Laser Doppler velocimetry is used in the analysis of vibration of MEMS devices, often to compare the performance of devices such as accelerometers-on-a-chip with their theoretical (calculated) modes of vibration. As a specific example in which the unique features of Laser Doppler velocimetry are important, the measurement of velocity of a MEMS watt balance device has allowed greater accuracy in the measurement of small forces than previously possible, through directly measuring the ratio of this velocity to the speed of light. This is a fundamental, traceable measurement that now allows traceability of small forces to the S.I. System.