the invention relates to a method for fabricating low - resistance electrodes in trench capacitors , and includes steps of : providing a wafer ; producing trenches in the wafer ; introducing the wafer into an electrolyte solution including a salt of an electrically conductive material ; and electrically contact - connecting the wafer and applying a voltage between the wafer and a counterelectrode configured in the electrolyte solution to electrodeposit at least sections of the electrically conductive material in the trenches . the electrodeposition of the electrode material enables a uniform layer thickness along all regions of the trench wall .