Actuating sensor module
An actuating sensor module is disclosed and comprises an actuator, a first substrate, a valve layer and a second substrate which are stuck sequentially. The first substrate comprises an inlet channel, an outlet channel, an inlet opening and an outlet opening, and the second substrate comprises a penetrated groove. The valve layer is disposed between the first substrate and the second substrate, and an inlet valve and an outlet valve of the valve layer close the inlet channel and the outlet channel respectively. The actuator is disposed on the penetrated groove of the second substrate, and a compression chamber is formed between the valve layer and the penetrated groove. The inlet opening, the inlet channel, the compression chamber, the outlet channel and the outlet opening are communicated with each other to form an air flowing circuit, and a sensor is disposed within the air flowing route. By driving the actuator, an air is transmitted into the air flowing route from the outside, thereby to detect the circulating air by the sensor.