a micro - electromechanical systems device includes a substrate comprising at least one anchor , a proof mass having first and second deceleration extensions extending therefrom , a motor drive comb , a motor sense comb , a plurality of suspensions configured to suspend the proof mass over the substrate and between the motor drive comb and the motor sense comb . the suspensions are anchored to the substrate . a body is attached to the substrate . at least one deceleration beam extends from a first side of said body . the at least one deceleration beam is configured to engage at least one of the first and second deceleration extensions and slow or stop the proof mass before the proof mass contacts the motor drive comb and the motor sense comb .