a micro - electromechanical system probe package is provided including a first reflective element receiving a light beam directed into to the probe package and a second reflective element receiving light directed from the first reflective element . the second reflective element directs light in an optical path extending from the probe package . at least one of the reflective elements includes a mems mirror . an embodiment of the package is made with a monolithic housing having mounting surfaces formed therein for aligning the first reflective element with the second reflective element . the monolithic housing also includes a mounting surface for aligning at least one lens with at least one of the reflective elements .