a ceramic green sheet is manufactured by preparing a support which includes a releasing layer formed on its top surface and has a smoothness that at least a region of the top surface of the support to be coated with a ceramic slurry has substantially no projections having a height of equal to or more than about 1 μm , and applying a ceramic slurry to the releasing layer of the support , which ceramic slurry contains a ceramic powder dispersed in a medium . this ceramic green sheet has a small thickness of , for example , about 0 . 3 to 3 μm , has no depressions or through holes caused by a filler in the support and is excellent in smoothness .