HEAT SOURCE DOOR FOR A THERMAL DIFFUSION CHAMBER
A frame (104) supporting a containment chamber (102), the containment chamber is preferably configured to enclose and confine a process chamber (106). A heat source module (108) is disposed between the containment chamber and the process chamber, while a collar (1 12) communicates with the process chamber and is secured to the process chamber. Preferably, a heat source door (1 14) is in fluidic communication with the process chamber, and includes at least a top hat section (1 16) secured to a main body portion (1 18), an over center latch (120) secured to the top hat section and interacting with the collar, the over center latch mitigates an inadvertent opening of the process chamber, and a lamp feed-through (122) is preferably secured to the main body portion and supports a heat source device (142).