a method and system for preparing a light transmitting and electrically conductive oxide film . the method and system includes providing an atomic layer deposition system , providing a first precursor selected from the group of cyclopentadienyl indium , tetrakis tin and mixtures thereof , inputting to the deposition system the first precursor for reaction for a first selected time , providing a purge gas for a selected time , providing a second precursor comprised of an oxidizer , and optionally inputting a second precursor into the deposition system for reaction and alternating for a predetermined number of cycles each of the first precursor , the purge gas and the second precursor to produce the oxide film .