Trimethylsilyl chloride is used to prepare other trimethylsilyl halides and pseudohalides, including trimethylsilyl fluoride, trimethylsilyl bromide, trimethylsilyl iodide,  trimethylsilyl cyanide, trimethylsilyl azide, and trimethylsilyl trifluoromethanesulfonate (TMSOTf). These compounds are produced by a salt metathesis reaction between trimethylsilyl chloride and a salt of the (pseudo)halide (MX):
TMSCl, lithium, and nitrogen molecule react to give tris(trimethylsilyl)amine, under catalysis by nichrome wire or chromium trichloride:
Using this approach, atmospheric nitrogen can be introduced into organic substrate. For example, tris(trimethylsilyl)amine reacts with α,δ,ω-triketones to give tricyclic pyrroles.
Reduction of trimethylsilyl chloride give hexamethyldisilane: