Acylsilanes can be synthesized by treating acyl anion equivalents with silyl halides (typically trimethylsilyl chloride, tmsCl).  Silylation of 2-lithio-1,3-dithiane, followed by hydrolysis of the dithioacetal group with mercury(II) chloride. Analogous methods has also been used to produce acylgermanes.
Several approches to acylsilanes start with carboxylic acid derivatives. Esters undergo reductive silylation en route to acylsilanes:  
Tertiary amides react with silyl lithium reagents:
Acid chlorides are converted using hexamethyldisilane:
Some acyl silanes are prepared by oxidation of a suitable silanes.