MECHANICALLY-ACTIVE ANTI-REFLECTION SWITCH (MARS) MODULATOR WITH WIDE ANGLE TOLERANCE
A method and apparatus for modulating an optical signal, is disclosed. The modulator is comprised of a support, a membrane whic consits of three layers including a central layer, and an air gap between the substrate and the membrane. The thickness of the layer and the size of the air gap are optimized to maximize differential reflectivity of light. The thickness of the layers and the air gap are designed according to formulas such that the modulator can operate over wider angles of incidence up to about 55 degrees and an angle of incidence up to about 85 degrees with a TE-only polarization of the incident light.