a mirror device includes a mirror , an anchor , and a spring coupling the mirror to the anchor . the anchor and / or mirror can define one or more rows of holes adjacent to the coupling location of the spring . the natural frequency of the device can be adjusted by removing material between the perimeter of the mirror / anchor and the outermost holes , and between adjacent holes in the same row . another mirror device includes a mirror , anchors , and springs coupling the mirror to the anchors . the natural frequency of the device can be adjusted by decoupling one or more springs coupling the mirror to the anchors . the mirror of both devices can includes one or more sacrificial portions . the natural frequencies of the both devices can also be adjusted by trimming the sacrificial portions .