a part inspection and calibration method for the inspection of integrated circuits includes a camera to image a precision pattern mask deposited on a transparent reticle . small parts are placed on or above the transparent reticle to be inspected . a light source and overhead light reflective diffuser provide illumination . an overhead mirror or prism reflects a side view of the part under inspection to the camera . the scene of the part is triangulated and the dimensions of the system can thus be calibrated . a reference line is located on the transparent reticle to allow an image through the prism to the camera of the reference line between the side view and the bottom view . a precise reticle mask with dot patterns gives an additional set of information needed for calibration . by imaging more than one dot pattern the missing state values can be resolved using an iterative trigonometric solution . the system optics are designed to focus images for all perspectives without the need for an additional focusing element .