the present invention provides a device for in - situ monitoring of material , process and dynamic properties of a mems device . the monitoring device includes a pair of comb drives , a cantilever suspension comprising a translating shuttle operatively connected with the pair of comb drives , structures for applying an electrical potential to the comb drives to displace the shuttle , structures for measuring an electrical potential from the pair of comb drives ; measuring combs configured to measure the displacement of the shuttle , and structures for measuring an electrical capacitance of the measuring combs . each of the comb drives may have differently sized comb finger gaps and a different number of comb finger gaps . the shuttle may be formed on two cantilevers perpendicularly disposed with the shuttle , whereby the cantilevers act as springs to return the shuttle to its initial position after each displacement .