a method of manufacturing a thin film capacitor includes steps of : performing recrystallization heat treatment on a metal foil ; forming a dielectric layer on a top surface of the recrystallized metal foil ; heat treating the metal foil and the dielectric layer ; and forming an upper electrode on a top surface of the heat - treated dielectric layer . the recrystallization heat treatment prevents the oxidation of a metal foil , by which a dielectric layer can be heat treated at a high temperature , thereby improving electric properties of a thin film capacitor and the reliability of a product .