the mems sensor suite on a chip provides the capability , monolithically integrated onto one mems chip , to sense temperature , humidity , and two axes of acceleration . the device incorporates a mems accelerometer , a mems humidity sensor , and a mems temperature sensor on one chip . these individual devices incorporate proof masses , suspensions , humidity sensitive capacitors , and temperature sensitive resistors all fabricated in a common fabrication process that allows them to be integrated onto one micromachined chip . the device can be fabricated in a simple micromachining process that allows its size to be miniaturized for embedded and portable applications . during operation , the sensor suite chip monitors temperature levels , humidity levels , and acceleration levels in two axes . external circuitry allows sensor readout , range selection , and signal processing .