a substrate handling system comprises a robot containing mico - environment in communication with a plurality of processing stations . the robot has a robot arm comprising an end effector linkage mounted to an extensible linkage . each of the linkages is independently actuatable using an associated motor , with the extensible linkage serving to convey the end effector linkage to the vicinity of a target processing station for delivery or retrieval of a substrate . motion of the linkages may be synchronized to reduce travel time , and multiple end effectors may be mounted to the extensible linkage for increasing throughput .