The sample should be vacuum stable. It is typically mounted using a conductive compound (e.g. an epoxy thermoset filled with Cu), which minimises image drift and sample charging under electron beam irradiation. EBSP quality is sensitive to surface preparation. Typically the sample is ground using SiC papers from 240 down to 4000 grit, and polished using diamond paste (from 9 to 1 µm) then in 50 nm colloidal silica. Afterwards, it is cleaned in ethanol, rinsed with deionised water, and dried with a hot air blower. This may be followed by ion beam polishing, for final surface preparation.
Inside the SEM, the size of the measurement area determines local resolution and measurement time. Usual settings for high-quality EBSPs are 15 nA current, 20 kV beam energy, 18 mm working distance, long exposure time, and minimal CCD pixel binning. The EBSD phosphor screen is set at an 18 mm working distance and a map's step size of less than 0.5 µm for strain and dislocations density analysis.
Decomposition of gaseous hydrocarbons and also hydrocarbons on the surface  of samples by the electron beam inside the microscope results in carbon deposition, which degrades the quality of EBSPs inside the probed area compared to the EBSPs outside the acquisition window. The gradient of pattern degradation increases moving inside the probed zone with an apparent accumulation of deposited carbon. The black spots from the beam instant-induced carbon deposition also highlight the immediate deposition even if agglomeration did not happen.