a pattern structure of at least two different layer system elements disposed adjacent one beside the other upon a carrier substrate , at least one of said layer system elements comprises a layer of dielectric material , the layer of dielectric material residing upon a layer of a material that is resistant to activated oxygen or activated water and having a second surface facing toward the substrate . the dielectric layer of the one layer system element forms a disturbed region between the adjacent layer system elements , the dielectric layer having a thickness of d s and wherein the disturbed region has a width of at least 10 * d s .