a method of printing a gate pattern on a substrate comprising the steps of : identifying at least one area in the pattern in which one of the gate features overlays one of the active regions ; reducing a width dimension of the one of the gate features at the location which the one of the gate features overlays the one of the active regions ; extracting the gate features from the pattern ; decomposing the gate features into a vertical component mask and a horizontal component mask ; and illuminating the vertical component mask and the horizontal component mask utilizing dipole illumination .