a method and apparatus for inspecting defects includes emitting an ultraviolet light from an ultraviolet light source , illuminating a specimen with the ultraviolet light in which a polarization condition of the ultraviolet light is controlled , controlling a polarization condition of light reflected from the specimen which is illuminated by the polarization condition controlled ultraviolet light , detecting the light reflected from the specimen , processing the detected light so as to detect defects , and outputting information about the defects . the ultraviolet light source is disposed in a clean environment supplied with clean gas and separated from outside .