an electromechanical dynamic force profile articulating mechanism for recovering or emulating true parallel plate capacitor actuation behaviors from deformable membranes used in mems systems . the curved deformation of flexible membranes causes their mems behavior to deviate from known interactions between rigid plates that maintain geometric parallelism during ponderomotive actuation . the present invention teaches three methods for reacquiring parallel plate behavior : superaddition or in situ integration of a rigid region within or upon the deformable mems membrane ; creation of isodyne regions to secure parallelism by altering the force profile upon the membrane by introducing tuned and shaped voids within the conductive region associated with the membrane ; and a hybrid composite approach wherein the conductive region is deposited after deposition of a raised rigid zone , thereby emulating isodyne behavior due to the increased inter - conductor distance in the vicinity of the rigid zone , in conjunction with rigidity benefits stemming directly from said zone .