A gas explosion was believed to have damaged the ATM at the Tesco Metro store in Newtonhill early on Saturday.
A loud bang was heard at about 03:00. Police Scotland said a mid five-figure sum of money was stolen.
A dark estate car was seen leaving the scene.
Robbers who blew a cash machine off a wall at an Aberdeenshire supermarket are believed to have escaped with about £50,000.