the present invention relates to a device for setting image acquisition conditions for charged particle beam devices or the like . an image integration unit forms a plurality of images with a number of different integrations from one image acquired in advance . a pattern matching unit matches the patterns of each of the plurality of images having a number of different integrations with template images registered in advance and then finds a score that shows the degree of matching between images . a selection unit selects a number of integrations such that any variation in the scores is contained within a prescribed allowable range . the selected number of integrations is stored in a recipe of the device . thus , it is possible to determine the number of integrations in the recipes without having to operate the device , and to set image acquisition conditions so as to allow a minimization of the processing time while maintaining a sufficient s / n ratio .