in an anti - reflective film comprising alternating layers of high refractive - index layers and low refractive - index layers , by designing such that a designed central wavelength λ 0 is within a wavelength range of 141 nm to 189 nm , and that when the first to eighth layers as counted from a substrate have optical film thicknesses d1 to d8 respectively , the equations of : 0 . 45λ 0 ≦ d 1 ≦ 0 . 65λ 0 ; 0 . 05λ 0 ≦ d 2 ≦ 0 . 20λ 0 ; 0 . 29λ 0 ≦ d 3 ≦ 0 . 49λ 0 ; 0 . 01λ 0 ≦ d 4 ≦ 0 . 15λ 0 ; 0 . 05λ 0 ≦ d 5 ≦ 0 . 20λ 0 ; 0 . 23λ 0 ≦ d 6 ≦ 0 . 28λ 0 ; 0 . 23λ 0 ≦ d 7 ≦ 0 . 28λ 0 ; and 0 . 23λ 0 ≦ d 8 ≦ 0 . 28λ 0 are satisfied , the anti - reflective film can be formed so as to have a low reflectance for a light incident at such a large angle as 30 degrees or more , without increasing the whole thickness of the film .