the present invention includes a method of determining a relative position of a substrate and a template spaced - apart therefrom , the substrate having substrate alignment marks disposed thereon and the template having template alignment marks disposed thereon , the method including , impinging first and second fluxes of light upon the substrate and template alignment marks , with the substrate and template alignment marks being responsive to the first flux of light defining a first response , and being responsive to the second flux of light defining a second response differing from the first response ; and processing the first and second responses to form a focused image of the substrate and template alignment marks on a common plane , with the focused image indicating the relative position of the substrate and the template .