% Encoding: UTF-8 @COMMENT{BibTeX export based on data in FAU CRIS: https://cris.fau.de/} @COMMENT{For any questions please write to cris-support@fau.de} @article{faucris.210833463, abstract = {A new method for the preparation of freestanding thin film samples for mechanical testing in transmission electron microscopes is presented. It is based on a combination of focused ion beam.(FIB) milling and electron-beam-assisted etching with xenon difluoride (XeF2) precursor gas. The use of the FIB allows for the target preparation of microstructural defects and enables well-defined sample geometries which can be easily adapted in order to meet the requirements of various testing setups. In contrast to existing FIB-based preparation approaches, the area of interest is never exposed to ion beam irradiation which preserves a pristine microstructure. The method can be applied to a wide range of thin film material systems compatible with XeF2 etching. Its feasibility is demonstrated for gold and alloyed copper thin films and its practical application is discussed. (C) 2016 Elsevier B.V. All rights reserved.}, author = {Liebig, Jan Philipp and Göken, Mathias and Richter, Gunther and Mackovic, Mirza and Przybilla, Thomas and Spiecker, Erdmann and Pierron, O. N. and Merle, Benoit}, doi = {10.1016/j.ultramic.2016.09.004}, faupublication = {yes}, journal = {Ultramicroscopy}, keywords = {Thin films;FIB;Electron-beam-assisted etching;XeF2;Micromechanical testing}, pages = {82-88}, peerreviewed = {Yes}, title = {{A} flexible method for the preparation of thin film samples for in situ {TEM} characterization combining shadow-{FIB} milling and electron beam-assisted etching}, volume = {171}, year = {2016} }