a combined atomic force and near field microscope assembly for atomic level inspection of a target object . the assembly includes a scanning probe with a sharp tip and a photosensitive region on its lower surface . a sample is disposed on a glass substrate and exposed to an evanescent wave generated on the glass substrate by total internal reflection . an optical probe comprising a microfabricated cantilever having an apex in close proximity to a photosensitive region is disposed in close proximity to a sample . the photosensitive region collects light generated by ftr at the apex of the optical probe due to local disruptions of the evanescent field caused by the probe tip . a cantilever displacement mechanism is included so as to allow for operation in a second mode as a conventional atomic force microscope .