apparatus and method for handling articles , such as glass or ceramic plates , commonly referred to as masks , employed in the manufacture of semi - conductor devices . the masks are transported between two predetermined stations with a treating operation being performed thereon at an intermediate station . the subject apparatus utilizes a fluid bearing for removing a plurality of masks in sequence from an indexable carrier and for accurately positioning the masks in sequence relative to a vacuum transfer arm . the transfer arm positions the masks in a precisely oriented location on a rotatable vacuum chuck so that a predtermined operation may be formed thereon . another vacuum transfer arm then moves the treated masks in sequence from the vacuum chuck and places the same onto another fluid bearing for introduction thereby into another indexable carrier . specially designed vacuum transfer arms , and means for accurately positioning masks in sequence relative to an infeed transfer arm for precise positioning thereby on the vacuum chuck , are employed so that damage to the relatively fragile masks during transfer to and from , and spinning at , the treating station is obviated .