anti - reflective compositions and methods of using those compositions to form circuits are provided . the compositions comprise a polymer dissolved or dispersed in a solvent system . in one embodiment , the compositions comprise less than about 0 . 3 % by weight of a strong acid . in another embodiment , the weight ratio of strong acid to weak acid in the composition is from about 0 : 100 to about 25 : 75 . examples of preferred weak acid compounds include phenolic compounds , carboxylic acids , phosphoric acid , and cyano compounds . the polymer and other ingredients are preferably physically mixed in a solvent system . the resulting compositions are spin bowl compatible .