{"instruction": "You are an expert in named entity recognition. Please extract entities that match the schema definition from the input. Return an empty list if the entity type does not exist. Please respond in the format of a JSON string.", "schema": ["process characterization", "process parameter", "machine or equipment", "manufacturing standard", "manufacturing process", "application"], "input": "In addition , the IMC thickness will affect the product functionality , e.g. , the thermal or electrical conductivity of the IMC layer can be the limiting factor in the related applications ."}
{"process characterization": ["product functionality"], "process parameter": ["layer"], "machine or equipment": [], "manufacturing standard": [], "manufacturing process": [], "application": []}