Profilométrie optique par méthodes inverses de diffraction électromagnétique
Optical profilometry is a nondestructive and fast noncontact surface metrology technique. In this thesis, we have tackled this issue with inverse scattering electromagnetic methods and in an Optical Digital Tomographic Microscopy (ODTM) configuration. The surface is probed with illuminations under several incidence angles; the measure of far scattered field amplitude and phase constitutes the problem data. Surface profiles have been reconstructed using different scattering models among which an approximate theory based on single scattering and paraxiality. The lateral resolution of this technique and classical profilometric approaches is limited by the so-called Abbe-Rayleigh's criterion defined out of the numerical aperture for illumination and field detection. In order to overpass this resolution limit, we have developed a regularized iterative Newton-Kantorovitch's method. The scattering operator is rigorously modelized with the method of moments, that is a numerical solution of boundary integral equations, and its Frechet derivative adjoint states expression is deduced from the reciprocity theorem. For one-dimensional metallic surfaces, our method succeeds in inverting from synthetic data very rough surfaces with the resolutions beyond the Abbe-Rayleigh's criterion. The performance of this technique and inversion conditions clearly differ from one polarization to the other : in the TM case, interactions at longer distance than in the TE case improve yet the resolution. This work includes also an experimental validation of our inverse model on grooves in indium phosphure substrate at 633 nm.