disclosed are resonant vibratory gyroscopes and fabrication methods relating thereto . the angular motion sensor comprises a resonating star gyroscope which comprises a vibratory solid or shell - type structure for rate sensing or measuring angle of rotation . the structure formed as a merged superposition of two square entities , yields in - plane degenerate flexural modes that are used to sense rotation around the axis perpendicular to the substrate . the resonating star gyroscope may be implemented using the primary flexural degenerate modes . such an implementation has been successfully demonstrated by the authors using trench - refilled polysilicon and epitaxial polysilicon as the structural material . it is also possible to use a solid star - shaped resonator for the gyroscope . the authors also suggest the operation of the resonating star gyroscope employing the higher - order flexural modes . in this particular implementation the authors utilized a single crystalline structural material .