatus that washes peeled substrates to be processed , and a second washing apparatus that washes the peeled support substrates . the pressure inside the transport station is a positive pressure in relation to the pressure inside the peeling device , the pressure inside the first washing apparatus , and the pressure inside the second washing apparatus . the pressure inside a transport apparatus is a positive pressure in relation to the pressure inside the peeling device and the pressure inside the first washing apparatus .