the present invention provides methods and apparatus for deposition of contact layers for group ibiiiavia solar cells using electrodeposition and / or electroless deposition approaches , and solar cells that result therefrom . in one aspect of the invention , the solar cell that results includes a substrate , a stacked contact layer that includes a bottom film coated on a surface of the substrate and a top film formed by electroplating over the bottom film , wherein the top film comprises at least one of ru , ir and os . a group ibiiiavia compound film formed over the top film . in another aspect of the invention , there is provided a method of depositing a stacked layer of a plurality of films in a plurality of sequentially disposed depositing units onto a continuously moving roll - to - roll sheet , preferably using electroplating of a stacked contact layer .