a method of making a modulator for modulating an incident beam of light uses a substantially planar light reflection surface formed by a light reflection layer associated with a plurality of deformable elements and a light reflection layer associated with a plurality of fixed elements . the fixed and deformable elements are arranged in a cavity of a substrate supporting the modulator . light is modulated when a current is applied to a conductive element operably associated with the deformable elements causing the light reflective layer associated with the deformable element to deflect towards the base of the cavity from its substantial planar relations with the light reflecting layer of the fixed element .