a mems device is disclosed . the mems device comprises a first plate with a first surface and a second surface ; and an anchor attached to a first substrate . the mems device further includes a second plate with a third surface and a fourth surface attached to the first plate . a linkage connects the anchor to the first plate , wherein the first plate and second plate are displaced in the presence of an acoustic pressure differential between the first and second surfaces of the first plate . the first plate , second plate , linkage , and anchor are all contained in an enclosure formed by the first substrate and a second substrate , wherein one of the first and second substrates contains a through opening to expose the first surface of the first plate to the environment .