this invention comprises a coating for equipment parts , particularly including chemical mechanical polishing equipment parts and other equipment that may experience wear or contaminant build - up . the coating includes a fluoropolymer based material that may also contain a colorant or pigment to visually contrast with particles or slurry that is deposited on the parts during use . in some embodiments , multiple layers are applied in contrasting colors so that when a layer closer to the surface begins to wear a lower layer will be readily visible , signaling that re - coating or replacement will soon be required .