Several symbols of vacuum system components, including vacuum pumps, valves, gauges etc. The symbols probably are not standardized in the World. Please make sure that they are commonly used in your country's vacuum engineering diagrams before you use them in any serious document.
Own work, based on Ing. Jaroslav KRÁL, CSc.: Cvičení z vakuové techniky, Vydavatelství ČVUT, Prague 1996.
FDominec