a superprecision positioning device includes an output shaft rotor , a plurality of eccentric shaft rotors including an inner eccentric shaft rotor and an outer eccentric shaft rotor , and a bearing base cylinder , electrically rotating and driving mechanism portions being provided between the eccentric shaft rotor and the output shaft rotor , and between the outer eccentric shaft rotor and the bearing base cylinder , respectively , whereby the eccentric shaft rotors and the output shaft rotor may be independently rotated and controlled . with this arrangement , movement in three degrees of freedom may be achieved by translational movement and rotation of the output shaft in a two - dimensional surface , and if an axially movable support shaft is inserted in the output shaft , an article being positioned may be moved with four degrees of freedom in total , providing superprecision positioning in units of 1 / 10 micron .