section_path: Areas of research/Micro electro-mechanical systems (MEMS)
section_name: Micro electro-mechanical systems (MEMS)
paragraph_text: Micro electro-mechanical systems (MEMS)
  
  Micron-scale mechanical components such as springs, gears, fluidic and heat transfer devices are fabricated from a variety of substrate materials such as silicon, glass and polymers like SU8. Examples of MEMS components are the accelerometers that are used as car airbag sensors, modern cell phones, gyroscopes for precise positioning and microfluidic devices used in biomedical applications.