a novel embedded fastener apparatus and method for fastening components to the interior of a process chamber of a semiconductor fabrication apparatus . in one embodiment , an apparatus having a showerhead or gas distribution plate which is mounted to the interior of the process chamber using multiple fasteners which are embedded in respective fastener openings in the showerhead . in another embodiment , an apparatus having a showerhead which is mounted to the interior of the process chamber using multiple exterior fasteners which extend into the showerhead through the walls of the process chamber . accordingly , the regions of the showerhead which surround the fasteners are physically separated from the interior of the process chamber .