{"instruction": "You are an expert in named entity recognition. Please extract entities that match the schema definition from the input. Return an empty list if the entity type does not exist. Please respond in the format of a JSON string.", "schema": ["process parameter", "concept or principle", "enabling technology", "manufacturing standard", "machine or equipment", "process characterization"], "input": "However , previous research has shown that this process interruption causes failure at the paused layer due to the cooling between the layers ."}
{"process parameter": ["layer"], "concept or principle": ["research", "process", "failure"], "enabling technology": [], "manufacturing standard": [], "machine or equipment": [], "process characterization": []}