Single particle inductively coupled plasma mass spectrometry has been used for size measurements of individual nanoparticles (NPs). Here, uncertainties in size analysis based upon two calibration approaches were evaluated: (i) the use of particle size standard and (ii) the use of ion standard solution. For particle size standard approach, the source of uncertainty to determine the target NP diameter was related to the variation in the signal intensities of both target NPs and particle size standard, and the size distribution of the particle size standard. The relative uncertainties of the 50 nm silver NP as the target were 15.0%, 9.9%, and 10.8% when particle size standards of 30 nm, 60 nm, and 100 nm silver NPs were used, respectively. As for the ion standard solution approach, the sources of uncertainty were the concentration of working standard solution, sample flow rate, transport efficiency, slope of calibration curve, and variation in the signal intensity of the ion standard solution and of the target NPs. The relative uncertainties for the 50 nm silver NP were 18.5% for 1 ng/g, 7.6% for 10 ng/g, and 4.7% for 100 ng/g solutions. The lower uncertainty obtained with a high concentration working standard solution is recommended to improve precision on particle size determinations by spICP-MS.