human
I have a question about semiconductor lithography. Who invented the lithography process?
assistant
The lithography process was invented by a team of scientists at Bell Labs in the 1950s. The process uses a photomask to transfer a pattern of light onto a semiconductor wafer. The photomask is made of a material called chrome, which is covered with a pattern of light-sensitive material called photoresist. The photoresist is exposed to light through the photomask, and then developed to create a pattern of light and dark areas on the wafer. The pattern is then used to create the desired circuit on the wafer.