a chamber for transitioning a semiconductor substrate between modules operating at different pressures is provided . the chamber includes a base defining an outlet . the outlet permits removal of an atmosphere within the chamber to create a vacuum . a substrate support for supporting a semiconductor substrate within the chamber is included . a chamber top having an inlet is included . the inlet is configured to allow for the introduction of a gas into the chamber to displace moisture in a region defined above the substrate support . sidewalls extending from the base to the chamber top are included . the sidewalls include access ports for entry and exit of a semiconductor substrate from the chamber . a method for conditioning an environment above a region of a semiconductor substrate within a pressure varying interface is also provided .