the invention relates to a plasma generation device comprising a plurality of plasma modules for generating a plasma . each plasma module has a module housing with at least one gas inlet for supplying a process gas . furthermore , a discharge device for generating the plasma from the process gas and a plasma outlet are provided . the plasma generation device has at least two plasma modules for generating a plasma . each plasma module has at least one gas outlet for some of the process gas , wherein the at least one gas outlet of at least one plasma module issues into a respective gas inlet of another plasma module .