a specimen inspection stage implemented with a processing stage coupling mechanism provides a capability to conduct with maximum efficiency post - processing specimen inspections on - board a processing platform . heavy inspection equipment is mounted on a specimen inspection stage that is separate from a processing stage . in a preferred embodiment , the processing stage moves in response to an applied motive force and performs laser - based processing operations on a specimen . while laser processing is ongoing , the specimen inspection stage remains parked in its home position . when it is time for post - processing inspection , a stage coupling and decoupling mechanism couples together the specimen inspection stage and the processing stage , which transports the specimen inspection stage to and from the specimen position .