The main components of an XPS system are the source of X-rays, an ultra-high vacuum (UHV)  chamber with mu-metal magnetic shielding, an electron collection lens, an electron energy analyzer, an electron detector system, a sample introduction chamber, sample mounts, a sample stage with the ability to heat or cool the sample, and a set of stage manipulators.
The most prevalent electron spectrometer for XPS is the hemispherical electron analyzer. They have high energy resolution and spatial selection of the emitted electrons. Sometimes, however, much simpler electron energy filters - the cylindrical mirror analyzers are used, most often for checking the elemental composition of the surface. They represent a trade-off between the need for high count rates and high angular/energy resolution. This type consists of two co-axial cylinders placed in front of the sample, the inner one being held at a positive potential, while the outer cylinder is held at a negative potential. Only the electrons with the right energy can pass through this setup and are detected at the end. The count rates are high but the resolution (both in energy and angle) is poor.
Electrons are detected using electron multipliers: a single channeltron for single energy detection, or arrays of channeltrons and microchannel plates for parallel acquisition. These devices consists of a glass channel with a resistive coating on the inside. A high voltage is applied between the front and the end. An incoming electron is accelerated to the wall, where it removes more electrons,  in such a way that an electron avalanche is created, until a measurable current pulse is obtained.