PRODUCTION OF A DENSE MIST OF MICROMETRIC DROPLETS IN PARTICULAR FOR EXTREME UV LITHOGRAPHY
The invention concerns a method and a device for producing a dense mist of micrometric and submicrometric droplets, used for light generation in the extreme ultraviolet in particular for lithography. The invention is characterised in that it consists in injecting pressurised liquid (4) into a nozzle (10) with a small diameter emerging into vacuum. Light (42) is generated by focusing a laser radiation (36) onto the dense mist (23).