methods for fabricating graphene nanoelectronic devices with semiconductor compatible processes , which allow wafer scale fabrication of graphene nanoelectronic devices , is provided . one method includes the steps of preparing a dispersion of functionalized graphene in a solvent ; and applying a coating of said dispersion onto a substrate and evaporating the solvent to form a layer of functionalized graphene ; and defunctionalizing the graphene to form a graphene layer on the substrate .