a process for manufacturing a resonator including the steps of : forming on an insulating substrate a first portion of a conductive material and a second portion of another material on the first portion ; forming an insulating layer having its upper surface flush with the upper part of the second portion ; forming by a succession of depositions and etchings a beam of a conductive material above the second portion , the beam ends being on the insulating layer on either side of the second portion , the upper surface of the second portion being exposed on either side of the beam , a third portion of a piezoelectric material on the beam and a fourth portion of a conductive material on the third portion above the beam portion located above the second portion ; and removing the second portion .