a method for producing a ceramic diaphragm structure includes preparing a ceramic green substrate having at least one window and a plurality of layers , and a thin ceramic green sheet . the ceramic green sheet is superposed on the ceramic green substrate to cover the window and thereby provide a unitary laminate . the laminate is then fired so that the ceramic green sheet provides a diaphragm portion which protrudes in a direction away from the window . the average sintering temperature difference or the average shrinkage - rate difference , of the layers of the ceramic green substrate , is larger than zero .