DAST is prepared by the reaction of diethylaminotrimethylsilane and sulfur tetrafluoride:
:EtNSiMe + SF → EtNSF  +  MeSiF
The original paper calls for trichlorofluoromethane (Freon-11) as a solvent. Diethyl ether is a green alternative that can be used with no decrease in yield.  Because of the dangers involved in the preparation of DAST (glass etching, possibility of exothermic events), it is often purchased from a commercial source. At one time Carbolabs was one of the few suppliers of the chemical but a number of companies now sell DAST. Carbolabs was acquired by Sigma-Aldrich in 1998.