the invention relates to a method for making a 3d nanostructure having a nanosubstructure , comprising the steps of : i ) providing a mold comprising at least one sharp concave corner ; ii ) conformational depositing at least one structural material in the sharp concave corner ; iii ) isotropically removing structural material ; iv ) depositing at least one other structural material ; v ) removing earlier deposited structural material ; vi ) forming a nanosubstructure ; and vii ) removing the mold thereby providing the 3d nanostructure having the nanosubstructure .