a stacked capacitor having very thin fins and subminimum dimension supports for the fins is described . the capacitor includes a stack of conductive layers on a substrate . a plurality of subminimum dimension trenches are formed in the stack and a columnar conductive layer lines the trenches in contact with alternate layers of the stack . an insulator lines these alternate layers and the columnar conductive layer and capacitively couples these alternate layers and the columnar conductive layer to a second plate layer that is formed between the alternate layers , within the columnar layers in the trenches , and extending between stacked capacitors .