a micro - machined actuator for use in , among other things , sensors and data storage devices . the actuator includes a stator wafer and a micro - mover positioned adjacent to the stator wafer . between the stator wafer and the micro - mover are electrodes that are set to specified voltages and that emanate electric fields that position the micro - mover relative to the stator wafer . also between stator wafer and the micro - mover are bumpers that prevent the electrodes from coming into contact with each other .