an apparatus comprising a substrate ; and a platform elevated above the substrate and supported by curved flexures . the curvature of said flexures results substantially from variations in intrinsic residual stress within said flexures . in one embodiment the apparatus is a deformable mirror exhibiting low temperature - dependence , high stroke , high control resolution , large number of degrees of freedom , reduced pin count and small form - factor . structures and methods of fabrication are disclosed that allow the elevation of mirror segments to remain substantially constant over a wide operating temperature range . methods are also disclosed for integrating movable mirror segments with control and sense electronics to a produce small - form - factor deformable mirror .