ULTRASONIC TRAVELING WAVE MICROPUMP FOR LIQUID
The invention relates to an ultrasonic traveling wave micropump for moving a liquid, said micropump comprising: two single linear piezoelectric transducers (2, 3); a flexible metal blade (4), each end portion of which rests on one of the two linear piezoelectric transducers; a sealable channel (5) that is made of shape-changing material and is intended for transporting the liquid from an inlet (E) to an outlet (S) of the micropump, said channel (5) resting longitudinally on said blade (4) between said linear piezoelectric transducers (2, 3); and an excitation means (7) for exciting at least the linear piezoelectric transducer (2) located near the inlet (E) of the micropump so that said transducer generates a transverse vibration in the blade (4) and the channel (5) along a traveling wave moving to the outlet (S) of the micropump.