the present invention is ; a process for stabilizing a cyclotetrasiloxane , such as 1 , 3 , 5 , 7 - tetramethylcyclotetrasiloxane , against polymerization used in a chemical vapor deposition process for silicon oxides in electronic material fabrication comprising providing an effective amount of an antioxidant polymerization inhibitor to such cyclotetrasiloxane ; and a composition of a cyclotetrasiloxane , such as 1 , 3 , 5 , 7 - tetramethylcyclotetrasiloxane , stabilized against polymerization used in a chemical vapor deposition process as a precursor for silicon oxides in electronic material fabrication , comprising ; such cyclotetrasiloxane and an antioxidant .