the invention is directed to an arrangement for generating intensive radiation based on a plasma , particularly short - wavelength radiation from soft x - ray radiation to extreme ultraviolet radiation . the object of the invention is to find a novel possibility for generating radiation generated from plasma in which the individual pulse energy coupled into the plasma and , therefore , the usable radiation output are appreciably increased while retaining the advantages of mass - limited targets . according to the invention , this object is met in that the target generator has a multiple - channel nozzle with a plurality of separate orifices , wherein the orifices generate a plurality of target jets , the excitation radiation for generating plasma being directed simultaneously portion by portion to the target jets .