an electrical fuse has an anode contact on a surface of a semiconductor substrate . the electrical fuse has a cathode contact on the surface of the semiconductor substrate spaced from the anode contact . the electrical fuse has a link within the substrate electrically interconnecting the anode contact and the cathode contact . the link comprises a semiconductor layer and a silicide layer . the silicide layer extends beyond the anode contact . an opposite end of the silicide layer extends beyond the cathode contact . a silicon germanium region is embedded in the semiconductor layer under the silicide layer , between the anode contact and the cathode contact .