Since TPD observes the mass of desorbed molecules, it shows what molecules are adsorbed on the surface. Moreover, TPD recognizes the different adsorption conditions of the same molecule from the differences between the desorption temperatures of molecules desorbing different sites at the surface, e.g. terraces vs. steps. TPD also obtains the amounts of adsorbed molecules on the surface from the intensity of the peaks of the TPD spectrum, and the total amount of adsorbed species is shown by the integral of the spectrum.
To measure TPD, one needs a mass spectrometer, such as a quadrupole mass spectrometer or a time-of-flight (TOF) mass spectrometer, under ultrahigh vacuum (UHV) conditions. The amount of adsorbed molecules is measured by increasing the temperature at a heating rate of typically 2 K/s to 10 K/s. Several masses may be simultaneously measured by the mass spectrometer, and the intensity of each mass as a function of temperature is obtained as a TDS spectrum.
The heating procedure is often controlled by the PID control algorithm, with the controller being either a computer or specialised equipment such as a Eurotherm.
Other methods of measuring desorption are Thermal Gravimetric Analysis (TGA) or using infrared detectors, thermal conductivity detectors etc.