The current trend in the wafer production industry is to expand the production chain with more production stations, more buffers, and robots. The goal of the present paper is to develop a distributed control architecture to face this challenge by controlling wafer industrial units in a general production chain, with a parametric number of production stations, one robot per two stations where each robot serves its two adjacent production stations, and one additional robot serving a parametric number of stations. The control architecture is analyzed for individual control units, one per robot, monitoring appropriate event signals from the control units of the adjacent robots. Each control unit is further analyzed to individual supervisors. In the present paper, a modular parametric discrete event model with respect to the number of production stations, the number of buffers, and the number of robotic manipulators is developed. A set of specifications for the total system is proposed in the form of rules. The specifications are translated and decomposed to a set of local regular languages for each robotic manipulator. The distributed supervisory control architecture is developed based on the local regular languages, where a set of local supervisors are designed for each robotic manipulator. The desired performance of the total manufacturing system, the realizability, and the nonblocking property of the proposed architecture is guaranteed. Finally, implementation issues are tackled, and the complexity of the distributed architecture is determined in a parametric formula. Overall, the contribution of the present paper is the development of a parametric model of the wafer manufacturing systems and the development of a parametric distributed supervisory control architecture. The present results provide a ready-to-hand solution for the continuously expanding wafer production industry.