a corrosion - resistant member includes a substrate made of an aluminum - containing ceramic material and an aluminum fluorine containing film which coats at least a part of a surface of the substrate . the aluminum fluorine - containing film , which is formed by directly contacting the substrate with a fluorine - containing compound , has a thickness of 0 . 01 - 5 . 0 μm . the substrate contains silicon in an amount of not more than 0 . 5 % by weight when calculated as silicon dioxide . thereby , changes in weight due to corrosion can be decreased and generation of particles can be further controlled upon exposure to a corrosive halogen gas .