the present invention is directed to a method for making silica glass and silica glass preforms . a liquid , preferably halide - free , silicon - containing compound capable of being converted by thermal oxidative decomposition to sio 2 is provided and introduced directly into the flame of a combustion burner , which converts the compound to silica , thereby forming finely divided amorphous soot . the soot is vaporized proximate the site where the liquid is converted into silica glass by atomizing the liquid , preferably with a stream of atomizing gas . a heater proximate the burner face and around the burner flame increases soot capture rate and allows for a reduction of the velocity of the atomizing gas . the amorphous soot is deposited on a receptor surface where , either substantially simultaneously with or subsequently to its deposition , the soot is consolidated into a body of fused silica glass .