a method for fabricating a quartz nanoresonator which can be integrated on a substrate , along with other electronics is disclosed . in this method a quartz substrate is bonded to a base substrate . the quartz substrate is metallized so that a bias voltage is applied to the resonator , thereby causing the quartz substrate to resonate at resonant frequency greater than 100 mhz . the quartz substrate can then be used to drive other electrical elements with a frequency equal to its resonant frequency . the quartz substrate also contains tuning pads to adjust the resonant frequency of the resonator . additionally , a method for accurately thinning a quartz substrate of the resonator is provided . the method allows the thickness of the quartz substrate to be monitored while the quartz substrate is simultaneously thinned