a method for preventing process errors in a semiconductor fabricating process allows only a few authorized engineers to release interlocks of semiconductor fabricating equipment when a count of interlock occurrences exceeds a predetermined number within a predetermined period of time . by allowing a semiconductor fabricating equipment operator only limited ability to reset equipment interlocks , repeated interlock conditions caused by test specification failures may be over - ridden only a predetermined number of times before the semiconductor fabricating equipment is disabled completely . the disabled semiconductor fabricating equipment may only be re - enabled using an authorization code , which is only made available to selected personnel , thereby ensuring that necessary repairs and corrections have been implemented on the semiconductor fabricating equipment .