CASCADED MICROMECHANICAL ACTUATOR STRUCTURE
The invention provides a cascaded micromechanical actuator structure for turning a micromechanical component (S) about an axis of rotation (DA; DA'; DA''; DA'''; DA'''') with: a torsion spring device, which on the one hand is attached to a holder (VS) and to which on the other hand the micromechanical component (S) can be attached; wherein the torsion spring device has a plurality of torsion springs (f, f2, f3; f', fi'; f1'', f2''; f1a''', f1b''', f2'''; f1a'''', f1b'''', f2''''), which extend along or parallel to the axis of rotation (DA; DA'; DA''; DA'''; DA''''); and a rotary drive device with a plurality of rotary drives (A1, A2, A3; Ai'; A1'', A2''; A1''', A2'''; A1''''; A2''''), which are connected to the torsion spring device (f1, f2, f3; f', fi'; f1'', f2''; f1a''', f1b''', f2'''; f1a'''', f1b'''', f2'''') in such a way that each rotary drive (A1, A2, A3; Ai'; A1'', A2''; A1''', A2'''; A1''''; A2'''') contributes a fraction to an overall angle of rotation of the micromechanical component (S) about the axis of rotation  (DA; DA'; DA''; DA'''; DA'''').