AMS 1000

Atonarp’s AMS 1000 is the industry’s first ever quantitative real time miniaturized mass spectrometer the various semiconductor applications process gas detection. Now, you can monitor not only the most minuscule traces of gases, but also the precise quantity of each for optimized process control as well as detect the presence of harmful contaminants. With a rugged Faraday Cup and calibration against the Capacitance Diaphragm Gauge (CDG), the AMS
1000 operates in high pressure environments without the need for external pumps. Its customizable proprietary software puts precision molecular analysis for the semiconductor applications at your fingertips.


Monitor primary and secondary end points, silicon oil contamination and in-line vaccum leaks. Purpose-built for Lyophilisation Process Control.


Ensure efciency and compliance with Vaccuum and Transfer Chamber Monitoring, Leak Detection, Atmospheric Pressure Gas Analysis and more.


Quantitatively monitor species of interest to flag potential deviation from set parameters with feedback control to maintain the highest process quality

AMS 1000: The most durable, accurate, cost-effective and hassle-free Solution for process analytics.

Small and Powerful

Compact, sleek and as small as a toaster, the AMS 1000 can be easily retrofitted onto any semiconductor tool. Ideal for process control applications, it’s fitted with our proprietary miniaturized array of micro-quadrupoles along with integrated small turbo and roughing pumps.

Get real data in real time

The AMS 1000 delivers highly accurate measurements (sub-1%) due to its innovative electronics and signal processing capability. It performs quantitative molecular scans in less than 10ms, allowing for real-time process control optimization. And, with its cloud-connected software, you can leverage the data analytics for unparalleled process insight.

Optimized high-pressure performance

The AMS 1000 operates at ~3 orders of magnitude higher pressure compared to standard mass spectrometers, thanks to the miniature design of Atonarp’s mass spectrometer with its array of micro-quadrupole rods, enabling high operating pressure compatibility.

Work with molecular precision

Ideal for fast repeatable measurements needed in process control applications, the AMS 1000 spans 6+ decades of concentration dynamic range, down to ppm levels. It is calibrated within the same pressure range against the gold standard Capacitance Diaphragm Gauge (CDG).

Experience unparalleled uptime

With a smart modular design, the AMS 1000 guarantees the industry’s lowest downtime, with easy on-site replacement of consumable parts and in-built usage diagnostics. Few required consumables and low maintenance events translate into a low total cost-of-ownership, and hassle-free operation.

AMS 1000
16 Poles, 9 Quadrupoles

Miniaturized quadrupole arrays contain smaller rods, and more quadrupoles, than a conventional quadrupole detector.

Traditional MS
4 Poles, 1 Quadrupole

The standard-sized array is unable to operate at high pressure and requires external pumps which are space-consuming.

  AMS 1000 Traditional MS
Quantitative Qualitative / Semi-quant
Directly calibrated against a Gold Standard Indirectly by extrapolation, hence inaccurate and requires frequent calibration
Can diferentiate between isobaric masses: CO2 (m/z = 44 ) vs. Propane (m/z = 44) Yes, via its fragmentation ions fingerprinting algorithm
Operating pressure (mTorr)
Resolving capability
Quantitative accuracy (%)
Footprint (mm) including pumps
Pumping system
Calibration / tuning
Cost of ownership (P+M/1yr)