the present invention relates to a surface processing apparatus which performs heating processing of an object of heating which is mounted on a mounting device provided inside a process container , and which includes a plural number of lamps provided so as to oppose a rear surface of a processing surface of an object of processing , a rotating unit which has the plural number of lamps mounted to it in a ring shape , and a drive unit which drives the rotating unit . also , the present invention relates to a processing apparatus for leading a process gas from a gas supply tube to a gas chamber partitioned inside a process container , and which blows process gas from an outlet of the gas chamber and onto an object of processing which is mounted on a mounting device provided inside the process container , and which includes a plural number of partition plates each provided with a plural number of through holes , being provided at required intervals in a direction of gas flow and inside the gas chamber .