ULTRASOUND DEVICE
An ultrasound device has an ultrasound scanner unit at a distal portion of a shaft. The ultrasound scanner unit has ultrasound transducers and capacitors, each comprising a bottom electrode provided over a substrate, a region over the bottom electrode, a dielectric layer over (and preferably also beneath) the region and a top electrode over the dielectric layer. For the ultrasound transducers, the region is a cavity formed by removing a sacrificial layer. For the capacitors, the region may be the sacrificial layer. Capacitors can thus be formed integrally with the cMUT elements.