30+ days ago - req10051

Internship: Improve extreme ultraviolet illumination for lithography machines

Research & development



Optical engineering

In a nutshell


Veldhoven, Netherlands


Research & development


No experience (Student)



Job Category

Physics, Mathematics, Optical engineering


This is an internship for a Bachelor or Master’s student in Physics, Mathematics or Optics, or a related field, who has enthusiasm for programming and analytics.

Job Mission

ASML’s lithography machines are being used by our customers to create the next generation microchips. In EUV, extreme ultraviolet light is used in the lithography process. The light generated by the source is translated into the scanner, and modified such that the right distribution of light arrives at the reticle and the wafer. Our illumination group is responsible for this modification of the light, to ensure the correct intensity and angular distributions arise at the reticle.

Job Description

You will be part of the multidisciplinary Illumination project team, contributing to the delivery and improvement of the EUV illumination function. The illumination function is realized by using software and optomechatronic hardware. The essence of this work is in the prediction and calibration of the optical properties of the system and interpreting its performance qualification measurements. Generally speaking there is a large simulation component in the work, often including programming of models and/or the postprocessing of measurement data using Matlab.
The exact assignment will be tailor made, based on the interests and capability of the candidate, and the existing needs within the group. Example assignments are:
•Modelling the impact of alignment on system transmission.
•Investigate and optimize an optical performance monitoring (or qualification) method for both time efficiency as well as accuracy.
•Investigate the correction potential of an optical actuator.


You are a Bachelor or Master’s student in Physics, Mathematics or Optics. You must have a strong affinity with the challenging technical subject and you’re enthusiastic about analytics. Furthermore, you will need good communication skills, be able to work independently, and be goal oriented. Good programming skills are a big advantage, especially in shorter assignments.

This internship has a minimum duration of 3 months and a maximum duration of 1 year. The exact number of days per week is flexible, but will depend on the duration of the internship.


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